FEI Quanta FEG 250, Руководство пользователя

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8-1
8
MAINTENANCE AND TROUBLESHOOTING
This section describes necessary microscope maintenance
procedures that can be carried out by the
FEI Supervisor User / FEI
Microscope User . The user maintenance is at a minimum due to gun
and column design providing the long uptime. Therefore a
complicated maintenance is normally a part of a service contract to be
performed by a qualified service engineer.
At the User level items such as the following can be kept:
• Cleaning Procedures Overview
• The Standard Insert
• Gaseous Detectors
• Stage Maintenance
• Refilling the Water Bottle
• Rotary Pump Maintenance
C a u t i o n !
- Parts that operate in vacuum should be handled carefully using
clean powder-free gloves. Parts not in use should be stored in suitable
containers or packed in aluminium foil.
- the
EDX window (if present) is very fragile and must be protected
from large pressure oscillations . It is recommended to remove the
detector before major cleaning activities.
Note:
Gas back fill (N
2
) should be maintained while the specimen chamber
is at ambient pressure. However, to avoid gas waste it is
recommended that the chamber should be left vented no longer than
necessary.