Platinous User’s Manual
39
Installation
5.3 Power Supply Work
5.3.1 Primary Power Supply Requirements
The primary power supply must satisfy the following requirements:
•
The rated voltage is 208/230V 3Ph 60Hz, or 200/220V 3Ph 50Hz. Voltage fluctua-
tion must be /- 5% (or /- 10% while the chamber is running.)
•
Maximum current per voltage specification, minimum cable diameter, and switch
fuse capacity must be as below:
*Refer to NEC or applicable code requirements for feeder wire size.
TABLE 5.10.
P
RIMARY
POWER
SUPPLY
REQUIREMENTS
Chamber Model
Max. Current (A)
Main Power Breaker/
Service Size (A)*
ESL
2
29
40
3
29
40
4
34
50
ESU
2
24
40
3
24
40
4
31
50
ESX
2
32
40
3
32
40
4
38
50
ESZ
2
32
40
3
32
40
4
38
50
Содержание Platinous ESL Series
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Страница 22: ...Precautions in Usage 16 Platinous User s Manual...
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Страница 58: ...Installation 52 Platinous User s Manual...
Страница 80: ...Operation 74 Platinous User s Manual...
Страница 106: ...Troubleshooting 100 Platinous User s Manual...
Страница 107: ...Platinous User s Manual Chapter 9 Appendix...