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NT PROPORTIONAL CONTROL VALVE, MODEL 6300
7
Entegris, Inc. | User Guide
Installation
PROVIDED EQUIPMENT
—
The product box contains the pro-
portional control valve. For units with
Flaretek connections, two nuts are
included. For units with Pillar connec-
tions, two nuts, two sleeves and two
gauge rings are included.
NOTE: This unit has been assembled
and double-bagged under cleanroom
conditions. To maintain purity, only
open in cleanroom environment.
MOUNTING REQUIREMENTS
—
The proportional control valve may
be mounted in any orientation.
Care should be taken when installing
the proportional control valve to
avoid fluid leaks. Do not use exces-
sive torque or subject the unit to
high heat during installation. The
unit and base bracket assembly must
be mounted to a solid surface to
ensure stability.
Verify the body and the electrical
cable are free from mechanical stress
from the surrounding equipment.
NOTE: The proportional control valve
requires mounting in the direction of
the fluid flow.
#10 (M4)
Pan head
#10 (M4)
Flat washer
Recommended Hardware:
Cv1 – 4
SAE #10 (metric M4)
Cv 7 – 8
SAE ¼” (metric M6)
1
⁄
4
” (M6)
Pan head
1
⁄
4
” (M6)
Flat washer