NOWPAK LINER-BASED CANISTER SYSTEM
21
User Manual | Entegris, Inc.
SECTION 7: CANISTER SYSTEM MANINTENANCE
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Chemical suppliers and end users of the liner-based
canister system follow the procedures in this
section to perform these cleaning and O-ring
replacement procedures:
• Maintaining the diptube
• Maintaining the closure
• Maintaining the fitment adapter
(200-liter canisters only)
• Maintaining the dispense connector
WARNING: Some chemical may remain on
component parts. Follow all chemical safety
procedures and wear chemical splash goggles
and other appropriate personal protective
equipment (PPE).
DIPTUBE MAINTENANCE
Standard FEP diptubes can be reused but must be
thoroughly cleaned and inspected before each new
use. Entegris is not responsible for damage resulting
from using diptubes that have been improperly
cleaned or are damaged or worn out. Such diptubes
can cause dispense failure and must not be reused.
Normal diptube maintenance includes cleaning after
each use and replacing the O-ring as needed. This is
normally performed by the chemical supplier when
refurbishing a canister, but end users may also
perform diptube cleaning.
Single-use PE diptubes are meant to be replaced after
each use.
Tools Required (see Required Tools, page 28): O-ring
pick part number NA-27.
Items Needed: One O-ring for each diptube being
maintained. See FEP Reusable Diptube Replacement
O-ring Part Numbers, page 22, for ordering information
and optional O-ring materials.
IMPORTANT: Entegris does not recommend disassembling
the diptube, other than to replace the O-ring.
1. Slide the worn O-ring from the coupler using an
O-ring pick or similar tool.
2. Clean the diptube assembly with an appropriate
cleaning solvent.
3. Carefully inspect the old O-ring. If it shows any signs
of wear or damage, discard and obtain a new O-ring.
4. Place one section of the O-ring into the groove and
evenly pull the O-ring over the top of the coupling
and into the remaining part of the groove, Figure 39.
NOTE: Do not roll or twist the O-ring as this may result
in connection or dispense difficulties.
Diptube O-ring
(installed on
the coupler)
Figure 39. Removing the diptube O-ring.
NOTE: New diptube assemblies purchased from Entegris
are pre cleaned in a cleanroom environment and do not
require additional cleaning prior to use.
IMPORTANT: It is critical that the diptube O-ring be in good
condition and is inserted properly in the diptube gland.
Check to make sure there are no scratches or gouges in the
O-ring gland area. Damage or improper installation could
result in dispense failure at the end user site.
