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GATEKEEPER GPU OZONE GAS PURIFIERS

Installation and Operation Manual  |  Entegris, Inc.

MECHANICAL SPECIFICATIONS

—

Materials of construction

Filter membrane

PTFE

Purification media

Porous inorganic material

Housing

316L stainless steel

Surface finish, internal

Ra <0.17 µm (electropolished)

Retention

Volatile metals

Cr and Mn 

Volatile metal removal efficiency

>99% for Cr

Particles

>99.9999999% for particles ≥0.003 µm

Connection

1/4" gasket seal

Gas

Ozone (O₃) <300 g/Nm3 concentration

Inlet metal level

Cr: <1 ppm

Recommended flow rate

5 to 25 slm

Operating conditions

Maximum operating pressure:

20 kPa (2.9 psi)

Operating temperature:

20°  to 30° C (68°  to  86°F)

Please consult Entegris Account Managers for flow rate and O₃ gas concentration exceeding specifications.

GPU OPTIONS

—

Part number

Description

GPUS200TOZ04R11CA

For vacuum conditions

GPUS200TOZ04R12CA

 For pressurized conditions

Содержание GateKeeper

Страница 1: ...MICROCONTAMINATION CONTROL MANUAL GateKeeper GPU Ozone Gas Purifiers Installation and operation manual ...

Страница 2: ...allation Procedures 3 Site Preparation 3 Installation 3 Before Startup 3 Flowing Ozone Gas 3 Decommissioning Procedure When Heated 4 Managing Replacement and Purifier Lifetime 4 Disposal 4 Troubleshooting Guide 5 Mechanical Specifications 6 GPU Options 6 Limited Warranty 7 For More Information 7 Terms and Conditions of Sale 7 ...

Страница 3: ...t and or mitigate hazardous conditions Ensure the area is well ventilated to prevent asphyxiation DANGER USE THIS PURIFIER WITH APPROVED GASES ONLY If this product is exposed to an incompatible gas an exothermic or other adverse reaction may occur It is the user s responsibility to install all safety equipment to prevent and mitigate the effects of such a condition WARNING Always pressurize and de...

Страница 4: ...hout interruption This will minimize the purifiers exposure to atmosphere 4 Inspect inlet and outlet face seals for damage 5 Insert a new metal seal gasket for the outlet and hand tighten the connection 6 Insert a new metal seal gasket for the inlet and hand tighten the connection NOTE Take care to not rotate the purifier body This may damage the sealing surface which could lead to a leak 7 Using ...

Страница 5: ...e operating site 5 Cap the purifier tightly with metal caps CAUTION DO NOT REUSE the decommissioned purifier MANAGING REPLACEMENT AND PURIFIER LIFETIME Since the series does not have an end of life indicator it is recommended that they be put on a Preventative Maintenance PM cycle based on the estimated lifetime In order to determine the purifier s lifetime please visit www entegris com or contact...

Страница 6: ...nstream parts generate metals after purification Install the purifier near the use point to avoid metal generation by downstream parts Purifier flow rate is too high Verify that the maximum flow rate is not exceeded Outlet purity level degrades with time Purifier has exceeded its useful life Replace the purifier with a new purifier Ozone concentration declines after purification The inertness of t...

Страница 7: ...al removal efficiency 99 for Cr Particles 99 9999999 for particles 0 003 µm Connection 1 4 gasket seal Gas Ozone O 300 g Nm3 concentration Inlet metal level Cr 1 ppm Recommended flow rate 5 to 25 slm Operating conditions Maximum operating pressure 20 kPa 2 9 psi Operating temperature 20 to 30 C 68 to 86 F Please consult Entegris Account Managers for flow rate and O gas concentration exceeding spec...

Страница 8: ...it entegris com and select the Contact Us link to find the customer service center nearest you TERMS AND CONDITIONS OF SALE All purchases are subject to Entegris Terms and Conditions of Sale To view and print this information visit entegris com and select the Terms Conditions link in the footer www entegris com Installation and Operation Manual Entegris the Entegris Rings Design and other product ...

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