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28 

EQ-9-HP Operation Manual  

DOC-8240 Rev. 3 

 

 

C h a p t e r   5  

TROUBLESHOOTING 

 

Fault Indicator Block Diagram 

 

 

 

 

 

Lamp Fault 

Asserted 

 (pin 3 on remote) 

Diagnostic 

Safety 

Bulb Interlock 

Open 

Lamp Head 

Overtemp > 60C  

Control Cable Not 

Connected 

Plasma 

Extinguished 

(after ignition) 

Controller Fault 

Asserted 

 (pin 4 on remote) 

Laser Overtemp 

(>66C) 

Controller PCB 

Overtemp (>82C) 

Laser Current 

Regulation Error 

External 

Interlock Open 

Laser Temperature 

Regulation Error 

Signal Available on User Interface 

Internal Logic That Generates Signal 

Lamp On  

De-Asserted 

 (pin 1 on remote) 

Laser On  

De-Asserted 150 sec 

after Operate 

Command 

 (pin 2 on remote) 

Fail to Ignite 

Failed Ignition 

Содержание LDLS EQ-9-HP

Страница 1: ...Model EQ 9 HP LDLS Laser Driven Light Source Operation Manual Revision 3 June 2022 Part Number DOC 8240 ...

Страница 2: ...atics and specifications contained in this manual are the property of Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq The content of this manual is subject to change without notice Energetiq Technology Inc 205 Lowell Street Wilmington MA 01887 USA Tel 1 781 939 0763 E mail support energetiq com http www energetiq com ...

Страница 3: ......

Страница 4: ...ions 8 System Description 10 Power Supply Controller 11 Lamp House 13 Chapter 3 15 Installation 15 Unpacking 15 Connections 15 RS 485 Serial Interface 22 Installation Procedure 25 Chapter 4 26 Operation 26 Starting 26 Stopping 26 Chapter 5 28 Troubleshooting 28 Fault Indicator Block Diagram 28 Appendix A 31 Revision Control 31 ...

Страница 5: ...t All interlocks must be satisfied prior to operation failure to do so may lead to hazardous conditions The EQ 9 HP emits dangerous levels of UV radiation Even short exposures to skin or eyes may cause burns Ensure that only authorized personnel are in the vicinity of source during operation Personnel in vicinity of operating source should wear protective eyewear clothing and gloves Lighted UV war...

Страница 6: ...us UV radiation WARNING If the equipment is used in a manner not specified by the manufacturer the protection provided by the equipment may be impaired The power supply must be properly grounded by the outlet to prevent electrical shocks Securely plug in the power supply connector to avoid looseness or play Loose connections may result in faulty operation Indication of the symbols The following sy...

Страница 7: ... facilities connections There are no user serviceable parts inside the EQ 9 HP For any problems encountered during operation please contact Energetiq Technology for assistance If there is a component failure do not attempt to open the Power Supply Controller or Lamp House enclosure of the EQ 9 HP The EQ 9 HP utilizes a quartz lamp containing a high pressure gas fill Explosion of the lamp and possi...

Страница 8: ...ible internal laser are given below in Table 1 Wavelength 974 nm Emission Type CW Laser Power for classification 8 mW via 7mm measurement aperture Beam Diameter 25 mm at aperture Divergence 100 mRad Transverse Beam Mode Diffuse Table 1 Embedded Laser Parameters No regular maintenance is required for the EQ 9 HP Any service to the system must be performed only by factory authorized and trained tech...

Страница 9: ...cates hazardous levels of UV light are present Manufacturer s identification label gives the manufacturer s name the model number serial number and date of manufacture of the equipment Explanatory label states the classification of the laser product Class 1 is the lowest hazard level classification Certification label states that the equipment has been tested and verified to meet the standards ind...

Страница 10: ...ed for the customer s use see Chapter 3 for connection details Any suitable normally open contact or solid state switch can operate the interlock circuit The interlock circuit must be connected to enable the operation of the unit Should the interlock connection open during operation or standby the source is immediately disabled and all light output from the aperture ceases Certification Label Expl...

Страница 11: ...brightness across complete spectrum 170nm through visible and beyond Eliminates need for multiple lamps replaces D2 Tungsten Xenon Arc Simplified optical system Excellent spatial stability Repeatable measurements Superior short and long term power stability Repeatable measurements Electrodeless operation for long life Reduced consumable costs Minimal recalibration of instrument The EQ 9 HP system ...

Страница 12: ...uirements Electrical 12VDC 140W Cooling Fan 30 CFM forced air cooling Purge gas optional clean dry nitrogen filtered 5um 20 psig 0 14 MPa supply pressure Remote Interface Digital Inputs Type Optocoupler LED Logic Active High Input voltage 5VDC Input current 8mA Digital Outputs Type Open collector to ground digital common Logic Active Low Voltage 30VDC max Sink current 30mA max User Power Voltage 5...

Страница 13: ...ed air cooling Relative Humidity non condensing 80 max for temperatures up to 31 C decreasing linearly to 50 max at 40 C Pollution Degree 2 normally only non conductive pollution occasional temporary condensation possible Installation Category II Indoor use only Transport Temperature 5 95 C Relative Humidity non condensing 95 max Recommended Cooling Direction 30 CFM ...

Страница 14: ...he user or by Energetiq upon request The following sections provide descriptions of the system components and controls and give an overview of their functions Refer to the Installation section of this manual Chapter 3 for more detailed information Figure 3 EQ 9 HP Lamp System Lamp House Control Connector Lamp House Control Connector I O Interface Connector Status Indicators Optical Output Also opp...

Страница 15: ...when lit POWER ON DC power is connected to the EQ 9 HP Power Supply Controller LAMP ON UV Light is on LASER ON Laser power is ON and laser light is being produced within the Lamp House CONTROLLER FAULT One of the following has occurred in the Power Supply Controller 1 External interlock open 2 Controller internal temperature too high 3 Laser power not reaching setpoint 4 Laser Temperature Fault LA...

Страница 16: ...ut connector of the EQ 9 HP or EQ 99 and provides a means of local control Contact Energetiq for additional information Power Input Connector This is a jack screw secured input connector for 12 VDC power The EQ 9 HP can be powered directly from a customer provided 12VDC power supply See Chapter 3 for detailed information Lamp House Control Connector 21 pin mixed D sub Provides various power and co...

Страница 17: ...bly contains Lamp Igniter Laser Thermoelectric cooler IR pumping optics Output windows Laser ON indicator Interface connectors Figure 4 Lamp House Assembly External features refer to Figure 4 Lamp Window front Control Connector to Controller Purge Gas Port Laser ON Indicator ...

Страница 18: ...mospheric oxygen and attenuate the light output in the 220 280nm band In addition atmospheric oxygen and water vapor will attenuate the output below 200nm Bulbs chosen for some OEM applications do not produce ozone and the purge fitting can be omitted There is no return fitting for the purge nitrogen The purge flow normally escapes within the Lamp House enclosure and then to atmosphere Laser On In...

Страница 19: ...ector 1 I O cable with 15 pin D connector at each end 1 DC power supply with custom connector If any part is missing or appears damaged contact Energetiq immediately Do not attempt to substitute any parts There are no user serviceable parts inside the EQ 9 HP Lamp House or Power Supply Controller unit Connections Installation of the EQ 9 HP consists of connecting electrical and optional gas suppli...

Страница 20: ...rce of nitrogen purge gas to the port on the Lamp House The fitting is a push to connect type sized for 1 8 tubing Clean and dry nitrogen from either a Dewar or research grade N2 bottle is recommended Do not use any other purge gas Grade 6 or better gas purity is recommended to maintain cleanliness of the optics and gas should be filtered to 5um Supply pressure should be 20 psig 0 14 MPa With a 20...

Страница 21: ...DOC 8240 Rev 3 EQ 9 HP Operation Manual 17 ...

Страница 22: ...18 EQ 9 HP Operation Manual DOC 8240 Rev 3 Figure 5 Lamp House mechanical layout Figure 6 Lamp House Output Window Detail A ...

Страница 23: ...DOC 8240 Rev 3 EQ 9 HP Operation Manual 19 Figure 7 Power Supply Controller mechanical layout ...

Страница 24: ...ure 8 shows connection schematics for both configurations Description Pin Details Commands Inputs LAMP OPERATE 12 OPERATE REQUEST apply 5V referenced to digital common to initiate start cycle EXTERNAL INTERLOCK 13 EXTERNAL INTERLOCK apply 5V referenced to digital common to close interlock and allow operation Status Indicators Outputs LAMP ON 1 Pulled to digital common when ON LASER ON 2 Pulled to ...

Страница 25: ...Pin 5 499 Pins 11 12 13 Pins 6 7 8 9 499 0 1uF 0 1uF Pins 11 12 13 Pin 5 100 0 1uF Pins 1 2 3 4 Inputs Outputs Isolated 5VDC supply 5V Power 5V Return Contact or Load solid state switch Outputs Inputs Isolated 5VDC supply 5V Power 5V Return Contact or Load solid state switch 5VDC supply User N C N C EQ 9 HP EQ 9 HP ...

Страница 26: ...hm termination across the data lines Pin connections are as follows Description Pin Details DATA A 7 Connect to host DATA DATA B 2 Connect to host DATA GROUND 5 9 Galvanically isolated from system RESERVED 1 3 4 6 8 Do not connect Port settings are 9600 bps 8 data bits 1 stop bit no parity no handshaking Laser power adjustment Laser current in the EQ 9 HP is set by specifying a setpoint in amps Th...

Страница 27: ...t changes will be lost if power to the EQ 400 is interrupted Calibration data copied to FLASH Memory H Query bulb operating hours Bulb time XXXX X hrs Z Zero bulb operating hours Send z within 10 sec to confirm z Confirm zeroing of bulb hours Bulb hours zeroed flash saved L Query laser operating hours Laser time XXXX X hrs T Query lamphead temperature LH temp XX X degC S Query system status Return...

Страница 28: ...aser temperature 1 overtemperature 0 OK 4 Reserved always 0 5 Reserved always 0 6 Lamphead temperature 1 overtemperature 0 OK 7 Reserved always 0 8 Lamphead interlock 1 open 0 OK 9 External interlock 1 open 0 OK 10 Reserved always 0 11 Laser photodiode signal 1 low 0 OK 12 Lamp photodiode signal 1 low 0 OK 13 Ignition status 1 failed to ignite 0 OK 14 Reserved always 0 15 Reserved always 0 ...

Страница 29: ...in Figure 4 with the output windows on the side and the bulb oriented horizontally The lamp has been factory aligned in this position Mounting the lamp in a different orientation will cause the plasma position inside the bulb to shift slightly and may cause performance problems Setup the Lamp House unit with appropriate ultraviolet safety measures and laser light safety measures in place It is rec...

Страница 30: ... is now present in the Lamp House 4 In approximately 20 150 seconds the igniter will be turned on automatically and the plasma will ignite The LAMP ON LED will be lit The duration of the warm up time 20 150 seconds will depend on the temperature and previous operating condition of the EQ 9 HP The EQ 9 HP will automatically detect when the unit has reached the optimum conditions for ignition 5 If a...

Страница 31: ...DOC 8240 Rev 3 EQ 9 HP Operation Manual 27 Figure 9 Identification of Indicator LED s on Control Unit POWER OK LASER ON LAMP ON CONTROLLER FAULT LAMPHOUSE FAULT ...

Страница 32: ...ected Plasma Extinguished after ignition Controller Fault Asserted pin 4 on remote Laser Overtemp 66C Controller PCB Overtemp 82C Laser Current Regulation Error External Interlock Open Laser Temperature Regulation Error Signal Available on User Interface Internal Logic That Generates Signal Lamp On De Asserted pin 1 on remote Laser On De Asserted 150 sec after Operate Command pin 2 on remote Fail ...

Страница 33: ...into the back of the EQ 99 RC Remote Control Box To reset or clear a Fault condition actuate the Operate switch from the ON position to the OFF position If a fault was generated while the Operate switch was in the OFF position first actuate the switch to the ON position then to the OFF position The unit will not turn on if a fault condition exists If all of the interlocks are OK and either the lam...

Страница 34: ...30 EQ 9 HP Operation Manual DOC 8240 Rev 3 ...

Страница 35: ...n Number Modified By Modifications Made Date Modified Rev 2 M Steinberg Updated CE Mark Page footer format added Appendix A January 2018 Rev 3 L Chan Updated Declaration of Conformance to latest electrical safety standards Laser safety labels to reflect latest standards date June 2022 ...

Страница 36: ......

Страница 37: ...atics and specifications contained in this manual are the property of Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq The content of this manual is subject to change without notice Energetiq Technology Inc 205 Lowell Street Wilmington MA 01887 USA Tel 1 781 939 0763 E mail support energetiq com http www energetiq com ...

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