Plasma
Generation
PlasmaQuant MS Series
62
6.2.3
RF Generator Module
Figure 6-3 - RF Generator assembly
The Solid State Radio Frequency generator (SSRF) creates the electromagnetic field, by
which energy transfers through inductive coupling to an argon gas, which forms an
atmospheric pressure plasma. The generator comprises a simple circuit for alternately
switching “ON” and “OFF” solid state Field Effect Transistors (FET) via gate drive
voltages, which in turn supply RF power to a resonant load circuit. The induction coil
and parallel connected capacitance comprise the load circuit. The gate drive circuits,
for each FET, include a portion that is inductively coupled with leads of the induction
coil to provide the gate drive voltages.
The circuit allows for reduced components in comparison to other plasma generation
systems and therefore a relatively inexpensive RF power generator for exciting and
sustaining argon plasma for ICP-MS.
Dimensions BHT
152 x 152 x 255
Weight
2.2 kg
Supply Voltage
+53 … +200 V
Current Consumption
13 A max.
Operating Frequency
27.12 … 27.8 Hz
Output Power
300 … 1600 W
Efficiency
84 %
Bias Voltage
2 x 0 … 7 V (up to 115 V supply)
Water Flow
1 … 2 lpm
Water Pressure
3.4 … 6 bar
Forward Temp. Range
18 … 24 °C
Water Conductivity
Up to 2000 µS/cm
Figure 6-4 - RF Generator technical data
The generator uses an H-Bridge designed circuit in order to apply up to 1.6 kW to a
single load coil, while maintaining both a neutral plasma and allowing for no parasitic
losses. The generator creates a 27 MHz plasma from a 0V to 190V power supply
(
Redline Technologies Baesweiler, Germany
) located above the RF compartment.
Technical Data