
Plasma
Generation
PlasmaQuant MS Series
60
6
Plasma Generation
This chapter describes the operation and maintenance of the plasma generating
system. This includes the RF generator, DC power supply, and translator.
For information relating to the sampling of ions from the plasma and transmission
into the mass spectrometer, refer to Mass Spectrometer section, page 112.
6.1
System Description
The plasma generating system of the instrument consists of:
RF generator module
DC supply module
Translation mechanism
Filter PCB
Control wiring
Figure 6-1 - Block diagram of the plasma generating system
6.2
Theory of Operation
6.2.1
Plasma Formation
Plasma is simply an ionized gas. The concentration of ions and electrons may be very
small (about 1%), but the presence of these charged particles leads to changes in the
properties of the gas. For example, plasmas conduct electricity well, while non-ionized
gases do not. Plasmas are described as a fourth state of matter. Familiar examples of