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Figure 4 Motor voltage configuration: single-phase pumps

1

2

3

B

4

C

8

7

5 

6 

B

C

CS

/110

8/

A

A

A. Top view of motor

B. View of voltage selector switch cover

C. View of On-off switch

A. Top view of motor

B. View of voltage selector switch cover

C. View of On-off switch

1. Terminal box

2. Electrical inlet-connector

3. Voltage selector switch

4. On-off switch

5. Voltage selector switch cover

6. Retaining screws

7. Position 'I' (on)

8. Position '0' (off)

1. Terminal box

2. Electrical inlet-connector

3. Voltage selector switch

4. On-off switch

5. Voltage selector switch cover

6. Retaining screws

7. Position 'I' (on)

8. Position '0' (off)

4.7  Electrical installation: three-phase pumps

4.7.1  Check and configure the motor

CAUTION:

Ensure that the motor is correctly configured for the local electrical supply. If the

pump is operated when the motor is not correctly configured for the electrical supply,

the motor will be damaged.

1.

Remove the screws which secure the cover of the motor terminal-box. Remove the

cover.

2.

Remove the cable-gland from the inside of the terminal-box and fit the cable-gland

to the cable lead through hole in the side of the terminal-box.

3.

Ensure that the motor is correctly configured for the local electrical supply. If

necessary, reconfigure the links (

Figure: Three-phase electrical connections: 200–

03/2021 - ©Edwards Limited

Page 29

A65201880_AA

A65201880_AA - Installation

Содержание RV12

Страница 1: ...Rotary Vane Pumps RV3 RV5 RV8 and RV12 INSTRUCTION MANUAL A65201880_AA Original instructions edwardsvacuum com ...

Страница 2: ...r in this manual nor do we make any expressed or implied warranties regarding the content As far as practical we have ensured that the products have been designed and constructed to be safe and without risks when properly installed and used in accordance with their operating instructions We accept no liability for loss of profit loss of market or any other indirect or consequential loss whatsoever...

Страница 3: ... 2 6 Dimensions 21 3 2 7 Electrical data single phase pumps 22 3 2 8 Electrical data three phase pumps 23 4 Installation 25 4 1 Safety 25 4 2 System design considerations 25 4 3 Unpack and inspect 26 4 4 Locate the pump 26 4 5 Fill the pump with oil 27 4 6 Electrical installation single phase pumps 27 4 6 1 Check and configure the motor 27 4 6 2 Connect the pump to the electrical supply 28 4 6 3 C...

Страница 4: ... 42 6 6 Inspect and clean the gas ballast control 43 6 7 Clean the oil level sight glass 44 6 8 Clean the motor fan cover and enclosure 45 6 9 Clean and overhaul the pump 45 6 10 Fit new blades 45 6 11 Test the motor condition 46 7 Fault finding 47 7 1 Introduction 47 7 2 The pump has failed to start 47 7 3 The pump has failed to achieve the specified performance has failed to reach ultimate vacuu...

Страница 5: ...al trap 53 9 4 6 Foreline trap 53 9 4 7 Outlet mist filter 53 9 4 8 Gas ballast adaptor 53 9 4 9 Gravity oil drain kit 53 9 4 10 Oil drain extension 54 9 4 11 Exhaust nozzle kit 54 9 4 12 Vibration isolators 54 9 4 13 Solenoid operated gas ballast valve 54 9 4 14 Solenoid operated pipeline valve 54 10 PFPE prepared RV pumps 56 10 1 Summary 56 10 2 Installation 56 10 3 Operation 56 10 4 Maintenance...

Страница 6: ...s mm 21 Figure 4 Motor voltage configuration single phase pumps 29 Figure 5 Three phase electrical connections 200 230 V 31 Figure 6 Three phase electrical connections 380 460 V 31 Figure 7 Inlet filter assembly 43 Figure 8 Gas ballast control assembly 44 Figure 9 Sight glass assembly 45 Figure 10 Accessories 55 03 2021 Edwards Limited Page 6 A65201880_AA ...

Страница 7: ... safety operation or maintenance of the device please contact our nearest subsidiary Important safety information is highlighted as warning and caution instructions Obey these instructions WARNING If you do not obey a warning there is a risk of injury or death Different symbols are used according to the type of hazard CAUTION If you do not obey a caution there is a risk of minor injury damage to e...

Страница 8: ...o tential hazard exists Warning Heavy object Identifies a possible hazard from a heavy object Warning Dangerous voltage Identifies possible hazards from dangerous voltages Warning Hot surfaces Identifies a potential hazard from a hot surface Warning Use protective equipment Use appropriate protective equipment for the task Warning Risk of explosion There is a risk of explosion when you do the task...

Страница 9: ...mosphere There is no potential source of ignition within the pump during normal operation but there may be potential sources of ignition under conditions of predictable and rare malfunction as defined in the Directive There is no potential source of ignition within the pump during normal operation but there may be potential sources of ignition under conditions of predictable and rare malfunction a...

Страница 10: ... Oil filler plug 5 NW25 outlet port 6 Oil level sight glass 7 Oil drain plug 8 Rubber feet 4 off 9 Mode selector 10 On off switch 11 Motor fan cover 12 Correct direction of rotation 13 Voltage indicator 14 Electrical inlet connector RV3 and RV5 pumps only a lifting bracket is fitted to RV8 and RV12 pumps Single phase pumps only Note Single phase RV3 RV5 pump shown 2 3 Description The RV rotary van...

Страница 11: ...local electrical supply on page 30 the motor will restart As of the end of 2009 improved motors have been fitted to RV pumps These motors benefit from being fitted with an aluminium terminal box and externally accessible voltage change over switches The introduction of these motors has resulted in the range of motors covering all voltage and frequency conditions being reduced from four variants to...

Страница 12: ...rnatively an inert gas such as nitrogen can be supplied through a suitable external valve The gas ballast control has three positions Closed position 0 Low flow position I High flow position II 2 5 Construction The pump shafts and rotors are made of high grade cast iron The pump body and oil box are made from cast aluminium All surfaces of the pump which are exposed to the pumped gases are free fr...

Страница 13: ...sures have been measured by a capacitance diaphragm gauge on a vacuum chamber without a cold trap as specified by Pneurop Standard 6602 1979 Table 2 General performance data Parameter Reference data RV3 RV5 RV8 RV12 High Vacuum mode S performance See Table Performance data High Vacuum mode High Throughput mode S performance See Table Performance data High throughput mode Suckback protection 1 x 10...

Страница 14: ...ure mbar 2 x 10 3 2 x 10 3 Pa 2 x 10 1 2 x 10 1 Gas ballast control low flow position I Ultimate total pressure mbar 3 x 10 2 3 x 10 2 Pa 3 3 Gas ballast flow l min 1 5 5 Maximum water vapour pumping rate kg h 1 0 06 0 04 0 06 0 04 Maximum water vapour in let pressure mbar 27 18 16 11 Pa 2 7 x 103 1 8 x 103 1 6 x 103 1 1 x 103 Gas ballast control high flow position II Ultimate total pressure mbar ...

Страница 15: ...x 102 5 x 102 Gas ballast control high flow position II Ultimate total pressure mbar 6 x 10 2 6 x 10 2 Pa 6 6 Gas ballast flow l min 1 16 16 Maximum water vapour pump ing rate kg h 1 0 22 0 20 0 29 0 25 Maximum water vapour inlet pressure mbar 38 34 32 28 Pa 3 8 x 103 3 4 x 103 3 2 x 103 2 8 x 103 Table 5 Performance data High throughput mode 1 HIGH THROUGHPUT MODE S Parameter Units RV3 RV5 1 phas...

Страница 16: ...r 80 54 50 32 Pa 8 x 103 5 4 x 103 5 x 103 3 2 x 103 Table 6 Performance data High throughput mode 2 HIGH THROUGHPUT MODE S Parameter Units RV8 RV12 1 phase 3 phase 1 phase 3 phase Gas ballast control closed position 0 Ultimate total pressure mbar 3 x 10 2 3 x 10 2 Pa 3 3 Gas ballast control low flow position I Ultimate total pressure mbar 4 x 10 2 4 x 10 2 Pa 4 4 Gas ballast flow l min 1 5 5 Maxi...

Страница 17: ... flow position II High Vac uum mode S Ultimate total pressure Ultimate total pressure Ultimate total pressure mbar Pa mbar Pa mbar Pa 2 x 10 3 2 x 10 1 3 x 10 2 3 1 2 x 10 1 RV3 1 0 x 10 1 RV5 6 x 10 2 RV8 12 1 2 x 101 RV3 1 0 x 101 RV5 6 0 RV8 12 Use for the best ultimate pressure Maximum water vapour pumping rate Maximum water vapour pump ing rate 1 phase pumps 3 phase pumps 1 phase pumps 3 phas...

Страница 18: ...h 1 RV8 0 25 kg h 1 RV12 3 2 2 Performance characteristics Note The performance characteristics described below are for use with hydrocarbon oil The positions of the mode selector and the gas ballast control define the performance characteristics of the pump These performance characteristics are listed fully in Table Performance data High Vacuum mode and Table Performance data High throughput mode...

Страница 19: ...Dimensions See Figure Dimensions mm Degree of protection IEC 34 5 1981 Single phase pumps IP44 Three phase pumps IP54 Maximum tilt angle 10 Motor rotational speed 50 Hz electrical supply 1470 r min 1 60 Hz electrical supply 1760 r min 1 Maximum mass Pumps with motor without oil 25 0 kg 25 0 kg 28 0 kg 29 0 kg 3 2 4 Noise and vibration data Table 9 Noise and vibration data Parameter Reference data ...

Страница 20: ...ation data Parameter Reference data RV3 RV5 RV8 RV12 Recommended oil Hydrocarbon prepared pumps Ultragrade 19 PFPE prepared pumps Krytox 1506 or Fomblin 06 6 Oil capacity Maximum 0 70 litres 0 70 litres 0 75 litres 1 00 litres Minimum 0 42 litres 0 42 litres 0 45 litres 0 65 litres To operate the pump when the ambient temperature is outside the limits specified in Operating and storage conditions ...

Страница 21: ...2 Lifting bracket RV8 and RV12 pumps only A lifting handle is fitted to RV3 and RV5 pumps 1 On off switch single phase pumps only 2 Lifting bracket RV8 and RV12 pumps only A lifting handle is fitted to RV3 and RV5 pumps Pump A A B C D E F G H I J K RV3 430 429 158 225 127 29 78 230 120 37 32 RV5 430 429 158 225 127 29 78 230 120 37 32 RV8 470 469 158 225 161 35 78 230 120 37 32 261 RV12 490 489 15...

Страница 22: ...ed to prevent unnecessary fuse failure during pump start up in accordance with local and regional electrical codes Within five minutes as the oil in the pump warms up the current drawn will slowly reduce to the full load current specified in Table Electrical data single phase pumps with Part Numbers ending in 903 or 906 and Table Electrical data single phase pumps with Part Numbers ending in 904 T...

Страница 23: ...refer to Check and configure the motor on page 27 Pumps are supplied preset for nominal 380 460 V electrical supplies When a cold pump is started the motor will draw the start up current shown in Table Electrical data three phase pumps with Part Numbers ending in 905 for up to 0 5 seconds The current will then reduce quickly as the motor reaches the rated rotational speed Within 5 minutes as the o...

Страница 24: ...d RV5 200 220 50 250 1 7 10 2 2 5 200 230 60 300 1 7 10 2 2 5 380 415 50 250 1 0 5 7 2 5 460 60 300 1 0 7 0 2 5 RV8 and RV12 200 208 50 450 2 5 14 0 4 0 200 230 60 550 2 9 12 0 4 0 380 415 50 450 1 5 9 0 2 5 460 60 550 1 5 8 7 2 5 Observe requirements of local and regional electrical codes with respect to supply protection 03 2021 Edwards Limited Page 24 A65201880_AA A65201880_AA Technical data ...

Страница 25: ...ecting the pump into an existing system Details of specific safety precautions are given at the appropriate point in the instructions Wear the appropriate safety clothing when coming into contact with contaminated components is anticipated Dismantle and clean contaminated components inside a fume cupboard Vent and purge the vacuum system before starting installation work Take suitable precautions ...

Страница 26: ...cking box 2 Remove the protective covers from the inlet and outlet ports and inspect the pump If the pump is damaged notify the supplier and the carrier in writing within three days state the Item Number of the pump together with the order number and the supplier s invoice number Retain all the packing materials for inspection Do not use the pump if it is damaged If the pump is not to be used imme...

Страница 27: ...irmly by hand Do not overtighten 4 6 Electrical installation single phase pumps 4 6 1 Check and configure the motor CAUTION Ensure that the motor is correctly configured for the local electrical supply If the pump is operated when the motor is not correctly configured for the electrical supply the motor will be damaged Refer to Figure Motor voltage configuration single phase pumps for the item num...

Страница 28: ...he electrical inlet connector on the motor Figure Motor voltage configuration single phase pumps item 2 3 Connect the plug if fitted at the other end of the cable to the electrical supply If a plug is not fitted connect the wires in the cable to the correct terminals of the electrical supply 4 6 3 Check the direction of rotation CAUTION Ensure that the pump motor rotates in the correct direction I...

Страница 29: ...on I on 8 Position 0 off 4 7 Electrical installation three phase pumps 4 7 1 Check and configure the motor CAUTION Ensure that the motor is correctly configured for the local electrical supply If the pump is operated when the motor is not correctly configured for the electrical supply the motor will be damaged 1 Remove the screws which secure the cover of the motor terminal box Remove the cover 2 ...

Страница 30: ...ending in 905 are provided for guidance only The supplier of the thermal over current protection device may specify different values to ensure correct operation of the fuse and the over current protection device Ensure that the fuse used is suitable for the starting currents given in Table Electrical data three phase pumps with Part Numbers ending in 905 1 Remove the cover from the motor terminal ...

Страница 31: ...inal box A Starter contactor B Motor terminal box 1 Links 1 Links Figure 6 Three phase electrical connections 380 460 V L1 L2 L3 E W2 U2 V2 W1 V1 U1 B A CS 1110 A 1 A Starter contactor B Motor terminal box A Starter contactor B Motor terminal box 1 Links 1 Links 03 2021 Edwards Limited Page 31 A65201880_AA A65201880_AA Installation ...

Страница 32: ... inlet port see Figure Dimensions mm item 4 Take note of the following information when connecting the pump to the vacuum system Refer to Service and spares on page 50 for details of the accessories mentioned below Use standard NW25 fittings not supplied when connecting the pump For optimum pumping speeds ensure that the pipeline connected to the pump inlet is as short as possible and has an inter...

Страница 33: ... pumped down from atmospheric pressure The oil mist filter will trap the oil exhausted from the pump the oil can be reused if it is not contaminated 4 9 Leak test the system Leak test the system and seal any leaks found after installing the RV pump to prevent leakage of substances out of the system and leakage of air into the system 03 2021 Edwards Limited Page 33 A65201880_AA A65201880_AA Install...

Страница 34: ...ammable materials and mixtures operating procedures should ensure that under all normal and reasonably predictable conditions these materials and mixtures are not within explosive limits Category 3 is considered appropriate for the avoidance of ignition in the case of a rare malfunction which allows flammable materials or mixtures to pass through the pump whilst within their explosive limits 5 1 1...

Страница 35: ...w rate for the flammable gases vapours that could occur For example if a mass flow controller is used to supply flammable gases to the process assume a flow rate for flammable gases that could arise if the mass flow controller is fully open Continually measure the inert gas purge flow rate if the flow rate falls below that required stop the flow of flammable gases or vapours into the pump Note We ...

Страница 36: ...ughput that is inlet pressure 50 mbar to pump dirty condensable vapours to decontaminate the oil 5 2 3 Gas ballast control Use the gas ballast control to change the amount of air or inert gas introduced into the low vacuum stage of the pump refer to Gas ballast control on page 12 Use of gas ballast will prevent the condensation of vapours in the pump The condensates would contaminate the oil The g...

Страница 37: ...taminate the pump oil refer to the procedures in To achieve ultimate vacuum on page 37 To pump condensable vapours on page 38 and To decontaminate the oil on page 38 respectively Otherwise open the vacuum system isolation valve 5 4 To achieve ultimate vacuum If the pump does not achieve the performance specified in Performance on page 13 make sure that this is not due to the system design before c...

Страница 38: ...if the oil is cloudy or discoloured it is contaminated with process vapours 1 Look at the condition of the oil in the oil level sight glass Figure The RV pump item 8 If the oil is cloudy or discoloured continue with the procedure at Step 2 below 2 Close the vacuum system isolation valve 3 Turn the mode selector fully anticlockwise to select High Throughput mode S Set the gas ballast control to low...

Страница 39: ...Refer to To decontaminate the oil on page 38 and decontaminate the oil as required 2 Close the vacuum system isolation valve if not already closed 3 Close gas ballast set the gas ballast control to position 0 4 On single phase pumps use the on off switch to switch off the pump 5 Switch off the electrical supply to the pump 03 2021 Edwards Limited Page 39 A65201880_AA A65201880_AA Operation ...

Страница 40: ...of pump rotation if the electrical supply has been disconnected The pump and the pump oil will be contaminated with the process chemicals that have been pumped during operation Ensure that the pump is decontaminated before maintenance and that adequate precautions are taken to protect people from the effects of dangerous substances if contamination has occurred Do not touch or inhale the thermal b...

Страница 41: ...ean the motor fan cover and enclosure Yearly Clean the motor fan cover and enclosure on page 45 Clean and overhaul the pump Every 15000 hours of operation Clean and overhaul the pump on page 45 Fit new blades Every 30000 hours of operation Fit new blades on page 45 Test the motor condition Every 15000 hours of operation Test the motor condition on page 46 6 3 Check the oil level Note If required t...

Страница 42: ...r with clean oil and pour the oil into the filler hole until the oil level reaches the MAX level mark on the bezel of the sight glass 8 8 Allow a few minutes for the oil to drain into the pump If necessary add more oil Refit the filler plug 6 5 Inspect and clean the inlet filter 1 Refer to Figure Inlet filter assembly Disconnect the vacuum system from the pump inlet port 3 and remove the centring ...

Страница 43: ...I 2 Push the control down against the compression spring 6 as far as it will go then turn the control anticlockwise slightly to release the bayonet lugs 5 and remove the control 3 If necessary wipe the control with a clean dry lint free cloth and check that the air hole 3 is not blocked 4 Refit the control into the gas ballast inlet and ensure that the compression spring locates correctly between ...

Страница 44: ... the oil as described in Replace the oil on page 42 2 Undo the two screws 1 and remove the bezel 2 the sight glass 3 and the O ring 4 from the oil box 5 3 Clean the screws bezel and sight glass with a suitable cleaning solution 4 Wipe the O ring with a clean dry lint free cloth 5 Wipe the sight glass recess in the oil box with the cloth 6 Refit the O ring sight glass and bezel and secure with the ...

Страница 45: ...pump may overheat 1 Switch off the pump and disconnect it from the electrical supply 2 Use a dry cloth and a soft brush to remove dirt and deposits from the fan cover and enclosure 6 9 Clean and overhaul the pump Clean and overhaul the pump as described in the instructions supplied with the clean and overhaul kit see Spares on page 51 6 10 Fit new blades Fit new blades to the pump as described in ...

Страница 46: ...sting of electrical equipment The motor of single phase RV pumps complies with IEC 1010V1 We recommend that to maintain compliance with IEC 1010 1 the earth continuity is less than 0 1 W and the insulation resistance is greater than 10 W If the motor fails these tests the motor must be replaced 03 2021 Edwards Limited Page 46 A65201880_AA A65201880_AA Maintenance ...

Страница 47: ...s faulty 7 3 The pump has failed to achieve the specified performance has failed to reach ultimate vacuum The pressure measurement technique or gauge head is unsuitable or gives an incorrect indication of pressure For example a contaminated Pirani gauge can indicate a pressure which is several times higher than the actual pressure in the system The pump has been filled with the wrong type of oil T...

Страница 48: ...ated The process gas is too hot or the throughput is too high 7 6 The vacuum is not fully maintained after the pump is switched off The gas ballast control is open in position I or II The inlet valve pad is damaged The inlet valve has not closed 7 7 The pumping speed is poor The connecting pipelines are too small in diameter The connecting pipelines are too long The inlet filter is blocked 7 8 The...

Страница 49: ...escribed in Replace the oil on page 42 5 Place and secure protective covers over the inlet and outlet ports 6 Store the pump in cool dry conditions until required for use When required prepare and install the pump as described in Installation on page 25 If the pump has been stored for more than a year before installing the pump it must be cleaned and overhauled as described in the instructions sup...

Страница 50: ... service options contact the nearest service centre or other company 9 2 1 Return the equipment or components for service Before you send your equipment to us for service or for any other reason you must send us a completed Declaration of Contamination of Vacuum Equipment and Components Form HS2 The HS2 form tells us if any substances found in the equipment are hazardous which is important for the...

Страница 51: ...mps PFPE prepared pumps Ultragrade 19 oil 1 litre H110 25 015 Ultragrade 19 oil 4 litres H110 25 013 Fomblin 06 6 oil 1 kg H113 06 019 Fomblin 06 6 oil 5 kg H113 06 020 Clean and overhaul kit Standard A652 01 131 A652 01 131 RV3 Blade kit A652 01 130 A652 01 130 RV5 Blade kit A653 01 130 A653 01 130 RV8 Blade kit A654 01 130 A654 01 130 RV12 Blade kit A655 01 130 A655 01 130 RV3 Cartridge kit A652...

Страница 52: ...ers Accessory Refer to Section Item Number ITO20K Inlet catchpot Inlet catchpot on page 53 A441 10 000 ITF20K Inlet dust filter Inlet dust filter on page 53 A442 15 000 ITD20K Inlet desiccant trap Inlet desiccant trap on page 53 A445 10 000 ITC20K Inlet chemical trap Inlet chemical trap on page 53 A444 10 000 FL20K Foreline trap Foreline trap on page 53 A133 05 000 EMF10 Outlet mist filter Outlet ...

Страница 53: ...eline trap Use a foreline trap on a clean pumping system to prevent back migration of pump oil vapour into the vacuum system 9 4 7 Outlet mist filter The outlet mist filter separates and traps oil droplets in the pump outlet to prevent oil mist discharge 9 4 8 Gas ballast adaptor Fit the gas ballast adaptor in place of the gas ballast control on the pump The adaptor allows fitting of a solenoid op...

Страница 54: ...rain when the mounting area is uneven 9 4 13 Solenoid operated gas ballast valve Fit the gas ballast valve in place of the built in gas ballast control on the pump the gas ballast adaptor see Gas ballast adaptor on page 53 must be fitted with the solenoid operated gas ballast valve The valve provides automatic on off control of the gas ballast and isolates the gas ballast inlet when the pump is sw...

Страница 55: ... Gas ballast adaptor 10 Gravity oil drain kit 11 Vibration isolators 12 Oil drain extension 1 Inlet catchpot 2 Inlet dust filter 3 Inlet desiccant trap 4 Inlet chemical trap 5 Solenoid operated gas ballast valve 6 Foreline trap 7 Solenoid operated pipeline valve 8 Outlet mist filter 9 Gas ballast adaptor 10 Gravity oil drain kit 11 Vibration isolators 12 Oil drain extension 03 2021 Edwards Limited...

Страница 56: ... that PFPE prepared RV pumps are not used for the pumping of hazardous materials Operation of a PFPE prepared RV pump is as specified in Operation on page 34 but take note of the warning above 10 4 Maintenance WARNING Obey the safety instructions given below and take note of appropriate precautions Failure to do so can cause injury to people Take additional care if it is suspected that the pump an...

Страница 57: ...ed RV pump is filled with Fomblin oil We recommend you to do regular checks for oil leaks are carried out particularly around the shaft seals If an oil leak is detected contact us or the supplier for advice 03 2021 Edwards Limited Page 57 A65201880_AA A65201880_AA PFPE prepared RV pumps ...

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Страница 59: ...iction of certain hazardous substances RoHS directive as amended by Delegated Directive EU 2015 863 Based on the relevant requirements of harmonised standards EN 1012 2 1996 A1 2009 Compressors and vacuum pumps Safety requirements Vacuum pumps EN 61010 1 2010 Safety requirements for electrical equipment for measurement control and laboratory use General requirements 1 phase pumps only The pumps co...

Страница 60: ...Centre Holandska 10 Brno 63900 Czech Republic 42 0 734 418 896 documentation edwardsvacuum com This declaration based on the requirements of the listed Directives and EN ISO IEC 17050 1 covers all product serial numbers from this date on 21st May 2020 Petr Smerek Engineering Manager Scientific Vacuum Division Lutin CZ Nina Buta General Manager Lutin CZ ...

Страница 61: ...oducts listed are also in scope for and comply with the requirements of the following 2012 19 EU Directive on waste electrical and electronic equipment WEEE CSA C22 2 No 77 2014 Motors with inherent overheating protection CSA C22 2 No 100 2014 Motors and generators Product is certified to CSA C22 2 No 61010 1 12 Safety requirements for electrical equipment for measurement control and laboratory us...

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Страница 64: ...edwardsvacuum com ...

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