Edwards RV12, Инструкция по эксплуатации, Страница: 14 / 64

Parameter
Reference data
RV3 RV5 RV8 RV12
60 Hz electrical supply 3.9 6.2 10.0 14.2
Maximum permitted inlet pressure and gas-ballast inlet pressure
bar gauge 0.5 0.5 0.5 0.5
Pa
1.5 x 10
5
1.5 x 10
5
1.5 x 10
5
1.5 x 10
5
Maximum permitted outlet pressure
bar gauge 0.2 0.2 0.2 0.2
Pa
0.2 x 10
5
0.2 x 10
5
0.2 x 10
5
0.2 x 10
5
Table 3
Performance data - High vacuum mode - 1
HIGH VACUUM MODE
S
Parameter Units
RV3 RV5
1-phase 3-phase 1-phase 3-phase
Gas-ballast control closed (position ‘0’)
Ultimate total pressure
mbar
2 x 10
-3
2 x 10
-3
Pa
2 x 10
-1
2 x 10
-1
Gas-ballast control low flow (position ‘I’)
Ultimate total pressure
mbar
3 x 10
-2
3 x 10
-2
Pa 3 3
Gas-ballast flow
l min
-1
5 5
Maximum water vapour
pumping rate
kg h
-1
0.06 0.04 0.06 0.04
Maximum water vapour in-
let pressure
mbar 27 18 16 11
Pa
2.7 x 10
3
1.8 x 10
3
1.6 x 10
3
1.1 x 10
3
Gas-ballast control high flow (position ‘II’)
Ultimate total pressure
mbar
1.2 x 10
-1
1 x 10
-1
Pa
1.2 x 10
1
1 x 10
1
Gas-ballast flow
l min
-1
14 14
Maximum water vapour
pumping rate
kg h
-1
0.22 0.12 0.22 0.12
Maximum water vapour in-
let pressure
mbar 80 54 50 32
Pa
8 x 10
3
5.4 x 10
3
5 x 10
3
3.2 x 10
3
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A65201880_AA - Technical data