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9.2.1 Silencer

A silencer is available for the nXDS pump. Refer to

Connect to the vacuum system on

page 28

for guidance on its use.

Table 17

Silencer

Product description

Ordering information

Silencer NW25

A50597000

9.2.2 Gas ballast adaptor

A gas ballast adaptor may be fitted in place of the gas ballast control on the pump. The

adaptor allows a controlled supply of inert gas to be connected to the pump.
Gas ballast adaptor

Product description

Ordering information

Gas ballast adaptor with fine restrictor

A73501809

Gas ballast adaptor without fine restrictor

A73501811

9.2.3 Gas ballast adaptor blank

This adaptor kit allows the conversion of a standard nXDS pump into an nXDS

‑

R version.

The gas ballast control is replaced with a blank adaptor so that the gas ballast cannot be

accidentally opened. This feature is useful for applications such as rare gas recirculation

or gas recovery. Another advantage is improved leak tightness at this location.

Table 18

Gas ballast blank adaptor

Product description

Ordering information

Gas ballast blank adaptor

A73501806

9.2.4 Vibration isolators

Fit vibration isolators to the pump to reduce the transmitted vibration from the pump to

a structure, such as a frame or a system.

Table 19

Vibration isolators

Product description

Ordering information

Vibration isolators (pack of 4)

A24801441

9.2.5 Inlet/exhaust filter

The inlet dust filter has two functions. It can be connected inline between the pump

inlet and your chamber outlet connection to prevent dust from migrating into your

system. Alternatively, it can be connected inline between the pump exhaust and your
exhaust extraction system. The filter is supplied ready to use with a 5

m element.

Page 50

A73501880_G - Spares and accessories

Содержание nXDS10i nXDS15i

Страница 1: ... edwardsvacuum com DESCRIPTION ITEM NUMBER DESCRIPTION ITEM NUMBER nXDS6i A73501983 nXDS15iC A73702983 nXDS10i A73601983 nXDS20iC A73802983 nXDS15i A73701983 nXDS6iR A73503983 nXDS20i A73801983 nXDS10iR A73603983 nXDS6iC A73502983 nXDS15iR A73703983 nXDS10iC A73602983 nXDS20iR A73803983 ...

Страница 2: ...r in this manual nor do we make any expressed or implied warranties regarding the content As far as practical we have ensured that the products have been designed and constructed to be safe and without risks when properly installed and used in accordance with their operating instructions We accept no liability for loss of profit loss of market or any other indirect or consequential loss whatsoever...

Страница 3: ...iction of certain hazardous substances RoHS directive as amended by Delegated Directive EU 2015 863 Based on the relevant requirements of harmonised standards EN 1012 2 1996 A1 2009 Compressors and vacuum pumps Safety requirements Vacuum pumps EN ISO 80079 36 2016 Explosive atmospheres Part 36 Non electrical equipment for explosive atmospheres Basic method and requirements EN ISO 80079 37 2016 Exp...

Страница 4: ...he Candidate List June 2018 As indicated by the applied RoHS exemption s above this substance is present in certain aluminium and brass components ADDITIONAL INFORMATION The products listed are also in scope for and comply with the requirements of the following 2012 19 EU Directive on waste electrical and electronic equipment WEEE Product is certified to CSA C22 2 No 61010 1 12 Safety requirements...

Страница 5: ...3 1 Sound and vibration data 19 3 3 2 Construction 20 3 4 Electrical data 20 3 4 1 Electrical cables 20 3 5 Logic interface data 21 3 6 LED indicators 23 4 Installation 25 4 1 Safety 25 4 2 System design considerations 25 4 3 Unpack and inspect 27 4 4 Position the pump 27 4 4 1 Mechanical fixing 27 4 5 Connect to the vacuum system 28 4 6 Electrical installation 29 4 6 1 Fuses and circuit breakers ...

Страница 6: ...r 39 6 4 Clean the external fan cover 39 6 5 Check the pump performance service indicator 40 6 6 Replace the tip seals 40 6 7 Replace the pump bearings service indicator 40 6 8 Replace the pump controller service indicator 41 6 9 Electrical safety check 41 6 10 Service indicator codes 41 7 Fault finding 43 7 1 The pump has failed to start or has stopped 43 7 2 The pump has failed to achieve the re...

Страница 7: ...kit 51 9 2 8 Electrical cables 51 9 2 9 Pump to controller cable 52 9 3 Spares 52 9 3 1 Tip seal kit 52 9 3 2 Cooling fan 52 9 3 3 Gas ballast knob 52 9 3 4 Silencer spares kit 52 9 3 5 Inlet exhaust filter spares 53 9 3 6 Bearing replacement kit not field serviceable 53 9 3 7 Exhaust and ballast valve kit 53 10 Service 54 10 1 Return the equipment or components for service 54 Page 5 ...

Страница 8: ...eristics 18 Figure 6 nXDS20i Performance characteristics 19 Figure 7 LED indicators 23 Figure 8 Installation drawing 26 Figure 9 User interface panel 32 Figure 10 Logic interface connections parallel control 33 Figure 11 Logic interface connections analogue speed control 34 Figure 12 Analogue speed control 34 Figure 13 Poor ultimate vacuum flow chart 44 Figure 14 Noisy pump flow chart 45 Figure 15...

Страница 9: ...ur nearest subsidiary Important safety information is highlighted as warning and caution instructions Obey these instructions WARNING If you do not obey a warning there is a risk of injury or death Different symbols are used according to the type of hazard CAUTION If you do not obey a caution there is a risk of minor injury damage to equipment related equipment or process NOTICE Information about ...

Страница 10: ...ard from a heavy object Warning Dangerous voltage Identifies possible hazards from dangerous voltages Warning Hot surfaces Identifies a potential hazard from a hot surface Warning Risk of explosion An indication that there is a risk of explosion when you do the task Page 8 A73501880_G Safety and compliance ...

Страница 11: ...utside of the equipment as the equipment has not been designed for use where there is an external potentially explosive atmosphere There is no potential source of ignition within the pump during normal operation but there may be potential sources of ignition under conditions of rare or unexpected malfunction as defined in the directive As a result of this it is necessary to consider the potential ...

Страница 12: ...e inlet is compressed by the movement of the orbiting scroll and swept towards the centre of the fixed scroll The compressed gas enters the exhaust port near the centre of the fixed scroll and is exhausted from the pump through the outlet Refer to Operating and storage conditions on page 15 for details of operating conditions 2 4 Pump controller The integral pump controller manages the supply of c...

Страница 13: ...the following types Control inputs these are switch type and analogue signals that controls the pump Status outputs these outputs identify the status of the system tab The logic interface is designed to support both serial control parallel control and monitoring operating though one connector For serial control either RS232 or RS485 can be selected For Control Modes refer to Table nXDS Control mod...

Страница 14: ...te up to full running speed The RUN INDICATOR will flash while accelerating The RUN INDICATOR will remain on when the pump reaches full speed Start and stop on page 32 Stop the pump STOP BUTTON The pump will decelerate and stop running The RUN INDICATOR will flash while decelerating The RUN INDICATOR will go off when the pump has stopped Start and stop on page 32 Select and deselect the standby sp...

Страница 15: ...r STOP BUTTON 8 sec When engaged the AUTO RUN INDICATOR will illuminate The pump will re start automatically after the power has been restored Auto run on page 35 The pump is set to 30 Hz rotational full speed factory default Table 1 nXDS Control modes Configuration Control mode Manual Section Manual control via nXDS user interface Introduction on page 9 Figure Quick start guide manual control mod...

Страница 16: ...terface connections analogue speed control on page 34 Serial control via RS232 or RS485 Comms Interface Manual A73501860 Note Table nXDS Control modes on page 13 shows our additional products such as DX nEXT Turbo pumps and active gauges that can be controlled at the same time using the various control methods displayed above Page 14 A73501880_G Introduction ...

Страница 17: ...llation category II Altitude restriction Max 2000 m Area of use Indoor The product can be used up to an altitude of 3000 m However the product is only ETL certified for use up to 2000 m 3 2 Performance Table 4 General characteristics Description nXDS6i nXDS10i nXDS15i nXDS20i Peak pumping speed m3 h 1 6 2 11 4 15 1 22 0 Maximum permitted continuous inlet pressure mbar 200 200 200 50 Maximum permit...

Страница 18: ...ng may become hot the controller may reduce the motor speed and tip seal wear rate will be increased 3 2 1 Pumping media WARNING Do not use the nXDS pump to pump pyrophoric materials or dust The pump is designed to pump the following gases Air Carbon dioxide Helium Carbon monoxide Nitrogen Argon Oxygen O2 The pump can be used to pump water vapour Caution must be taken to ensure that vapour does no...

Страница 19: ...0i Pump ultimate mbar Gas ballast position 0 2 x 10 2 7 x 10 3 7 x 10 3 3 x 10 2 Gas ballast position 1 5 x 10 2 4 x 10 2 4 x 10 2 6 x 10 2 Gas ballast flow l min 1 Gas ballast position 1 12 16 31 24 Figure 3 nXDS6i Performance characteristics Page 17 A73501880_G Technical data ...

Страница 20: ...Figure 4 nXDS10i Performance characteristics Figure 5 nXDS15i Performance characteristics Page 18 A73501880_G Technical data ...

Страница 21: ... speed 1800 rpm 30 Hz Mass maximum 6i 26 2 kg 10i 25 8 kg 15i 25 2 kg 20i 25 6 kg Inlet connection NW25 Outlet connection NW25 3 3 1 Sound and vibration data Table 7 Sound and vibration data Parameter nXDS Sound pressure measured at ultimate vacuum 1 metre from the end of the pump to ISO 3744 52 0 dB A 2 5 Declared dual number noise emission values according with ISO 4871 Page 19 A73501880_G Techn...

Страница 22: ...ency Hz Input current A rms All variants 100 127 10 Single 50 60 10 200 240 10 Single 50 60 6 Table 9 Recommended regional supply protection Area Voltage Rating UK 230 V 10 A 250 V a c rms Europe 230 V 10 A 250 V a c rms US 120 V 10 A 250 V a c rms Japan 100 V 10 A 250 V a c rms 3 4 1 Electrical cables Recommended cord sets and fuses for regional requirements Table 10 Recommended cord sets Descrip...

Страница 23: ...rface technical data on page 21 for the interface technical data and Table Logic interface connector pins on page 22 for the logic interface pins for the electrical connections Table 11 Logic interface technical data Logic interface description Connector 15 way D type male Start serial enable and remote enable Enable control voltage low closed 0 to 0 8 V d c lOUT 0 55 mA nominal Disable control vo...

Страница 24: ...Polarity Use 1 Analogue Speed Enable control Input Connect to Pin 2 0 V to enable analogue speed control via Pin 9 2 0 V Control Reference 0 V reference for ALL control and status signals listed within this table 3 START STOP Control Input Connect to Pin 2 0 V to START the nXDS pump system 4 STANDBY Control Input Serial RX RS485 A Connect to Pin 2 0 V to enable STANDBY speed when the SERIAL ENABLE...

Страница 25: ...nal speed is at normal speed or above 3 6 LED indicators Figure 7 LED indicators The nXDS pump has eight indicator LED s Table 13 LED indicators LED Description Details 1 Power indicator Indicates that electrical mains supply to the pump is ON 2 Run indicator Indicates that the pump is running Refer to Start and stop on page 32 3 Standby mode indicator Indicates that the Standby mode has been sele...

Страница 26: ... reached Refer to Standby on page 32 6 Auto run indicator Indicates that the Auto run mode has been selected Refer to Parallel control and monitoring on page 33 7 Service indicator Indicates that a service interval has been reached Refer to Service indicator codes on page 41 8 Alarm indicator Indicates an Alarm has been triggered Refer to Alarm indicator codes on page 45 Page 24 A73501880_G Techni...

Страница 27: ...liar with the safety procedures that relate to the products handled by the pumping system Disconnect the other components in the pumping system from the electrical supply to prevent accidental operation 4 2 System design considerations Consider the following points when designing the pumping system We recommend you to use a foreline vacuum isolation valve to allow the pump to warm up before pumpin...

Страница 28: ...Figure 8 Installation drawing Note All dimensions in mm External dimensions are the same for all variants Page 26 A73501880_G Installation ...

Страница 29: ...ged If the pump is not to be used immediately replace the protective covers Store the pump in the conditions described in Storage on page 47 Refer to Disposal on page 47 for disposal of materials 4 4 Position the pump WARNING If the pump is to be used on the floor of a work area position the power lead and the exhaust and inlet hoses with care Ensure that personnel in the area are aware of any obs...

Страница 30: ...pipework if the pump is operated with the exhaust line blocked Connect the pump using appropriate pipework and fittings If necessary incorporate flexible bellows in the system pipelines to reduce the transmission of vibration and to prevent loading of the coupling joints If using flexible bellows ensure that bellows have a maximum pressure rating which is greater than the highest pressure that can...

Страница 31: ...ng to the pump The pump must be earthed via the earth conductor of the IEC60320 connector A list of cable specifications is available in Electrical data on page 20 of this manual We recommend you to fit a separate earth to the pump using a non insulated braid or a separate insulated green or yellow conductor The conductor must be a minimum of 14 AWG Use the M5 x 10 screw and shake proof washer loc...

Страница 32: ...re parallel interface refer to Parallel control and monitoring on page 33 for more information To use the serial interface or to work with a mixture of parallel and serial control refer to manual A73501860 Page 30 A73501880_G Installation ...

Страница 33: ...anel Parallel Control Mode via 15 way D type logic interface connector on user interface panel Serial Control Mode including Serial Interlock via 15 way D type logic interface connector on user interface panel The Control Mode is determined by the way the pump is started Once started the pump can only be stopped by the mode in which it was started unless the power is cycled by isolation from the e...

Страница 34: ...gure User interface panel on page 32 items 3 and 12 to start and stop the pump Note that the stop command does not isolate the pump from the electrical supply 5 2 2 Standby Operation at reduced speed will further improve tip seal and bearing service life Vacuum performance will be reduced when operating at standby speed Press the Standby button to select standby mode The pump will initially run at...

Страница 35: ...connect the relevant control input pin 14 to the 0 V control reference To monitor the normal status output connect the control equipment to the Normal status output pin 15 and to pin 2 of the logic interface mating half The output can be used to control other devices in the pumping system The output can drive a low power relay of up to 24 V coil rating up to 10 mA To monitor the fail status output...

Страница 36: ...nXDS pump logic interface Note 0 1 V º 1 of Default Run Speed 1 Start switch 2 Analogue control switch 3 nXDS pump logic interface Note 0 1 V º 1 of Default Run Speed Figure 12 Analogue speed control Note Voltages below 6 7 V will result in a clamped speed of 67 of full speed Page 34 A73501880_G Operation ...

Страница 37: ...ovided by the Analogue Speed control source is clamped by the maximum Standby Speed Setting that is 100 of the default run speed of 30 Hz 5 5 Auto run The auto run setting configures the pump to start at power up without any customer intervention This parameter is customer configurable via serial communications or using the START STOP buttons Holding down either the START or STOP button for more t...

Страница 38: ...ial control mode 5 Open the vacuum system isolation valve if fitted 5 8 To achieve ultimate vacuum In order to achieve the best possible vacuum the pump should be operated with the gas ballast control turned off However if the pump or elements of the vacuum system it is attached to are new or have been newly fitted some atmospheric moisture may be present If atmospheric moisture is present run the...

Страница 39: ...top button in manual control mode refer to Figure User interface panel on page 32 the Start Stop control input refer to Table Logic interface connector pins on page 22 pin 3 in parallel control mode or a Stop command in serial control mode 4 Vent the nXDS pump system using the gas ballast control or the valve on the inlet 5 Isolate the Mains supply Page 37 A73501880_G Operation ...

Страница 40: ...utions to protect people from the effects of dangerous substances if contamination has occurred WARNING Do not touch or inhale the thermal breakdown products of fluorinated materials which may be present in the pump if the pump has been heated to 260 C and above Fluorinated materials are safe in normal use but can decompose into very dangerous substances which may include hydrofluoric acid if heat...

Страница 41: ...spect and clean the external fan cover if required 12 No Clean the external fan cover on page 39 Check the pump performance 30 Yes Check the pump performance service indicator on page 40 Replace the pump bearings 60 Yes Replace the tip seals on page 40 Replace the pump controller 120 Yes Replace the tip seals on page 40 Electrical safety check 60 No Replace the pump controller service indicator on...

Страница 42: ...the pump tip seals is determine by the following factors The pump has reached a service interval Refer to Check the pump performance service indicator on page 40 and Replace the pump bearings service indicator on page 40 The pump is no longer achieving the required performance If the pump is no longer achieving the required performance prior to a service interval being reached we recommend you to ...

Страница 43: ...eset the service indicator refer to Service indicator codes on page 41 6 9 Electrical safety check Test the earth continuity and the insulation resistance of the pump system in accordance with local regulations for the periodic testing of electrical equipment The earth continuity should be less than 0 1 W and the DC insulation resistance greater than 1 0 MW If the pump fails any of these tests con...

Страница 44: ...ndicator will also reset the performance check timer that is both counters will be set to zero Resetting the service indicator will reset the service timer back to zero refer to Table Maintenance plan on page 39 Page 42 A73501880_G Maintenance ...

Страница 45: ...elow the lowest voltage specified on the user interface panel the pump may operate but deliver a degraded vacuum performance There is a leak in the system Tip seals may need further run in typically 24 hours with some requiring up to a maximum of 100 hours The pressure measurement technique or gauge head is unsuitable or gives an incorrect indication of pressure The vacuum fittings are dirty or da...

Страница 46: ...Figure 13 Poor ultimate vacuum flow chart 7 4 The pump is noisy If the pump is noisy refer to Figure Noisy pump flow chart on page 45 Page 44 A73501880_G Fault finding ...

Страница 47: ...s indicates a problem has been found with the embedded software In this case try cycling the power If cycling the power does not clear the indication a software download may be required In this situation contact us or the supplier If the alarm indicator is flashing identify the error flash code and consult Table Flashing error codes on page 46 There is a sufficient off period between each subseque...

Страница 48: ...d see whether the error code appears again If it does contact us or the supplier 3 ssLsss Acceleration timeout Check whether the pump is not running under constant high pressure or the inlet or outlet is not blocked 4 sssLss Over current trip activated or other hardware fault Cycle the power to the pump and see whether the error code appears again If it does contact us or the supplier 5 ssssLs Sel...

Страница 49: ...n cool dry conditions until required for use When required prepare and install the pump as described in Installation on page 25 8 2 Disposal Dispose of the pump and any components from it safely in accordance with all local and national safety and environmental requirements Particular care must be taken with components which have been contaminated with dangerous process substances Do not incinerat...

Страница 50: ...S A and a world wide network of distributors The majority of these centres employ Service Engineers who have undergone our comprehensive training courses Order spare parts and accessories from our nearest company or distributor When ordering state for each part required Model and item number of your equipment Serial number Item number and description of part Page 48 A73501880_G Spares and accessor...

Страница 51: ...zzle 6 Vibration isolators 7 Chemical resistance conversion kit 8 Pump to controller cable not shown 1 Gas ballast adaptor blank 2 Gas ballast adaptor 3 3a 3b Inlet exhaust filter 4 Silencer 5 Exhaust nozzle 6 Vibration isolators 7 Chemical resistance conversion kit 8 Pump to controller cable not shown Page 49 A73501880_G Spares and accessories ...

Страница 52: ...allast cannot be accidentally opened This feature is useful for applications such as rare gas recirculation or gas recovery Another advantage is improved leak tightness at this location Table 18 Gas ballast blank adaptor Product description Ordering information Gas ballast blank adaptor A73501806 9 2 4 Vibration isolators Fit vibration isolators to the pump to reduce the transmitted vibration from...

Страница 53: ... corrosive substances For more information contact us Note If returning the pump to us for repair or service having been converted from a standard version to an nXDS C version our service must be informed otherwise the pump will be returned back as a standard version Table 22 Chemical resistance conversion kit Product description Ordering information Chemical adaptor kit for nXDS 6i 10i or 15i A73...

Страница 54: ...n Tip seal kit A73501801 9 3 2 Cooling fan Used to replace the cooling fan located inside the nXDS fan cowl Refer to Figure nXDS scroll pump on page 11 item 4 Table 26 Cooling fan Product description Ordering information Cooling fan A73501707 9 3 3 Gas ballast knob Replacement gas ballast control knob attached to the gas ballast control Refer to Figure nXDS scroll pump on page 11 item 3 Table 27 G...

Страница 55: ... pump bearings service indicator on page 40 for details of our options for providing this training Table 30 Bearing replacement kit Product description Ordering information Bearing replacement kit A73501802 9 3 7 Exhaust and ballast valve kit Used when the pump has reached a long run service interval Table 31 Exhaust and ballast valve kit Product description Ordering information Exhaust and ballas...

Страница 56: ...ontamination of Vacuum equipment and Components Procedure HS1 If you are returning a vacuum pump note the following If a pump is configured to suit the application make a record of the configuration before returning the pump All replacement pumps will be supplied with default factory settings Do not return a pump with accessories fitted Remove all accessories and retain them for future use The ins...

Страница 57: ...Page 55 A73501880_G Service ...

Страница 58: ...edwardsvacuum com ...

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