Edwards nEXT240, Инструкция по эксплуатации

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Technical data
B800-00-880 Issue A
2.3 Vent gas specification and vent control data
Although the pump may be vented to atmosphere, high relative humidity of the air may greatly increase the
subsequent pump-down time. To reduce pump-down times you should vent with dry, clean gases. Refer to
Section 3.8
for a description of the vent options and the vent valve connection refer to Section 4.1.3 for configuring the venting
options.
Figure 6 - Maximum allowed rate of pressure rise during venting: pressure against time (with pump initially at
full rotational speed)
Table 8 - Vent gas specification and vent control
Vent gas specification and control Reference data
Vent gas Dry air, nitrogen, argon or other inert gases
Maximum dew point at atmospheric pressure -22 °C
Maximum size of particulates 1
µ
m
Maximum concentration of oil 0.1 parts per million
Recommended time for rotational speed to reach 50% > 15 seconds
Maximum allowed rate of pressure rise Refer to Figure 5