A540-55-880 Issue D
Page 44
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Service, spares and accessories
7.3
Accessories
The accessories available for use with the iXL 600 and iXL1000 dry pump systems are described in the following
sections.
shows how the accessories connect to the dry pump systems.
7.3.1
Disconnect box
The disconnect box ensures full compliance with SEMI S2 by providing true EMO functionality and also provides
interlock with photohelic switch.
7.3.2
Accessory modules
Two accessory modules are available for the dry pump system. The Active Accessory Module (AAM) provides
connectivity for up to three directly connected accessories including a gate valve, abatement and water flow sensor,
plus up to two supported active accessories, two thermocouples and the pump status output. The Passive Accessory
Module (PAM) allows up to 3 accessories to be connected to the accessory module interface.
An accessory module extension cable allows the AAM or PAM to be mounted up to 5 m away from the dry pump system.
7.3.3
Pump Display Terminal (PDT)
The PDT allows control and monitoring of the dry pump system.
7.3.4
PDT holster
The PDT holster retains the PDT and is attached to the pump or tool frame.
Table 15 - Disconnect box
Item
Item number
Disconnect box 200 - 230 V 50 - 60 Hz 3 Phase, 25 A
Contact Edwards
Table 16 - Accessories modules
Accessory module
Item number
AAM
D37480500
PAM
D37480550
Accessory module extension cable (5 m)
D37491502
Table 17 - PDT
Item
Item number
PDT
D37280700
Table 18 - PDT holster
Item
Item number
PDT holster
D37209800
