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B777-00-880

Issue E Original

Instruction Manual

EXT Compound Turbomolecular Pumps:

EXT555H, EXT555Hi and EXT555Hf

Description

Item Number

EXT555H / ISO160

B777-01-000

EXT555H / ISO160 (fine)

B777-11-000

EXT555H / 160CF

B777-02-000

EXT555Hi / ISO160

B777-05-000

EXT555Hf / ISO160

B777-07-000

EXT555Hf / 160CF

B777-08-000

Содержание B777-01-000

Страница 1: ...Compound Turbomolecular Pumps EXT555H EXT555Hi and EXT555Hf Description Item Number EXT555H ISO160 B777 01 000 EXT555H ISO160 fine B777 11 000 EXT555H 160CF B777 02 000 EXT555Hi ISO160 B777 05 000 EXT...

Страница 2: ...tory use A1 1998 A2 2001 EICrequirements t IndustriaI tocation Class Bemissions CAN CSA C22 2 No 61010 1 04 Safety Requirements for Etectricat Equipment forMeasurement Controt AndLaboratory use Part1...

Страница 3: ...system 11 3 3 1 Inlet screens supplied fitted 11 3 3 2 Inlet connection 13 3 3 3 Backing connection 13 3 3 4 Interstage connection Hi pump variants only 13 3 4 Vent options vent valve connection and c...

Страница 4: ...es 30 7 4 5 BX bakeout band conflat only 30 7 4 6 FL20K foreline trap 30 7 4 7 TAV vent valve and vent port adaptor 31 7 4 8 ACX air cooler 31 7 4 9 WCX water cooler 31 7 4 10 Vibration isolators 31 7...

Страница 5: ...g 22 9 ISX inlet screen 27 10 Inlet strainer EXT555Hi pump only 28 11 Inlet flange seals 28 12 EXC controller 28 13 Pump to controller cable 30 14 EXDC drive modules 30 15 BX bakeout band 30 16 FL20K...

Страница 7: ...obey these instructions The use of warnings and cautions is defined below CAUTION Cautions are given where failure to observe the instruction could result in damage to the equipment associated equipm...

Страница 9: ...mT vertical EXT555H ISO160 2 5 mT horizontal 5 mT vertical EXT555HF ISO and CF variants 50mT in any orientation Installation category EN61010 part 1 category 1 Pollution degree CAN CSA UL EN61010 part...

Страница 10: ...z krypton z helium z neon z argon z hydrogen z ethane z propane z butane z methane You can use the pumps to pump oxygen and water vapour subject to the following conditions z Oxygen The oxygen concent...

Страница 11: ...or rotational speed to reach 50 15 seconds Maximum allowed rate of pressure rise see Figure 3 Table 3 Purge gas specification Purge gas system items Reference data Purge gas Dry nitrogen argon or othe...

Страница 12: ...Parameter EXT555H Notes Mass EXT555H ISO160 13 4 kg Mass EXT555H DN160CF 21 2 kg Main inlet flange DN160ISO K DN160CF Outlet flange DN25NW Interstage port Hi variants DN25NW Vent port 1 8 inch BSP Pu...

Страница 13: ...ed air cooled 30 C ambient 5 mbar Forced air cooled 35 C ambient 3 5 mbar Water cooling at 15 C 8 mbar Water cooling while pumping high concentrations of argon is not recommended Operating attitude An...

Страница 15: ...supplier and carrier in writing within three days state the item number of the pump together with your order number and your supplier s invoice number Retain all the packing materials for inspection...

Страница 16: ...ypical pumping system 1 Alternative position for vent valve 2 Vacuum system 3 High vacuum gauge 4 Inlet screen 5 EXT pump 6 Backing valve 7 Vacuum gauge 8 Flexible bellows 9 Foreline trap 10 Rotary ba...

Страница 17: ...re is no danger that debris can fall into the pump If the inlet screens are removed the pumping speed through the inlet will increase by 11 for a coarse and 17 for a fine screen To remove the inlet sc...

Страница 18: ...2 Edwards Limited 2008 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Installation Figure 2 Diagram of inlet screen remove screws A in order to remove the inlet scr...

Страница 19: ...the vibration isolator in the unlikely event of a seizure of the pump rotor The pump can be mounted in any orientation If it is mounted off vertical ensure that the backing port points downwards to r...

Страница 20: ...ur backing pump Venting may be accomplished by one of the following methods z Use a TAV5 or TAV6 solenoid vent valve accessory see Section 7 in place of the manual vent valve z Use a TAV5 or TAV6 sole...

Страница 21: ...ge gas flow rate to the allowed range also specified in Section 2 To limit the flow rate use a flow controller or a pressure regulator and calibrated flow restrictor The PRX10 purge restrictor accesso...

Страница 22: ...served Edwards and the Edwards logo are trademarks of Edwards Limited Installation Figure 4 Dimensions and features of EXT555H pumps 1 Backing port NW25 2 Interstage port Hi variants NW25 3 Electrical...

Страница 23: ...80 l s 1 160 cfm 3 7 3 Water cooling A water cooling accessory is available for the EXT555H pump see Section 7 Fit the water cooler as described in the instructions supplied with it It is not necessa...

Страница 24: ...l ensure that the water cooling plate connectors are positioned below the electrical connector so that any leaking water does not drip onto it You must turn off the cooling water supply when you switc...

Страница 25: ...on the front of the controller This runs the pump at 70 rotational speed This can be used to allow system pressure to increase where this suits a particular process However you should not run the pum...

Страница 26: ...press the EXC Controller Start Stop button to reset the Fail condition and restart the EXT pump If the pump is hot allow sufficient time for it to cool before you restart it 4 5 Bakeout conflat only C...

Страница 27: ...return EXT555H pumps to Edwards Service Centres please use the procedure included at the end of this manual 5 3 Clean the pump CAUTION Do not attempt to clean any parts of the pump other than externa...

Страница 28: ...g start Fail LED not lit Is the EXC Controller power LED lit If not check that the electrical supply is on check that the switch at the rear of the EXC Controller is on check the fuse in the rear of t...

Страница 29: ...incorrectly Increase the timer setting refer to the instruction manual supplied with the EXC Controller If the EXC Controller still trips into Fail consult Edwards or your supplier The EXC Controller...

Страница 30: ...he pump from the system and test the ultimate pressure of the pump alone see Section 3 for specification If poor check the pump for contamination and if necessary clean as described in Section 5 3 Lea...

Страница 31: ...n required prepare and install the pump as described in Section 3 4 Avoid long term storage if possible When long term storage is necessary the pump should be set up and run for at least eight hours e...

Страница 33: ...e repair rebuild and testing to factory specifications Equipment which has been serviced repaired or rebuilt is returned with a full warranty Your local Service Centre can also provide Edwards enginee...

Страница 34: ...bomolecular pumps are described in the following Sections Figure 5 shows how the accessories are fitted to an EXT pump 7 4 2 EXC controller The Edwards EXC Controllers provide the facilities necessary...

Страница 35: ...and spares 1 Vibration isolator 2 Bakeout band 3 Inlet flange seal supplied 4 Inlet screen fitted 5 EXT555H pump 6 TAV solenoid vent valve 7 DN10NW adaptor 8 Manual vent valve fitted 9 VRX vent restr...

Страница 36: ...lower pressures It may also be used to protect the pump from condensation of contaminants The bakeout bands are available in 110 120 V or 220 240 V versions and may be powered from a rear panel socket...

Страница 37: ...se refer to Section 3 7 and to Table 5 to check the suitability of air cooling in a particular application 7 4 9 WCX water cooler If you wish to water cool your pump you must order the water cooling p...

Страница 38: ...suitable for all EXT pumps fitted with a purge port 7 4 12 VRX vent restrictor Use a VRX fixed orifice vent restrictor to restrict the flow of vent gas into the EXT pump Refer to Section 3 4 for infor...

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