B756-50-880 Issue C
Page 6
© Edwards Limited 2013. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
This page has been intentionally left blank.
Figure 1 - EXT70/70/200H dimensions
Страница 1: ...B756 50 880 Issue C Original Instruction Manual EXT70 70 200H...
Страница 2: ...nts Class B Emissions EN50581 2012 Technical Documentation for the Assessment of Electrical and Electronic Products with respect to the Restriction of Hazardous Substances and fulfils all the relevant...
Страница 3: ...d control 10 3 5 Electrical installation 10 3 5 1 EXDC160 Controllers 11 3 6 Cooling 11 3 6 1 Introduction 11 3 6 2 Forced air cooling 11 4 OPERATION 13 4 1 Start up procedure 13 4 2 Shut down procedu...
Страница 4: ...200H system fitted to the Waters LCT flight tube 9 4 Cartridge pump fixing positions 16 5 Breakdown of spares items 21 Tables Table Page 1 Technical data 4 2 List of items supplied 8 3 Vent restructu...
Страница 5: ...ions must be obeyed The use of WARNINGS and CAUTIONS is defined below CAUTION Cautions are given where failure to observe the instruction could result in damage to the equipment associated equipment a...
Страница 6: ...point The blades present a rotational safety hazard when the pump is operational and a sharp edged hazard when the pump is stationary Care must be taken to avoid foreign objects entering the pump when...
Страница 7: ...Ensure that vapour does not condense inside the pump If there is a requirement to pump a gas not in the list above contact the supplier for advice If the supplier is not contacted the warranty on the...
Страница 8: ...ata Parameter EXT70 70 200H Notes Mass system 23 kg Eyebolt positions are supplied for lifting and handling Mass Cartridge pump 9 kg Outlet flange DN25NW Main inlet pumping speed TOF N2 170 ls 1 He 18...
Страница 9: ...nitride phenolic resin and carbon fibre reinforced epoxy resin Further to this the machined from solid chamber the top interface plate and the junction piece are surface treated with Alocrom 1000 on...
Страница 10: ...50 880 Issue C Page 6 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank Figure 1 EXT70 70 200H dimens...
Страница 11: ...uter cardboard packaging and check the pump If the pump is damaged notify the supplier and the carrier in writing within three days State the Item Number of the pump together with the order number and...
Страница 12: ...the LCT Premier flight tube Table 2 List of items supplied Qty Description Check 1 System chamber 1 EXT70 70 200H Split Flow Turbomolecular pump fitted to chamber 1 Top Interface Plate fitted to cham...
Страница 13: ...rovided refer to Figure 3 The system mounting must be suitably rigid and capable of absorbing the rotational energy generated by the unlikely event of a failure of the pump rotor Contact Edwards for f...
Страница 14: ...to suppress any back streaming of hydrocarbon oil from the backing pump Venting may be accomplished by one of the following methods Use a TAV5 or TAV6 solenoid vent valve accessory see Section 7 in p...
Страница 15: ...TION The pump must be cooled by forced air cooling to prevent damage to the bearing Ensure that there is an adequate supply of cooling air to the pump During operation if the temperature of any surfac...
Страница 16: ...B756 50 880 Issue C Page 12 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank...
Страница 17: ...ual vent valve and an EXDC160 Controller 1 Close the valve in the backing line connecting the EXT70 70 200H pump to the backing pump 2 Switch off the backing pump 3 Switch off the power supply to the...
Страница 18: ...ION 4 3 1 EXDC160 Controller The EXDC160 controller monitors the temperature of the EXT70 70 200H Split Flow pump and the electrical power consumption of the pump If the EXDC160 controller detects exc...
Страница 19: ...when the bolt has been removed 4 The cartridge pump is removed from the chamber by tightening of the two nylon jacking screws fitted to the flange of the cartridge pump see Figure 4 The screws should...
Страница 20: ...e to the forefinger and thumb of your gloved hand Slowly run the O ring between the greased thumb and forefinger to apply a light sheen of grease to the full diameter of the O ring It is very importan...
Страница 21: ...5 Restart the system in accordance with the operating instructions and ensure leak tightness 6 The O ring piston seals fitted to the cartridge pump should be replaced whenever the cartridge pump is r...
Страница 22: ...If so clean or replace them Is the pumping speed insufficient due to poor conductance between the pump and the gauge or too large a chamber Increase the conductance or reduce the volume Is the inters...
Страница 23: ...urs every six months 6 2 Disposal Dispose of the EXT70 70 200H Turbomolecular Pump and any components and accessories safely in accordance with all local and national safety and environmental requirem...
Страница 24: ...B756 50 880 Issue C Page 20 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank...
Страница 25: ...world wide network of distributors The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses Order spare parts and accessories from the nearest E...
Страница 26: ...pment which has been serviced repaired or rebuilt is returned with a full warranty Edwards local Service Centres can also provide Edwards engineers to support on site maintenance service or repair of...
