Edwards AIGX-D-DN16CF Скачать руководство пользователя страница 1 | Manualshive

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D048-60-880

Issue E Original

Instruction Manual

Active Ion Gauge

Description

Item

Number

AIGX - D - NW25

D048-60-000

AIGX - D - DN16CF

D048-61-000

AIGX - D - DN40CF

D048-02-000

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Содержание AIGX-D-DN16CF

Страница 1: ...D048 60 880 Issue E Original Instruction Manual Active Ion Gauge Description Item Number AIGX D NW25 D048 60 000 AIGX D DN16CF D048 61 000 AIGX D DN40CF D048 02 000 ...

Страница 2: ...Laboratory Use General Requirements EN61326 2 3 2013 Electrical equipment for measurement control and laboratory Class B Emissions Use EMC requirements Particular requirements Test Industrial Immunity configuration operational conditions and performance criteria for transducers with integrated or remote signal conditioning EN50581 2012 Technical Documentation for the Assessment of Electrical and E...

Страница 3: ... the vacuum system 7 3 3 Electrical connections 7 3 3 1 Connect to your own supply and control equipment 7 3 3 2 Maximum cable length 9 4 Operation 11 4 1 Enable and disable the AIGX 11 4 2 Pressure measurement 11 4 2 1 Calibration in different gases 11 4 3 Emission current selection 12 4 4 Degas the AIGX 13 4 5 Over pressure protection 13 4 6 Filament selection 13 4 7 LED status 13 4 8 Bakeout 14...

Страница 4: ...Recommended Electrical Connections 8 4 Pressure Output Signal of AIGX 12 5 Separate the Electronics Housing from the Body Tube 14 6 Fuse Replacement 16 Tables Table Page 1 Pins on the AIGX Connector 8 2 Maximum Recommended Cable Length 9 3 Gas Calibration Factors For Various Gases 12 4 LED Status 13 5 Fault Finding Guide 15 Associated publications Publication title Publication number Vacuum pump a...

Страница 5: ... hot filament ionisation gauge in which the pressure is measured indirectly as a function of the current The measurement range of the AIGX is 5 x 10 10 to 5 x 10 2 Torr 6 6 x 10 10 to 6 6 x 10 2 mbar Three types of vacuum connections are available DN16CF DN40CF and NW25 The AIGX requires a 14 5 30 V d c power supply it has a 0 to 10 V d c analogue output which is related to pressure A 9 way electr...

Страница 6: ... is inhibited at high pressure The maximum duration of degas is three minutes after which the gauge returns automatically to its normal mode The AIGX is fitted with a status LED Figure 1 item 3 This LED indicates the operating status of the gauge Figure 1 General View of the AIGX 1 Electrical connector 3 Status LED 2 Filament select switch 4 Vacuum flange 3 1 2 4 ACTIVE ION GAUGE AIGX D 1 33CF P N...

Страница 7: ...gauge tube 21 cm3 Enclosure rating IP30 Ambient temperature operation 0 to 40 C storage 30 to 70 C Ambient humidity 90 RH non condensing up to 31 C reducing to 50 RH at 40 C Atmosphere Dry non conductive only pollution degree 1 Bakeout temperature 200 C with electronics removed Maximum operating altitude 2000 m Maximum internal pressure 10 bar absolute Pressure measurement range 5 x 10 10 to 5 x 1...

Страница 8: ...cuum Measurement range 0 7 V to 8 7 V Gauge disabled 10 0 V Minimum load impedance 10 kW Control sense Active low Active level 1 5 V Load rating 30 V d c 100 mA max Back EMF suppression diode Min surge rating 1 A Min reverse voltage rating 100 V Emission current Normal 0 1 or 1 mA Degas 10 mA Grid voltage Normal 180 V Degas 500 V Filament bias voltage 30 V Collector voltage 0 V Collector Tungsten ...

Страница 9: ... Edwards Limited 2013 All rights reserved Page 5 Edwards and the Edwards logo are trademarks of Edwards Limited Technical Data D048 60 880 Issue E Figure 2 Dimensions A B 70 70 ...

Страница 10: ...D048 60 880 Issue E Page 6 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

Страница 11: ...or systems where UHV pressures are required 3 3 Electrical connections 3 3 1 Connect to your own supply and control equipment Note Do not connect the electrical supply common pin 2 to the signal common pin 5 If you do the AIGX pressure output signal will be inaccurate A schematic diagram of the recommended electrical connections to the AIGX is shown in Figure 3 The pins on the AIGX connector are u...

Страница 12: ... Connections Table 1 Pins on the AIGX Connector Pin No Use 1 Gauge enable 2 Supply common 3 Signal output 4 Supply positive 5 Degas status 6 Degas enable 7 Signal common 8 Emission current select 9 Emission status F B A E C G D H C DC RELAY VOLTAGE SUPPLY DC RELAY VOLTMETER SIGNAL VOLTAGE 1 2 3 4 5 6 7 8 9 0V 1 9 A AIGX connector socket B Cable electrical plug C Back EMF suppression diode optional...

Страница 13: ...The following maximum cable lengths are recommended The common mode signal voltage that is the voltage between signal common and supply common could be as much as 2 5 V with long cables due to the voltage drop in the supply cable You should ensure that the signal voltage measurement will operate correctly Table 2 Maximum Recommended Cable Length Conductor cross section 24 V Supply 15 V Supply 0 75...

Страница 14: ...D048 60 880 Issue E Page 10 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

Страница 15: ...put signal to pressure using the following equation P 10 V 10 Torr P 10 V 9 875 mbar P 10 V 7 875 Pa where V is the measured voltage in volts Refer to Figure 4 This formula is valid for the range 0 7 V to 8 7 V 4 2 1 Calibration in different gases The equation given in Section 4 2 is for air or nitrogen only For other gases the indicated pressure has to be multiplied by a gas calibration factor GC...

Страница 16: ... of the gauge we recommend that you use the low emission current at pressures higher than 1 x 10 5 Torr 1 3 x 10 5 mbar To select the higher emission current connect pin 8 to pin 2 To select the lower emission current disconnect pin 8 from pin 2 You can monitor the emission status at pin 9 When the emissions are off the open collector transistor is off When the emissions are on the open collector ...

Страница 17: ...ormal operation mode after 3 minutes To enable degassing of the AIGX connect pin 6 to pin 2 To disable degassing of the AIGX disconnect pin 6 from pin 2 You can monitor the degas status at pin 5 When the degas is operating the open collector transistor is on When the degas is off the open collector transistor is off 4 5 Over pressure protection The gauge will automatically switch off when the meas...

Страница 18: ...nics housing Refer to Figure 5 and the procedure in Section 5 2 to remove and refit the electronics housing Ensure that the tube has cooled down before refitting the electronics housing Figure 5 Separate the Electronics Housing from the Body Tube 1 Electronics housing 3 Body tube assembly 2 Fixing screws 4 Locating lugs 1 2 4 3 2 ACTIVE ION GAUGE AIGX D 1 33CF P NO D04861000 EDWARDS LIMITED Manor ...

Страница 19: ... the two M3 screws to the sides of the AIGX 5 3 Replace the internal fuse If you suspect that the internal fuse has blown you should check that the voltage and polarity of the electrical supply are correct before replacing the fuse To replace the fuse refer to Figure 6 and use the following procedure WARNING Disconnect the electrical supply cable before you start any maintenance High voltages are ...

Страница 20: ...example a small pair of pliers 5 The replacement fuse is supplied mounted in a fuseholder Remove the new fuse from its fuseholder and discard the new fuseholder 6 Push the new fuse into the fuseholder on the PCB 7 Refit the gauge lid ensuring that the screw is fitted in the shrouded earth socket next to the main connector Refit the four M3 5 screws 8 Apply power to the gauge and check that the LED...

Страница 21: ...all the AIGX as described in Section 3 6 2 Disposal Disposal of the AIGX in accordance with all local and national safety and environmental requirements Alternatively you may be able to recycle the AIGX and or cables contact Edwards or your supplier for advice also see below The AIGX and associated cables are within the scope of the European Directive on Waste Electrical and Electronic Equipment 2...

Страница 22: ...D048 60 880 Issue E Page 18 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

Страница 23: ...undergone comprehensive Edwards training courses Order spare parts and accessories from your nearest Edwards company or distributor When ordering please state for each part required Model and Item Number of your equipment Serial number if any Item Number and description of part 7 2 Spares 7 3 Accessories Description Item Number Electronics housings AIGX D D048 60 800 Body tubes NW25 D048 50 801 DN...

Страница 24: ...D048 60 880 Issue E Page 20 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

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