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FAX:

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Appendix 4. Corrected Pressure Values for Various Gases

True Pressure [Torr]

Indicated Pressure [Torr]

Deuterium

Freon-12

Freon-22

Methane

Oxygen

1 x 10

-4

1 x 10

-4

1 x 10

-4

1 x 10

-4

1 x 10

-4

1 x 10

-4

1 x 10

-4

2 x 10

-4

1 x 10

-4

1 x 10

-4

2 x 10

-4

2 x 10

-4

2 x 10

-4

3 x 10

-4

2 x 10

-4

2 x 10

-4

2 x 10

-4

3 x 10

-4

1 x 10

-4

2 x 10

-4

5 x 10

-4

6 x 10

-4

5 x 10

-4

8 x 10

-4

7 x 10

-4

4 x 10

-4

3 x 10

-4

8 x 10

-4

3 x 10

-4

5 x 10

-4

1 x 10

-3

1.1 x 10

-3

1.9 x 10

-3

1.5 x 10

-3

1.4 x 10

-3

8 x 10

-4

5 x 10

-4

1.8 x 10

-3

7 x 10

-4

1.0 x 10

-3

2 x 10

-3

2.3 x 10

-3

2.4 x 10

-3

3.0 x 10

-3

2.9 x 10

-3

1.6 x 10

-3

1.0 x 10

-3

3.2 x 10

-3

1.4 x 10

-3

2.0 x 10

-3

5 x 10

-3

5.5 x 10

-3

6.0 x 10

-3

7.5 x 10

-3

6.8 x 10

-3

4.0 x 10

-3

2.3 x 10

-3

7.7 x 10

-3

3.5 x 10

-3

4.9 x 10

-3

1 x 10

-2

1.09 x 10

-2

1.20 x 10

-2

1.47 x 10

-2

1.35 x 10

-2

8.0 x 10

-3

4.6 x 10

-3

1.52 x 10

-2

7.0 x 10

-3

9.7 x 10

-3

2 x 10

-2

2.20 x 10

-2

2.40 x 10

-2

3.00 x 10

-2

2.70 x 10

-2

1.60 x 10

-2

9.0 x 10

-3

3.10 x 10

-2

1.40 x 10

-2

2.00 x 10

-2

2 x 10

-2

5.50 x 10

-2

6.00 x 10

-2

7.30 x 10

-2

6.90 x 10

-2

4.10 x 10

-2

2.40 x 10

-2

7.70 x 10

-2

3.50 x 10

-2

4.90 x 10

-2

1 x 10

-1

1.07 x 10

-1

1.20 x 10

-1

1.42 x 10

-1

1.36 x 10

-1

8.20 x 10

-2

4.60 x 10

-2

1.58 x 10

-1

7.00 x 10

-2

9.70 x 10

-2

2 x 10

-1

2.08 x 10

-1

2.47 x 10

-1

2.70 x 10

-1

2.59 x 10

-1

1.63 x 10

-1

8.50 x 10

-2

3.10 x 10

-1

1.40 x 10

-1

1.92 x 10

-1

5 x 10

-1

4.94 x 10

-1

6.73 x 10

-1

5.99 x 10

-1

5.82 x 10

-1

4.27 x 10

-1

2.14 x 10

-1

7.64 x 10

-1

3.53 x 10

-1

4.77 x 10

-1

9.30 x 10

-1

1.52

1.04

1.02

9.20 x 10

-1

3.90 x 10

-1

1.56

7.30 x 10

-1

9.50 x 10

-1

1.68

4.02

1.60

1.62

2.16

6.80 x 10

-1

3.24

1.60

1.90

3.24

260

2.38

2.54

13.0

1.26

13.5

5.10

4.86

4.84

2.86

3.30

1.74

28.5

21.5

10.0

6.40

3.22

3.62

2.24

360

585

22.5

8.00

3.68

4.02

2.50

845

86.0

100

9.00

4.56

4.78

2.66

225

200

12.0

5.80

6.25

3.08

305

300

17.0

6.70

7.30

3.50

385

500

29.5

8.05

9.00

4.10

605

700

49.0

9.20

10.5

4.60

860

760

56.0

9.50

11.0

4.64

945

900

88.5

10.0

12.0

1000

130

11.0

12.5

Data was compiled from a number of sources and is provided as a guide. If pressure readings are critical to application, user should
consult a vacuum pressure gauge calibration specialist.

Содержание Terranova 907

Страница 1: ...a 800 446 8811 FAX 650 965 0764 EMAIL info duniway com WEB www duniway com 1 of 30 Terranova 907 Dual Capacitance Diaphragm Gauge Convection enhanced Pirani Control Unit Instructions Manual Revision 0...

Страница 2: ...ent 11 Changing Pressure Gauge Curves 12 Pascal Mode 12 Restoring Default Values 13 PRESSURE MEASUREMENT 13 SET POINT OPERATION 14 SERIAL COMMUNICATION 16 ANALOG OUTPUT 18 TROUBLESHOOTING 19 CHANGING...

Страница 3: ...C to 50 C in operation Weight 1 lb 0 5 kg Convection enhanced Pirani Measuring Range 1 x 10 4 Torr to 1000 Torr Air Nitrogen 1 3 x 10 4 bar to 1333 mbar 1 3 x 10 2 Pa to 133 kPa Display Resolution Va...

Страница 4: ...inated male 15 pin D sub connector Required Sold separately HYB 275 Hybrid Granville Phillips 275 Convectron or equivalent capacitance diaphragm gauge cable 10 ft HYB CEP Hybrid MKS HPS Series 317 Con...

Страница 5: ...rn can create an explosion which can damage equipment and or injure personnel Limitation on use of Compression Mounts Do not use a compression port to connect pressure gauges to a vacuum system in app...

Страница 6: ...0 V DC output signal Installation Mounting the Terranova 907 The Terranova 907 is housed in a standard 1 8 DIN box to allow for mounting on most equipment racks or cabinets The dashed call out dimensi...

Страница 7: ...iaphragm gauge to the control unit Figure 2 Terranova 907 back view Terranova 907 should be OFF before connecting the pressure gauge s Plugging or unplugging the pressure gauge while the control unit...

Страница 8: ...LED will illuminate during adjustment See Set Point Operation 2 Press the SELECT button a second time to set or adjust the relay activation pressure for SET POINT 1 Use the RAISE or LOWER button to in...

Страница 9: ...value shown on the display CDG CALIB CONV ATM LED will illuminate during adjustment See the Pressure Adjustment section The GAUGE ZERO and CDG CALIB CONV ATM pressure values may be independently modif...

Страница 10: ...asurements The control unit may also be set to a specific pressure value For example if system pressure is indicated to be at 10 mTorr by a secondary pressure gauge the unit can also be set to agree w...

Страница 11: ...ser accidentally changes the CDG CALIB CONV ATM value during use If this occurs user should reset the Terranova 907 and redo both the zero and atmospheric pressure adjustment Capacitance Diaphragm Gau...

Страница 12: ...itted and the corresponding pressure curve code will appear on the unit display Thereafter the Terranova 907 will resume normal operation Pascal Mode Pascal Mode disables the ability to change pressur...

Страница 13: ...to the display at a time User can select between the CEP 275 and CDG pressure gauge via the GAUGE SELECT button to display the corresponding pressure readings The selected pressure gauge LED will illu...

Страница 14: ...t programmable set points SET POINT 1 and SET POINT 2 and corresponding relays Each set point has an adjustable activation i e SET POINT LO and deactivation i e SET POINT HI pressure value that allows...

Страница 15: ...19 to 99 8 of full scale value Set point resolution steps in torr units are as follows Step Pressure Range 0 01 of full scale less than 10 of full scale 0 1 of full scale greater than 10 of full scal...

Страница 16: ...15 CEP Analog Output See NOTES Table 1 I O port pin configuration NOTES PIN 11 Buffered signal 1k output impedance PIN 15 Buffered signal 1k output impedance Serial Communication The INPUT OUTPUT 15 p...

Страница 17: ...ndicates the set point relay state and G indicates the pressure gauge to which the set point applies If the relay is active R 1 otherwise R 0 G CDG corresponds to the capacitance diaphragm gauge G PIR...

Страница 18: ...g output available for use as a secondary method to read measured pressure values Analog output voltage can be accessed through the INPUT OUPUT 15 pin D sub connector port The unit outputs 0 50 V per...

Страница 19: ...orr For example if V is equal to 3 50 V P is approximately 100 Torr Pressure values are converted from torr to millibar or Pascal units 1 k source impedance for analog output Troubleshooting Problem P...

Страница 20: ...troller problems If resetting does not resolve the problem user may clean the inside of the pressure gauge A cleaning agent such as acetone or toluene may be used to carefully clear away any contamina...

Страница 21: ...S Series 317 resistance values If the measured resistance values significantly differ from those provided in Table 5 the pressure gauge may be damaged contaminated or defective Tests should be perform...

Страница 22: ...on the back panel of the unit Figure 7 Terranova 907 power module To change fuses 1 Unplug the line cord from the unit power module 2 Locate the fuse block immediately below the power cord socket 3 Pr...

Страница 23: ...uct is returned to DSC for warranty service Buyer will prepay shipping charges and pay all duties and taxes for products returned to DSC DSC will pay for the return of products to Buyer except for pro...

Страница 24: ...his declaration relates is in conformity with the following standards or normal documents EMC Directive 89 336 EEC 93 68 EEC Electromagnetic Compatibility Standards EN 50081 1 2 1992 EN 50082 1 2 1993...

Страница 25: ...8 Male NPT CEP HPS KF16SH MKS HPS Series 317 Shielded Convection enhanced Pirani3 gauge KF16 Other fittings available upon request 1 Bakeable up to 150 C non operating 2 Compatible plug in replacement...

Страница 26: ...iway com WEB www duniway com 26 of 30 Appendix 2 Gauge Cable Diagrams Figure 1 Terranova 907 to MKS Baratron 15 pin D sub connector Granville Phillips 275 Convectron cable configuration Figure 2 Terra...

Страница 27: ...NNN N kPa N NN kPa 500 665 NNN N N NN 6 65 x 104 NN NN kPa N 200 266 NNN N N NN 2 66 x 104 NN NN kPa N 100 133 NN NN N NN 1 33 x 104 NN NN kPa N 50 66 5 NN NN N NNN 6650 NNNN N N 20 26 6 NN NN N NNN...

Страница 28: ...2 2 70 x 10 2 1 60 x 10 2 9 0 x 10 3 3 10 x 10 2 1 40 x 10 2 2 00 x 10 2 2 x 10 2 5 50 x 10 2 6 00 x 10 2 7 30 x 10 2 6 90 x 10 2 4 10 x 10 2 2 40 x 10 2 7 70 x 10 2 3 50 x 10 2 4 90 x 10 2 1 x 10 1...

Страница 29: ...s As shown in Figure 1 maximum current varies from 2 A at 30 V DC 60 V AC to 0 4 A at 150 V DC 300 V AC for resistive loads Protective Circuits for Inductive Loads A protective circuit or component is...

Страница 30: ...example if Figure 2 shows a 1 A LOAD with a 110 V AC source connected in series with the Terranova relay I 1 A and E 110 V AC Therefore Equation 1 provides a capacitance value of 0 1 F Equation 2 pro...

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