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5-14

Installation, Setup, and Operation

HPG 13150 400 V (A)

Dressler

®

HF-Technik GmbH

Prerelease version

To Select Load Power Regulation Through the User Port:

See pin 8 on the 25-pin

User port

“RF forward/load power regulation” on

.

To Select Load Power Regulation through the Host Port:

If you are using

RS-232

,

PROFIBUS

, or

Ethernet

to control and monitor the

HPG generator:

1. Select load power regulation mode:

Send one data byte for command

3

(see

Table 4-13 on page 4-41

).

4

7 = Load power regulation

2. Specify the output set point level for the regulation mode:

Send two data bytes, least significant byte first, for command

8

representing the set point level in watts (see

Table 4-13 on page 4-41

To Select Load Power Regulation Using the HPG Generator Front Panel:

Complete the following steps to select P

real

regulation mode using the front

panel:

1. Press the

Program

soft key.

Control Settings

appears on the display.

2. Press

Change

.

3. Press

Control P

real

.

4. Select the desired power set point between 0 W and 15 kW into a 50

Ω

nonreactive load using the

RF POWER

rotary dial knob. Press the

Increm

Auto

soft key to toggle between dynamic increments (Auto) and several

fixed increments.

5. Press

Ok

to confirm.

6. Press

Exit

.

7. Press

Execute

.

The operating screen will then display the load power in watts, the reflected
power in watts, and the

Program

and

Display

soft keys.

SETTING EXTERNAL POWER REGULATION MODE (DC
BIAS)

In external power regulation mode, the HPG Generator regulates RF power at
a constant DC self bias voltage in the plasma chamber. The RF output power
can be limited to protect your plasma chamber against high RF power. This
limitation is useful if there is no self bias voltage in the beginning of the
process.

This section explains how to select external power regulation using the

User

Port

, the

Host

port, or the front panel.

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Содержание 13150 400 V

Страница 1: ...U s e r M a n u a l s e r v i c e d r e s s l e r c o m Prerelease version HPG Generator Model 13150 400 V July 2004 ...

Страница 2: ......

Страница 3: ...User Manual Prerelease version HPG Generator Model 13150 400 V HPG 13150 400 V A ...

Страница 4: ...t of the reliance on or use of the information contained herein PRODUCT USAGE STATEMENT Read this entire manual and all other publications pertaining to the work to be performed before you install operate or maintain this equipment Practice all plant and product safety instructions and precautions Failure to follow instructions can cause personal injury and or property damage If the equipment is u...

Страница 5: ...m To order a manual please contact the Dressler Customer Service Department service dressler com is a registered trademark of Dressler HF Technik GmbH CESAR is a trademark of Dressler HF Technik GmbH Internet Explorer is a registered trademark of the Microsoft Corporation Microsoft is a registered trademark of the Microsoft Corporation Modbus is a registered trademark of Gould Inc Smith The Smith ...

Страница 6: ...iv HPG 13150 400 V A Dressler HF Technik GmbH Prerelease version ...

Страница 7: ...tification 1 4 Safety and Compliance Directives and Standards 1 5 Electromagnetic Compatibility EMC Directives and Standards 1 5 Safety Directives and Standards 1 5 Conditions of Use 1 6 Interlocks and Limits 1 7 Chapter 2 Product Overview and Theory Description 2 1 Theory of Operation 2 2 Chapter 3 Specifications Physical Specifications 3 1 Unit Dimensions 3 2 Physical Specifications Table 3 7 El...

Страница 8: ...nse CSR Codes 4 40 Host Port Command Set 4 40 Chapter 5 Installation Setup and Operation Preparing to Install the HPG Generator 5 1 Spacing Requirements 5 1 Installation Requirements 5 2 Unpacking 5 2 Installing the HPG Generator 5 3 Grounding 5 3 Connecting Cooling Water 5 3 Connecting RF Output Power 5 4 Connecting Communication Interfaces 5 5 Connecting the HPG Generator to a System Interlock L...

Страница 9: ...sing Preset Generator Settings for Different Applications 5 35 Controlling a Variomatch Unit Attached to the Generator 5 35 Understanding Additional Operating Functions 5 37 Using the Pulsing Function 5 37 Creating Recipes 5 38 Using the Remote Control Override 5 40 Setting a Target Lifetime 5 40 Changing Reflected Power Settings 5 41 Connecting to an Ethernet Enabled Unit With a Web Browser 5 41 ...

Страница 10: ...viii Table of Contents HPG 13150 400 V A Dressler HF Technik GmbH Prerelease version Authorized Returns 6 24 Warranty Statement 6 24 ...

Страница 11: ...ns 6 and 19 4 17 Fig 4 8 DC BIAS MONITOR signal wiring pins 7 and 20 4 17 Fig 4 9 RF FORWARD LOAD REGULATION signal wiring pins 8 and 21 4 18 Fig 4 10 INTERLOCK LOOP signal wiring pins 10 and 23 4 18 Fig 4 11 15 VOLT DC signal wiring pins 13 and 21 4 19 Fig 4 12 SET POINT STATUS signal wiring pins 14 and 1 4 19 Fig 4 13 OVERTEMPERATURE signal wiring pins 22 and 9 4 20 Fig 4 14 INTERLOCK SATISFIED ...

Страница 12: ...x List of Figures HPG 13150 400 V A Dressler HF Technik GmbH Prerelease version ...

Страница 13: ...scriptions 4 6 Table 4 3 RS 232 host pin descriptions 4 22 Table 4 4 PROFIBUS Host port pins 4 29 Table 4 5 PROFIBUS status LEDs 4 30 Table 4 6 Configuration of download bytes outbytes 4 32 Table 4 7 Configuration of upload packet inbytes 4 33 Table 4 8 Upload status bytes 4 34 Table 4 9 Packet format for FC23 send 4 36 Table 4 10 Packet format for FC23 response 4 38 Table 4 11 Packet format for F...

Страница 14: ...xii List of Tables HPG 13150 400 V A Dressler HF Technik GmbH Prerelease version ...

Страница 15: ...s documented under Safety Guidelines on page 1 3 INTERPRETING THE MANUAL The following sections provide information to help you interpret this user manual This Revision of the Manual This revision of the manual provides information associated with software release 1 16 This version of the software included changes to the error and warning messages Please use an appropriate revision of this manual ...

Страница 16: ...conventions Pin and signal names appear in capitalized italics RF POWER ON New terms appear in italicized text Unit labels switches indicators and so on appear in boldface text Mains Commands 1 and command names regulation select appear in boldface lowercase text Danger Warning and Caution Boxes This symbol represents important notes concerning potential harm to people this unit or associated equi...

Страница 17: ...see also Grounding on page 5 3 Ensure that all cables are properly connected see also HPG Generator User Port on page 4 4 and HPG Generator Host Port Options on page 4 21 Verify that input line voltage and current capacity are within specifications before turning on the power supplies see Electrical Specifications on page 3 9 Use proper electrostatic discharge ESD precautions Always be careful aro...

Страница 18: ...nformation about unit compliance and certification including the conditions of use required to be in compliance with the standards and directives Product Certification Certain options of this product are certified by CE marking self addressed by Dressler Compliance Engineering EMC measurements verified by Competent Body Product Services Capacitor discharge warning CE label Hazardous voltage No use...

Страница 19: ...tives and standards Directive Description 89 336 EEC EC Council directive on the approximation of the laws of the Member States relating to electromagnetic compatibility EMC Directive 47 CFR Part 18 Code of Federal Regulations Limits and methods of measurement of radio interference characteristics of industrial scientific and medical equipment EN 55011 Limits and methods of measurement of radio di...

Страница 20: ...rack or other enclosure The rack or enclosure must be metal and either reinforced or of sufficient thickness to resist the following tests 4A steady force of 445 N applied through a steel hemisphere 12 7 mm in diameter 4An impact of 7 J applied by dropping or swinging a 0 53 kg 50 mm diameter steel sphere Following the tests there must still be a minimum clearance of 12 7 mm between the rack or en...

Страница 21: ... interlock loop you must make the proper interlock loop connections for the unit to enable RF power The HPG Generator may be shipped with an interlock jumper plug that provides a connection between the interlock pins You can use this jumper plug to satisfy the interlock and enable operation in situations where you do not intend to connect the remaining pins on this port For more information on sat...

Страница 22: ...rmation on resolving an overtemperature condition see E10 E11 and E12 in Table 6 1 on page 6 7 See also pin 22 in Table 4 2 on page 4 6 Current limit When the driver power exceeds the limit the unit reduces output to remain within the limits Output is not at set point For more information see W10 in Table 6 2 on page 6 16 External pulse frequency limit When the external pulse frequency exceeds the...

Страница 23: ... information see E20 and E21 in Table 6 1 on page 6 7 The unit resets when the humidity returns to an acceptable level Minimum cooling flow When the flow of water drops below the specified minimum limit the RF power shuts off see Cooling Specifications on page 3 10 For information see E02 in Table 6 1 on page 6 7 The unit resets when the water flow returns to acceptable conditions Table 1 4 HPG ge...

Страница 24: ...1 10 Safety and Product Compliance Guidelines HPG 13150 400 V A Dressler HF Technik GmbH Prerelease version ...

Страница 25: ...y design for quick tube exchange Robust ability to handle excessive mismatch on the load due to the highly resilient tube characteristics Designed to regulate power into a broad range of output impedances the HPG generator can operate in forward load or external power regulation mode see Setting Regulation Mode on page 5 11 You can control the HPG generator remotely through an analog User Port see...

Страница 26: ...ator theory of operation Module Description 1 Analog I O This module provides the User interface 2 Driver Exciter This module generates power at the designated output frequency to drive the main RF sections and contains the CEX functions 3 RF Amplifiers This module generates RF power 4 RF Measure This module samples the output signal and sends it to the sensor electronics 5 Digital Controller This...

Страница 27: ...00 V RF Power Generator Chapter 3 Prerelease version Specifications PHYSICAL SPECIFICATIONS The following sections describe the dimensions and physical specifications of the HPG generator Unit Dimensions on page 3 2 Physical Specifications Table on page 3 7 ...

Страница 28: ...ifications HPG 13150 400 V A Dressler HF Technik GmbH Prerelease version Unit Dimensions The following illustrations show the dimensions of the HPG generator Figure 3 1 Front view of the HPG Generator with door ...

Страница 29: ...HPG 13150 400 V A Specifications 3 3 HPG 13150 400 V RF Power Generator Prerelease version Figure 3 2 Front view of the HPG Generator without door ...

Страница 30: ...sler HF Technik GmbH Prerelease version Figure 3 3 Rear view of the HPG Generator Water In Water Out RF Out Main Circuit Breaker AC Input Power Diagnostic Matching Host Port User Port Air Outlet Air Outlet Air Outlet 1406 4mm 55 37 602mm 23 70 ...

Страница 31: ...HPG 13150 400 V A Specifications 3 5 HPG 13150 400 V RF Power Generator Prerelease version Figure 3 4 Left side of the HPG Generator ...

Страница 32: ...3 6 Specifications HPG 13150 400 V A Dressler HF Technik GmbH Prerelease version Figure 3 5 Top view of the HPG Generator ...

Страница 33: ...t 520 kg 1145 lb Clearance 30 cm 11 8 required at rear for airflow and cable connections Mounting Stand alone cabinet Connector Cable specifications AC input power Connecting terminal for 4 x 53 5 mm2 45 mm OD type AWG0 For more information see Connecting AC Input Mains Power on page 5 5 RF output Connector 1 5 8 EIA flange female connector 50 Ω For more information see Connecting RF Output Power ...

Страница 34: ... 4 28 An Ethernet Modbus TCP connection see also Host Port Ethernet Modbus TCP on page 4 34 To determine which host port you have see Understanding Model 13150 400 V Options on page 1 2 For more information on the Host port options see HPG Generator Host Port Options on page 4 21 CEX Not available Coolant connectors 1 2 fittings with optional Nitto SP 4P 1 2 quick release coupling For more informa...

Страница 35: ...ent 46 A each φ at 400 VAC nominal 42 A at 440 VAC 38A at 480 VAC selected by user changing the transformer taps Input power 32 kVA at 15 kW RF power Power factor 90 at maximum RF power level Overcurrent protection 80 A to 100 A adjustable circuit breaker Efficiency line to load 53 typical at full rated power nominal line typical at full rated power nominal line into a 50 Ω load RF output specific...

Страница 36: ...int or 30 W whichever is greater RF Power Repeatability 0 5 of set point or 30 W whichever is greater RF Power Response Time 10 ms from foldback to full power set point For detailed specifications of RF waveforms see www dressler com products generators RF Pulse frequency 150 Hz to 10 kHz pulse repetition frequency RF Pulse Rise Time 30 µs RF Pulse Fall Time 1 µs Table 3 2 Electrical specification...

Страница 37: ... generator pH between 7 and 9 Total chlorine 20 ppm Total nitrate 10 ppm Total sulfate 100 ppm Total dissolved solids 250 ppm Total hardness expressed as calcium carbonate equivalent less than 250 ppm Specific resistivity of 2500 Ω per cm or higher at 25ºC Total dissolved solids TDS as estimated by the following TDS 640 000 specific resistivity Ω per cm Table 3 3 Cooling specifications Continued D...

Страница 38: ...o 131 F Class 1K3 5 to 95 1 g per m3 to 29 g per m3 Class 1K4 80 kPa to 106 kPa 800 mbar to 1060 mbar approximately 2000 m above sea level Transportation Class 2K3 25 C to 70 C 13 F to 158 F Class 2K3 95 Note 2 60 g per m3 Note 3 Class 2K3 66 kPa to 106 kPa 660 mbar to 1060 mbar approximately 3265 m above sea level Note 1 Noncondensing Note 2 Maximum relative humidity when the unit temperature slo...

Страница 39: ...erator The sections that follow describe each interface For an illustration of the rear panel of the HPG generator with communication interfaces identified see Figure 3 3 on page 3 4 Note To determine which interface options you have see Understanding Model 13150 400 V Options on page 1 2 DIAGNOSTIC INTERFACE Each HPG generator has a Diagnostic interface for use only at authorized Dressler Service...

Страница 40: ...ctor Table 4 1 Matching Interface pin descriptions Pin Name Signal Type Level Description 1 GROUND Connect to the shield of the cable for example RC cable 2 DECREASE CLoad Digital Output Open collector 30 V capable The output is connected to ground to turn the Load motor counter clockwise 3 INCREASE CLoad Digital Output Open collector 30 V capable The output is connected to ground to turn the Load...

Страница 41: ...For example in the default configuration of the Dressler Variomatch 4000 V bias voltage is equal to 10 V test voltage and is displayed on the front panel as 4000 13 POSITION OF TUNE CAPACITOR Analog Input 0 V to 10 V The voltage at this input is proportional to the position of the Tune capacitor A 10 V reading at this pin is equal to 100 on the front panel display 14 POSITION OF LOAD CAPACITOR Ana...

Страница 42: ...shown in Figure 4 2 the User Port is a 25 pin shielded female subminiature D connector Figure 4 2 25 pin User Port connector SATISFYING MINIMAL 25 PIN USER PORT REQUIREMENTS If you do not use the User Port to control or monitor the HPG generator you still must satisfy the User Port INTERLOCK LOOP signal to operate the generator Dressler HF Technik GmbH s products only include interlocks and limits...

Страница 43: ...length between the HPG generator and the controller is 10 meters 33 feet Minimize interference from adjacent electrical equipment by terminating the EMI shield in the cable to the metal shells of the cable s connectors Additionally you must tie the chassis of the HPG generator to a local earth ground through an adequately sized copper grounding strap Note Grounding the User Port at the HPG generat...

Страница 44: ...e 4 2 25 pin User Port pin descriptions Pin Number Return Pin Name Signal Type Description 1 Return for pin 14 See pin 14 2 15 REFLECTED POWER MONITOR Analog output This signal provides a linearly scaled readback of reflected power as measured at the generator output The default range is 0 V to 10 V but you can change this range see Analog Outputs on page 4 14 Default setting 0 V to 10 V 0 W to 15...

Страница 45: ...ut The default range is 0 V to 10 V but you can change this range see Analog Outputs on page 4 14 For a description of regulation mode see Setting Regulation Mode on page 5 11 To change control settings see pin 8 Default setting 0 V to 10 V 0 W to 15 kW into a 50 Ω nonreactive load For a wiring diagram see Figure 4 4 on page 4 15 Pin 16 must be grounded Table 4 2 25 pin User Port pin descriptions ...

Страница 46: ...ly a voltage of 1 5 V or less to this pin For a wiring diagram see Figure 4 5 on page 4 16 Note Before the HPG generator can deliver power the interlock must be satisfied see Satisfying Minimal 25 Pin User Port Requirements on page 4 4 and the set point must be within the output power range see Electrical specifications on page 3 9 Pin 17 must be grounded Table 4 2 25 pin User Port pin description...

Страница 47: ... V 0 W to 15 kW into a 50 Ω nonreactive load For DC bias regulation the scaling of the set point must be the same as for the DC bias signal see pin 7 For a wiring diagram see Figure 4 6 on page 4 16 6 19 RF FORWARD POWER DC BIAS REGULATION Digital input Use this signal to select DC bias or RF power regulation mode To regulate on DC bias input apply a positive voltage of 4 V to 30 V to this pin To ...

Страница 48: ... see Analog Inputs on page 4 13 Default setting 0 V to 10 V 0 V to 4000 V Typically matching networks provide a DC bias voltage monitor signal When this scaled representation of the DC bias voltage is used for DC bias regulation see pin 6 the scaling must be the same as for the set point see pin 5 Dressler Variomatch matching networks provide a DC bias voltage monitor signal for regulation through...

Страница 49: ...nges the regulation mode For a wiring diagram see Figure 4 9 on page 4 18 9 Return for pin 22 See pin 22 10 23 INTERLOCK LOOP Digital input To satisfy the interlock and enable RF power in the generator close an external loop from pin 23 to pin 10 A resistance of 15 Ω or less across this pin closes the loop Pin 23 feeds this loop via a current limiting circuit maximum 120 mA Alternatively you can s...

Страница 50: ...2 See pin 2 Pin 15 must be grounded at the host 16 Return for pin 3 See pin 3 Pin 16 must be grounded at the host 17 Return for pin 4 See pin 4 18 Return for pin 5 See pin 5 19 N A DC GROUND Chassis ground DC ground connection common to chassis ground 20 Return for pin 7 See pin 7 21 N A CHASSIS GROUND Chassis ground DC ground connection common to chassis ground 22 9 OVERTEMP Digital output When a...

Страница 51: ... For a wiring diagram see Figure 4 14 on page 4 20 25 19 BLANKING PULSING Pulse input When Pulse Settings is set to External this pin allows you to pulse blank the RF power Set the required logic for RF on and off through the front panel menu see Changing the Pulse Input Configuration Settings on page 5 32 When Pulse Settings is set to Internal this pin allows you to switch between internal pulsin...

Страница 52: ...r must present a 10 kΩ or higher impedance to these signals The readback signals represent the forward and reflected power as measured at the output of the HPG generator Digital Inputs Pins 4 6 8 and 10 are opto coupled The user s signal drives the LED in the opto coupler through a 4 7 kΩ resistor A signal level of 4 V to 30 V applied to the input pin activates the signal Digital Outputs The statu...

Страница 53: ...RT WIRING DIAGRAMS The following schematics illustrate how to properly connect the HPG generator User Port For detailed pin descriptions see 25 Pin User Port Pin Descriptions on page 4 6 Figure 4 3 REFLECTED POWER MONITOR signal wiring pins 2 and 15 Figure 4 4 RF FORWARD LOAD POWER MONITOR signal wiring pins 3 and 16 ...

Страница 54: ...4 16 Communication Interfaces HPG 13150 400 V A Dressler HF Technik GmbH Prerelease version Figure 4 5 RF POWER ON signal wiring pins 4 and 17 Figure 4 6 SET POINT signal wiring pins 5 and 18 ...

Страница 55: ...00 V A Communication Interfaces 4 17 HPG 13150 400 V RF Power Generator Prerelease version Figure 4 7 RF FORWARD POWER DC BIAS REGULATION wiring pins 6 and 19 Figure 4 8 DC BIAS MONITOR signal wiring pins 7 and 20 ...

Страница 56: ...ommunication Interfaces HPG 13150 400 V A Dressler HF Technik GmbH Prerelease version Figure 4 9 RF FORWARD LOAD REGULATION signal wiring pins 8 and 21 Figure 4 10 INTERLOCK LOOP signal wiring pins 10 and 23 ...

Страница 57: ...13150 400 V A Communication Interfaces 4 19 HPG 13150 400 V RF Power Generator Prerelease version Figure 4 11 15 VOLT DC signal wiring pins 13 and 21 Figure 4 12 SET POINT STATUS signal wiring pins 14 and 1 ...

Страница 58: ...0 Communication Interfaces HPG 13150 400 V A Dressler HF Technik GmbH Prerelease version Figure 4 13 OVERTEMPERATURE signal wiring pins 22 and 9 Figure 4 14 INTERLOCK SATISFIED signal wiring pins 24 and 11 ...

Страница 59: ...34 Note To determine which host port option you have see Understanding Model 13150 400 V Options on page 1 2 The host port commands are very similar for all interfaces All host port commands are listed and described in Host Port Commands on page 4 39 Host Port RS 232 With AE Bus This section describes the RS 232 host port For information on the PROFIBUS host port see Host Port PROFIBUS on page 4 2...

Страница 60: ... PARAMETERS The communications capability of the serial RS 232 host port is limited to the following parameters RS 232 protocol transmission standard Five baud rates selected on the front panel see Changing the Device Configuration Settings on page 5 33 49600 Table 4 3 RS 232 host pin descriptions Signal Pin Name Description 1 NO CONNECTION Reserved for future use 2 TXD RS 232 transmit data 3 RXD ...

Страница 61: ...er s serial connector The receive pin is normally pin 2 for a standard 9 pin serial port and normally pin 3 for a standard 25 pin serial port AE BUS PROTOCOL The AE Bus protocol uses pure binary data nothing is coded in ASCII and is designed to facilitate direct communications between a host computer and the HPG generator The AE Bus message packet combines a set quantity of bits and bytes in such ...

Страница 62: ...is reserved for the network broadcast address when this address is used in a Host originated packet all units execute the packet but do not respond to the host The remaining three bits bits 0 1 and 2 are the length bits These bits tell the receiving unit how long the Data field is so that the unit can determine when it has received the entire message If the Data field contains more than six bytes ...

Страница 63: ... some commands do not require data sometimes the Data field is not present If the value specified in the length bits bits 0 1 and 2 of the Header field is 0 to 6 the HPG generator expects zero to six data bytes However if the value in the Header field is 7 07h the HPG generator looks for the Optional Length byte after the Command field and reads this value to calculate the data byte count Unless o...

Страница 64: ...nds a message packet to the HPG generator The packet contains one of the following A command that requests data or status information A command and data that change a parameter setting An executable command T1 Unit Verifies Host Transmission Packet Once the HPG generator receives the host computer transmission message packet the HPG generator verifies that the message is intended for it and not fo...

Страница 65: ...acket or does whatever else it has been programmed to do in this situation If the Host receives an ACK 06h it waits for the requested data or status information or it waits for the CSR code telling it whether or not the new parameter was accepted If the Host receives no response within a reasonable period it takes whatever action it has been programmed to take T2 Unit Transmits Response to Host Th...

Страница 66: ...e Ethernet host port see Host Port Ethernet Modbus TCP on page 4 34 Note To determine which option you have see Understanding Model 13150 400 V Options on page 1 2 The PROFIBUS host port on the HPG generator consists of a 9 pin female subminiature D connector two status LEDs and two rotary address switches located beside the connector This section describes the PROFIBUS status LEDs pins and commun...

Страница 67: ...ng sections describe the PROFIBUS protocol Please note that Dressler s PROFIBUS protocol does not support the following functions address changing freeze unfreeze modes or sync modes PROFIBUS Type Files GSD Files Type files are computer files that some Programmable Logic Controllers PLCs use to compile PROFIBUS programs These files are device specific and contain information on features found in t...

Страница 68: ...cedures if your HPG generator is the last slave on the PROFIBUS cable The termination resistors should be on the connector housing of the PROFIBUS cable not included PROFIBUS Baud Rate The auto baud feature of Dressler s certified PROFIBUS interface adjusts automatically to the rate of the PROFIBUS master system Baud rates are available in discrete steps from 9600 bits 9 6 kbits to 12 Mbits The au...

Страница 69: ...uction before sending the packet to the HPG generator This problem most often manifests as mysteriously changed values That is values at the HPG generator seem to have changed automatically even though no command has executed or the values appear changed because one data bye contained the data that another data byte should have contained The root of the problem is a shared memory block Most PLCs s...

Страница 70: ...nload packet outbytes and an upload packet inbytes as described in the following sections of this chapter Command lists follow Note Response times are fast so requested information is available in less than 100 ms More specifically a download packet outbytes has high priority for the PROFIBUS and is processed immediately The upload packet has lower priority and is updated every 100 ms with the exc...

Страница 71: ...cket Table 4 7 lists the response or upload packet These bytes are also known as inbytes Table 4 7 Configuration of upload packet inbytes Byte Description 0 Status flags first byte 1 Status flags second byte 2 Delivered power low 3 Delivered power high 4 Forward power low 5 Forward power high 6 Reflected power low 7 Reflected power high 8 Data byte LSB 9 Data byte 10 Data byte 11 Data byte 12 Data...

Страница 72: ... the data extends over more than one byte the PROFIBUS sends the least significant byte LSB before the most significant byte MSB Byte 13 references the requesting command Host Port Ethernet Modbus TCP This section describes the Ethernet host port For information on the RS 232 host port see Host Port RS 232 With AE Bus on page 4 21 For information on the PROFIBUS host port see Host Port PROFIBUS on...

Страница 73: ...y implement Modbus TCP Instead a program running on the interface board accepts Modbus TCP packets from the Host sends appropriate AE Bus commands to the HPG generator using the internal RS 232 interface and forms an appropriate reply packet The system supports up to 6 Modbus TCP connections to port 502 Registers are defined in an absolute zero based format Note When using third party tools make s...

Страница 74: ...ands in the HPG generator are atomic which prevents erasing problems However one client may overwrite another s configuration information Using Modbus TCP FC23 FC23 allows you to send any HPG generator AE Bus command through the Modbus TCP interface providing complete control of the system in a way that directly corresponds to the AE Bus commands For a complete listing of the AE Bus commands and t...

Страница 75: ... command number AE Bus command number see Host Port Commands on page 4 39 for a complete list of commands 18 Number of bytes in AE Bus write packet Total number of bytes in the AE Bus packet for a description of the AE Bus packet see AE Bus Protocol on page 4 23 for information on the number of data bytes in each AE Bus command see Table 4 13 on page 4 41 19 and up AE Bus data bytes Data bytes con...

Страница 76: ...de 23 0x17h 8 Byte counter Not used 9 AE Bus command number AE Bus command number see Table 4 13 on page 4 41 for a complete list of commands 10 Number of bytes in AE Bus response packet Total number of bytes in the AE Bus packet for a description of the AE Bus packet see AE Bus Protocol on page 4 23 for information on the number of data bytes in each AE Bus command see Table 4 13 on page 4 41 11 ...

Страница 77: ... revision of this manual for earlier versions of the software If you do not have the appropriate manual contact Customer Support see Customer Support on page 6 21 Note The unit reports the software revision level with host port command 198 see Table 4 13 on page 4 41 The following sections describe the command status response CSR codes returned by the HPG generator in response to a host port comma...

Страница 78: ...rning output on or off or changing a setting in the unit The unit responds to these commands by sending a command status response CSR This single byte response indicates whether the unit has accepted or rejected the command and in the case of rejection the reason the unit could not respond to the command For more information on CSR codes see Host Port Command Status Response CSR Codes on page 4 40...

Страница 79: ...d 1 16 bit value 6 through 3 32 bit value Most host port commands are the same for all of the available interfaces Differences are noted where they exist Table 4 13 describes the HPG generator host port commands Table 4 13 Host port commands Command Description Number of Host Data Bytes Number of Response Data Bytes 1 RF off Turns off RF output Read back with command 162 0 1 CSR only 2 RF on Turns...

Страница 80: ...ommand 169 2 1 CSR only 5 reflected power limit Specifies the maximum reflected power Send two data bytes least significant byte first representing the reflected power limit as a percentage of nominal power Accepts a value of 1 of nominal power up to the specified limit Read back with command 170 2 1 CSR only 8 set point Specifies the output set point level for the selected regulation mode set wit...

Страница 81: ...0 is selected the no target life timer will count For more information see Setting a Target Lifetime on page 5 40 Read back with command 156 See also command 12 1 1 CSR only 12 AE Bus and Ethernet version set target life see next row for Profibus version of command Sets the target life in kilowatt hours of the specified target see command 11 Send five data bytes least significant byte first Byte 1...

Страница 82: ...e on page 5 40 Read back with command 157 3 1 CSR only 13 tuner control Sets the tuner control if the HPG generator is connected to a Dressler Variomatch unit through the matching interface For more information on this interface see Matching Interface on page 4 2 This command will not work with other matching networks unless they are electrically compatible and are connected through the Matching I...

Страница 83: ... 4 21 4 User Port analog control for more information see HPG Generator User Port on page 4 4 6 Local control through Front Panel for more information see Operating the HPG Generator Using the Front Panel on page 5 16 Note If you try to change the control mode while the unit is on the unit automatically switches off Read back with command 155 1 1 CSR only Table 4 13 Host port commands Continued Co...

Страница 84: ...ve If FST is active modes 1 through 4 the frequency set with command 18 is used as the minimum frequency limit Ensure that this frequency is less than the maximum frequency before command 17 is used Note This command is not available on generators with fixed frequency Read back with 187 3 1 CSR only 18 AE Bus and Ethernet version RF frequency see next row for Profibus version of command Sets the R...

Страница 85: ... one data byte representing the desired number of recipe steps Accepts a value of 0 through 2 Note 0 disables recipe settings For more information see Creating Recipes on page 5 38 1 1 CSR only 21 recipe step ramp time Specifies the ramp time for a given recipe step Send three data bytes least significant byte first Byte 1 selects the recipe step number 1 to 2 set with command 19 Bytes 2 and 3 set...

Страница 86: ...8 3 1 CSR only 23 recipe step run time Sets the run time in seconds for a specified recipe step Send three data bytes least significant byte first Byte 1 selects the recipe step number 1 to 2 set with command 19 Bytes 2 and 3 set the run time in seconds For more information see Creating Recipes on page 5 38 Read back with command 188 3 1 CSR only 24 save presets Saves the current operation paramet...

Страница 87: ... off 1 Internal pulsing 2 External pulsing 3 External pulsing inverted 4 Enable internal pulsing by external pulsing input See also commands 93 and 96 For more information see Using the Pulsing Function on page 5 37 Read back with command 177 1 1 CSR only Table 4 13 Host port commands Continued Command Description Number of Host Data Bytes Number of Response Data Bytes ...

Страница 88: ...ing knob disabled Matching buttons disabled 42 RF On Off buttons disabled Rotating knob enabled Matching buttons disabled 43 RF On Off buttons enabled Rotating knob enabled Matching buttons disabled 44 RF On Off buttons disabled Rotating knob disabled Matching buttons enabled 45 RF On Off buttons enabled Rotating knob disabled Matching buttons enabled 46 RF On Off buttons disabled Rotating knob en...

Страница 89: ...fall time Send two data bytes least significant byte first representing the RF on ramping fall time in tenths of a second Read back with command 151 2 1 CSR only 33 set reflected power parameters Sets reflected power parameters Send three data bytes least significant byte first Byte 1 sets the number of seconds after reaching the limit set by bytes 2 and 3 until RF is turned off 4Accepts a value o...

Страница 90: ...0 the selection value is 0 Read back with command 212 3 1 CSR only 93 set pulsing frequency Sets the RF pulsing frequency Send three data bytes least significant byte first representing the pulsing frequency in Hertz Accepts a value of 1 to 100000 1 Hz to 100000 Hz Note Ensure the value does not exceed the specified maximum pulse frequency of the generator see Electrical Specifications on page 3 9...

Страница 91: ...ommand will not work with other matching networks unless they are electrically compatible and are connected through the Matching Interface connector 0 1 CSR only 112 move load capacitor position Moves the load capacitor motor of a connected Variomatch unit to the specified position For more information on this interface see Matching Interface on page 4 2 This command will not work with other match...

Страница 92: ...nterface on page 4 2 This command will not work with other matching networks unless they are electrically compatible and are connected through the Matching Interface connector Send two data bytes to move the series motor to its new position Accepts a value of 0 to 1000 Read back with command 175 2 1 CSR only 128 supply type Reports the generator type returns 5 ASCII characters for example CESAR 0 ...

Страница 93: ...port motor movement Reports the match network motor movement when the generator is connected to a Variomatch unit through the matching interface For more information on this interface see Matching Interface on page 4 2 This command will not work with other matching networks unless they are electrically compatible and are connected through the Matching Interface connector Returns one data byte 0 Ma...

Страница 94: ...d of tube life in hours If you sent a value of 2 Bytes 1 and 2 16 bit value Plate voltage in volts Bytes 3 8 bit value Plate current in tenth of amperes Byte 4 8 bit value Grid current in tenth of amperes 1 4 151 report ramping rise and fall times Report on and off ramping rise and fall times The controller returns four data bytes least significant byte first Bytes 1 and 2 represent rise time in t...

Страница 95: ...nd 33 0 3 154 report regulation mode Reports regulation mode The controller returns one data byte representing the regulation mode 6 Forward power Pforward regulation 7 Load power Preal regulation 8 External power DC Bias regulation Set with command 3 0 1 155 report control mode Reports the control mode The controller returns one data byte representing the control mode 2 Host 4 User Port 6 Local F...

Страница 96: ... one data byte representing the desired target number 1 to 4 The controller returns the target life in hundredths of kilowatt hours for example 100 1 kWh Set with command 12 1 4 158 report User Port scaling Reports User Port analog voltage scaling Set with command 30 Table 4 13 Host port commands Continued Command Description Number of Host Data Bytes Number of Response Data Bytes ...

Страница 97: ... On 7 Set point status 0 Within tolerance 1 Out of tolerance 2nd status byte bit flags 0 End of target life 1 End of tube lifetime 2 Tube lifetime warning 3 Overtemperature 4 Overtemperature warning 5 Overtemperature HV supply 6 Overtemperature HV supply warning 7 Interlock open 3rd status byte bit flags 0 Reserved 1 Bus fault 2 High bus fault 3 Reserved 4 Low bus fault 5 Out of set point 6 Reserv...

Страница 98: ...ocked 163 report tuning control Reports matching control when the generator is connected to a Variomatch unit through the matching interface For more information on this interface see Matching Interface on page 4 2 This command will not work with other matching networks unless they are electrically compatible and are connected through the Matching Interface connector Returns one data byte 0 Manual...

Страница 99: ... The controller returns two data bytes representing the forward power in watts LSB first 0 2 166 report reflected power Reports a snapshot of reflected power level at that instant The controller returns two data bytes representing the reflected power in watts LSB first 0 2 167 report delivered power Reports a snapshot of delivered power level at that instant The controller returns two data bytes B...

Страница 100: ...s least significant byte first Bytes 1 and 2 report the current load position 0 to 1000 Bytes 3 and 4 report the current series position 0 to 1000 Set with commands 112 and 122 or by using the automatic tune process 0 4 177 report pulsing Reports pulsing settings The controller returns one data byte 0 Pulsing off 1 Internal pulsing 2 External pulsing 3 External pulsing inverted 4 Enable internal p...

Страница 101: ...ble on generators with fixed frequency Set with command 17 0 3 188 report recipe step set point run time Reports the set point and run time for the selected recipe step Send one byte to select the desired recipe step The controller returns four data bytes Bytes 1 and 2 represent the recipe step set point in watts Bytes 3 and 4 represent the recipe step run time in tenths of seconds Set with comman...

Страница 102: ...ng the duty cycle in the percent of on time per cycle Set with command 96 0 2 198 report software revision level Reports the revision level of the software Used in conjunction with command 130 to obtain the version revision of the software for example 1 16 4 data bytes 4 ASCII characters 205 report run time Reports the total time that the generator was producing output power The controller returns...

Страница 103: ...3 baud rate 49600 419200 438400 457600 4115200 Note For 115200 the return value is 0 Set with command 69 0 3 223 report error code register Retrieves the error code See also Checking for and Resolving Errors and Warnings on page 6 6 0 1 230 report sensor data Returns sensor data Bytes 0 and 1 Reserved Bytes 2 and 3 Condensation 0 4 231 report unit serial number The controller returns four data byt...

Страница 104: ...4 66 Communication Interfaces HPG 13150 400 V A Dressler HF Technik GmbH Prerelease version ...

Страница 105: ...eration PREPARING TO INSTALL THE HPG GENERATOR The following sections provide information that you need to understand before installing the HPG generator Spacing Requirements The HPG generator needs 30 cm 11 8 at the rear for RF cable connection water hose connections and cooling air flow A minimum of 60 cm 24 is required at the front to open the door ...

Страница 106: ... to the carrier Operating and maintenance personnel must receive proper training before installing troubleshooting or maintaining high energy electrical equipment Potentially lethal voltages could cause death serious personal injury or damage to the equipment Ensure that all appropriate safety precautions are taken RISK OF DEATH OR BODILY INJURY Disconnect and lockout tagout all sources of input p...

Страница 107: ...d with quick release couplings The HPG generator water cooling system includes a water solenoid water flow meter and a humidity sensor which are designed to protect the generator and the environment To Connect Cooling Water 1 Install a source of water to the Water In connector 2 Install a source of water out to the Water Out connector Never integrate the HPG generator into a cabinet in a way that ...

Страница 108: ...or and Table 5 1 describes each pin Figure 5 1 Output RF Out connector 1 5 8 EIA flange To Connect RF Output 1 Connect one end of a shielded coaxial cable of 50 Ωimpedance to the RF Out connector 2 Connect the other end of the cable to the input of the load or matching network Note For information on optimum cable length contact customer service for contact information see Customer Support on page...

Страница 109: ...t port for communication some User Port circuits must be satisfied to operate the HPG generator For more information see HPG Generator User Port on page 4 4 To Connect the Communication Interfaces Make each interface connection For specific information on the interface connections including pin descriptions and communication protocols see Chapter 4 Communication Interfaces Connecting the HPG Gener...

Страница 110: ...ch product option you have see Understanding Model 13150 400 V Options on page 1 2 This section provides information on connecting for Ethernet communication and setting the IP configuration for your unit which will allow you to connect to the unit through your network For more information see also Host Port Ethernet Modbus TCP on page 4 34 and Connecting to an Ethernet Enabled Unit With a Web Bro...

Страница 111: ...ation settings in a non BootP environment The following procedures provide instructions for both situations To Change the IP Configuration With BootP 1 Configure your BootP server to recognize the HPG generator MAC address located on a sticker on the back of the unit close to the Ethernet connector 2 In the BootP server configuration set an IP address for the HPG generator that is appropriate for ...

Страница 112: ...ough the 25 pin User port To Operate the HPG Generator for the First Time Using the 25 pin User Port 1 If the generator is not connected to a system interlock loop verify that there is external contact closure between pins 10 and 23 INTERLOCK LOOP See Table 4 2 on page 4 6 for more information 2 Apply water and ensure the water is flowing at or above the specified minimum value see Table 3 3 on pa...

Страница 113: ...nge Congratulations you have successfully installed and operated the HPG generator Operating the HPG Generator for the First Time With Host Port There are three Host port options for specific Host port information see HPG Generator Host Port Options on page 4 21 This section describes operating procedures for all Host port options Note To determine which option you have see HPG 13150 400 V A optio...

Страница 114: ...see Troubleshooting Guide on page 6 2 10 If you have a matching network connected did the capacitors begin to move If not see 11 Vary the chamber conditions according to your process requirements and verify that the HPG generator can cover the required load impedance range Congratulations you have successfully installed and operated the HPG generator Operating the HPG Generator for the First Time ...

Страница 115: ...n page 6 2 8 If you have a matching network connected did the capacitors begin to move If not see Matching Network Troubleshooting on page 6 2 9 Vary the chamber conditions according to your process requirements and verify that the HPG generator can cover the required load impedance range Congratulations you have successfully installed and operated the HPG generator NORMAL OPERATION The following ...

Страница 116: ... the front panel To Determine the Regulation Mode Through the Host Port If you are using RS 232 PROFIBUS or Ethernet to control and monitor the HPG generator send command 154 see Table 4 13 on page 4 41 The controller will return one byte representing the regulation mode 6 Forward power regulation Pforward 7 Load power regulation Preal 8 External power regulation DC Bias To Determine the Current R...

Страница 117: ...two data bytes least significant byte first for command 8 representing the set point level in watts see Table 4 13 on page 4 41 To Select Forward Power Regulation Using the HPG Generator Front Panel Complete the following steps to select Pforward regulation using the front panel 1 Press the Program soft key Control Settings appears on the display 2 Press Change 3 Press Control Pforward 4 Select th...

Страница 118: ...ion mode using the front panel 1 Press the Program soft key Control Settings appears on the display 2 Press Change 3 Press Control Preal 4 Select the desired power set point between 0 W and 15 kW into a 50 Ω nonreactive load using the RF POWER rotary dial knob Press the Increm Auto soft key to toggle between dynamic increments Auto and several fixed increments 5 Press Ok to confirm 6 Press Exit 7 ...

Страница 119: ...nd two data bytes least significant byte first for command 8 representing the set point level in watts see Table 4 13 on page 4 41 Selecting DC Bias Regulation Using the HPG Generator Front Panel Complete the following steps to select DC Bias regulation mode using the front panel 1 Press the Program soft key Control Settings appears on the display 2 Press Change 3 Press Control DC Bias 4 Set a DC ...

Страница 120: ... Figure 5 2 illustrates the front panel control elements Figure 5 2 Front panel The following sections describe how to operate the HPG Generator using the features Understanding the basic front panel control elements Using the front panel Program menu Setting and using Preset generator settings Using the display settings Controlling a Dressler Variomatch unit that connected to the generator throug...

Страница 121: ...on To power off the HPG generator turn the switch counter clockwise to a horizontal position Note The ON OFF power switch does not completely disconnect the Mains You must install an external switch to completely disconnect Mains LCD graphic display The liquid crystal display LCD allows you to read all operating conditions and power values Soft key functions The three soft keys located on the righ...

Страница 122: ...b is also used to select various values in the Program menu See Using the Front Panel Program Menu on page 5 18 To increase a value rotate the control knob clockwise To decrease a value rotate the control knob counter clockwise Matching control of Variomatch unit The matching control allows you to control operation of a Variomatch matching network that is connected to the Matching Interface on the...

Страница 123: ...d Exit soft keys Press Next to cycle through the menu until you reach a desired function Note You can only move forward through the program menu To return to a previous function displayed on the menu screen you must press Next repeatedly until you again reach the desired function Press Change to view the submenu for any particular function and follow the submenu prompts Press Exit to exit the prog...

Страница 124: ...F POWER rotary knob Use the soft keys to make menu selections and use the RF POWER rotary knob to set specific values Then press the appropriate soft key to save that value Note You can only move forward through the program menu To return to a previous function displayed on the menu screen you must press Next repeatedly until you again reach the desired function For more specific menu information ...

Страница 125: ...ram menu tree Control Settings Match Settings Pulse Settings Recipe Settings Control Pforward Control Preal auto manual C Tune C Load Internal External Pulse Freq Duty Cycle Rise Fall RF Rise Time RF Fall Time Time Frames 1 4 Ok Time Frame T2 Time Frame T3 Time Frame T4 Start Value Final Value Time Frame T1 Pforward Off More Control DC Bias DC Bias Preal Power Ramping Off Remote Control Override R...

Страница 126: ... regulates RF power with constant forward power Pulse Input Hi RFon Lo RFoff Hi RFoff Lo RFon Refl Power Settings Pulse Input Configuration Prfl Threshold RF off after Ok On Off Pwr Interrupt Device Configuration Displ Contrast Ok Analog I O MAX DCBias Scaling Ok Active Target 1 4 Energy MAX Ok On Off Reset Counter Prefl Limit Ok Ok Pulse Input Hi CW Lo Pulse Hi Pulse Lo CW off Pulse Mode External...

Страница 127: ...s Change 4 Press the soft key for the desired regulation mode Control Pforward Control Preal or Control DC Bias 5 For Pforward or Preal regulation mode set the desired power set point between 0 W and 15 kW into a 50 Ωnonreactive load using a combination of the Increm Auto key and the RF POWER dial knob 6 For DC Bias control set a DC Bias value using a combination of the Increm Auto key and the RF ...

Страница 128: ...onnected through the Matching Interface connector You may choose between Manual tune In manual tune control the automatic tuning feature is disabled and you can manually set the tune and load capacitor positions of the Variomatch unit Automatic tune In automatic tune control the Variomatch unit sets presets to automatically adjust the capacitor positions and minimize reflected power To Select Tuni...

Страница 129: ...ngs See Changing the Pulse Input Configuration Settings on page 5 32 To Select Internal or External Pulsing Using the HPG Generator Front Panel 1 Press the Program soft key 2 Press Next until you see Pulse Settings on the display 3 Press Change 4 Press Internal for internal pulsing press External for external pulsing 5 For internal pulsing a Select the desired Pulse Freq value between 1 Hz and 30 ...

Страница 130: ...functionality with its fast and uncontrolled rise time You can program your critical plasma system to strike smoothly with a well controlled rising edge of the RF power 2 Power ramping Power ramping allows you to determine the shape of a power ramp within a specified time frame There are four programmable time frames To Create the Rise fall Recipe Using the HPG Generator Front Panel 1 Press the Pr...

Страница 131: ...for T1 between 0 W and 15 kW into a 50 Ω nonreactive load using a combination of the Increm Auto key and the RF POWER rotary knob g Press Ok to confirm h Set a time for T2 the recipe s second power ramp between 0 1 and 60 minutes using a combination of the Increm Auto key and the RF POWER rotary knob i Press Ok to confirm j The Start Power value will display as the final value of T1 set a Final Va...

Страница 132: ...e last val to continue at the same position you stopped at before To Turn Off the Recipe Settings Feature Using the HPG Generator Front Panel 1 Press the Program soft key 2 Press Next until you see Recipe Settings on the display 3 Press Change 4 Press Off to turn off the feature 5 Press the Exit soft key 6 Press the Execute soft key For 8 minutes a linear increasing power level from 150 W to 895 W...

Страница 133: ...g remote control all front panel controls are disabled To Select Remote Control Override Using the HPG Generator Front Panel 1 Press the Program soft key 2 Press Next until you see Remote Control Override on the display 3 Press Change 4 To use the RF ON OFF front panel controls press On Off Keys to leave these controls as remote functions only press Remote 5 To use the Rot Knob front panel control...

Страница 134: ...the lifetime counter 5 Select an Active Target 1 to 4 using the RF POWER rotary knob 6 Select the Energy MAX between 0 01 kWh and 21600 kWh using a combination of the Auto Increm button and the RF POWER rotary knob 7 Press Ok to confirm 8 Press the Exit soft key 9 Press the Execute soft key To Turn Off the Target Lifetime Feature Using the HPG Generator Front Panel 1 Press the Program soft key 2 P...

Страница 135: ...ey 2 Press Next until you see Reflected Power Settings on the display 3 Press Change 4 Set a Prefl Threshold between 20 W and 200 W using the RF POWER rotary knob 5 Press Ok 6 If you want the generator to shut off when it reaches this limit for a specified period of time press On Otherwise press Off a If you select On 4 Set the desired max refl value between 12 W and 180 W using the RF POWER rotar...

Страница 136: ...To exit press Escape CHANGING THE PULSE INPUT CONFIGURATION SETTINGS Before changing the pulse input configuration settings you must first turn on the pulsing function For more information see To Select Internal or External Pulsing Using the HPG Generator Front Panel on page 5 25 The configuration settings allow you to program the polarity of the HPG generator s pulse input function To Set the Pul...

Страница 137: ...st allows you to adjust the contrast brightness of the LCD graphic display Analog I O range The analog interface level is factory set to the most common level range of 0 V to 10 V However you may reprogram this value by changing the maximum voltage of possible analog interface levels from 2 V to 10 V These levels apply to all analog inputs and outputs on the user port DC Bias Scaling You may set t...

Страница 138: ...dial knob 5 Press Ok to confirm 6 Press the desired Analog I O Max level using the RF POWER rotary dial knob 4You may select values between 2 V and 10 V 7 Press Ok to confirm 8 Select the desired DC Bias Scaling using the RF POWER rotary dial knob 4You may select values between 0 V and 4000 V using a combination of the Increm Auto key and the RF POWER rotary dial 9 Press Ok to confirm 10 Press the...

Страница 139: ...e settings for this particular preset will flash on the front panel To Erase a Preset Using the HPG Generator Front Panel 1 Go to the preset number you wish to erase When you select a number the settings for each particular preset will flash on the front panel 2 Press Quit To Use a Preset 1 Go the preset you wish to select When you select a number the settings for each particular preset will flash...

Страница 140: ...rsion If you wish to use the Host port for primary generator control yet retain Variomatch control on the front panel you must set the generator to Remote Control Override see Using the Remote Control Override on page 5 40 First ensure that unit is set to manual tune control AUTO MAN CT CT CL CL ...

Страница 141: ...IONS Using the Pulsing Function The HPG generator s pulse function allows you to switch on the RF power at a given set point and switch it off with the pulse frequency You may select between Internal pulsing Internal pulsing modifies the pulse repetition frequency PRF The waveform is always a rectangle the power is given by the set point The internal pulse generator is configurable for pulse frequ...

Страница 142: ...Send two data bytes least significant byte first for command 96 representing the duty cycle as a percentage seeTable 4 13 on page 4 41 To Select Internal or External Pulsing Using the HPG Generator Front Panel see instructions on page 5 25 Creating Recipes This feature enables you to create a power profile that may provide up to four time frames You can choose to program one of the two recipe sett...

Страница 143: ...et the number of recipes Send one data byte for command 19 representing the desired number of recipe steps 2 Specify the ramp time for each given recipe using command 21 a Send one byte to select the step number 1 to 2 b Send two bytes to set the ramp time value 3 Specify the set point for each given recipe step using command 22 a Send one byte to select the recipe step number 1 to 2 b Send two by...

Страница 144: ... Attached to the Generator on page 5 35 for detailed information on these front panel control keys and how to use them Note Normally when using remote control all front panel controls are disabled To Select Remote Control Override Through the Host Port If you are using RS 232 PROFIBUS or Ethernet to control and monitor the HPG generator 1 Send command 29 see Table 4 13 on page 4 41 To Select Remot...

Страница 145: ...power will fold back when the reflected power reaches a certain limit for a specified period of time The Reflected Power Settings menu allows you to create a reaction profile to shut off RF power when the reflected power reaches this limit To Set a Reflected Power Reaction Profile Through the Host Port If you are using RS 232 PROFIBUS or Ethernet to control and monitor the HPG generator set the re...

Страница 146: ... to the network through the Ethernet port see Connecting and Setting Ethernet Modbus TCP Communication on page 5 6 for more information The HPG generator is receiving proper input power for specifications see Chapter 3 Electrical Specifications You are typing in the correct IP address see Setting the IP Configuration for Ethernet Communication on page 5 6 for information on the default IP address ...

Страница 147: ...er to the unit is off 2 Check for visible damage to the unit cables and connectors 3 Ensure that all unit connectors are installed correctly and fastened tightly 4 Check to determine whether any system related circuit breakers have been tripped 5 Verify that the input power to the unit meets specifications 6 Ensure ground connections are adequate and secure Checks With the Power On 1 Check the uni...

Страница 148: ... WXX messages 4If there is no warning or error message on the display go to the next step 4If there is an error or warning message on the display see Checking for and Resolving Errors and Warnings on page 6 6 4 Does the HPG generator communicate with the host computer 4If yes go to the next step 4If no see Communication Problems on page 6 4 5 For any other general problems contact Customer Support...

Страница 149: ...shooting section of the matching network manual 4If unsure or no see the installation section of the matching network manual 6 If these steps have not resolved the problem contact Customer Support see Customer Support on page 6 21 Interlock Not Satisfied You must satisfy the interlock connection even if you do not connect the HPG generator into a larger system interlock loop To create hardware int...

Страница 150: ... RS 232 Transmission Parameters on page 4 22 Incorrect or corrupt data packet Verify that the data packet has been set up correctly see AE Bus Protocol on page 4 23 Commands transferring too fast Ensure the commands are sent to the HPG generator at a rate less than 1 command every 50 milliseconds 20 commands per second if you are not using the recommended handshaking protocol described in Creating...

Страница 151: ...h an installations that requires low impedances and higher currents try metal strap or stripline connections Consider the surface area and surface structure of conducting elements cables vacuum feedthroughs and electrodes to ensure that all elements are appropriate for the low penetration depth of RF currents Minimize the cable length between the match and load to minimize power losses With some a...

Страница 152: ...ions always turn output off If multiple error conditions exist the unit displays all errors When operating in front panel control mode you need to reset the unit after the condition that caused the error has been resolved Once the condition is resolved the front panel displays a Quit soft key which you press to reset the unit The Quit soft key will not display until the error condition is resolved...

Страница 153: ...Solution Close interlock loop by making the proper connections to satisfy the interlock See pins 10 and 23 in Table 4 2 on page 4 6 E02 Water Flow Too Low Cooling water flow below limit HV and filament are switched off HPG will reinitialize after error condition is resolved Cause Water flow detector reports insufficient water flow Solution Increase cooling water flow E04 Mains Failure Softstart re...

Страница 154: ... see Cooling specifications on page 3 10 2 Check the water lines to ensure that they are unobstructed E11 RF Generator Temperature Too High Driver power section chill plate temperature too high Cause Cooling water temperature too high water flow too low Solution Let generator cool down improve cooling Ensure proper airflow 1 Check to see that the air flow is unobstructed and below the specified in...

Страница 155: ...plate humidity is too high only where humidity sensor is available HV is switched off HPG will reinitialize after error condition has gone Cause Humidity sensor on chill plate reports too high humidity Solution 1 Switch off generator and disconnect the mains The ON OFF power switch does not completely disconnect the Mains You must have an external switch installed to completely disconnect the Main...

Страница 156: ...disconnect the Mains You must have an external switch installed to completely disconnect the Mains 2 Turn off the water source 3 Check the water connections for leaks 4 Check water temperature low water temperature causes condensation 5 Dry any condensation in the generator before reconnecting mains E22 Cooling Water Conductance Too High Grid current is negative Cause The cooling water is too cond...

Страница 157: ... disconnect the Mains You must have an external switch installed to completely disconnect the Mains E31 Plate Voltage Too High Plate voltage was above upper limit HV is switched off Cause Mains voltage too high for selected transformer tap Solution Switch HPG generator off and check mains transformer tap settings to make sure that they match the input voltage Note Changing the taps is a technical ...

Страница 158: ... installed to completely disconnect the Mains E33 Electronics Supply Voltage Too High 24V supply voltage is above limit HV is switched off HPG will reinitialize after error condition has gone Cause Mains voltage too high for selected supply tap Solution Switch HPG generator off and check mains transformer tap settings to make sure that they match the input voltage Note Changing the taps is a techn...

Страница 159: ... Plate current exceeded limit Causes The plate current exceeded the maximum current of the tube Cooling water is too conductive Solutions Reduce VSWR Reduce output power Make sure that cooling water is within specifications see Cooling Specifications on page 3 10 Increase the plate voltage by changing the mains transformer tap settings Note Changing the taps is a technical procedure that can only ...

Страница 160: ...upport on page 6 21 E82 Driver Failure Driver power fold back reported Cause Driver power foldback reported Solution Turn off mains power then check RF connection between driver and cavity Note Making this check is a technical procedure that can only be done by properly trained personnel For more information see the HPG generator service manual The ON OFF power switch does not completely disconnec...

Страница 161: ...cate with DDS Solution Switch generator off and on again ensure installation and operating environment comply with EMC requirements see Product Compliance on page 1 4 and Installing the HPG Generator on page 5 3 If this error persists contact Customer Support see Customer Support on page 6 21 E97 Invalid EEPROM Contents Controller fault Parameter data is corrupt Cause Checksum error or invalid dat...

Страница 162: ...erator describes each warning message and explains how to resolve the associated problem Table 6 2 Warning description and resolution Warning Message Description and Resolution W10 DC power at limit The driver power has exceeded the limit The unit has reduced output to remain within the limits Output is not at set point Cause VSWR is too high Solution Reduce VSWR W11 Pforw maximum reached This war...

Страница 163: ...C Bias on page 5 14 Change plasma conditions W21 Plate current at limit The plate current has reached the maximum The unit has reduced forward power to remain within the limits Output is not at set point Causes VSWR is too high Cooling water is too conductive Solutions Reduce VSWR Make sure that cooling water is within specifications see Cooling Specifications on page 3 10 W22 Tube power at limit ...

Страница 164: ...the unit to reduce output See also W21 Causes VSWR is too high Cooling water is too conductive Solutions Reduce VSWR Make sure that cooling water is within specifications see Cooling Specifications on page 3 10 W32 Tube power near limit Tube power dissipation is near the maximum The generator is still working at set point but slight changes in operating conditions could cause the unit to reduce ou...

Страница 165: ...imit In frequency shift tuning FST the output frequency has reached its upper or lower limit Therefore the phase controller is not working at set point Cause VSWR is too high Solution Reduce VSWR W50 Target lifetime has expired The target lifetime counter has reached the user set target life limit This warning does not affect the operation of the unit Solution Change target or reset target lifetim...

Страница 166: ...ifetime counter Note Replacing the tube is a technical procedure that can only be done by properly trained personnel For more information see the HPG generator service manual W82 High temp HV power supply The HV transformer temperature is near its limit The generator is still working at its set point But if the temperature increases the generator will turn off to prevent damage See also E12 in Tab...

Страница 167: ...H Raiffeisenstrasse 32 D 70794 Filderstadt Bonlanden Note For returns and repairs call Customer Support prior to shipping Phone 49 2402 9881 0 Fax 49 2402 988 11 Email technical support dressler com Phone 49 711 779270 Fax 49 711 7778700 Email support_de aei com Note Response to emails by end of next business day USA Dressler USA Inc 6389 San Ignacio Avenue San Jose CA 95119 AE World Headquarters ...

Страница 168: ...9 320022 Fax 44 1869 325004 Email aeuk_sales info aei com Japan Astech Corporation No 39 7 Takadanobaba 4 Chome Shinjuku Ku 169 0075 Tokyo Phone 81 3 3367 8921 Fax 81 3 3367 8996 Email semicon astechcorp co jp South Korea Advanced Energy Korea 701 Sicox Tower 513 4 Sangdaewon dong Chungwon gu Sungnam si Kyunggi do Korea 462 120 Phone 82 31 777 9191 Fax 82 31 777 9195 Email AEK_sales info aei com T...

Страница 169: ...hnik GmbH products are warranted to be free from failures due to defects in material and workmanship for 12 months 24 months in Europe after they are shipped from the factory please see warranty statement below for details In order to claim shipping or handling damage you must inspect the delivered goods and report such damage to Dressler HF Technik GmbH within 30 days of your receipt of the goods...

Страница 170: ...goods are merchantable or fit for any particular purpose except as specifically stated in printed specifications The sole responsibility of the Seller shall be that it will manufacture the goods in accordance with its published specifications and that the goods will be free from defects in material and workmanship The seller s liability for breach of an expressed warranty shall exist only if the g...

Страница 171: ...65 reporting capacitor positions 4 62 reporting control method 4 57 reporting DC bias 4 61 reporting external feedback 4 61 reporting forward power 4 61 reporting forward power limit 4 62 reporting frequency tuning parameters 4 63 reporting generator type 4 54 reporting generator s output capacity 4 54 reporting process status 4 59 reporting pulsing mode 4 62 reporting pulsing parameters 4 64 repo...

Страница 172: ...current input line specifications 3 9 customer service see customer support customer support 6 21 before contacting 6 1 D data data bytes 4 25 data consistency PROFIBUS 4 31 delivered power specifications 3 9 description general 2 1 diagnostic interface 4 1 digital port see Host port dimensions 3 2 3 7 directives 73 23 EEC 1 5 89 336 EEC 1 5 display see panel display download packet PROFIBUS 4 32 ...

Страница 173: ...ns command 4 24 communications data data bytes 4 25 communications header 4 24 communications optional length byte 4 25 communications transaction 4 26 communications transaction example 4 28 communications transaction illustration 4 26 4 28 connector 4 22 illustration 4 22 pin descriptions 4 22 humidity limit 1 9 I icons in user manual 1 2 on unit 1 4 illustrations 4 15 Host port RS 232 4 22 Host...

Страница 174: ...ling through User port 25 pin 4 4 maximum specifications 3 9 minimum specifications 3 9 specifications 3 9 output connector pin descriptions 5 4 specifications 3 7 output frequency specifications 3 9 output power connecting 5 4 overcurrent specifications 3 9 overcurrent limit 1 8 overtemperature limit 1 8 overvoltage category specifications 3 12 P packet format Modbus TCP 4 36 panel display specif...

Страница 175: ...ing RS 232 host control 4 40 selecting the User Port 25 pin 4 5 selecting see setting serial port see Host port setting PROFIBUS address 4 30 PROFIBUS baud rate 4 30 Siemens Energy Automation 4 29 spacing requirements 5 1 specifications cable 3 7 CEX 3 8 clearance 3 7 climatic 3 12 connectors 3 7 cooling 3 10 cooling medium 3 10 delivered power 3 9 dimensions 3 7 efficiency line to load 3 9 electr...

Страница 176: ... 13 enabling RF power 4 8 monitoring forward power 4 7 monitoring load power 4 7 monitoring overtemperature 4 12 monitoring reflected power 4 6 monitoring set point status 4 12 pin descriptions 4 6 satisfying circuits for operation 4 4 setting a set point 4 9 wiring diagrams 4 15 User port 25 pin wiring diagrams 4 15 V views see illustrations Virtual Front Panel troubleshooting with 6 6 voltage in...

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