User's Manual
351
Appendix 5 Particulate and Gaseous
Contamination Specifications
Appendix 5.1 Particulate Contamination Specifications
The following table defines the limitations of the particulate contamination in the operating
environment of the device. If the level of particulate contamination exceeds the specified limitations
and result in device damage or failure, you need to rectify the environmental conditions.
Appendix Table 5-1 Particulate contamination specifications
Particulate
contamination
Specifications
Air filtration
Class 8 as defined by ISO 14644-1.
Conductive dust
Air must be free of conductive dust, zinc whiskers, or other
conductive particles.
Corrosive dust
Air must be free of corrosive dust. Residual dust present in the air
must have a deliquescent point less than 60% relative humidity.
Appendix Table 5-2 ISO 14644-1 cleanroom classification
Class
Maximum particles/m
3
—
≥ 0.1 μm
≥ 0.2 μm
≥ 0.3 μm
≥ 0.5 μm
≥ 1 μm
≥ 5 μm
Class 1
10
2
—
—
—
—
Class 2
100
24
10
4
—
—
Class 3
1000
237
102
35
8
–7
Class 4
10000
2370
1020
352
83
—
Class 5
100000
23700
10200
3520
832
29
Class 6
1000000
237000
102000
35200
8320
293
Class 7
—
—
—
352000
83200
2930
Class 8
—
—
—
3520000
832000
29300
Class 9
—
—
—
—
8320000
293000
Appendix 5.2 Gaseous Contamination Specifications
Usually indoor and outdoor atmospheric environments contain a small amount of common
corrosive gas pollutants. When these mixed or single corrosive gas pollutants react with other
environmental factors such as temperature or relative humidity in the long term, the device might
suffer from a risk of corrosion and failure. The following table defines the limitations of the gaseous
contamination in the operating environment of the device.
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