QUICK START GUIDE
AVLS3 Auto Vibration and Leveling Sensor
Caution:
CyberOptics Corporation has made every effort to clean the AVLS3 Sensor and Charging
Case. Removing it from its protective bag outside of a clean room will expose it to the surrounding
air. If you plan to use the AVLS3 in an ultra clean environment, you may have to clean the wafer after
removing it from its clean case.
Suitcase Contents
Sensor Unit
The AVLS3 WaferSense® unit (300mm), are vacuum compatible and designed for use in operating
pressures of <10-⁶ to 760 torr.
Charging Case
The Charging Case provides a convenient place to store and protect the unit when not in use, and
provides wireless charging and hands free operation.
AVLS3 Link & USB cable
The link is a Bluetooth® wireless transmitter/receiver that attaches to a laptop or personal computer with
a USB cable and communicates with the wafer.
Battery Charger
The battery charger is used for recharging the AVLS3 Li-Ion battery.
Installation CD
(not shown)
CD contains the CyberSpectrum™ Application, Users Manual and wireless link device driver. For full detail
on AVLS3 operation, please refer to the AVLS3 Users Manual which installs during installation.
AVLS3 unit
Charging Case
AVLS3 Link and USB Cable
Battery Charger (and install CD)
