Scanning Electron Microscope
EM-30PLUS Operating Manual
16
2.2.2 Vacuum State Buttons
It is used when making inside the chamber vacuum state during specimen observation or
when converting it to air pressure state in taking the specimen out. You can select the
vacuum degree according to observation purpose or specimens. The buttons below show
the state of current equipment.
buttons
names
explanations
Vacuum ON
/
Vacuum OFF
button
It is a button for converting the inside of the chamber
into vacuum state or air pressure state.
Vacuum ON: It indicates it is vacuum state at
present.
(When pressing Vacuum ON button, it is converted
into Vacuum OFF button, which is air pressure
state.)
Vacuum OFF: It indicates it is air pressure state
at present.
(When pressing Vacuum OFF button, it is
converted into Vacuum ON button, which is
vacuum state.)
Setup
-
Vacuum
Toggle
button
It is a button for controlling the vacuum degree of
chamber inside.
HIGH VACUUM: It indicates current state is
ready for high vacuum. Keep the vacuum state
of chamber inside at the level of below 10
-4
torr.
LOW VACUUM: It indicates current state is
ready for low vacuum..
Keep the inside vacuum state at the level of
10
-1~
10
-2
torr.
(optional)
Low Vacuum mode is used when observing uncoated specimens including wood,
semiconductor, and biopsy specimens or nonconductive specimens.
For reference, observing in BSE mode when it is Low Vacuum makes it possible to
observe the specimen efficiently due to the decreased charge-up effect
* You can see the Vacuum Toggle button after clicking the Setup screen, and a
conversion of vacuum degree is available only in the Vent state. (Selection and
conversion are impossible in the Pump state)
