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Содержание CPS-500AS

Страница 1: ...anual is proprietary to Comdel Inc and is protected by copyright and trademark laws You may not modify copy reproduce republish post transmit or distribute in any way any material from this manual except as may be expressly permitted in writing by Comdel Inc Comdel Inc 11 Kondelin Road Gloucester MA 01930 Phone 800 468 3144 www comdel com ...

Страница 2: ...rd and Reflected Power Monitoring VII Theory of Operation 6 A DC Power Supply B Oscillator Control Board C Driver D Power Amplifier E Low Pass Filter F Directional Coupler VIII Adjustments and Calibration 8 A Over Voltage Over Current Adjustment B VSWR Adjustment C Thermal Set D Forward RF Power Calibration E Reflected RF Power Calibration F Enable G Interlocks IX Figures FP0113RX CPS 500AS 13 56 ...

Страница 3: ...ce of high voltages in or around the unit This symbol indicates that the component or circuit is short circuit protected This symbol indicates the presence of RF energy in or around the unit This symbol indicates a protective earth ground connecting point This label indicates a presence of high voltage in or around the equipment which may cause sever injury or death All appropriate precautions sho...

Страница 4: ...afety Administration over and above those supplied by the generator manufacturer Read And Understand This Section Fully Before Installing or Operating This Equipment WARNING This equipment must be installed operated and serviced only by trained qualified persons General Safety Requirements WARNING Hazardous Voltages and RF voltages are present inside this unit which may cause injury or death To pr...

Страница 5: ...to qualify for the application of the CE marking This equipment must be installed in accordance with the applicable requirements or prEN50178 and EN60204 1 IEC 204 1 This equipment is qualified to operate at Pollution Degree II and Insulation Category II The installation of this equipment must assure that the AC power input connector UL CSA is not accessible to the user operator Access may be gain...

Страница 6: ...fier low pass filter and directional coupler The CPS 500AS RF Generator is designed for long life and low maintenance operation III Unpacking and Inspection 1 Carefully unpack the unit and inspect for any obvious signs of physical damage that might have occurred during shipment Notify the shipping agent of any damage immediately 2 Check the outside of the unit for missing or loose mounting screws ...

Страница 7: ...nel 3 Power Control Local power control is accomplished by means of a ten turn potentiometer Full counter clockwise is 0 watts output 4 Power On Indicator This indicator lights when circuit breaker is in the ON position 5 Over temp Indicator This indicator turns on when an over temperature situation occurs VI Operating Instructions Before the AC power is connected make sure the local power control...

Страница 8: ...ulse supply is connected with Pin 5 J1 as pulse input and Pin 6 J1 as the return E Forward and Reflected Power Monitoring Forward and Reflected Power Monitoring access is gained through Pins 3 and 2 J1 Pin 3 is forward and Pin 2 is reflected These provide a DC voltage proportional to power VII Theory of Operation The CPS 500AS is a source of radio frequency energy for use in RF plasma applications...

Страница 9: ...ected C Driver The driver is a Class C two stage amplifier with feedback The first transistor operates with approximately 1 watt input from the oscillator and amplifies this to 10 watts The circuitry between the first and second transistor contains more impedance matching and a loss section for stability and isolation The output of this stage is 25 watts There are no adjustments or tuning required...

Страница 10: ...formed at the factory and generally will never have to be reset A Over Voltage Over Current Adjustment The OV OC potentiometer adjustments are located on the integrated meter assembly FA0637RX These adjustments should be altered only when the generator is operating into a 50 Ω real load The procedure for adjustment is as follows 1 See instructions Operating into 50Ω 2 Set generator at maximum outp...

Страница 11: ... on the Oscillator Control Board on right side of unit until the forward readback voltage out of the rear panel connector Pin 3 reads 10V with respect to ground 4 Adjust pot located behind front panel FORWARD meter so that meter reads 500W 5 Adjust ACTUAL CALIBRATION POT R44 on the Oscillator Control Board until external power meter reads 500W E Reflected RF Power Calibration 1 Disconnect RF cable...

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