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II.  Description / Specification 

  

The CPS-1001/S/13.56MHZ is a RF Generator operating with a center frequency of 13.56 MHz.  The 
power source produces maximum transfer of power into a 50 ohm resistive load, yet it is designed to 
withstand large deviations in load impedance without failure. 
 
The primary features of the CPS-1001 series are its solid-state design, small physical size and 
reliability. 
 
The CPS-1001 series amplifier is constructed with two main sections.  The DC power section includes 
all of the filter capacitors, rectifiers and regulators, as well as the three-phase 208 VAC power 
transformer.  Transformers to accommodate other line voltages are available through special order.  The 
rectifiers and bleeder resistors are mounted on a water-cooled copper heatsink.  These components are 
operated at about half of their rated outputs to insure the high reliability of this section.  The RF section 
consists of the oscillator control board (OCB), driver, PA 1000 power amplifier, combiner and 
directional coupler assembly.  The driver and power amplifier modules are mounted on water-cooled 
heatsinks.  All components are used well below their dissipation ratings for long life and low 
maintenance operation. 
 
The CPS-1001 is enclosed in a standard 19” rack mounted chassis.  The chassis is 5.25” high and 
16.125” deep (See the Control Drawing for further mechanical detail). 
 

NOTE:

 This product is subject to a “Copy Exact” agreement that requires written notification to the 

contract specialist prior to implementing any PART or PROCESS Changes. 

 

A.  Electrical Specifications 

 

1.  A/C Input Voltage: 180-229 VAC, 49-61Hz, three phase, NO NEUTRAL 
 
2.  Line Current Protection:  10 Amp, 3 pole circuit breaker. 

 

3.  Output Power: (within specified range of line voltage) 

 

3.1  0 to 1.0 KW continuous forward power into a 50 ohm load, 0 degrees nominal phase. 

 

3.2  0 to 1.0 KW continuous forward power into a plasma load of complex impedance 

with appropriate matching network.  

 

3.3  Forward power out to track command setpoint for reflected power less than 200 watts.  

 

4.  Generator frequency: 13.56 MHz 

 

5.  Frequency stability: +/- .005% 

 

6.  Load Mismatch: Continuous operation into any load mismatch.  Automatic forward power 

limiting above 200 watts reflected power.  

 

7.  Harmonic distortion:  All harmonics minimum 30 db below fundamental at full power 

 

8.  Accuracy / Linearity / Regulation/ Stability: 

 

Setpoint Zero Offset: - 2% of full scale max 
Input to Output Linearity: +/- 3% of setpoint from 10-100% 
Input to Output Accuracy: +/ - 3% of setpoint from 10-100% 
A/C Line Regulation: 2% max output change over rated voltage 
Forward Power Regulation: +/- 5% of setpoint max for load variations from 1:1 to 

Содержание CPS-1001/S/13.56MHZ

Страница 1: ...is manual is proprietary to Comdel Inc and is protected by copyright and trademark laws You may not modify copy reproduce republish post transmit or distribute in any way any material from this manual except as may be expressly permitted in writing by Comdel Inc Comdel Inc 11 Kondelin Road Gloucester MA 01930 Phone 800 468 3144 www comdel com ...

Страница 2: ...10 A Local Operation B Remote Operation C Test Equipment List VII Theory of Operation 11 A DC Power Supply B Oscillator Control Board C Driver D PA1000 Power Amplifier E Directional Coupler F CPS Meter Board VIII Adjustments and Calibration 13 A Over Voltage Over Current Adjustment B VSWR Adjustment C Output Power and Forward Monitor Calibration D Reflected Monitor Calibration IX Figures FP0213RX ...

Страница 3: ...ce of high voltages in or around the unit This symbol indicates that the component or circuit is short circuit protected This symbol indicates the presence of RF energy in or around the unit This symbol indicates a protective earth ground connecting point This label indicates a presence of high voltage in or around the equipment which may cause sever injury or death All appropriate precautions sho...

Страница 4: ...on Fully Before Installing or Operating This Equipment WARNING This equipment must be installed operated and serviced only by trained qualified persons General Safety Requirements WARNING Hazardous Voltages and RF voltages are present inside this unit which may cause injury or death To prevent electrical shock and or RF burns never operate this equipment with the covers removed Never operate witho...

Страница 5: ...on is located at the removable top cover bottom cover and RF output connector safety cover End user s system should provide indication to the operator of the interlock fault condition Low voltage power for the interlock circuit is supplied by a step down transformer located inside the unit This transformer is designed to provide safe low voltage operation and provide isolation from the main AC lin...

Страница 6: ...he CPS 1001 is enclosed in a standard 19 rack mounted chassis The chassis is 5 25 high and 16 125 deep See the Control Drawing for further mechanical detail NOTE This product is subject to a Copy Exact agreement that requires written notification to the contract specialist prior to implementing any PART or PROCESS Changes A Electrical Specifications 1 A C Input Voltage 180 229 VAC 49 61Hz three ph...

Страница 7: ...lt Output limiting protection under short and open circuit conditions 6 Overdrive Limit Internally limited at 1100 watts 7 Control signal protection Unit not to be damaged if a short circuit or up to 30 volts AC or DC is placed between any input signal return signal and ground C Generator I O Requirements 1 Signal input impedance 10K ohms min 2 Signal input isolation 1000 VAC MIN to the A C supply...

Страница 8: ...ard and reverse power 5 2 Power on indicators Visible green LED to indicate A C power on 5 3 Fault indication Visible red LED to indicate temp fault 6 Handles Two handles left and right to be mounted on the front panel exterior evenly spaced on center dimensioned 7 Color Front panel to be black with contrasting white alpha numeric designators 8 Warning Labels 8 1 Safety Labels for hazardous voltag...

Страница 9: ...s 1 Production Acceptance Test Each unit will be required to pass production acceptance testing and a Final Test Report will be generated to document results 1 1 Production Acceptance Testing process shall include as a minimum Complete Parametric Functional Tests covering line regulation calibration linearity burn in over temp test open circuit test MAX power test harmonic distortion AC ripple and...

Страница 10: ... not damage copper brass stainless steel and nylon tubing should be chosen V Preparation for Use A Power Requirements The CPS 1001 is designed to operate from a 208 VAC three phase line The system will function within specifications when line voltage fluctuates between 185 and 230 volts However voltages over the recommended 208 VAC reduce the safety margins designed into the system and should be a...

Страница 11: ...e control The remote monitoring and control interface is handled through the rear panel mounted 15 pin female D type connector called J1 A Local Operation 1 Install 50 ohm coaxial load to output terminal of generator Attach interlock sleeve on output cable to capture output cable interlock The generator is normally supplied with Type N coaxial connectors RG 8 u cable is sufficient to carry the out...

Страница 12: ...agram dwg FP0213RI is a compete system drawing down to the module level A DC Power Supply schem dwg FP0213RI The DC supply consists of a three phase transformer a three phase full wave bridge rectifier and low pass filter for the high current DC power supply This supply is used primarily by the driver and power amplifier PA There are two regulated low current power supplies Both are on the integra...

Страница 13: ...in the directional coupler reaches a pre set limit the U5B amplifier pulls down the reference line until the VSWR conditions are within safe limits The oscillator control board also includes linearizing circuitry allowing both forward and reflected analog power level signals to appear at connector J1 as linear representations of the forward and reflected RF output power Two squaring ICs U2 and U4 ...

Страница 14: ...r The signals from the two detectors are produced from inductive current and capacitive voltage taps off the output line The forward power and reflected power signals are fed into the OCB where they are linearized They are then used to drive the front panel meters and for remote output monitoring The reflected power signal is only present when the generator is driving a load that is not purely res...

Страница 15: ...heir maximum counter clockwise limit Maximum power should now be at least 1400W 10 Start turning OC R21 adjustment clockwise until output power drops then back off adjustment of a turn 11 Turn the OV R22 adjustment clockwise until output power drops to 1350W B VSWR Adjustment The VSWR set is located in the oscillator control board OCB and is adjusted by R1 10 K pot Under high VSWR conditions Q6 is...

Страница 16: ... sufficient to carry the output power from generator to load Load and RF wattmeter should have at least a 1500W dissipation rating 2 Pin 11 of rear panel connector J1 must be grounded to enable the main power contactor Pin 12 is ground Pin 4 of rear panel connector J1 must be connected to Pin 9 RF enable 3 With front panel circuit breaker in the OFF position attach primary supply line to appropria...

Страница 17: ...f rear panel connector J1 must be connected to Pin 9 RF enable 3 With the front panel circuit breaker in the OFF position attach primary supply line to appropriate supply mains NOTE Units are shipped wired for 208V 3 phase 50 60 Hz unless specified by customer 4 Place local remote switch in LOCAL position 5 Rotate power control knob fully counter clockwise 6 Check that cooling water is on 7 Turn o...

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