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If the intake line is not equipped with a shut-off device:

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Remove the rubber plate from the intake flange and connect
the intake line to the intake flange

CAUTION

The vacuum pump may not be lifted anymore when it has been
filled with oil.

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Make sure before every transport that the oil has been drained out
of the vacuum pump.

CAUTION

The vacuum pump must remain in a horizontal position when it has
been filled with oil.

Checking the direct cooling

The flow of the cooling water is checked by the flowmeter CWM. The
flowmeter must be connected in such a way that switching-on leads to
a warning at below 2,0 l/min, when the flow drops below 1,5 l/min,
the vacuum pump must be stopped.

Checking the nitrogen supply (dilution gas)

The flow of the nitrogen is checked by the flowmeter DGF. The flow-
meter must be connected in such a way that switching-on leads to an
alarm. The alarm limit can be adjusted depending the type of process.

Checking the nitrogen supply (sealing gas)

The flow of the nitrogen is checked by the flowmeter DGF 2. The flow-
meter must be connected in such a way that switching-on leads to an
alarm. The alarm limit can be adjusted depending the type of process.

Saving the operating parameters

As soon as the vacuum pump is working under normal conditions after
being switched on:

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Measure the working current of the motor and save it as reference
value for all future maintenance and repair work

Recommendations on operation

Application

WARNING

The vacuum pump is designed for use under the conditions speci-
fied here.

If these conditions are not met, there is a risk of damage to or total
destruction of the vacuum pump and its components!

The vacuum pump may only be switched on under the specified
conditions.

The COBRA BC vacuum pumps are designed for use in the field of mi-
croelectronics and similar industries.

They can be used to suck gases and gas mixtures.

WARNING

When using toxic, inflammable and/ or explosive gases, make sure
that the system corresponds in design to applicable local and na-
tional safety regulations and that all applicable safety measures are
followed.
All product-specific safety regulations must be observed.

Solid particles must not get into the vacuum pump. Procedural errors
can result in the pump sucking in a certain quantity of liquid. If the
pump has sucked in liquid, a short drying time is necessary at the end
of the procedure.

The allowed maximum inlet gas temperature depends on the inlet pres-
sure and the type of gas: the lower the inlet pressure (Pa), the higher
the drawn gas temperature (TGas) can be.

The following indicative values for air can be considered:

– Pa > 50 mbar, TGas < 80°C
– Pa < 50 mbar, TGas < 200°C

The vacuum pump is intended for use in a potentially non-explosive
environment.

As far as temperature is concerned, the vacuum pump is suitable for
evacuation of a 300 liters tank. The vacuum pump is not suitable for
continuous duty at a pressure more or equal than 150 (hPa) mbar.
Caution, the operating cycle of 150 (hPa) mbar must not exceed more
than 5 min.
For other applications, contact your Busch representative.
- Maximum inlet pressure: 1 bar (abs).
- With pump running at full speed, do not expose to inlet pressure
> 300 (hPa) mbar.

The vacuum pump is tight down to ultimate pressure.

CAUTION

The surface temperature of the vacuum pump can exceed 50 °C
when the vacuum pump is in operation.

Danger of burns!

The vacuum pump may not be touched when it is in operation. If
touching the pump is unavoidable, wait until the surface tempera-
ture has cooled down or wear protective gloves.

CAUTION

The intensity of the noise of the vacuum pump is higher within a
certain area of the pump.

Risk of hearing damage.

Users must wear ear protection when spending a longer period of
time in the vicinity of a non-insulated vacuum pump.

CAUTION

The COBRA BC 0200 F vacuum pumps are always delivered without
oil and without cooling water.

Operation without oil will result in damage to the vacuum pump!

The vacuum pump must remain in a horizontal position when it has
been filled with oil.

CAUTION

The cooling water flow, which is checked by the flowmeter CWM,
must be at least 2 l/min.

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Make sure that all caps, safeguards and similar covers are mounted

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Make sure that the safeguards are switched on

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Make sure that the inlet and outlet for the cooling air are not
covered or closed and that the flow of cooling air is not impaired in
any way

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Make sure that the system does not leak. Leakages of dangerous
substances must be prevented

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Make sure that the “Necessary installation instructions” are
followed and especially that adequate cooling is ensured

The following must be noted when the pump is shut down for a longer
period of time:

Installation and start-up

BC 0200 F

Page 14

0870767417 (En)

Содержание COBRA BC 0200 F

Страница 1: ...Instructions Screw Vacuum Pumps COBRA BC 0200 F Busch Manufacturing Korea Ltd 189 51 Soicheon ro Majang myun Icheon si Gyunggi do 467 813 Republic of Korea 0870767417 190605 Original instructions Subj...

Страница 2: ...tions on operation 14 Application 14 Switching the vacuum pump on off 15 First start up of the system 15 Switching the system off 15 Maintenance 15 Maintenance program 16 Weekly 16 Monthly 16 Yearly 1...

Страница 3: ...racket OFP Oil filler plug OSG Oil sight glass PS Discharge pressure switch CAO Extracting ventilator CPC PLC connection ES Emergency stop button EMO MB On Off switch Main circuit breaker RC LCD DGF D...

Страница 4: ...BC 0200 F Page 4 0870767417 En MB CPC DPS DGF DGR2 DGR1 PSA TS CWR CWM VFD...

Страница 5: ...not suitable for continuous duty at a pressure more or equal than 150 hPa mbar Caution the operating cycle of 150 hPa mbar must not exceed more than 5 min For other applications contact your Busch rep...

Страница 6: ...valve optional at the exhaust traps the condensate in the pump when the pump is switched off The LCD controller processes the data of the sensors see chapter Communication with the equipment as follo...

Страница 7: ...ntact exceed the limits in Table A5 1 of Appendix 5 SEMI S2 guideline Lock Out Tag Out procedure Type 1 of electrical work l Stop the pump with the remote control or with the stop button press on STOP...

Страница 8: ...ie the contactors open and remove power to motor S Cooling water flow low Water flowmeter B2 Depends on alarm function set in the PLC for water flow Set at factory General Stop ie the contactors open...

Страница 9: ...aws Appliance after warehousing Prior to reoperate a vacuum pump which remained outside the buiding for a certain period of time make sure to let it stand at ambient tempe rature in a room for a whole...

Страница 10: ...l must be disposed of in accordance with local and national regulations This handbook is contained in the delivery package Storage Temporary storage l Make sure that the intake and exhaust flanges are...

Страница 11: ...by the adjustment stroke 15 mm of the four machine foots l Make sure that the four rollers do not touch the ground NOTE In order to ensure the fixation of the pump to the ground it is possible to use...

Страница 12: ...nnection diameter 3 8 NPT Nitrogen connection The nitrogen is connected with a pipe leakproof against oxygen Connection diameter 1 4 NPT Electrical connection Checks l Make sure that the regulations o...

Страница 13: ...e installation handbook is of informative nature only Check the oil level with the help of the oil sight glass OSG on the vacuum pump CAUTION Before you change the type of oil make sure that the new t...

Страница 14: ...tain quantity of liquid If the pump has sucked in liquid a short drying time is necessary at the end of the procedure The allowed maximum inlet gas temperature depends on the inlet pres sure and the t...

Страница 15: ...minated with foreign materials that are dangerous to health the oil and condensates will also be contaminated These foreign materials can infiltrate the pores recesses and other internal spaces of the...

Страница 16: ...essary l Check the seals and replace if necessary l Check the intake and discharge lines and clean or replace if necessary Every 16 000 hours of operation at the latest after 4 years l Drain the oil s...

Страница 17: ...the sealing washer of the magnetic plug is not damaged replace it if necessary l Refit the magnetic plug and tighten up l Make sure that the sealing washer on the drain plug is undamaged and correctly...

Страница 18: ...that the various protective elements stoppers or adhesive tapes have been removed l Switch on the vacuum pump by following the procedure described in the chapter Installation and start up Dismantling...

Страница 19: ...ntaminated or polluted oil can lead to hazardous pump conditions which could cause personal injury Oil quantity The quantity of oil specified in the following table is of informative nature only Check...

Страница 20: ...Nominal motor speed min 1 4570 Noise level EN ISO 2151 dB A 60 Ambient temperature C F 10 40 32 104 Maximal counter pressure Discharge bar 0 2 Cooling water requirement l min min 2 0 Cooling water pr...

Страница 21: ...and electronic equipment and following the standards Standard Title of the standard EN ISO 12100 2010 Safety of machinery Basic concepts general principles of design EN ISO 13857 2008 Safety of machi...

Страница 22: ...Note...

Страница 23: ...Note...

Страница 24: ...myun Icheon si Gyunggi do 467 813 Republic of Korea Phone 82 31 645 2700 Fax 82 31 631 2898 e mail busch busch co kr Malaysia Busch Malaysia Sdn Bhd 4 6 Jalan Taboh 33 22 Seksyen 33 Shah Alam Technolo...

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