1-3
Section 1 - Introduction
Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
August, 2009
Brooks
®
Digital MFC's and MFM's
Sensitivity to Mounting Attitude:
<0.2% FS maximum deviation from specified accuracy, after rezeroing.
RATINGS:
Temperature Sensitivity
Zero: less than 0.05% FS per °C
Span: less than 0.05% FS per °C
Pressure Sensitivity
± 0.03% per psig up to 200 psig (13.79 bar) (N
2
Eq.).
Maximum Operating Pressure
See Table 1-1
Pressure Equipment Directive (PED) 97/23/EC
See Table 1-1.
Pressure Differential Range (Controllers)
Minimum
Model SLAMf50
5 psi (0.35 bar) up to 30 lpm N
2
eq.
Model SLAMf51
10 psi (0.69 bar) from 30 lpm to 100 lpm N
2
eq.
Model SLAMf53
7.5 psi (0.52 bar) at 500 lpm N
2
eq.
14.5 psi (1.00 bar) at 1000 lpm N
2
eq.
35.0 psi (2.41 bar) at 2500 lpm N
2
eq.
(consult factory for details)
High DP valve 30 to 290 psi (20 bar maximum)
Low DP valve 7.5 to 30 psid (2 bar max.)
Minimum pressure drop depends on gas and FS flow rate (consult factory)
Leak Integrity
Inboard to Outboard: 1x10
-9
atm scc/sec Helium max.
Ambient Temperature Limits
Operating: 0°C to 65°C (32°F to 149°F)
Non-Operating: -25°C to 100°C (-13°F to 212°F)
Fluid Temperature Limits
0°C to 65°C (32°F to 149°F)
Table 1-1 Flow Ranges and Pressure Settings
Mass Flow
Controller
Mass Flow
Meter
Pressure Ratings
P.E.D. Module H Category
Model:
Model:
Min. FS
Max. FS
Unit
(2)
Bar/psi
SLAMF50 (1) SLAMF60
(1)
0.003
30
lpm
100bar/1500psi
SEP
SLAMF51
SLAMF61
20
100
lpm
100bar/1500psi(3)
SEP
SLAMF53
SLAMF63
100
2500
lpm
70bar/1000psi
1 for all 150lbs flanges
2 for all other connections
Flow Ranges N2 Equivalent
(1) 300 bar (4500 psi) version optional
(2) Refering to normal or standard conditions (on customer request)
(3) 70 bar / 1000 psi for UL Certification
