4
Copyright 2013, Brooks Automation Inc
Part Number 8040648, Revision A, 01/11/2013
ECO Number 63723
Brooks Automation
www.brooks.com
Printed in U.S.A
1
800-367-4887
USA
978-262-2400
International
Host RS-232 Connector
provides information for connecting the Host computer to the On-Board
IS
Controller.
Table 1: Host RS-232 Connector Specifications
Parameter
Value
Baud Rate
9.6 kbs
Data Bits
7
Parity
Even
Number of Stop Bits
0
NOTE:
The Host computer RS-232 cable must be fully shielded through to the outer shell. Use CTI-Cryogenics cable
8132157 or equivalent.
Startup
See the 8040647,
On-Board
IS
Cryopump Operation Instructions
, for details.
Status LEDs
Status LED III blinks when the On-Board
IS
Controller is operating, and indicates normal Intercomponent Network
communication.Status LED I and LED II remain off during normal operation.
Helium Mapping
A helium map is a collection of cryopumps and compressors that the On-Board
IS
Controller manages, so that the
system operates efficiently. The map controls when each cryopump uses a shared helium manifold and compressor for
each process tool. See the
On-Board IS Cryopump System Operation Guide
, CTI-Cryogenics part number 8040647,
for more information about helium maps.
To check the device (cryopumps and compressors) addresses in a helium map:
1. Make a physical inventory of the system, noting the address of each device.
2. Use the Remote keypad (part number 8187007K00, see
) to go to the
On-Board
IS
Controller
screen.
3. Choose
Monitor
and press
Enter
, choose
Show Devices
and then press
Enter
.
4. Ensure that all device addresses appear correctly.
If all device addresses match the physical inventory, continue to add or change a helium map. If the device addresses do not
match, check the cable connections and repeat from
through this step.
To change or add to a helium map:
1. Use the Remote keypad to go to the
On-Board IS Controller
screen.
2. Choose
System Setup
and press
Enter
, choose
Helium
and then press
Enter
, finally choose
Helium Map X
(where
X
is the number of the helium map you want to see) then press
Enter
. The
Choose Map Pumps
screen appears.
3. Choose the addresses of cryopumps that match your inventory addresses, go to
Accept Change
, and then
press
Enter
.
The
Choose Compressors
screen appears.
4. Choose the addresses of compressors that match your inventory addresses, go to
Accept Change
, and then
press
Enter
.
The
Verify Helium Map X
screen appears.
5. Go to
Accept Change
and press
Enter
to set the helium map.
If you want to make changes to the helium map, press the back button as necessary and make the changes.
Product Information and Technical Support
Please visit the Brooks Automation website at www.brooks.com or email to
On-Board
®
IS
Controller (Pump Mount)
Quick Installation Guide
Part Number 8040648, Revision A, 01/11/2013
ECO Number 63723
On-Board
IS
Controller Specifications
Input Voltage and Power: 24 VDC +/- 10% (21.6 - 26.4) VDC - 18 watts
Ambient Temperature: 50º F - 100º F (10º C - 38º C)
Communication Interface: Host RS-232, Aux RS-232, Service RS-232 - 9 Pin D Connector
Communication Interface Baud Rate: 9600
On-Board
IS
Intercomponent Network Interface: RS-232, RS-485
On-Board
IS
Remote Interface: USB B Connector with RS-232 Protocol