Brooks On-Board 8, Инструкция по установке и обслуживанию

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Cryo-Torr 8600 Compressor Operation, Installation and Maintenance Guide
©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 1-1
Section 1 - On-Board GLE Cryopump
Description
Introduction
On-Board GLE Cryopumps provide fast, clean pumping of all gases in the
10
-3
to 10
-9
torr range. They are available in two configurations; On-Board
8F (Flat) and On-Board 8 (Straight) as shown in Figure 1-1 .
On-Board Cryopumps operate on the principle that gases can be condensed
and held at extremely low vapor pressures, achieving high speeds and
throughputs as described in
Table 1-1 .
On-Board Cryopumps are highly-reliable and rugged units that require
little maintenance. Since the On-Board Cryopump exposes no moving
parts, operating fluids, or backing pumps to the vacuum, the possibility of
system or process contamination from the On-Board Cryopump is
eliminated.
Installation, Operation, and Maintenance Instructions
On-Board 8 GLE Cryopump Installation, Operation, and Maintenance
Instructions provide easily accessible information. All personnel with
installation, operation, and maintenance responsibilities should become
familiar with the contents of these instructions to ensure safe, reliable, and
high performance.
Microprocessor-Based Control System
The On-Board 8 GLE Cryopump is equipped with a microprocessor-based
control system that allows you to both monitor and control a wide range of
important vacuum system functions. Operations are performed from either
a remote keypad control/display panel that can be connected to the
cryopump or from the production tool host computer. You can monitor and
control cooldown, warm-up, regeneration, etc.
Refer to the On-Board GLE Cryopump Module Programming and
Operation Instructions P/N 8040574 that came with your On-Board 8