Alignment and Calibration
MagnaTran 7.1 User’s Manual
Setting the Transfer and Process Modules’ T and R Coordinates
MN-003-1600-00
Brooks Automation
7-16
Revision 2.2
Setting the Transfer and Process Modules’ T and R Coordinates
This procedure is used to teach the robot the exact rotational axis (T) and radial axis
(R) coordinates of each transfer and process module. It includes rotating and extend-
ing the robot arm until its end effector is positioned over the center of the module’s
wafer platform, and then storing this position in the robot controller’s memory.
NOTE:
This procedure must be performed during initial setup, and at any time that the
robot’s arms or end effector(s) are removed and replaced.
CAUTION
Transfer and process modules may have specific wafer placement
requirements. Refer to the appropriate User’s Manuals while per-
forming this procedure.
Required Tools and Test Equipment
•
The robot’s Control/Display Module (CDM)
•
Expendable wafer
WARNING
Breaking wafers may produce flying shards of glass. When using
wafers in a set up or test procedure, protective eye wear should be
worn at all times to guard against possible eye injuries.
Adjustment/Calibration Strategy
This procedure sets the R and T position for arm ‘A’ based upon the required position
for a wafer on the end effector in each module.
Adjustment Procedure
1.
Place a wafer on the end effector in the position required.
2.
Using the CDM, move the robot to the initial module T axis position using the
MOVE command.
