Introduction
MagnaTran 7.1 User’s Manual
MagnaTran 7 Robot Overview
MN-003-1600-00
Brooks Automation
1-2
Revision 2.2
MagnaTran 7 Robot Overview
The Brooks Automation MagnaTran™ 7 wafer transfer robot is designed for produc-
tion environments requiring minimum vibration, minimum particle contamination,
and high throughput with high reliability performance in an ultra high vacuum envi-
ronment.
The MagnaTran 7 is a compact, cylindrical, ergonomically designed robot utilizing a
concentrically mounted drive assembly with integral, DSP based control electronics.
Continuous rotation capability, no dynamic seals, drive belts or moving cables in
effective operation.
The MagnaTran 7 wafer transfer robot is designed for applications where a maximum
reach of 1050 mm from the center line of the robot to the center line of the wafer is
required. Wafer sizes from 100mm to 300mm may be handled.
This robot is supplied with either the Brooks Automation Single Pan Arm Set, the pat-
ented BiSymmetrik™ Dual Pan Arm Set, or the patented Leapfrog™ same-side Dual
Arm Set. The Single Pan Arm Set has Brooks Automation patented Frogleg arm
assembly with a single end effector providing high reliability and throughput. The
BiSymmetrik arm set has two arms addressing opposite directions and offering very
high throughput. The Leap Frog has the unique, dual end effector arm configuration,
one above the other, addressing the same direction and supplying maximum
throughput.
The MagnaTran 7 Frogleg robot and the BiSymmetrik robot may be 2 axis (Radial and
Rotational) or 3 axis (Radial, Rotational and Vertical).
Table 1-1: Standard MagnaTran 7 Models
Module
Standard Arm
Axis Options
MagnaTran™ 7F
Frogleg™ Arm Assembly
2 Axis
or
3 Axis
MagnaTran™ 7B
BiSymmetrik™ Arm Set
2 Axis
or
3 Axis
MagnaTran™ 7X
Leapfrog™ Arm Set
3 Axis