Operation
MagnaTran 7.1 User’s Manual
MagnaTran 7.1 Wafer Handling Robot Overview
MN-003-1600-00
Brooks Automation
6-4
Revision 2.2
BiSymmetrik™ Dual Pan Arm Set
On all three axis of motion [radial (R), rotational (T for Theta), and the optional
vertical (Z)], the left and right sides of the arm set for both arm ‘A’ and arm ‘B’
are driven simultaneously moving both end effectors as required. For vertical
(Z) and Rotational (T) motion, the arms move at the same time and with the
same velocities and accelerations.
For radial motion, the arms are driven simultaneously by the shoulder shafts,
one always extending while the other retracts. Due to the kinematics of the
arm, the linear motion profile of the ‘A’ and ‘B’ arms will differ as the arms
move from Arm A fully extended to Arm B fully extended with the inactive
arm remaining in the retract position while the active arm extends or retracts.
The rotary motion of the independent drive shafts is coordinated by the Per-
sonality Board and profiled to provide smooth motion to the arms as the end
effector is accelerated from or brought to rest. The software produces a motion
profile at the T1 and T2 drive shafts that will obey the motion constraints for
arm A and B defined by the user.
While the maximum radial extension is dependent on the geometry of the arm
specified by the user, the MagnaTran 7 is typically supplied with a BiSym-
metrik arm that meets the specification of a 1050 mm reach from the center-line
of the robot to the center-line of the wafer. This version of the arm accommo-
dates a load of up to 1.0kg (2.2lbs) on each end effector. The actual extension
and retraction positions of the arms are software selectable.
