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Copyright 2007, Brooks Automation
Part Number 8040706, Revision 1, 12/13/2007
ECO Number 18207
Brooks Automation
www.brooks.com
Printed in U.S.A
1
800-367-4887
USA
978-262-2400
International
Additional Cryo-Torr Accessories Available from Brooks Automation
Cryo-Torr
®
20HP with Temperature Sensor
Quick Installation Guide
Part Number 8040706, Revision 1, 12/13/2007
ECO Number 18207
Part Number
Description
8080250K023
Purge Gas Solenoid Valve Kit, 110V
8080250K020
Purge Gas Heater Kit, 110V
8080250K022
Roughing Valve Kit, 110V
8080250K008
Exhaust Adapter Kit
8043459G001
Temperature Indicator
8080250K017
Purge Gas Solenoid Valve Kit, 230V
8080250K036
Purge Gas Heater Kit, 230V
8080250K037
Roughing Valve Kit, 230V
Cryo-Torr 20HP Cryopump Facility Requirements
Electrical Power
Nitrogen Purge Gas
Roughing Connector
Conditioned power supplied from
helium compressor
3/8 inch VCO tube connection
(Parker Ultraseal No. 6)
NW-40 ISO KF flange
