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Safety Precautions

The following are general safety precautions that are not necessarily

related to any specific part or procedure and do not necessarily appear

elsewhere in this publication. These precautions must be thoroughly

understood and apply to all phases of operation and maintenance.

Keep Away From Live Circuits

Operating personnel must at all times observe normal safety regulations.

Do not replace components or make adjustments inside the equipment

with high voltage turned on. To avoid casualties, always remove power.

Shock Hazard

Do not attempt to remove the RF transmission line while RF power is

present.

Do Not Service or Adjust Alone

Under no circumstances should any person reach into an enclosure for the

purpose of service or adjustment of equipment except in the presence of

someone who is capable of rendering aid.

Safety Earth Ground

An uninterruptible earth safety ground must be supplied from the main

power source to test instruments. Grounding one conductor of a two

conductor power cable is not sufficient protection. Serious injury or death

can occur if this grounding is not properly supplied.

Chemical Hazard

Dry cleaning solvents for cleaning parts may be potentially dangerous.

Avoid inhalation of fumes or prolonged contact with skin.

Resuscitation

Personnel working with or near high voltages should be familiar with

modern methods of resuscitation.

Содержание THRULINE 4021

Страница 1: ...ENSORS 4020 SERIES 4027A SERIES AND 4027F SERIES Copyright 2003 by Bird Electronic Corporation Instruction Book Part Number 920 4421 Rev G Thruline is a Registered Trademark of Bird Electronic Corpora...

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Страница 3: ...line while RF power is present Do Not Service or Adjust Alone Under no circumstances should any person reach into an enclosure for the purpose of service or adjustment of equipment except in the prese...

Страница 4: ...G Warning notes call attention to a procedure which if not correctly performed could result in personal injury CAUTION Caution notes call attention to a procedure which if not correctly performed coul...

Страница 5: ...the unit CAUTION Ensure that the 115 230 voltage selector on the 4421 s rear panel is set to the proper voltage before ac power is applied CAUTION The Bird 4421 must be powered off when connecting or...

Страница 6: ...CE SERVICING INSTRUCTIONS ARE FOR USE BY SERVICE TRAINED PERSONNEL ONLY TO AVOID DANGEROUS ELECTRIC SHOCK DO NOT PERFORM ANY SERVICING UNLESS QUALIFIED TO DO SO SERVICIO LAS INSTRUCCIONES DE SERVICIO...

Страница 7: ...CIFICATO DAL PRODUTTORE LA PROTEZIONE DI SICUREZZA POTREBBE VENIRNE COMPROMESSA BE SURE THE 115 230V AC VOLTAGE SELECTOR IS SET TO THE PROPER LINE VOLTAGE AND THE CORRECT AC LINE FUSE IS INSTALLED BEF...

Страница 8: ...appear in this chapter If the power meter is equipped with a IEEE 488 GPIB Interface refer to Chapter 4 IEEE 488 GPIB Interface For the RS 232 Interface refer to Chapter 5 RS 232 Interface Maintenance...

Страница 9: ...y and Power Ranges 3 4020 Series 3 4027A Series 3 4027F Series 3 Installation 5 Interface Module 5 Sensor Connection 6 RF Line Connection 6 Handle Operation 6 230V AC Power 7 Setting AC Voltage 7 AC L...

Страница 10: ...iption 27 Cable Connector 27 Indicators 27 Setup 28 DIP Switch 28 Auto Baud 28 Talker Only Mode 29 Command Syntax 29 General Bus Commands 30 Device Dependent Commands 32 Maintenance 39 Troubleshooting...

Страница 11: ...1 to be installed in a standard 19 panel for rack mount applications IEEE 488 GPIB Bus Interface Module P N 4421 488 Allows the 4421 to be remotely controlled over an IEEE 488 general purpose interfac...

Страница 12: ...repeatability allowing consistent amounts of RF energy to be applied to the etch process over many etch cycles 4027A Sensors are accurate to 1 at specified calibration frequencies and power levels Fi...

Страница 13: ...re 2 Power Sensor Outline Drawing Model Frequency Range Power Range 4021 1 8 32 MHz 300 mW 1 kW 4022 25 1000 MHz 300 mW 1 kW 4024 1 5 32 MHz 3 W 10 kW 4025 100 kHz 2 5 MHz 3 W 10 kW 4027A250K 250 400...

Страница 14: ...Bird 4421 RF Power Meter 4...

Страница 15: ...le edges with the side guides in the meter and slide the interface module into the access slot 4 Press on the front edge of the module until it seats fully 5 Screw the module into place with the acces...

Страница 16: ...d 4421 can be set to four different positions see Figure 4 To adjust the handle press the center buttons on both sides Releasing the buttons will lock the handle into position CAUTION Changing the sen...

Страница 17: ...n the drum will be visible through the window 3 Replace the voltage selector drum and close the cover AC Line Connectors To make the ac line cord compatible with European style sockets users must inst...

Страница 18: ...Bird 4421 RF Power Meter 8...

Страница 19: ...o measure standing wave ratio SWR indicator turns on Value displayed will be between 1 0 and 199 9 MIN MAX Used after pressing FWD RFL SWR or dBm Displays the minimum maximum measured value of the pre...

Страница 20: ...capability the power meter will sound a warning buzzer Figure 7 Error Codes Symbol Explanation Value greater than overrange limit of function Value less than underrange limit of function Figure 8 Func...

Страница 21: ...commands that apply to the Bird 4421 Operators should understand IEEE standard 488 1978 and have basic computer programming skills before attempting to write any programs CAUTION During remote operati...

Страница 22: ...ace module uses a standard IEEE 488 cable connector Pin assignments are listed in Figure 9 Figure 9 IEEE 488 Pin Assignments Pin Designation Type 1 D101 Data 2 D102 Data 3 D103 Data 4 D104 Data 5 EOI...

Страница 23: ...odule Capabilities Code Name Description SH1 Source Handshake Can handshake data or command bytes when the unit is acting as a source AH1 Acceptor Can handshake the bus when it is acting as the accept...

Страница 24: ...4 and 2 NOTE The primary address is used by the controller to refer to specific devices on the bus When programming the controller the address in the program must be the same as the address set on th...

Страница 25: ...dent commands can be sent as a single string as long as like command categories are not repeated for example PNFCFDT3TRG This string sets up the 4421 to send no prefixes read forward dBm make one read...

Страница 26: ...al operation Remarks Issuing a GTL command while the device is in Local Lockout mode does not clear the lockout condition The REMOTE indicator turns off The LISTEN indicator remains on Local LOckout L...

Страница 27: ...dition listed in Figure 13 Selective Device Clear SDC Function Resets the status of a selected device to an initialized state Remarks Only the device addressed will be cleared The 4421 returns to the...

Страница 28: ...Figure 14 IEEE Status Byte Description Bit Name Condition 6 SRQ Set if a service request is generated by the 4421 If an SRQ has been received by the controller and this bit is cleared other instrumen...

Страница 29: ...ff stay at present range Terminators YT Two terminators CR LF YO One terminator CR YN No terminator Prefixes PY Prefix YES PN Prefix NO Triggers T0 Continuous on TALK T1 One shot on TALK T2 Continuous...

Страница 30: ...returned in Watts or dBm Standing Wave Ratio SW Return Loss RL Function Selects SWR or return loss match measurement mode Remarks Measurement results are returned in VSWR or dB MiNimum Value MN MaXimu...

Страница 31: ...nator message can be terminated by EOI Remarks Many controllers use the terminator sequence to recognize the end of an input string Using incorrect terminators can lock the bus Figure 16 Measurement R...

Страница 32: ...the measurement type y U indicates underflow the value sent is 000 y O indicates overflow the value sent is 199 9 y N indicates normal the value sent is a normal on scale reading y 4421 indicates the...

Страница 33: ...values of the desired SRQ trigger bits For example M12 would set the SRQ for both operation complete and underrange values 8 and 4 Set xx to 00 to never generate an SRQ Remarks If a status bit is mask...

Страница 34: ...gure 21 When an error occurs an error is also flagged in the status serial poll byte and a SRQ may be generated See SRQ Mask on page 23 All flags will revert to their non error states after the U1 com...

Страница 35: ...ollers to lock unless another terminator is used When enabled EOI is only asserted at the end of a multiple byte string VCO Valid Command Option Set when no IDDCO is received PS Self Test Pass Set whe...

Страница 36: ...Bird 4421 RF Power Meter 26 Writable Store Wxxxxxx Function Storage for six bytes of ASCII data Remarks Data stored is lost when the 4421 is turned off Data is sent back as part of the U2 status word...

Страница 37: ...e the interface module s connector A null modem kit should be used for rewiring instead Indicators The bottom line of the power meter s display shows indicators describing the status of the Bird 4421...

Страница 38: ...7 and 8 to ON 2 Connect a controller to the power meter 3 Turn the power meter on Figure 24 RS 232 Interface Default DIP Switch Settings Switch Function Description 1 Stop Bit ON 1 Stop Bit OFF 2 Sto...

Страница 39: ...e information is sent to the bus Command Syntax The Bird 4421 accepts two types of commands General bus commands are commands such as Initialize INT that apply to any RS 232 interfaced device Device d...

Страница 40: ...transmit a reading to the controller Remarks A measurement must have already been triggered placing a reading in the output buffer To send a reading whenever a measurement is triggered set DIP switch...

Страница 41: ...w control y XO enables flow control y XF disables flow control Remarks When data is being sent from the power meter to the computer and flow control is enabled data transmission will be suspended when...

Страница 42: ...wave RD Reflected dBm SW Standing wave ratio RL Return loss MN Minimum value MX Maximum value Range RYY Auto range on R00 to R17 Manual ranges RNN Auto range off stay at present range Terminators YT T...

Страница 43: ...rned in Watts or dBm Standing Wave Ratio SW Return Loss RL Function Selects SWR or return loss match measurement mode Remarks Measurement results are returned in VSWR or dB MiNimum Value MN MaXimum Va...

Страница 44: ...y N for no terminator Remarks Many controllers use the terminator sequence to recognize the end of an input string Using incorrect terminators can lock the bus Figure 28 Measurement Ranges Command Po...

Страница 45: ...el number Triggers Tx Function Selects the condition which will trigger a reading see Figure 30 Remarks Failure to trigger device before requesting a reading will lock the bus Fastest reading rate is...

Страница 46: ...nd the possible error messages are shown in Figure 32 All flags will revert to their non error states after the U1 command is sent Figure 31 Machine Status Word Format Header Measurement Function Rang...

Страница 47: ...Remarks Data stored is lost when the 4421 is turned off Data is sent back as part of the U2 status word PS Self test Pass Set when a self test has been initiated by the J0 command and the test result...

Страница 48: ...Bird 4421 RF Power Meter 38...

Страница 49: ...cannot list all malfunctions that may occur or corrective actions If a malfunction is not listed or is not corrected by the listed corrective actions contact a qualified service center WARNING Disconn...

Страница 50: ...o not respond Test the push buttons see Push Button Test on page 41 Are they defective Return meter for service Every segment on the display is lit Return meter for service IEEE 488 Interface Module d...

Страница 51: ...ta then the power sensor is malfunctioning Push Button Test This test checks that the push buttons and display are functioning properly If a push button is malfunctioning return the power meter 1 Disc...

Страница 52: ...8 Turn the power meter OFF Repair Fuse To replace the power meter fuse y Open the ac module door on the power meter rear panel See Figure 35 y Remove the fuse drawer and fuse y Install the new fuse an...

Страница 53: ...struments returned must be shipped prepaid and to the attention of Bird Service Center Bird Service Center 30303 Aurora Road Cleveland Solon Ohio 44139 2794 Phone 440 519 2298 Fax 440 519 2326 E mail...

Страница 54: ...t cells 15 W max NEDA Type 10014 Battery Life Minimum 8 hours continuous usage Battery Charger Built in battery charger Drained batteries require approximately 28 hours to recharge Display LCD 3 digit...

Страница 55: ...ected at frequency of measurement within rated range Operating Power Supplied by power meter via sensor cable Connectors Customer specified See Available Connectors on page 50 Emissions Immunity EMC D...

Страница 56: ...Hz 1 GHz 1 5 32 MHz 100 kHz 2 5 MHz Accuracy Fwd 3 Insertion VSWR Insertion Loss 4021 4024 4025 4022 1 05 0 05 dB max 1 05 0 05 dB max 25 512 MHz 1 10 0 13 dB max 512 MHz 1 GHz Directivity Minimum 402...

Страница 57: ...027A150M 250 400 kHz 250 kHz 400 550 kHz 400 kHz 800 950 kHz 900 kHz 1 5 2 5 MHz 2 0 MHz 3 5 MHz 4 0 MHz 10 15 MHz 13 56 MHz 10 15 MHz 13 56 MHz 25 30 MHz 27 12 MHz 35 45 MHz 40 0 MHz 45 65 MHz 60 0 M...

Страница 58: ...ejection Minimum 4027F2M 4027F10M frequency 3 8 MHz 30 dB 3 6 3 8 MHz 26 dB frequency 25 MHz 30 dB Low Frequency Rejection Minimum 4027F10M Only frequency 1 MHz 30 dB AM Rejection 5 kW 10 AM 5 10 kW 1...

Страница 59: ...ng Storage 32 to 122 F 0 to 50 C 4 to 122 F 20 to 50 C Dimensions 6 5 L x 4 5 W 165 1 x 114 3 mm Weight 0 5 lbs 0 227 kg nominal RS 232 Interface Module Logic Levels Meets all EIA Standard RS 232 C sp...

Страница 60: ...Changing the sensor s connectors will invalidate calibration data and may reduce the maximum power rating of the unit Connector P N Connector P N Connector P N BNC Female 4240 125 LT Female 4240 018...

Страница 61: ...f our plant and shall not apply to any goods or parts thereof furnished by Buyer or acquired from others at Buyer s request and or to Buyer s specifications Routine regularly required calibration is n...

Страница 62: ...of the following standards y European Standard EN 61326 1 1997 Electronic Equipment for Measurement Control and Laboratory Use EMC Requirements These standards are in accordance with EMC Directive 89...

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