USER MANUAL
TD064-O&M-001
REVISION 4
Page 14 of 38
When the door is “UNLOCKED”
whichever door is opening is
highlighted yellow.
Open the door.
Any items which are required to be
operating during the cycle, such as
ventilation units and electronic
equipment (to ensure good gas
distribution within them); ought to be
plugged in to the power sockets.
Close the door.
The above screens would be displayed for a system that uses an Air Purge Boost
system for ventilation.
4.2
Running a Cycle
4.2.1
Running an Air Clean Up Cycle
Use the drop down arrow to select the
operating mode.
Содержание WIC-1
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