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The Role of This Manual

There are two different manuals related to SUS/SUS316 models of CMS/CMF High-Flow

Mass Flow Meters. Read them as necessary for your specific requirements.

If a manual you require is not available, contact the azbil Group or its dealer.

Gas Mass Flow Meter SUS/SUS316 Models CMS 9500/0002/0005/

0020/0050/0200/0500 User's Manual

Document No. CP-UM-1189E

This manual.

This manual is supplied with the product.

Personnel in charge of the design or configuration of equipment that

incorporates this device should read this manual thoroughly.

The manual covers safety precautions, installation, wiring, troubleshoot-

ing, and primary specifications.

Gas Mass Flow Meter User's Manual for Communication

Functions

Document No. CP-SP-1184E

Personnel who use this device's communications functions should

read this manual.

The manual gives an overview of communications, describes wir-

ing, transmission protocols, communications data, and trouble-

shooting, and gives communications specifications.

Содержание Micro Flow CMS 0200

Страница 1: ...o provides necessary information for installation main tenance and troubleshooting This manual should be read by those who design and maintain equipment that uses this product Be sure to keep this man...

Страница 2: ...tion and specifications in this manual are subject to change without notice Considerable effort has been made to ensure that this manual is free from inaccuracies and omissions If you should find an e...

Страница 3: ...should pay attention to when handling the Gas Mass Flow Meter Note Notes indicate information that might benefit the user This indicates the item or page that the user is requested to refer to 1 2 3 N...

Страница 4: ...e valve or the like to control the flow rate If the flow rate exceeds the high limit both the flow rate display and the output voltage current may indicate considerably lower values than the actual fl...

Страница 5: ...r or the device could slip and fall causing an injury Mount this device horizontally If it is mounted vertically drift may occur when the flow rate is zero resulting in an erroneous measurement Do not...

Страница 6: ...l is supplied with the product Personnel in charge of the design or configuration of equipment that incorporates this device should read this manual thoroughly The manual covers safety precautions ins...

Страница 7: ...er 11 Wiring 13 Chapter 4 Operation State transition 16 Function setup 17 Parameter setup 21 Display OFF mode 24 Totalized flow and reverse totalized flow 24 Memory backup for totalized flow and rever...

Страница 8: ......

Страница 9: ...e not affected by temperature or pressure Provides high accuracy 3 rdg and high rangeability 100 1 Model Measurement range CMS9500 5 500 mL min standard CMS0002 0 02 2 L min standard CMS0005 0 05 5 L...

Страница 10: ...report Y With traceability certificate 0 Product version 1 mL m in standard and L min standard indicate the volumetric flow rate per minute converted to conditions of 20 C and 101 325 kPa 1 atm The re...

Страница 11: ...ions 0 No degreasing 1 Degreasing for gas contacting parts 5 0 No optional functions D With inspection report Y With traceability certificate 0 Product version 1 mL m in standard and L min standard in...

Страница 12: ...For communication models 5 m harness 10 core with M3 5 spade terminals Mounting bracket 81446628 001 For CMS9500 0002 0005 0020 0050 81446721 001 For CMS0200 81446856 001 For CMS0500 AC adapter 814469...

Страница 13: ...nt LED During setup the first two digits and the last two digits show the function and the setting respectively EV1 and EV2 indicators Lit when event output is generated Display unit Instantaneous flo...

Страница 14: ...loss or damage could result from the abnormal functioning of this device include appropri ate redundancy in the system design Prevent foreign matter from entering this device If rust water droplets o...

Страница 15: ...ductive sub stances water droplets oil mist or organic solvents Direct vibration or shock Direct sunlight Water or rain Splashing by fluids e g oil chemicals Strong magnetic or electrical field Behavi...

Страница 16: ...s 1 and 2 make sure that there are no welding fumes and dust before installation Handling Precautions If foreign matter cannot be fully eliminated by flushing or wiping or if the regular presence of f...

Страница 17: ...CMS CMS 5D B B B 5D 3D 3D A A B A A CMS CMS Upstream reduction Downstream expansion Different diameter socket etc Different diameter socket etc If the flowmeter and the pipe have the same internal di...

Страница 18: ...g hold the flowmeter by putting a wrench on the flange Handling Precautions Do not grip and turn the main part of the device Doing so might cause damage or leakage When connecting the pip ing do not h...

Страница 19: ...ause measurement error or device failure z z Mounting orientation z z Installation There are two methods of mounting the flowmeter 1 Attach the flowmeter using the mounting screw holes on the bot tom...

Страница 20: ...with four screws from the top of the bracket Mounting bracket model number 81446628 001 For CMS9500 0002 0005 0020 0050 81446721 001 For CMS0200 81446856 001 For CMS0500 Mounting bracket 63 78 4 5 48...

Страница 21: ...ring can cause damage or malfunction For wiring it is recommended to use a harness with the dedicated connector sold separately z z Connector pin layout Compatible connector DF11 10DS 2C made by Hiros...

Страница 22: ...aneous flow rate output and event output common lines are all connected inside this device If these lines are connected to an external device through a common power supply interference will cause devi...

Страница 23: ...ed flow data Example The instantaneous flow rate is 100 L min standard and the totalized flow is 100 x 10 L Communication specifications Item Description Communication system RS 232C start stop synchr...

Страница 24: ...ayed If the DISP key is pressed again the first 4 digits of the totalized flow or reverse totalized flow are displayed Pressing the key once more restores the instantaneous flow rate display If at som...

Страница 25: ...o 12 2 When the first two digits display the desired setup item press the ENT key while the digits are blinking The setup item is selected and the last two digits will begin blinking Press the or key...

Страница 26: ...count Reverse totalized flow countdown Totalizer output pulse rate 1 1 Totalizer output pulse rate 2 1 Totalizer output pulse rate 3 1 00 05 On delay EV1 00 0 1 Disable Enable 00 Valid only if functi...

Страница 27: ...nparity 1stopbit 8 bit data no parity 2 stop bits 00 Can be set only for models with RS 485 1 Totalizer output pulse rates Function setup Function Setting CMS9500 CMS0002 0005 CMS0020 0050 CMS0200 050...

Страница 28: ...n 0 and 2 5 V In addition if function setup 0G analog output scaling is changed the analog output changes to 0 5 V for the specified flow rate range Any desired flow rate range from 10 to 250 can be s...

Страница 29: ...en the desired item No is displayed The current parameter will be displayed If the ENT key is pressed again the last digit will begin blinking Pressing the MODE key moves the blinking digit to the lef...

Страница 30: ...or 1 000 0 100 to 8 000 If 08 is set to 08 P 0G Analog output scaling 100 10 to 250 If 0G is set to 04 z z CMS0002 0005 Parameter Item Default setting Setting range Condition for display setting in fu...

Страница 31: ...vent output 2 EV2 0 0 to 9999 L min 1 If 04 is set to 0 1 or 02 00000000 0 to 99999999 10L If 04 is set to 03 or 04 P 03 EV1 hysteresis 50 2 0 to 100 L min 2 If 03 is set to 0 1 or 02 P 04 EV2 hystere...

Страница 32: ...d flow are reset 10 minutes have passed after the last time the data was saved How to reset the totalized flow and reverse totalized flow To reset press the and keys simultaneously for at least one se...

Страница 33: ...calibration as shown below 1 Display the instantaneous flow rate or totalized flow 2 Press and hold the ENT key 3 After about 10 seconds 0 CAL will begin blinking on the flow rate display 4 Press and...

Страница 34: ...orrect Check for gas leaks from the piping Check if there is a foreign substance such as dust or oil in the pipe or the connection port of the flowmeter If oil is found contact the azbil Group and ask...

Страница 35: ...27 MEMO...

Страница 36: ...mL min 3 rdg 1 digit 0 02 0 4 L min 1 FS 1 digit 0 4 2 L min 3 rdg 1 digit 0 05 1 L min 1 FS 1 digit 1 5 L min 3 rdg 1 digit Temperature characteristics at 10 to 60 C 6 0 to 75 of flow rate range 0 10...

Страница 37: ...min 1 FS 1 digit 2 20 L min 3 rdg 1 digit 0 5 5 L min 1 FS 1 digit 5 50 L min 3 rdg 1 digit 2 20 L min 1 FS 1 digit 20 200 L min 3 rdg 1 digit 5 50 L min 1 FS 1 digit 50 500 L min 3 rdg 1 digit 0 to 7...

Страница 38: ...al current contacts ON approx 0 5 mA current to contacts Allowable ON contact resistance 250 max Allowable OFF contact resistance 100 k min Allowable ON residual voltage 0 8 V max for open collector A...

Страница 39: ...on voltage contacts or open collector Terminal voltage contacts OFF 4 5 1 V Terminal current contacts ON approx 0 5 mA current to contacts Allowable ON contact resistance 250 Allowable OFF contact res...

Страница 40: ...ide CO2 250 2 5 1 1 2 5 0 01 Oxygen 2 500 5 1 2 5 0 01 Fuel gas 13A 400 4 1 1 5 3 75 0 01 Methane 500 5 1 2 5 0 01 Propane 140 1 4 1 0 5 1 25 0 005 Butane 100 1 1 0 4 1 0 005 User specified 1 5 1 1 5...

Страница 41: ...n Air nitrogen 500 5 1 Argon 500 5 1 Carbon dioxide CO2 250 2 5 1 Oxygen 2 500 5 1 Fuel gas 13A 400 4 1 Methane 500 5 1 Propane 140 1 4 1 Butane 120 1 2 1 User specified 1 5 1 1 Users can set the conv...

Страница 42: ...tely Harness with dedicated connector model No 81446594 ITEM Mounting bracket model No 81446721 001 Connector DF11 10DP 2DS made by Hirose Electric Co Ltd Connection threads Rc 1 4 2 Harness with dedi...

Страница 43: ...l Corporation X10L L min EV2 EV1 ENT MODE DISP Mass Flow Meter MADE IN JAPAN Azbil Corporation MADE IN JAPAN Azbil Corporation 15 0 3 37 32 17 15 7 15 7 91 69 1 7 5 48 7 18 5 2 9 16 18UNF 58 75 48 58...

Страница 44: ...46721 001 2 3 4 16 UNF 90 78 75 63 4 5 98 6 18 7 18 7 82 1 23 2 45 62 50 7 5 HEX26 148 6 25 25 160 30 7 30 7 HEX7 8 25 3 13 5 161 6 31 5 31 5 48 0 3 M4 threaded holes 4 6 mm deep for retaining screws...

Страница 45: ...fittings 2 SS 8 VCR 1 8STSC11 or equivalent Material SUS316 Connector DF11 10DP 2DS made by Hirose Electric Co Ltd Rc 1 2 fittings 2 Compatible pipe Outer diameter 1 2 Material SUS316 1 2 Swagelok fi...

Страница 46: ...connection harness is necessary when supplying AC power to the CMS z z 81446594 030 AC adapter connection harness ITEM 005 006 ITEM 007 008 81446957 001 Azbil Corporation 50 26 5 64 1800 50 2 3 0 20...

Страница 47: ...ing bracket 81446856 001 for CMS0500 Material SUS304 Unit mm 2 4 5 d ia ho le R 2 R 1 o r C 1 3 2 B 2 places R 4 5 5 5 A 4 places 58 5 48 11 11 75 6 5 36 10 3 6 68 58 13 5 48 24 16 5 15 B A Mounting h...

Страница 48: ...Butane 2 08 Example For the CMS9500 if the primary pressure is 100 kPa and the flow rate is 500 mL min the pressure loss for argon is calculated as follows On the graph for CMS9500 the pressure loss i...

Страница 49: ...min standard Pressure loss Pa CMS0002 Primary pressure 0 5 kPa 100 kPa 300 kPa 500 kPa 700 kPa 20 0 40 0 60 0 80 0 100 0 120 0 140 0 160 0 180 0 0 0 0 2 4 6 1 3 5 Flow rate L min standard Pressure los...

Страница 50: ...0 0 700 0 800 0 0 100 0 0 0 100 200 50 150 250 Flow rate L min standard Pressure loss Pa CMS0200 500 0 1000 0 1500 0 2000 0 2500 0 0 0 0 200 400 100 300 500 600 Flow rate L min standard Pressure loss...

Страница 51: ...added CMS Series flowmeter was changed to Gas Mass Flow Meter Caution was added Notes was changed CMS was deleted from the figure MFF100 Series was changed to MFF200NAG A description was added to diag...

Страница 52: ...1 12 2 Kawana Fujisawa Kanagawa 251 8522 Japan URL https www azbil com 11 Specifications are subject to change without notice 1st edition Dec 2006 U 3rd edittion Oct 2019 V...

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