DTT
Triple Source Thermal
Evaporation Coater
User Manual
For technical and applications advice plus online order for spares and consumables parts visit www.vaccoat.com
Страница 1: ...DTT Triple Source Thermal Evaporation Coater User Manual For technical and applications advice plus online order for spares and consumables parts visit www vaccoat com ...
Страница 2: ...hnical and applications advice plus online order for spares and consumables parts visit www vaccoat com Disclaimer The components and packages described in this document are mutually compatible and guaranteed to meet or exceed the published performance specifications No performance guarantees however can be given in circumstances where these component packages are used in conjunction with equipmen...
Страница 3: ...nd Safety It is important for all firm s product which describe very important issues in the field of safety Section 3 Introduction Introduces this manual Section 4 Setup and Installation Instructions on how this instrument should be installed and the connections which should be made between the equipment items Section 5 Operation Instructions on how to start up and run the instrument Section 6 Ma...
Страница 4: ...dvantages 13 3 4 2 Features 13 3 4 3 The equipment inside the metal box 14 3 4 4 The internal components of the glass chamber 14 3 4 5 DC high voltage power supply 21 4 Set up and Installation 23 4 1 Required equipment for the device installation 23 4 2 Initial checkup after device collection 23 4 3 The connections 24 4 3 2 Electric Connection 25 4 3 3 Vacuum pump connection 26 4 3 4 The Connectio...
Страница 5: ...Figure 3 5 Copper Electrodes 16 Figure 3 6 Feedthrough and thickness meter cooling system Plastic blue hoses 17 Figure 3 7 Electronic Shutter 18 Figure 3 8 Sample holder 18 Figure 3 9 Motorized sample holder 19 Figure 3 10 Turbo molecular pump inlet 20 Figure 3 11 Pressure gauge inlet 21 Figure 3 12 High Current Power Supplies Back view 22 Figure 4 1 Side view of the DTT 25 Figure 4 2 Back Side vi...
Страница 6: ...age 44 Figure 6 1 Door holder screw 48 Figure 6 2 Small groove to replace the new crystal 48 Figure 6 3 Insertion of new crystal to the groove 49 Figure 6 4 Connecting the alternative crystal to test the thickness meter 52 Figure 6 5 Different parts of thickness gauge 53 List of Tables Table 1 Hazard Labels and Their Definitions 8 Table 2 DTT Desktop Triple Source Thermal Evaporator Coater Specifi...
Страница 7: ...using the instrument whether as an operator or in a service capacity Vaccoat Co is committed to providing a safe working environment for its employees and those that use its equipment and conducts its business responsibly and in a manner designed to protect the health and safety of its customers and employees It also seeks to minimize any adverse effects that its activities may have on the environ...
Страница 8: ...e instrument or modification of the instrument 2 2 2 Operators and Service Engineers A normal operator of the equipment will not be trained in or qualified for service work on the equipment and may cause a hazard to him herself or others if such work is attempted Operators should therefore restrict themselves to the normal operation of the equipment and not by removing covers from the electronic e...
Страница 9: ...if not avoided may result in minor or moderate injury or damage to equipment 2 3 2 Hazard Labels Used on Equipment Several hazard symbols may be found on the equipment they are shown in Table 1 with their meaning Table 1 Hazard Labels and Their Definitions Sign Shape Sign Name Sign Definition Electric Shock Risk Imminently hazardous situation or unsafe practice that if not avoided will result in d...
Страница 10: ...sult in minor or moderate injury or damage to equipment 2 4 Earth connection The device must be connected to a plug with proper earth connection this would prevent electrocution of user in case of a short circuit in the system However in the absence of proper earth connection the thickness gauges will not work properly ...
Страница 11: ...5 minutes and depositing large group of materials with the three thermal sources boat basket The DTT with usage of three copper electrodes is able to fit in different size of boat and basket and they are changeable easily Therefore structuring the multilayer with three different materials without having to break the vacuum and possibility of alloying is provided The touch screen control panel and ...
Страница 12: ...sample holder This method is one the most common deposition method to create super thin layers Chamber s pressure and the boat s temperature are the parameters that need to be controlled in this process In this method the source material will be placed in the boat or filament made of resistant metals Ta Mo or W The electric current by passing through the boat will make it hot and the source materi...
Страница 13: ...t basket Size 50 90 mm length Number of boat basket 3 Pieces Thickness Sensors Number of Sensors 1 Piece Specification Crystal thickness gauge with sensors oscillator and the water circulated crystal holder Resolution 1 Angstrom Accuracy 1 nanometer Vacuum Equipment Turbo Molecular Pump Capacity 90 L s Leybold Backing Pump Two stage rotary pump 4m3 h Pressure Gauge Leybold Ionivac model Full Range...
Страница 14: ...ermal evaporation purpose 5 The ability of enabling the two power supply at the same time optional 6 Precise adjustment ability of pressure 7 Reaching the right vacuum level to perform the deposition 8 Ability to view graphs of pressure and thickness 3 2 2 Features Turbo molecular pump Made in Germany Rotary backing pump Full range vacuum gauge Made in Germany Sample holder Boat Selection Crystal ...
Страница 15: ...trical and electronic parts of the device The tray includes 1 24 V power Supply 2 Pressure Module 3 Relay Motor Drive Module 4 MFC Module 5 Thickness Gauge Module 6 MFC Mass Flow Controller Figure 3 3 The tray in the metal box 3 2 4 The internal components of the glass chamber Figure 3 4 shows the internal components of the glass chamber The base plate made of Stainless Steel and components such a...
Страница 16: ...nlet connection 2 4 pin electrical feed through 3 Gas inlet 4 Pressure gauge connection 5 Copper electrode 6 Thickness gauge sensor 7 Rotational sample holder 8 Shutter 9 Air filter for the ventilation purpose Figure 3 4 Inside the vacuum chamber ...
Страница 17: ...er electrodes to hold the boat for evaporation purpose The length of each one is adjustable from 50 to 90 mm Figure 3 5 Copper Electrodes These electrodes should not have connection to each other or the steel internal surface ii Thermal sources Boat Basket Selection of kind of the thermal sources is a very important item to reach the desired deposition Less thickness of the selected Boat or Basket...
Страница 18: ...s less than 40 Amp there is no need to cool the electric feedthroughs and so thickness meter But for more time or currents it s recommended to cool feedthroughs and thickness meter Figure 3 6 Figure 3 6 Feedthrough and thickness meter cooling system Plastic blue hoses For the first time using the cooling system turn off the system and make sure that there is no any water leakage inside the metal b...
Страница 19: ...hermal source is adjustable For this purpose the operator should open the shutter s connection to shaft and tight it back after the height adjustment Figure 3 7 Electronic Shutter iv Sample Holder Figure 3 8 shows the sample holder User is able to adjust the position of the sample holder in three directions X Y and Z Shape and the dimension of sample holder could be customized based on the user re...
Страница 20: ...s Fix the surface on the right place Figure 3 9 and connect the motor power cable For setting the desired speed see the item No 9 in part 5 2 NOTE In order to increase the motor lifetime it s recommended that turn on sample rotation motor after opening the shutter and after closing the shutter or finishing the deposition turn off it Figure 3 9 Motorized sample holder ...
Страница 21: ...esh screen to protect the inner nets 3 Exterior nets Figure 3 10 Turbo molecular pump inlet vi Pressure gauge inlet The pressure gauge is manufactured by the famous German company Laybold IONIVAC model The pirani filament of this gauge is so thin and sensitive Therefore the pressure gauge is protected from both sides one by a half cylinder which its inlet is facing the inner layer of container gla...
Страница 22: ... high current cables and so signed by symbol on the cable 2 By using the turbo molecular pump the chamber s pressure must reach its lowest point In high pressure the tungsten will oxidized 3 Stimulate the HC key which stands for High Current from the system s monitor 4 Rotate ON OFF switch clockwise on the right of the power supply 5 Turn the Voltage knob clockwise up to 24 volts 6 Turn the flow k...
Страница 23: ...E After completion of the deposition lower the current flow and wait for venting inside the chamber up to 15 minutes The boat or basket is hot and in the presence of oxygen will be oxidized Figure 3 12 High Current Power Supplies Back view ...
Страница 24: ...in the range of 5 to 35 C and relative humidity must be less than 75 The proper ventilation is essential for the device and the device should not be exposed to direct sunlight and should be placed in a suitable environment and free of dust 4 1 Required equipment for the device installation Input Power 220 V Frequency 50 60 Hz 20 A with a suitable earth connection A strong table with a length of 13...
Страница 25: ...g of system the sound of air entering the chamber will be heard confirming the system had been vacuumed NOTE The metal box which is prepared for carrying the device must be maintained in duration of warranty and after sales service So it can be used in case of sending the device to the Vaccoat co 4 3 The connections All the connectors of the device must be in accordance with this user s guide 1 El...
Страница 26: ...m electrical shock if any short circuit happens in the system However in the absence of suitable earth connection thickness gauge will not work correctly 2 The cable of the backing pump connects to the left side of the deivce Figure 4 1 The system s design makes each cable unable to connect to the location other than its own 3 24 voltage cables of power supply 2 pin 4 Shared connection of evaporat...
Страница 27: ...tion by a proper flow of water about 0 5 liters per minute passes through the thickness gauge and even quartz crystal Best method for areas where the water hardness is high is water circulation bath by the temperature less than 20 C or cooling the system by a small chiller which keep the water temperature about 5 20 C If the recommended methods are not available it is possible to use the city wate...
Страница 28: ...hickness gauge This is because these parts are adjacent to boards and electronic components and pouring water might cause the short circuit or burn some of them Figure 4 3 Water filter for installing in the cooling system The system is equipped with a water filter at the inlet water section Figure 4 4 Figure 4 4 Installed water filter on the system ...
Страница 29: ...ng and the devices will use the same setting after turning on 5 1 Device preparation before the setup 1 Fill up the rotary pump with the appropriate oil if the backing pump is a rotary pump Do not turn on the rotary pump without proper oil It will cause a serious damage to the pump 2 Switch on the backing pump Figure 5 1 3 By using the No 6 Allen wrench open the blue valve cap installed on the sid...
Страница 30: ...ior parts to avoid the deposition of them sample holder shaft electric connection and etc with aluminum foil Review the material library in the Vaccoat website and make sure that you have chosen the right material and boat 7 Turn on the system In order to turn on the system use the power board Figure 5 2 Connect the main cable of the system and power supplies to the power board in order to protect...
Страница 31: ... Co DTT Operating Manual 30 Figure 5 2 Power board 5 2 Deposition Manual 8 Push the start button on screen Figure 5 3 Start Page All the vacuum and deposition parameters are visible on the home Page Figure 5 4 ...
Страница 32: ...page MFC s setting Motorized Part page or boat selection Note that once this page is open the other part of screen will not operate HC power supply activation Pressure 5 mTorr Time mode selection for deposition Thickness mode selection for deposition Zero Thickness meter activation Vent valve opening Page selection Display Items Pressure display Temperature and time display Thickness and pressure ...
Страница 33: ... the desired Source position Figure 5 5 Use sample rotation to obtain a thin film with high uniformity Figure 5 5 Motorized page NOTE Place a steel cube under the basket or boat to avoid the deposition of the base plat and make sure that is not in contact with the boat Otherwise it will cause the electric leakage ...
Страница 34: ...er atoms initial frequency Starting frequency decreases Circuit frequency counters calculates the frequency variations and converts it into the thickness Thickness sensors can be used by both time mode and thickness mode In time mode the deposition process based on the desired duration is set to perform In this mode the thickness gauge is active and measures the thickness until reach the scheduled...
Страница 35: ...wise it will not show the thickness On the screen the crystal life option shows the remaining of its life And before the end of its life the user should provide the new one If the user intends to use a new material as a target it is necessary to set the correct target in the thickness setting menu Figure 5 6 Thickness gauge page Figure 5 7 Target set page ...
Страница 36: ... as Ellipsometer For example if the tooling factor selected 1 and after the deposition it show 10 nm thickness but measuring by Ellipsometer show 35 nm it means the correct tooling factor is 3 5 12 Press the vacuum pump key to turn on the backing pump Once it is on the chamber will go under vacuum condition and it is not possible to open the door The pressure gauge will show the pressure drop afte...
Страница 37: ...e of operation it will turn to red To view the allowable range of each parameter refer to Appendix 1 When the TMP is on its vanes are rotating by high speed thus don t move the system If the input pump s speed and the monitored speed have more than 10 Hz difference it means the pump s converter is in trouble and the user must contact the Vaccoat Company Figure 5 9 Pressure Display in the main page...
Страница 38: ... the user by setting the time the thickness will be disabled automatically and the sputtering will be done on time and when the set time is reached the device will stop sputtering If the thickness of the layer is important for the user he she can enter the desired thickness in terms of angstroms and the device will do the sputtering based on the thickness In this case the time will be disabled and...
Страница 39: ...ockwise on the right of the power supply Figure 3 13 19 Turn the Voltage knob clockwise up to 24 volts 20 Turn the current knob slowly in clockwise direction until the current and temperature increases and the basket turns to red and material that have poured into it will be melted and then evaporated The copper feed through are isolated in respect of base plate with the Teflon washers Due to laye...
Страница 40: ...ppears during deposition With the keys on the left in this sector can zoom in out the graph The keys are located at the bottom of the sector can scroll left right Logger Page In the logger page can stream the graphs of deposition parameter such as thickness time and rate By pressing the SAVE LOGGED DATA key or PRINTSCREEN can save the data In this sector can change the scales of graphs by SCALE ke...
Страница 41: ...5 13 The logger page In this sector the yellow line indicates the thickness and the green line indicates the pressure Key Operation Converting the graph to data and vice versa Start to draw the graph Zoon in Zoom out Deleting the graph Undo key ...
Страница 42: ...etion of the deposition lower the current and wait for venting inside the chamber up to 15 minutes The boat or basket is hot and in the presence of oxygen will be oxidized 1 Disconnect the water circulation system 2 Turn off the turbo pump by pressing the Turn TMP off bottom Before reaching 50Hz speed it is not possible to do the venting 3 Activate the vent valve for the ventilation 4 Vent the sys...
Страница 43: ...meter settings can be done in this sector Table 4 Setting Parameters Key Description History Shows the last 300 deposition history Safety Remove USB To remove the USB in safe mode Update OS APP For updating the OS APP Copy OS_APP To Copy the old version of software Time Date Shows the Time Date Increase Brightness To increase the brightness of display Decrease Brightness To decrease the brightness...
Страница 44: ...eep sound History Page Figure 5 16 History Page This window will allow the user to see date time and pressure the thickness of the last 300 layer which is deposited with the latter view The details of pumps and rotary sputtering process will be shown in the window All this information can be saved by SAVE LOGE to FILE button to flash connected to the USB ...
Страница 45: ...ressure is not low enough to start the deposition process The third part shows the main parameters and control buttons of device Beside of each parameter a red light is placed It means none of these parts are activated But for example if the HC section is activated by the user then the HC signal is green If it did not happen in spite of being active HC its lights still remain red indicating a defe...
Страница 46: ... the data of the temperature sensors of cathodes If it is red it means there is a fault in one of the sections Table 7 Table 5 NTC Section Parameters Cut of range The wire is disconnected Short out of range Short circuit has happened Overheat There is overheating in the area Caution All the information in maintenance section is solely to inform the user And in case of a problem the user should not...
Страница 47: ...f prp and press OK Then the device will replace the new version with the old one It is recommended to save the old version before upgrading o Make Zero Thickness only for first time after uploading the new software Restart Panel AP Turns on the device and opens the main page ...
Страница 48: ...ge Inspection of wires and plugs Every time before starting the deposition 6 1 Evaporation Source Installation and Replacement Turn off the system and loosen the wing bolt at the sides of the basket and remove it And then replace it with the new one To replace the new boat or basket and to adjust the length need to loosen the wing bolt and displace the copper connection Do not tight the wing bolt ...
Страница 49: ...Figure 6 1 Door holder screw 2 Remove the crystal placed on small grooves on the holder Figure 6 2 Small groove to replace the new crystal 3 Insert the new crystal with caution in the right direction to the groove shown in the Figure 6 3 ...
Страница 50: ...n by four screws Just open the screws and wash the plate to clean the vacuum chamber s base Chamber To wash the glass chamber should be very careful because the edges of the glass are very vulnerable and easy to chip off and this causes the device not to reach the desired vacuum level So the user should note the following Use gloves in all washing steps It is recommended to use the dilute acid for...
Страница 51: ...rease Vacuum grease should be applied only to the extent that the O rings are shiny and should not use a lot of grease on the O rings it leads to disruption of the vacuum process Put the O rings in its place and close the clips Internal Items in Chamber Remove the aluminum foil and clean the parts with a soft brush toothbrush So the layers of material deposited on the part are separated as scaling...
Страница 52: ... interrupted Crystal Life shows the number 0 See the section 6 5 1 See the section 6 5 1 Despite the applied voltage current the displays shows Zero 1 There might be a disconnection in evaporation source 2 The short circuit has happened in system 1 Check the boat connections 2 By ohmmeter check the connections The power supply is not turning on 1 The pressure is not low enough less that 5x10 3 2 T...
Страница 53: ...onnects the thickness gauge wire to the crystal counter clockwise to be removed Then connect the test crystal Figure 6 4 to the wire and wait for 10 seconds if the crystal life turns to Green and showed the 98 or 99 that means there is a problems with connection of crystal three springs which pushing it upwards Fig 6 5 Figure 6 4 Connecting the alternative crystal to test the thickness meter ...
Страница 54: ...right direction in its place and push it a little bit downward until the crystal life turns to green and tighten back the screw with Allen wrench 6 5 2 Leakage and Leakage Detection One of the problems that any vacuum system sooner or later will face is the leakage of the system and not to achieve the desired pressure Therefore need to avoid doing the things that cause leaks in the system and dete...
Страница 55: ...ar the places can detect the leak Small leaks it is a little difficult to find these leaks To find the leaks need to use the medical alcohol in the syringe and spray to that area If there is a leakage the alcohol will be drawn to the chamber and converted from a liquid to a gas And thus suddenly chamber pressure will increase Recommendations in connection with the leak 1 Avoid unnecessary manipula...
Страница 56: ...cause leakage but the sacks which are not possible to feel with nails are usually not important In the presence of such sacks with very soft sandpaper 800 or 1000 sand the scratches to disappear then clean location with a clean cloth and some alcohol ...
Страница 57: ...ncy 6 Bearing temperature warning threshold 10 150 60 C r w S16 Exceeding the bearing temperature warning threshold results in a warning 7 Motor temperature lower warning threshold 10 150 5 C r w S16 Falling below the motor temperature lower warning threshold results in a warning 8 Motor temperature lower error threshold 10 150 0 C r w S16 Falling below the motor temperature lower error threshold ...
