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CONFIDENTIAL

AIXTRON

- Dokumentation

Maintenance

System Manual

Cleaning procedures

CRIUS II

6.6

Cleaning procedures

6.6.1

Fused quartz glass parts

Solution

AIXTRON recommends using aqua regia:

This method works well for Arsenides and Phosphides as well as Antimonides.

It might not work well on Nitrides. For thin GaN layers the methode should be
applicable.

Etching time

The etching time will depend on amount of deposition. Account few hours.

Rinsing

Rinsing should be performed for 24 hours with running DI water. Rinse the
quartz parts thoroughly (8-10 rinsing cycles). The progress can be checked by
measuring drain water resistivity.

Drying

Drying should be performed in an oven (preferentially nitrogen-purged) with
100…150 °C for at least 12 hours.

HCl : HNO

3 : 1 or

HCl : HNO

5 : 1

Содержание CRIUS II

Страница 1: ...CONFIDENTIAL CRIUS II System Manual Edition 06 2010...

Страница 2: ...ghts reserved The legal end user of the AIXTRON CRIUS II may reproduce this document for use with his CRIUS II only For safety reasons complete copies must be made Any other reproduction without writt...

Страница 3: ...Danger areas Safety circuit LOTO 17 Description Process technology System overview Components 55 Installation Transport Assembly Initial commissioning 99 Operation Operating elements Switching on off...

Страница 4: ...crius_II_en_00 Edition 06 2010 Chapter overview System Manual CRIUS II 0 4 CONFIDENTIAL AIXTRON Dokumentation...

Страница 5: ...es and applications 6 1 1 4 Use of this System Manual 7 1 1 5 Worldwide AIXTRON service centers 7 1 2 User qualifications 8 1 3 Training 9 1 4 System identification 10 1 4 1 Type label 10 1 5 Dimensio...

Страница 6: ...corresponding information 1 1 2 Intended use of the CRIUS II The CRIUS II is intended for epitaxial deposition of materials on wafers using CVD technology CVD chemical vapor deposition To guarantee th...

Страница 7: ...e work service corrective work repair storage disposal Check the table of contents to locate the relevant chapter AIXTRON delivers user documentation along with the product Documents can be re ordered...

Страница 8: ...er qualifications Access rights The end user assigns access rights to his personnel according to their level of training knowledge experience and responsibility The following four access levels are de...

Страница 9: ...y AIXTRON Only appropriately trained personnel can correctly implement the safety regulations contained in this document Personnel without this training are considered as unauthorized Unauthorized per...

Страница 10: ...s State all details shown on the type label when you contact AIXTRON When ever possible also state the displayed software sequence step when you make diagnosis inquiries in the event of disturbances T...

Страница 11: ...ght 1 5 1 Dimensions Fig 1 3 Dimensions of the CRIUS II mm Side view and top view A Gas mixing cabinet B Reactor cabinet C Heater power supply unit D Heat exchanger E Transformer NOTE The technical da...

Страница 12: ...on Use data System Manual Dimensions and weight CRIUS II 1 1 5 2 Weight Tab 1 1 Weight Component Weight kg Gas mixing cabinet Approx 2800 kg Reactor cabinet Approx 3800 kg Heater power supply unit App...

Страница 13: ...vironmental conditions 1 6 3 Pneumatic supply The pneumatic supply is recommended to be a low purity N2 supply to prevent any oxygen entering the hydrogen lines in the unlikely event of a valve leakin...

Страница 14: ...t diagram Fig 1 4 Dew point diagram T1 Room temperature T2 Minimum cooling water temperature rH Relative humidity NOTE Prevent condensation The temperature of the cooling water must exceed the dew poi...

Страница 15: ...it with Al components Circuit without Al compo nents pH 7 5 8 0 7 0 8 0 German hardness 7 5 dH 7 5 dH US hardness 0 05 ppm 0 05 ppm Total dissolved solids 1 2 ppm 10 ppm Oil content 1 ppm 1 ppm Micro...

Страница 16: ...evant regulations EC Directive for Machines 2006 42 EC EC EMC Electro Magnetic Compatibility Directive 2004 108 EC EC Low Voltage Directive 2006 95 EC Applied harmonized and national standards as well...

Страница 17: ...from electric power 25 2 5 2 Dangers originating from mechanical energy 27 2 5 3 Dangers originating from hazardous gases 28 2 6 Safety circuits 31 2 6 1 EMERGENCY OFF button 31 2 6 2 PROCESS STOP but...

Страница 18: ...on all work carried out in conjunction with the CRIUS II must be performed by trained personnel only and in accordance with this System Man ual The technical data must be observed on principle 2 1 3 R...

Страница 19: ...IUS II during any stage of its serviceable life has read and understood the relevant parts of the system documentation Basic documen tation electrical documentation The basic documentation e g install...

Страница 20: ...ssary loca tions Acceptance check Subsequent to initial commissioning the end user is responsible to perform a system acceptance check according to the local regulations concerning pre vention of acci...

Страница 21: ...wn and disconnected from the mains supply Make sure that the removed safety devices have been reinstalled and remounted before the unit is switched on again Spare parts Use only original spare parts N...

Страница 22: ...o perform the revision checks according to the local regulations concerning prevention of accidents At the end of a successful revision check the acceptance report for revision check is signed by an a...

Страница 23: ...dicates an imminently hazardous situation which if not avoided will result in death or severe injury WARNING WARNING indicates a potentially hazardous situation which if not avoided could result in de...

Страница 24: ...B WARNING Pinch points Outer lock chamber door There is the danger of contusions when opening or closing the outer lock chamber door Always use the handle when you are opening or closing the door WARN...

Страница 25: ...nnel Electric power A Gas mixing cabinet B Reactor cabinet C Heater power supply unit D Heat exchanger E Transformer WARNING High voltage The system contains parts which carry levels of high voltage T...

Страница 26: ...uching these parts will cause an electric shock The shock may be lethal Prior to any work in the danger area Lock out and tag out the main power supply system main switch and heater main switch Ground...

Страница 27: ...Mechanical energy A Susceptor motor Item A Entire system WARNING Moving component Susceptor motor Automatic movements of this component may cause contusions Check to make sure that no one is in the d...

Страница 28: ...ing safety measures Guide the exhaust lines to a suitable scrubber to prevent hazardous gases or vapor from escaping into the environment Make sure that the process gas pipes are tight Make sure that...

Страница 29: ...nition of gas mixtures or an explosion Process gas Color Smell Main dangers for health Other risks Ammonia NH3 Color less Pungent Inflammation of respiratory tract mucous membrane eyes and skin Arsin...

Страница 30: ...ively Propane C3H8 Color less Odorless Difficulty in breathing Flammable Sulphur hexaflu oride SF6 Color less Odorless Difficulty in breathing Silane SiH4 Color less Disgusting Irritations of the resp...

Страница 31: ...F button EMERGENCY OFF buttons outside the cabinets Fig 2 5 31 shows a typical EMERGENCY OFF button EMERGENCY OFF buttons are red with a yellow collar Fig 2 5 EMERGENCY OFF buttons outside the cabinet...

Страница 32: ...cuits CRIUS II 2 Positions outside Fig 2 7 32 shows the EMERGENCY OFF buttons installed at the outside of the CRIUS II Fig 2 7 Positions of the EMERGENCY OFF buttons outside Front side top back side b...

Страница 33: ...IUS II Safety circuits Positions inside Fig 2 7 32 shows the EMERGENCY OFF buttons installed inside the cab inets Fig 2 8 Positions of the EMERGENCY OFF buttons inside Front side top back side bottom...

Страница 34: ...n EMER GENCY OFF shutdown After an EMERGENCY OFF shutdown the red power OFF button is flashing The flashing frequency indicates the EMO state 1 Remove the cause for the EMERGENCY OFF shutdown 2 In cas...

Страница 35: ...CESS STOP button Fig 2 9 35 shows a typical PROCESS STOP button PROCESS STOP buttons are yellow Fig 2 9 PROCESS STOP button Positions Fig 2 10 35 shows the PROCESS STOP buttons installed at the CRIUS...

Страница 36: ...he throttle valve is closed All hydrogen and process gas valves are closed Process heater is switched off A running recipe is terminated Switching the system on after an PROCESS STOP Only service pers...

Страница 37: ...ed Active door locks Before a process starts the closed doors will be locked automatically This prevents unintended opening of a door while a process is running Positions Fig 2 11 37 shows the active...

Страница 38: ...t for shutdown if necessary Also make sure that the shutdown of the component will not affect running processes 2 Shut down the component Locking out 3 Isolate the component from all energy sources In...

Страница 39: ...ey must contain the following information A warning text or prohibitive sign Name and phone number of the person in charge Date and time when the component has been locked out Fig 2 13 Front and back...

Страница 40: ...down 6 2 Pressurized gas Pressurized gases may be stored in the related gas lines Use the pressure relief valve 6 3 Pressurized liquid May be stored in water lines and hydraulic systems Use the pressu...

Страница 41: ...k out tagout refer to the safety department of your company 2 7 3 Removing lockout tagout devices Proceed as follows to remove lockout tagout devices 1 Inspect the component to ensure that it is opera...

Страница 42: ...to create a bar rier against workplace hazards It must be worn during potentially hazardous work in order to prevent injuries or illness Tab 2 2 43 shows the PPE that is required for working with the...

Страница 43: ...ical examples Safety goggles unbreakable Fine dust mask P2 Cartridge respirator half facepiece Filters for inorganic gases and vapors Cartridge respirator full facepiece Filters for inorganic gases an...

Страница 44: ...ys tems and can only come together intentionally in the reactor Oxygen monitoring nitrogen purging is used to ensure that chemicals that react with air O2 do not pose a risk No bulk storage of flammab...

Страница 45: ...leases Gases The probability of occurrence of an unintended gas leak is very low However if a gas leak occurs inside the CRIUS II the exhaust system prevents hazard ous situations Liquids The entire s...

Страница 46: ...labels on the CRIUS II The following safety labels are attached to the CRIUS II or its components 2 12 1 Hazardous materials Label Positions Fig 2 14 Label positions front Hazardous materials contain...

Страница 47: ...AIXTRON Dokumentation CONFIDENTIAL 47 2 crius_II_en_00 Edition 06 2010 System Manual Safety CRIUS II Safety labels on the CRIUS II Fig 2 15 Label positions back...

Страница 48: ...IUS II 2 2 12 2 Hazardous voltage Label 1 Position At the gas mixing cabinet below the main switch Fig 2 16 Label below the main switch WARNING 99110165 Hazardous voltage This equipment is supplied by...

Страница 49: ...ON Dokumentation CONFIDENTIAL 49 2 crius_II_en_00 Edition 06 2010 System Manual Safety CRIUS II Safety labels on the CRIUS II Label 2 Positions Fig 2 17 Label positions front Fig 2 18 Label positions...

Страница 50: ...Fig 2 19 Label on the outer lock chamber door Label 2 Position Inside of the glove box on the inner door of the load lock Fig 2 20 Label on the inner lock chamber door 100093732 Hot surfaces within th...

Страница 51: ...CRIUS II Safety labels on the CRIUS II 2 12 4 Pinch points Label 1 Positions Inside of the glove box on the inner door of the load lock At the motor holder under the glove box Fig 2 21 Label on the in...

Страница 52: ...DENTIAL AIXTRON Dokumentation Safety System Manual Safety labels on the CRIUS II CRIUS II 2 Label 2 Positions Fig 2 23 Label positions front Fig 2 24 Label positions back CAUTION 99110170 Crushing haz...

Страница 53: ...emergency situations This system is to be serviced only by trained and authorized personnel Follow lockout procedures before servicing Consult Material Safety Data Sheets MSDS for hazards and required...

Страница 54: ...ne for safety relevant information on argon Read the material safety data sheets thoroughly and follow all directions 2 13 2 Electromagnetic compatibility The electrical equipment of the CRIUS II was...

Страница 55: ...ceptor 64 3 5 3 Tungsten heater 65 3 5 4 Temperature control unit 67 3 5 5 Double O ring system DOR 68 3 5 6 In situ layer thickness measurement 69 3 6 Gas system 70 3 6 1 Gas diagram 71 3 6 2 Run and...

Страница 56: ...bstrate by ther mal energy The following reaction steps take place see Fig 3 1 56 1 Transport of the reagents in the gas phase to the substrate e g by means of a carrier gas 2 Diffusion of the molecul...

Страница 57: ...ollowing steps are performed 1 The process gases item A are mixed in the gas mixing system item B 2 The process gases are fed via the showerhead item C into the reactor item D 3 A coating is deposited...

Страница 58: ...tem overview Fig 3 3 58 shows the main components of the CRIUS II Fig 3 3 Design of the CRIUS II example A Gas mixing cabinet B Reactor cabinet C Heater power supply unit D Heat exchanger E Transforme...

Страница 59: ...gon or nitrogen are used This protects the reactor from contaminations during loading unloading and when maintenance is performed Use the integrated gloves to access the operating elements inside of t...

Страница 60: ...Substrates are transported into the glove box via the load lock The load lock chamber comprises two doors The outer door is used to load and unload sub strates See Fig 3 5 60 The inner door is used to...

Страница 61: ...transfer handler optional A manual susceptor transfer handler may be installed inside the load lock chamber instead of the drawer It is used to transfer the susceptor between the reactor and the load...

Страница 62: ...ove the substrates The system is known as a Close Cou pled Showerhead CCS system Fig 3 7 62 shows the reactor Fig 3 7 Reactor A Reactor clamp B Reactor lid C Reactor chamber D Reactor bottom E Electri...

Страница 63: ...the optional servo mechanism range 5 mm to 25 mm Fig 3 8 Reactor lid with showerhead A Showerhead B Gas feedthroughs The showerhead normally has two plenums see Fig 3 9 63 In rare cases a third plenum...

Страница 64: ...located on top of the susceptor support The susceptor support rotates in a clockwise direction to ensure homoge neous temperatures during the process The susceptor is rotated by a motor drive A rotat...

Страница 65: ...r is located inside of the susceptor support below the susceptor Fig 3 11 Tungsten heater A Heater coils Heater coils The heater consists of three sets of tungsten rhenium coils which are config ured...

Страница 66: ...Reactor CRIUS II 3 Coil fixing The heater is mounted to the quadrant plates by means of clamps See Fig 3 13 66 Fig 3 13 Coil fixing A Susceptor support B Quadrant plates C Coil clamp Heater power supp...

Страница 67: ...of the susceptor A Eurotherm controller B Heater coil C Thermocouple Mikron pyrometer A Mikron pyrometer is used to measure the temperature on the top surface of the susceptor black body radiation It...

Страница 68: ...O ring system DOR The DOR system consists of two O rings The inner O ring and the outer O ring The intermediate volume is pumped continuously to ensure reliable and controllable sealing Fig 3 17 68 s...

Страница 69: ...or GaN growth provides Single wavelength reflectometry at 635 nm It is used for highly accurate growth rate and surface roughness measurements Fig 3 18 69 shows both the AIXTRON Multiwafer interferome...

Страница 70: ...ents Valves Mass flow controllers MFCs for controlling the gas flows Pressure controllers PCs for controlling the source pressures Gas purifier optional see Chapter 3 6 7 82 Hydride gas sources see Ch...

Страница 71: ...from this in certain details Always refer to the delivered gas diagram A Hydride gases B Gas supply for hydride sources C Gas supply for run lines D Gas dosing unit for hydride source E Pneumatic 5 2...

Страница 72: ...ces to the upper plenum of the showerhead See Fig 3 20 71 item H Vent lines For each run line there is also a vent line They lead past the reactor chamber into the vacuum system See Fig 3 20 71 item K...

Страница 73: ...of the optical access ports Skirt purge To assist gas flow over the edge of the susceptor to the exhaust Liner purge To purge the annulus between the reactor wall and the liner Heater purge To purge...

Страница 74: ...f Closed Hydride source off carrier gas on The source MFC item D controls the hydride gas flow The push MFC item E adds further carrier gas to dilute the hydride gas Fig 3 22 Standard hydride source D...

Страница 75: ...range you can use the following for mula to calculate the process gas flow FR into the reactor F1 flow through the source MFC F2 flow through the dilute MFC F3 flow through the inject MFC A A B C D E...

Страница 76: ...nted in thermostat heat baths See Fig 3 24 76 Several thermostat heat bath types are available For more information refer to the related OEM manual Fig 3 24 Thermostat heat bath example A Operating un...

Страница 77: ...e MFC item D controls the carrier gas flow into the bubbler The push MFC item E adds further carrier gas to dilute the carrier gas from the bubbler The pressure controller item C controls the pressure...

Страница 78: ...MO bubblers Fig 3 26 Standard MO source with double bubbler A B A G C P E F I K D L L H H J J J J J J A H2 supply B To MO run vent line C Pressure controller D Source MFC E Push MFC F Measuring devic...

Страница 79: ...ure operating point for the inject MFC item F and leads away excess gas into the hydride vent line item C Fig 3 27 Doping MO source Provided that all MFCs are in the control range you can use the foll...

Страница 80: ...As an example Fig 3 28 80 shows the arrangement of valves installed before a standard MO source Fig 3 28 Valves example A 4 2 way valve B Manual valves Pressure and flow controllers Fig 3 29 80 shows...

Страница 81: ...RIUS II Gas system Measuring apparatus for gas concentrations optional Fig 3 30 81 shows a measuring apparatus for gas concentrations It is used to measure the mixing ratio of two gases and can option...

Страница 82: ...tion Description System Manual Gas system CRIUS II 3 3 6 7 Gas purifier Gases purifiers are optionally available in order to obtain ultra pure gases Fig 3 31 82 and Fig 3 32 82 show examples Fig 3 31...

Страница 83: ...ual Description CRIUS II Electrical supply 3 7 Electrical supply Front Fig 3 33 83 and Fig 3 34 83 show the front side of the electrical cabinet Fig 3 33 Electrical cabinet 1 front side Fig 3 34 Elect...

Страница 84: ...AIXTRON Dokumentation Description System Manual Electrical supply CRIUS II 3 Back Fig 3 35 84 shows the rear side of the electrical cabinet Fig 3 35 Electrical cabinet rear side A Main fuses B Over c...

Страница 85: ...electro pneumatic valves Bypass lines with check valves to protect the system Exhaust gas filters including a separate water cooling unit 3 8 1 Vacuum pumps Glove box pump Fig 3 36 85 shows the glove...

Страница 86: ...2010 86 CONFIDENTIAL AIXTRON Dokumentation Description System Manual Vacuum system CRIUS II 3 Process pump Fig 3 38 86 shows a typical process pump It is used for evacuating the reactor chamber Fig 3...

Страница 87: ...components in vacuum diagrams Tab 3 1 Symbols used in the vacuum diagrams Symbol Meaning Manual valve Check valve High vacuum valve Pneumatic valve Solenoid pneumatic valve Throttle valve Filter Pres...

Страница 88: ...cuum diagram Reactor PV M C F G E PV B D A PV PT PV PV K H I J A Reactor B Reactor isolation valve C Exhaust filter device with cooling trap D Throttle valve for controlling the reactor pressure E MO...

Страница 89: ...R A Line for filling the DOR systems B Line for evacuating the DOR system C DOR pump D Exhaust to scrubber Vacuum cleaner vacuum tweezers Fig 3 41 Vacuum diagram Vacuum cleaner A PV PV C D PT B A A B...

Страница 90: ...ttle valve and in turn the pressure in the reactor See Fig 3 42 90 Fig 3 42 Pressure control unit Fig 3 43 90 shows the pressure gauge that measures the pressure in the reactor Fig 3 43 Pressure gauge...

Страница 91: ...xhaust filter unit The CRIUS II is equipped with an exhaust filter unit The two stage filter system comprises an upstream cooling trap and a downstream particle filter Fig 3 44 Exhaust filter unit sta...

Страница 92: ...y see Chapter 3 9 1 92 Pneumatic supply see Chapter 3 9 2 96 3 9 1 Water supply The following table lists the symbols which are used to specify the components in the water diagrams Symbol Meaning Manu...

Страница 93: ...IUS II Media supply Tab 3 2 Symbols used in the water diagrams The cooling water supply consists of three circuits that are shown in the follow ing diagrams For details refer to the delivered Cooling...

Страница 94: ...3 Circuit 1 without aluminum Fig 3 46 Water diagram Circuit 1 PV PV PV TT D C B B B B A K TT DFS TT DFS TT DFS E TT DFS PV E TT DFS H TT DFS TT DFS I PI F G J A Inlet B Thermostat bath 1 x C Process p...

Страница 95: ...RIUS II Media supply Circuit 2 with aluminum Fig 3 47 Water diagram Circuit 2 A Inlet B Heat exchanger C Showerhead D Circuit without Al components E Outlet Circuit 3 without aluminum Fig 3 48 Water d...

Страница 96: ...neumatic components are divided into the following groups MO Source Supply Hydride Source Supply H2 Source Supply H2 Run Supply I H2 Run Supply II Run Vent I Run Vent II Independent Valves Fig 3 49 Pn...

Страница 97: ...d with a safety control system preventing any unsafe state of the system The SCS monitors all signals valve positions sensors and analog limit val ues It operates stand alone and is superior to the co...

Страница 98: ...crius_II_en_00 Edition 06 2010 98 CONFIDENTIAL AIXTRON Dokumentation Description System Manual Safety Control System SCS CRIUS II 3...

Страница 99: ...ction 100 4 2 Packaging and external transport 101 4 3 Unpacking and internal transport 102 4 3 1 Hazard alerts 102 4 3 2 Unpacking 102 4 3 3 Internal transport by means of a crane 103 4 3 4 Internal...

Страница 100: ...e end user of the CRIUS II is responsible for Unpacking the system Factory internal transport of the system to the intended installation location Providing the supply connections water power pneumatic...

Страница 101: ...transported by means of a lift truck or a forklift truck The packing units are protected as follows Layer 1 Aluminum foil wrap Layer 2 Bubble wrap Layer 3 Aluminum wrap laminated and vacuum packed wit...

Страница 102: ...ed loads Never stay under a suspended load WARNING Transport devices Improper use of transport devices may result in personal injury and material damage Only authorized and specially trained personnel...

Страница 103: ...l transport by means of a crane Because of the non symmetrical centre of gravity the cabinets should be lifted and lowered by means of an adjustable H beam AIXTRON recommend using an adjustable H beam...

Страница 104: ...he crane using suitable belts 2 Lift the H beam with the crane up to the required height 3 Set the load hooks to positions which fit the transport lug positions of the cabinet to be transported 4 Atta...

Страница 105: ...vel surfaces Inclines A separate safety device for protection against tilting is required if the cabinet is transported on inclines Load capacity The surfaces must have a load capacity of at least 320...

Страница 106: ...er the cabinet onto the support plates 5 On both sides of the cabinet insert the load plates of the lift trucks below the cabinet frame 6 Use the load belts and tighten the load trucks to the cabinet...

Страница 107: ...media diagrams Space requirements The clearance distance for escape routes must be in keeping with the local safety regulations Safety doors covers etc must be installed in such a way that the CRIUS I...

Страница 108: ...functions must be demonstrated when the CRIUS II is handed over to the end user The CRIUS II must be ready for oper ation and must have been successfully subjected to previous operational and function...

Страница 109: ...um cleaner 117 5 2 7 Vacuum wand optional 118 5 2 8 Vacuum tweezers optional 118 5 2 9 N2 pistole optional 118 5 3 Operating elements Reactor 119 5 3 1 OPEN CLOSE buttons reactor lid chamber 119 5 3 2...

Страница 110: ...as mixing cabinet It controls the main switch in the electrical cabinet Remote control Fig 5 1 Remote control for the main switch Switch positions O OFF In this position the system is switched off com...

Страница 111: ...an lock the main switch in the O position Proceed as follows to lock out the main switch 1 Make sure that the main switch is set to the O position 2 Lock the main switch using a padlock Fig 5 2 Lockin...

Страница 112: ...IDENTIAL AIXTRON Dokumentation Operation System Manual General operating elements CRIUS II 5 5 1 3 Power ON OFF buttons Fig 5 3 112 shows the buttons for switching the mains power on and off Fig 5 3 O...

Страница 113: ...ting elements 5 1 4 Signal lamp The CRIUS II is equipped with signal lamps They indicate the state of the CRIUS II Fig 5 4 Signal lamp The signal colors are defined as follows Tab 5 1 Used signal colo...

Страница 114: ...System Manual General operating elements CRIUS II 5 5 1 5 Key switch for operating mode A key switch is used to switch between maintenance mode and operation mode Position 0 System is in operation mod...

Страница 115: ...et It switches on the components used for controlling the glove box and the reactor e g pressure control unit glove box control Fig 5 6 Main switch for components of the glove box 5 2 2 Gloves Three g...

Страница 116: ...uch as opening and closing the load lock doors For operation please refer to the corresponding OEM manual Fig 5 8 Control panel for the glove box 5 2 4 Control box inside of the glove box A control bo...

Страница 117: ...ctions Switch on off the susceptor rotation Evacuate the glove box Refill the glove box Fig 5 10 Pedal switches A Rotate the susceptor B Evacuate C Refill 5 2 6 Vacuum cleaner A vacuum cleaner is inst...

Страница 118: ...s installed in the glove box See Fig 5 12 118 It is oper ated with a pedal switch See Chapter 5 2 5 Pedal switches 117 Fig 5 12 Vacuum wand 5 2 8 Vacuum tweezers optional The vacuum tweezers that is i...

Страница 119: ...eactor lid chamber A OPEN button Open the reactor lid or the reactor chamber B CLOSE button Close the reactor lid or the reactor chamber 5 3 2 Key switch Fig 5 16 119 shows the key switch Fig 5 16 Key...

Страница 120: ...th two buttons are used for moving the reactor bottom It is loacated inside the reactor cabinet Fig 5 17 OPEN CLOSE buttons reactor bottom A OPEN button B CLOSE button 5 3 4 Pins up down buttons A box...

Страница 121: ...an be operated either directly Local or via the software Remote Fig 5 19 121 shows the front side of the pressure control unit with operat ing and display elements For operation please refer to the co...

Страница 122: ...itched off completely I ON In this position the system can be switched on WARNING Primary side of main switch Parts inside of the supply rack may be connected to the primary side of the main switches...

Страница 123: ...Operating elements Gas system 5 5 Operating elements Gas system 5 5 1 Control unit for the thermostat heat bath Fig 5 22 123 shows a control unit for the thermostat heat bath Fig 5 22 Control unit fo...

Страница 124: ...4 CONFIDENTIAL AIXTRON Dokumentation Operation System Manual Operator terminal CRIUS II 5 5 6 Operator terminal The CRIUS II can be operated via the server operator terminal or the client operator ter...

Страница 125: ...e all cabinet doors of the CRIUS II 2 Switch the main switch to the ON position Fig 5 24 Switch on the main switch The red OFF button is illuminated 3 Press the green ON button The red OFF button gets...

Страница 126: ...o switch the CRIUS II off 1 Quit AIXACT 2 Shut down the operating system 3 Press the red OFF button The green ON button gets dark The red OFF button is illuminated Fig 5 27 ON OFF buttons A ON button...

Страница 127: ...Fig 5 28 Using the gloves NOTE For reasons of hygiene you should put on clean room gloves before slipping into the gloves installed in the glove box We also recommend you to wear clean room glove on t...

Страница 128: ...the outer lock chamber door and open the door 3 Pull out the drawer Fig 5 29 Outer lock chamber door A Drawer B Handle 4 Put the substrates into the drawer 5 Push the drawer back into the lock chambe...

Страница 129: ...d for opening if the OPEN button is illu minated by green light Fig 5 31 OPEN and CLOSE buttons 10 Pull the drawer from the lock chamber into the glove box Fig 5 32 Pulling the drawer out of the lock...

Страница 130: ...crius_II_en_00 Edition 06 2010 130 CONFIDENTIAL AIXTRON Dokumentation Operation System Manual Preparing for a process CRIUS II 5...

Страница 131: ...schedule Glove box 139 6 3 5 Maintenance schedule Reactor 139 6 3 6 Maintenance schedule Heating system 140 6 3 7 Maintenance schedule Vacuum system 140 6 3 8 Maintenance schedule Pneumatic system 141...

Страница 132: ...acuum system 164 6 11 1 Hazard alerts 164 6 11 2 Process pump 164 6 11 3 Checking the KF clamps 165 6 11 4 Checking the throttle valve 166 6 11 5 Checking the pneumatic valves 167 6 11 6 Searching for...

Страница 133: ...ians on a regular basis Various important wear sensitive system parts such as vacuum seals sealing rings ball bearings etc will then be replaced by new parts Please contact your local AIXTRON represen...

Страница 134: ...operating personnel 24 and Chapter 2 5 Danger areas for maintenance and service personnel 25 6 1 9 Maintenance mode You must switch the CRIUS II to the maintenance mode to carry out certain maintenanc...

Страница 135: ...equipment as required for any work on contaminated systems Clean and lint free clean room gloves Industrial vacuum cleaner Fig 6 1 Standard tool box 6 2 2 Contaminated parts Components which contact p...

Страница 136: ...lters Particle filter Glove box filters Vacuum cleaner filters Vacuum wand filters Circulation filters 6 2 4 Operating materials Cleaning agents Lint free cloth Isopropanol 2 propanol NOTE Parts of th...

Страница 137: ...for maintenance work on one system A logbook allows the end user to keep a reliable check on the type and date of performed maintenance work Layout of the mainte nance schedules Tab 6 1 Layout of the...

Страница 138: ...onthly See Chapter 6 7 2 149 Checking the fuses Quaterly See Chapter 6 7 3 151 Checking the over current cir cuit breakers Quaterly See Chapter 6 7 4 151 Checking the EMERGENCY OFF buttons Quaterly Se...

Страница 139: ...cking the regeneration function Quaterly See OEM manual by MBRAUN Checking the tightness of the glove box Monthly See Chapter 6 9 6 158 Action Interval Comments Date and signa ture Opening the reactor...

Страница 140: ...Please contact your local AIXTRON service center for more information Mounting the thermocouple Please contact your local AIXTRON service center for more information Action Interval Comments Date and...

Страница 141: ...hapter 6 12 2 169 Checking the pressure switch Quaterly See Chapter 6 12 3 170 Checking the EPV valves Yearly See Chapter 6 12 4 170 Action Interval Comments Date and signa ture Replacing a bubbler De...

Страница 142: ...t Label Refer to Chapter 2 7 Lockout Tagout Prozedur 37 for general description of the LOTO procedure LOTO positions Fig 6 2 142 shows the LOTO positions of the CRIUS II Fig 6 2 LOTO positions Front a...

Страница 143: ...B Gases Lockable shut off valves between the gas interface of the CRIUS II and the media supply of the end user Close lockable shut off valves lockout and tagout them C Pneumatic Shut off valve at the...

Страница 144: ...ng groove Visual inspection 2 Inspect the seal It must be Regular in diameter Free from noticeable gluing joints Free from any damage such as cuts or swellings See Fig 6 3 145 Trade name Abbreviation...

Страница 145: ...seal through a dry and clean cloth to remove coarse soiling 4 Pull the seal through a cloth moistened with isopropanol Inserting 5 Insert the seal 6 Check the excess of the seal in the groove See Fig...

Страница 146: ...t might not work well on Nitrides For thin GaN layers the methode should be applicable Etching time The etching time will depend on amount of deposition Account few hours Rinsing Rinsing should be per...

Страница 147: ...Solution AIXTRON recommends using a solution of 90 KOH and 10 H2O2 KOH is prepared from KOH pellets 30 in weight in DI water However the etchant also partly attacks the molybdenum and the coating is...

Страница 148: ...res CRIUS II 6 6 6 4 Stainless steel parts Solutions AIXTRON recommends a Sodium Hydroxyde solution on systems growing Arsenides If grown layers are predominantly Phosphides AIXTRON recommends to use...

Страница 149: ...control Fig 6 5 Remote control for the main switch WARNING Hazardous voltage The system contains parts which carry dangerous levels of voltage Touching these parts will cause an electric shock The sh...

Страница 150: ...nnects and jumps to the trip position The RCD can be tested to see if it is operational Proceed as follows 1 Make sure that the system is in a state where it may be switched off safely 2 Open the door...

Страница 151: ...r 6 7 4 Checking the over current circuit breakers The system contains over current circuit breakers They are located in the electrical cabinet and in the heater supply unit Fig 6 8 Over current circu...

Страница 152: ...power supply CRIUS II 6 6 7 5 Checking the EMERGENCY OFF buttons 1 Check the function of the EMERGENCY OFF buttons EMERGENCY OFF buttons outside the cabinets Fig 6 9 EMERGENCY OFF buttons outside the...

Страница 153: ...153 shows a low power supply Fig 6 11 Low power supply example A Inlet B LED display C Output D Grounding 1 Open the corresponding doors 2 Check the LED display at the low power supply Normally the gr...

Страница 154: ...n Maintenance System Manual Low power supply CRIUS II 6 6 8 2 Checking the fuses The fuses for the low power supply are located in the electrical cabinet Fig 6 12 Fuses 1 Open the corresponding doors...

Страница 155: ...6 9 Glove box 6 9 1 Checking the control panel 1 Check the functions of the control panel e g opening closing the load lock See MBraun OEM manual Fig 6 13 Control panel 6 9 2 Replacing the particle f...

Страница 156: ...3 Remove the filter Fig 6 16 Removing the pump filter A Position of the filter B KF clamp C Pump 4 Blow out the filter grid with compressed air and clean it with alcohol WARNING Hazardous process gas...

Страница 157: ...rientation The filter grid must be located on the vacuum side See Fig 6 17 157 6 9 4 Checking the gloves 1 Pull the gloves out of the glove box 2 Check the gloves for tears Especially check critical p...

Страница 158: ...ws 8 2 Push the glove to the interior of the glove box Call a second person for assistance This avoids crinkles when screwing on the frame 8 3 Tighten the Allen screws 6 9 6 Checking the tightness of...

Страница 159: ...vacuum system may contain hazardous gases which can be detri mental for your health Always wear a gas mask gloves and industrial clothing with long sleeves when opening parts of the vacuum system Read...

Страница 160: ...ng the reactor lid 1 Make sure that the key switch is in the vertical position See Chapter 5 3 2 Key switch 119 2 Press the OPEN button The reactor lid is only cleared for opening if the OPEN button i...

Страница 161: ...ered wrench to remove the nuts securing the reactor chamber See Fig 6 21 161 Fig 6 21 Removing the reactor chamber nuts 4 Press the OPEN button The reactor chamber is only cleared for opening if the O...

Страница 162: ...See Chapter 6 10 2 2 Opening the reactor chamber 161 4 Visually check the O rings for damage Replacing the O rings 1 Replace defective O rings as follows 1 1 Remove the defective O ring with plastic...

Страница 163: ..._II_en_00 Edition 06 2010 System Manual Maintenance CRIUS II Reactor 6 10 4 Checking the susceptor rotation 1 Open the reactor lid See Chapter 6 10 2 1 Opening the reactor lid 160 Fig 6 22 Susceptor 2...

Страница 164: ...al 1 Open the reactor cabinet to access the process pump Fig 6 23 Process pump example Fig 6 24 165 shows the control panel for the pump For operation please refer to the OEM manual WARNING Hazardous...

Страница 165: ...rogen flow Operating temperature 3 Adjust the values if necessary 6 11 3 Checking the KF clamps 1 Open the corresponding doors to access the vacuum system 2 Check all KF clamps for correct mounting 3...

Страница 166: ...6 27 166 shows the removed throttle valve Fig 6 27 Throttle valve removed 3 Loosen both fastening screws of the seal plate See Fig 6 28 167 4 Remove the seal plate WARNING Hazardous process gases The...

Страница 167: ...the O ring for damage and replace if necessary 6 Install the seal plate 7 Install the throttle valve to the vacuum system Pay attention to the correct orientation 6 11 5 Checking the pneumatic valves...

Страница 168: ...as mixture Proceed as follows to search for leaks 1 Connect the inlet of the He leak detector to the vacuum system 2 Connect the outlet of the He leak detector to a suitable exhaust system 3 Perform a...

Страница 169: ...ents of the CRIUS II via EPV valves For more information refer to the related OEM manual Fig 6 30 Pneumatic unit for the glove box A shut off valve B Pressure switch C Filter regulator 6 12 2 Checking...

Страница 170: ...e limit value at the pressure sensor The pressure limit must be set to 4 bar 2 If necessary adjust the pressure limit See OEM manual Fig 6 32 Pressure sensor A Pressure display B Operating elements 6...

Страница 171: ...MO source 3 Close the manual valves at the bubbler item J in Fig 6 34 171 to isolate the bubbler from the system 4 Switch the system to H2 WARNING MO materials MO materials can be harmful to your hea...

Страница 172: ...one minute This will pump the source lines external to the bubbler 11 Close the MO vac valve and open the 4 2 way MO source valve Wait until the source line is filled again to 2000 mbar 12 Close the 4...

Страница 173: ...nd calcu lating the difference NOTE The pressure in a new bubbler is typically atmospheric pressure at room temperature If this bubbler is cooled or heated for operation the pres sure in the bubbler w...

Страница 174: ...12 Connect a He leak tester to the MO leak test port on the MO vac line and evacuate the pipe from the leak test port to the leak tester 13 Open the MO leak test port manual valve 14 Close the 4 2 wa...

Страница 175: ...equalize 31 Close both quarter turn valves item H in Fig 6 35 173 on the source manifold to the MO vac line 32 Close the 4 2 way MO source valve in AIXACT 33 Set all MFCs to normal operating state def...

Страница 176: ...3 Close the inlet valves for the process gas supply 4 Wait approx 3 minutes to guarantee an absolute zero flow 5 In AIXACT make sure that the deviation of the MFC is less than 1 of the maximum config...

Страница 177: ...System Manual Maintenance CRIUS II Gas system Zero offset for Horiba MFC 1 Press the ZERO button on the back side of the MFC using a proper tool e g small screw driver Fig 6 37 Zero offset for Horiba...

Страница 178: ...ter with flow limiter B shut off valve C Water filter D Pneumatic valve E Manual valve Checking the inlet pressure 2 Check the pressure display at the filter units You find the required pressure value...

Страница 179: ...hose to the drain as shown in the figure above 2 Turn the rotary basket item D counterclockwise until it is fully open This will open the ball valve and rinse the filter 3 Rinse the filter for 20 25...

Страница 180: ...he flow values can be checked at the Data Sampler 1 Open the reactor cabinet to access the Data Sampler Fig 6 40 Data Sampler Checking the Data Sampler configu ration 2 Check the configuration of the...

Страница 181: ...low value is out of range an alarm occurs 7 If necessary correct the limit values in the Data Sampler 6 14 4 Unintended release of liquid The entire system is equipped with liquid sensors which are co...

Страница 182: ...crius_II_en_00 Edition 06 2010 182 CONFIDENTIAL AIXTRON Dokumentation Maintenance System Manual Cooling water system CRIUS II 6...

Страница 183: ...I 7 Storage disposal 7 Storage disposal 7 1 Storage 184 7 1 1 Deactivating the system 184 7 1 2 Storage conditions 184 7 2 Disposal 185 7 2 1 Personnel qualifications 185 7 2 2 Safety regulations 185...

Страница 184: ...e protects the water circuit from damage caused by freezing when the temperature drops below 0 C 3 Blow out the pneumatic circuit with compressed air This removes any condensation water 4 Switch off t...

Страница 185: ...d user is responsible for proper disposal of the CRIUS II in keeping with the relevant regulations The end user must hand over the system to either a licensed private or public disposal company or he...

Страница 186: ...es not occur Environment and landscape are not damaged Sorting Subsequent to dismantling the system you must sort the individual system parts into their respective waste categories Do this in accordan...

Страница 187: ...ing cover plates etc Copper electric lines Steel profiles fixation equipment such as screws etc Stainless steel process chamber Glass Glass sight glasses panes used in dis play instruments Synthetic m...

Страница 188: ...process chamber These components must be classified as hazardous waste and brought to a specialized hazardous waste disposal company CAUTION Contaminated materials Contaminated materials are harmful...

Страница 189: ...er Water that has been purified from minerals by an ion exchange process DI water may still contain uncharged impurities such as organic compounds DOR Double O ring system Used to create an intermedia...

Страница 190: ...es has three inlets and one outlet The valve has three positions One of the inlets can be connected to the outlet at a time The valve position is set by means of two binary digits MSDS Material safety...

Страница 191: ...egion in which gas is present at a low pressure Usually we distinguish between rough vacuum 103 1 mbar fine vacuum 1 10 3 mbar high vacuum 10 3 10 7 mbar and ultrahigh vacuum p 10 7 mbar Vacuum in Pa...

Страница 192: ...crius_II_en_00 Edition 06 2010 192 CONFIDENTIAL AIXTRON Dokumentation Appendix System Manual Glossary CRIUS II 8...

Страница 193: ...3 Copyright 2 D DANGER 23 Definition CAUTION 23 DANGER 23 NOTE 23 WARNING 23 Document identification 6 H Hazard alerts definition 23 I Intended use 6 L Lockout tagout procedure 38 M Material safety da...

Страница 194: ...crius_II_en_00 Edition 06 2010 194 CONFIDENTIAL AIXTRON Dokumentation Index System Manual CRIUS II 9 T Training 9 U User qualifications 8 V Validity of this System Manual 6 W WARNING 23...

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