Agilent Technologies R1330-529 HS-16 Скачать руководство пользователя страница 1

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INSTRUCTION MANUAL
SUPPLEMENT

R1330-529 HS-16
R1797-301 HS-20
R1333-539 NHS-35
R1333-543 NHS-35

vacuum technologies

Diffusion Pumps

for Applied

Film Coating

Systems

Manual Number 699950040
Revision A
March 2003

NOTICE: This document contains references to Varian.

Please note that Varian, Inc. is now part of Agilent

Technologies. For more information, go to

www.agilent.com/chem.

Содержание R1330-529 HS-16

Страница 1: ...3 NHS 35 vacuum technologies Diffusion Pumps for Applied Film Coating Systems Manual Number 699950040 Revision A March 2003 NOTICE This document contains references to Varian Please note that Varian I...

Страница 2: ...uum Technologies Diffusion Pumps for Applied Film Coating Systems VacuSolv is a trademarks of Varian Vacuum Technologies Apiezon is a registered trademark of M I Materials Ltd Alconox is a registered...

Страница 3: ...cluding representatives of Seller which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller...

Страница 4: ...d and maintained by trained personnel Every operator or service person must read and thoroughly understand operation maintenance manuals and any additional information provided by Varian Vacuum Techno...

Страница 5: ...ngs that will come in contact with the spectrometer tube Do not use alcohol methanol or other solvents on O rings To do so causes deterioration and reduces the O ring s ability to hold a vacuum In all...

Страница 6: ...t Varian Vacuum Technologies Customer Service at 1 800 8VARIAN Internet users Send email to Customer Service Technical Support at vpl customer support varianinc com Visit our web site at www varianinc...

Страница 7: ...ual for any part that is not shown on this list or contact the factory for technical assistance Figure 1 on page 3 shows the location of the replacement parts on the diffusion pump Electrical Wiring E...

Страница 8: ...he electrical box For the wiring schematic of the heaters to the terminal strip please refer to the standard instruction manual or the wiring label on the inside cover of the electrical box Figure 5 o...

Страница 9: ...Diffusion Pumps for Applied Film Coating Systems 3 Figure 1 Supplemental Replacement Part Location...

Страница 10: ...Diffusion Pumps for Applied Film Coating Systems 4 Figure 2 HS 16 Wire Schematic...

Страница 11: ...Diffusion Pumps for Applied Film Coating Systems 5 Figure 3 HS 20 Wire Schematic...

Страница 12: ...Diffusion Pumps for Applied Film Coating Systems 6 Figure 4 NHS 35 Wire Schematic 480V 400V...

Страница 13: ...s for Applied Film Coating Systems 7 Figure 5 Power Module Pin Assignments Figure 6 ATHf 20 Switch and Thermostat Wire Harness Pin Assignments Figure 7 PT 100 Wire Harness Pin Assignments 1 2 3 4 5 6...

Страница 14: ...Diffusion Pumps for Applied Film Coating Systems This page intentionally left blank...

Страница 15: ...the customer is held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Varian employees occurring as a result of exposure to toxic...

Страница 16: ...ONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage problem Solenoid failure Damaged flange Error code on display Other Damaged sealing area O...

Страница 17: ...Returned Materials Report...

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Страница 20: ...House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax...