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16

  Instructions for Use

 

Safety Guideline for Turbomolecular Pumps 

 

196/276

 

TV 551/701 SEM Navigator User Manual / 87-900-958-01(G

)

 

Safety Guideline for Turbomolecular Pumps 

Turbomolecular pumps as described in the following operating 
manual contain a large amount of kinetic energy due to the high 
rotational speed in combination with the specific mass of their 
rotors. 

In case of a malfunction of the system for example rotor/stator 
contact or even a rotor crash the rotational energy may be released. 

 

WARNING! 

 

 

To avoid damage to equipment and to prevent injuries to operating personnel 
the installation instructions as given in this manual should be strictly 
followed! 

 

Содержание 969-8935

Страница 1: ...TV 551 701 SEM Navigator Pump models 969 8935 969 8936 969 8937 969 8938 Controller models 969 8976 969 8977 87 900 958 01 G 04 2011 User Manual Manual de Instrucciones...

Страница 2: ...ent are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government pri...

Страница 3: ...TV 551 701 SEM Navigator TV 551 701 SEM Navigator User Manual 87 900 958 01 G 3 276 TV 551 701 SEM Navigator...

Страница 4: ...TV 551 701 SEM Navigator 4 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G...

Страница 5: ...nformazioni generali 17 Immagazzinamento 18 Preparazione per l installazione 19 Installazione 20 Fissaggio della pompa 21 Uso22 Manutenzione 25 Smaltimento 26 2 Gebrauchsanleitung27 Sicherheitshinweis...

Страница 6: ...41 Stockage 42 Preparation pour l installation 43 Installation 44 Fixation de la pompe45 Utilisation 46 Entretien 49 Mise au rebut 50 4 Manual de istrucciones 51 Indicaciones de Seguridad para Bombas...

Страница 7: ...Installation 199 Installation 200 Pump Fixing201 Use202 Maintenance 205 Disposal 206 17 Technical Information 207 Description of the TV 551 701 Navigator 209 Pump Description 210 Controller Descriptio...

Страница 8: ...it Installation 246 Water Cooling Kit Installation 250 Vent Accessories 252 Vibration Isolators 256 Purge Valve Installation 257 Serial Cable Installation 258 TV 551 701 SEM Controller Installation 25...

Страница 9: ...Contents 14 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G...

Страница 10: ...ulares 52 Informaci n general 53 Almacenamiento 54 Preparaci n para la instalaci n 55 Instalaci n 56 Fijaci n de la bomba 57 Uso 58 Encendido y Uso del TV 551 701 SEM Navigator 59 Parada del TV 551 70...

Страница 11: ...ienen una elevada cantidad de energ a cin tica debido a la alta velocidad de rotaci n en combinaci n a la masa espec fica de sus rotores En el caso de un da o del sistema por ejemplo por un contacto e...

Страница 12: ...c o integrada por el controler correspondiente El sistema puede bombear cualquier tipo de gas o de composici n gaseosa pero no es adecuado para bombear l quidos o part culas s lidas El efecto de bombe...

Страница 13: ...notas contienen informaciones importantes extrapoladas del texto Almacenamiento Para garantizar el nivel m ximo de funcionalidad y fiabilidad de las bombas turbomoleculares Agilent deber n aplicarse...

Страница 14: ...tacto con la oficina local de ventas Durante la operaci n de desembalaje tener cuidado de que no se caiga el TV 551 701 SEM Navigator y de no someterlo a golpes o vibraciones No abandonar el embalaje...

Страница 15: ...strucciones Instalaci n 56 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Figura 1 Instalaci n ATENCI N Despegar el adhesivo y quitar el tap n de protecci n s lo al conectar la bomba al sist...

Страница 16: ...on Fijaci n de la bomba ADVERTENCIA En caso de da arse el rotor la conexi n entre la bomba y el sistema puede ser sometida a un par de fuerza excesivo En estas circunstancias la conexi n podr a no res...

Страница 17: ...a categor a El TV 551 701 SEM Navigator tiene conectores para las entradas salidas y para la comunicaci n serial que deben ser conectados a los circuitos externos de manera que ninguna parte bajo tens...

Страница 18: ...i n de entrada a trav s de la puerta deber ser inferior a 2 bar por encima de la presi n atmosf rica Para bombear gases agresivos estas bombas est n dotadas de una puerta espec fica mediante la cual e...

Страница 19: ...proximadamente el sistema est en estado de rampa o de frenado o de stop o de waiting for iterlock parpadea r pidamente periodo de 200 ms aproximadamente condici n de error Parada del TV 551 701 SEM Na...

Страница 20: ...rtuna esperar hasta que el rotor se pare completamente y esperar a que la temperatura superficial de la bomba sea inferior a 50 C En caso de aver a se podr utilizar el servicio de reparaci n Agilent o...

Страница 21: ...pea indica que el producto sobre el cual ha sido aplicado NO debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y que por el contrario deber ser sometido a un proced...

Страница 22: ...molecular Pumps 196 General Information 197 Storage 198 Preparation for Installation 199 Installation 200 Pump Fixing 201 Use 202 Switching on and Use of TV 551 701 SEM Navigator 204 TV 551 701 SEM Na...

Страница 23: ...anual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator co...

Страница 24: ...ecular pump for high and ultra high vacuum applications with its relevant controller The system can pumps any type of gas or gas compound It is not suitable for pumping liquids or solid particles The...

Страница 25: ...ge to the equipment NOTE Notes contain important information taken from the text Storage In order to guarantee the maximum level of performance and reliability of Agilent Turbomolecular pumps the foll...

Страница 26: ...ansport contact your local sales office When unpacking the system be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unau...

Страница 27: ...s for Use Installation 200 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Figure 1 Installation CAUTION Do not remove the adhesive and protective cap before connecting the turbopump to the s...

Страница 28: ...st be connected to a primary pump see Technical Information Pump Fixing WARNING If a rotor failure occurs the connection of the pump to the system could be subjected to a significant torque If the con...

Страница 29: ...er directive EN 61010 1 Connect the device to a mains line that satisfy the above category The TV 551 701 SEM Navigator has Input Output and serial communication connectors that must be connected to e...

Страница 30: ...n operation The bearings may become damaged Use air or inert gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure For p...

Страница 31: ...e TV 551 701 SEM Navigator base front panel indicates with its flashing frequency the system operating conditions with no flashing the pump is normally rotating slowly flashing period of about 400 ms...

Страница 32: ...the pump by opening the appropriate valve wait until the rotor has stopped turning and wait until the surface temperature of the pump falls below 50 C In the case of breakdown contact your local Agil...

Страница 33: ...his symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a...

Страница 34: ...3 TV 551 701 SEM Navigator Outline 216 Interconnections 221 P3 Vent 222 P4 External Fan 222 J1 In Out 223 Signal Description 224 How to Connect the Output Open Collector of the Controller 229 J2 Seria...

Страница 35: ...9834 252 Standard Rack Controller Compatible 254 Vent Valve mod 969 9843 254 Vent Device mod 969 9831 254 Vibration Isolators 256 Single Damper256 Double Damper 256 Purge Valve Installation 257 Seria...

Страница 36: ...for TV 701 The models of each group differ in the high vacuum flange The TV 551 SEM Navigator pump two models are Model 969 8935 with ISO 160 K high vacuum flange Model 969 8936 with ISO 160 F high va...

Страница 37: ...ne rotates in an anticlockwise direction when viewed from the high vacuum flange end The envelope is made of STT The turbine is made of high strength aluminium alloy machined from a single block Proce...

Страница 38: ...ioning machined discs with pumping channels and an opening restricted by the corresponding rotor discs These are made of aluminium alloy The pump can be water cooled or air cooled in the first case th...

Страница 39: ...f two PCBs which include power supply and 3 phase output analog and input output section microprocessor and digital section The power supply together with the 3 phase output converts the single phase...

Страница 40: ...leak free test dome 48 hours after the completion of test dome bake out with a Turbopump fitted with a ConFlat flange and using the recommended pre vacuum pump with minimum recommended mechanical pum...

Страница 41: ...following figure bearing peak 45 mm sec2 residual unbalance 350 mm sec2 Lubricant permanent lubrication Noise level 45 dB A at 1 meter Power supply Input voltage Input freq Max input power Stand by p...

Страница 42: ...r kit RS232 cable with a 9 pin D type male connector and a 9 pin D type female connector and Navigator software optional Storage temperature 20 C to 70 C Weight kg lbs pump controller 19 4 43 5 4 12 N...

Страница 43: ...avigator Outline 216 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 701 SEM Navigator Outline The following figures show the TV 551 701 SEM Navigator outlines dimensions are in inches...

Страница 44: ...Technical Information TV 551 701 SEM Navigator Outline 17 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 217 276 Figure 7 TV 701 SEM Navigator outline...

Страница 45: ...cal Information TV 551 701 SEM Navigator Outline 218 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 SEM TV 701 SEM Figure 8 Graph of nitrogen pumping speed vs inlet pressure with inle...

Страница 46: ...Technical Information TV 551 701 SEM Navigator Outline 17 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 219 276 Figure 9 Graph of compression ratio vs foreline pressure...

Страница 47: ...n TV 551 701 SEM Navigator Outline 220 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G TV 551 SEM TV 701 SEM Figure 10 Graph of nitrogen throughput vs inlet pressure using the recommended mec...

Страница 48: ...Technical Information Interconnections 17 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 221 276 Interconnections The following figure shows the TV 551 701 SEM interconnections Figure 11...

Страница 49: ...TV 551 701 SEM Navigator User Manual 87 900 958 01 G P3 Vent Figure 12 This is a dedicated 24 Vdc connector to control the optional vent valve P4 External Fan Figure 13 This is a dedicated 24 Vdc conn...

Страница 50: ...the TV 551 701 SEM Navigator It is a 15 pins D type connector the available signals are detailed in the table the following paragraphs describe the signal characteristics and use Tab 3 PIN N SIGNAL N...

Страница 51: ...and the START STOP signal to the GROUND pin in this condition the pump automatically starts as soon as the controller recognises the input supply Plug Pump INTERLOCK input signal to control the pump r...

Страница 52: ...fixed to ground the pump speed is set to Low Speed The Low Speed frequency is settable by window 117 see RS232 RS485 Communication Description SOFT START this input is used to provide a soft start to...

Страница 53: ...J1 In Out 226 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Figure 16 The screen can be mounted on each pump model Figure 17 FAULT this open collector output signal is ON when a system fau...

Страница 54: ...l active that is the output is normally at 24 Vdc and becomes 0 Vdc when activated Moreover if the reference quantity is the frequency or the current drawn it is possible to set the hysteresis in of t...

Страница 55: ...settings reference quantity frequency thereshold 643 Hz hysteresis 2 activation type high level delay time 0 second NOTE The Navigator Software optional allows the operator to set all the programmabl...

Страница 56: ...r Here below there are the typical connections of the output open collector of TV551 701 SEM Navigator to an external system Two cases are considered the customer supplies the 24 Vdc the customer does...

Страница 57: ...17 Technical Information J1 In Out 230 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Figure 21 Case 2 with relay utilization...

Страница 58: ...Technical Information J1 In Out 17 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 231 276 Figure 22 Case 2 with transistor utilization...

Страница 59: ...onnector to control via an RS 232 or RS 485 connection the TV 551 701 SEM Tab 4 PIN N SIGNAL NAME 1 SPARE 2 TX RS232 3 RX RS232 4 SPARE 5 GND 6 A RS485 7 SPARE 8 B RS485 9 RESERVED Note that the vent...

Страница 60: ...85 is necessary to select the type of communication as well as the device address by means of the Navigator software Communication Format 8 data bit no parity 1 stop bit baud rate 600 1200 2400 4800 9...

Страница 61: ...ragraph COM Command 0x30 to read the window 0x31 to write into the window DATA an alphanumeric ASCII string with the data to be written into the window In case of a reading command this field is not p...

Страница 62: ...f a logic window Numeric 6 bytes After a read instruction of a numeric window Alphanumeric 10 bytes After a read instruction of an alphanumeric window ACK 1 byte 0x6 The command execution has been suc...

Страница 63: ...RT Source PC Destination Controller 02 80 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command STOP Source PC Destinati...

Страница 64: ...rce PC Destination Controller 02 80 31 30 30 31 31 03 42 32 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command SOFT START OFF Source PC Desti...

Страница 65: ...30 03 38 37 STX ADDR WINDOW RD ETX CRC Source Controller with address 3 in stop status Destination PC 02 83 32 30 35 30 30 30 30 30 30 03 38 37 STX ADDR WINDOW DATA STATUS ETX CRC Command READ SERIAL...

Страница 66: ...ial 0 default 1 100 R W L Soft Start write only in Stop condition YES 1 NO 0 101 R W N Set Point type 0 Frequency 1 Current 2 Time default 0 102 R W N Set Point threshold expressed in Hz mA or s defau...

Страница 67: ...tput voltage signal proportional to frequency or power 0 frequency 1 power default 0 117 R W N Low Speed frequency Hz 272 to Maximum rotational frequency win 121 default 476 120 R W N Rotational frequ...

Страница 68: ...iving frequency in Hz 204 R N Pump temperature in C 0 to 70 205 R N Pump status Stop 0 Waiting intlk 1 Starting 2 Auto tuning 3 Braking 4 Normal 5 Fail 6 206 R N Error code Bit description see the fol...

Страница 69: ...31 default 0 NOTE 1 Automatic means that when the controller stops the vent valve is opened with a delay defined by window n 126 when the controller starts the vent valve is immediately closed 2 On c...

Страница 70: ...creen Installation Figure 25 Figure 26 The inlet screens mod 969 9304 and 969 9316 prevents the blades of the pump from being damaged by debris greater than 0 7 mm diameter The inlet screen however do...

Страница 71: ...ser Manual 87 900 958 01 G Figure 27 The screen can be mounted on each pump The screen can be removed as shown in the following figure Figure 28 The following figure shows the overall flange dimension...

Страница 72: ...Technical Information Inlet Screen Installation 17 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 245 276 Figure 29 Figure 30...

Страница 73: ...1 SEM with Navigator Controller An air cooling kit mod 969 9339 is available to improve the TV 551 701 SEM cooling during heavy operational conditions optional Figure 31 Fan specifications air flow 20...

Страница 74: ...To fix the fan to the TV 551 701 SEM case execute the following procedure see the following figure 1 Fix the fan to the suitable bracket by means of the furnished screws 2 Fix the bracket to the pump...

Страница 75: ...701 SEM Pump with Standard Rack Controller When the TV 551 701 SEM pumps are used with the standard rack controller it is necessary to utilize the air cooling kit model 969 9314 Figure 33 Fan specific...

Страница 76: ...vigator User Manual 87 900 958 01 G 249 276 To fix the fan to the pump position it ensuring that the holes in the plate line up with those in the pump base Insert the respective washers and screws and...

Страница 77: ...SEM Navigator User Manual 87 900 958 01 G Water Cooling Kit Installation The water cooling kit mod 969 9347 or 969 9337 must be installed when the pump is used under heavy load conditions or when air...

Страница 78: ...he two water cooling banjos Cooling may be carried out either through an open circuit with eventual discharge of the water or using a closed circuit cooling system The water temperature must be betwee...

Страница 79: ...p during temporary power failure and enables an automatic vent operation TV 551 701 SEM Navigator Controller Compatible Vent Valve mod 969 9834 Figure 38 This vent valve waits before opening a minimum...

Страница 80: ...rew the vent valve into the pump and tighten it using a 16 mm hexagonal spanner with a torque of 2 5 Nm Figure 40 CAUTION Do not overtighten the valve as this may damage the thread on the pump Then co...

Страница 81: ...ard Rack Controller Compatible Vent Valve mod 969 9843 Figure 41 This vent valve has a fixed delay time of about 5 sec This value can be used only with rack controller To install the vent valve execut...

Страница 82: ...time up to 36 min This value can be used only with rack controller To install the vent device unscrew and remove the threaded plug see the following figure Figure 43 Screw the flange mod 969 9108 on...

Страница 83: ...73 for ISO 160 F flange model 969 9374 for ISO 200 F flange They typically reduce the vibration transmitted from the TV 551 701 SEM Navigator to the system by a factor D 20 For more information please...

Страница 84: ...lease refer to the relevant instruction manual Figure 45 Purge Valve Installation A gas purge valve is available to protect the pump bearings against particulate and corrosive gases that could move in...

Страница 85: ...Nm as shown in the following figure Figure 47 Figure 48 Serial Cable Installation The supplied serial cable must be installed when the TV 551 701 SEM Navigator or the optional vent valve have to be co...

Страница 86: ...Bottom Mounting See the following figure 1 Turn the pump upside down 2 Place the three fixing blocks with the through holes toward the inside and fix them with the three M6 screws to the pump bottom 3...

Страница 87: ...17 Technical Information TV 551 701 SEM Controller Installation 260 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Figure 50...

Страница 88: ...the nuts The 6 holes on the bracket allows to mount the controller with the rotation angle that you like 2 Turn the pump upside down 3 Place the bracket on the pump bottom the hole on the bracket has...

Страница 89: ...701 SEM Controller Installation 262 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G Figure 51 Connection A HIGH VACUUM FLANGE For ISO K flange connections fix the two flanges with the clamps...

Страница 90: ...fixing torque To facilitate assembly and dismantling apply Fel pro C 100 high temperature lubricant to the screw threads protruding from the flange and between the nuts and flange Note that the conne...

Страница 91: ...acuum pump A hose or vacuum approved pipe can be used If a rigid pipe is used any vibration generated by the mechanical pump must be eliminated through the use of bellows NOTE The Turbo V551 701 SEM p...

Страница 92: ...nd pin E is connected to the pump ground pins G and H are not connected If the temperature sensor is disconnected the pump will not start To prevent damage to the pump when the temperature exceeds 60...

Страница 93: ...acuum pressure The recommended procedure to vent the system and the pump avoiding the contact between the pump bearings and the corrosive gas is described in the following points 1 Close the corrosive...

Страница 94: ...with Corrosive Gases 17 TV 551 701 SEM Navigator User Manual 87 900 958 01 G 267 276 Figure 55 Purge layout Tab 8 1 Purge gas line 2 Pressure regulator 3 Gas purge valve 4 Gas purge port 5 Forevacuum...

Страница 95: ...agnetic field In general therefore an increase in pump current can be expected If this increase is lower than 50 of the current value drawn by the motor in high vacuum operation no particular problem...

Страница 96: ...on isolator ISO 200 F 969 9378 Vent flange NW 10 KF M8 969 9108 Vent device with adjustable delay time for standard rack controller 969 9831 Vent valve for standard rack controller 969 9843 Vent valve...

Страница 97: ...17 Technical Information Accessories and Spare Parts 270 276 TV 551 701 SEM Navigator User Manual 87 900 958 01 G...

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Страница 103: ...6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 1QU UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 China Agilent Technologies China Co Ltd Vacuum Products Division No 3...

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