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Turbomolekulárne vývevy

Turbomolekulárne vývevy, ak sú následovne popisované, obsahujú ve

ké množstvo

kinetickej energie v

aka vysokej otá

avej rýchlosti v kombinácii s konkretným objemom ich

rotorov.

V prípade systémovej poruchy, napr. pri kontaktu rotora/statora alebo pri zrúcaniu rotora sa
može uvolni

rota

ná energia.



VAROVANIE!

Pokyny k

inštalácii uvedené v

tomto návode musia by

prísne

dodržované za ú

elom prevencie zranenia obsluhy!

Содержание 969-8888

Страница 1: ...NL BEDRIJFSHANDLEIDING DK INSTRUKSTIONSBOG S BRUKSANVISNING N INSTRUKSJON MANUAL FIN OHJEK SIKIRJA GR ODHGIES CRHSEWS H FELHASZN L I K ZIK NYV PL PODRECZNIK INSTRUKCJI CZ N VOD K POU IT SK N VOD NA O...

Страница 2: ...Turbo V 3K G...

Страница 3: ......

Страница 4: ......

Страница 5: ...ESCRIPTION OF THE TURBO V 3K G 80 Pump Description 80 Controller Description 81 TECHNICAL SPECIFICATION 81 TURBO V 3K G OUTLINE 84 INTERCONNECTIONS 85 J1 REMOTE I O 85 CONTROLLED VENT PROCEDURE 87 STO...

Страница 6: ...operation and state machine 98 Diagnostic management 103 Diagnostic buffer 103 INLET SCREEN INSTALLATION 104 WATER COOLING CONNECTION 104 VENT VALVE INSTALLATION 105 PUMP PURGING AND VENTING 105 Purge...

Страница 7: ...alla alta velocit di rotazione in unione alla massa speci fica dei loro rotori Nel caso di un guasto del sistema ad esempio per un contatto tra rotore e statore o per una rottura del rotore l energia...

Страница 8: ...a da 20 C a 70 C umidit relativa da 0 a 95 non condensante il cliente deve sempre avviare le pompe turbomolecolari nel modo Soft Start quando ricevute e messe in funzione per la prima volta il tempo d...

Страница 9: ...61010 1 Per l installazione degli accessori opzionali vedere Technical Information USO In questo paragrafo sono riportate le principali procedure ope rative Prima di usare il sistema effettuare tutti...

Страница 10: ...di frenata o di Stop o di Wai ting for interlock lampeggiante velocemente periodo di circa 200 ms con dizione di errore Come arrestare la Turbo V 3K G Per arrestare la pompa si pu usare uno dei segue...

Страница 11: ...Comunit Eu ropea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata S...

Страница 12: ...ndung mit dem spezifischen Ge wicht ihrer Rotoren ber eine gro e Menge kinetischer Energie Im Falle eines Systemdefekts z B durch einen Kontakt zwischen Rotor und Stator oder durch einen Rotorbruch k...

Страница 13: ...n 20 C bis 70 C Relative Feuchtigkeit von 0 bis 95 nicht kondensie rend Der Kunde hat die Turbomolekularpumpen nach dem Emp fang bei Erstinbetriebnahme stets im Modus Soft Start in gangzusetzen Die La...

Страница 14: ...n soda kein Teil unter Spannung zug nglich ist Sicherstellen da die Isolierung der an den Turbo V 3K G angeschlossenen Vorrichtung auch bei einer Einzelst rung ausreichend isoliert wie es von der Rich...

Страница 15: ...erf r vorgesehenen Schelle zu befestigen siehe nachstehen de Abbildung Dieses Kabel und Stecker zusammen mit einer korrekt an der Erde angeschlossenen Steckdose verwenden um Stromst e zu vermeiden und...

Страница 16: ...Vorschriften zu erfolgen ENTSORGUNG Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Equipment angebrach...

Страница 17: ...grande vitesse de rotation associ e la masse sp cifique de leurs rotors En cas de panne du syst me par exemple cause d un contact entre rotor et stator ou d une rupture du rotor l nergie de rotation...

Страница 18: ...voir lieu dans les conditions am biantes suivantes temp rature de 20 C 70 C humidit relative de 0 95 non condensante A la premi re utilisation les pompes turbomol culaires doivent toujours tre mises e...

Страница 19: ...1 Pour l installation des accessoires en option se reporter Technical Information UTILIZATION Ce paragraphe pr sente les principales proc dures op ration nelles Avant d utiliser le syst me effectuer t...

Страница 20: ...e allum e fixe la pompe est en rotation normale clignote lentement p riode d environ 400 ms le syst me est en tat de rampe de freinage de stop ou d attente in terlock clignote rapidement p diode d env...

Страница 21: ...naut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s...

Страница 22: ...debido a la alta velocidad de rotaci n en combinaci n a la masa espec fica de sus rotores En el caso de un da o del sistema por ejemplo por un contacto entre el rotor y el estator o por una rotura del...

Страница 23: ...funcionamiento por primera vez el per odo m ximo de almacenamiento de una bomba turbomolecular es de diez meses a contar de la fecha de env o al cliente ATENCI N En caso de superarse por cualquier mot...

Страница 24: ...opcionales v ase Technical Information USO En este apartado se citan los procedimientos operativos principales Antes de usar el sistema realizar todas las conexiones el ctricas y neum ticas Durante e...

Страница 25: ...0 ms aproximadamente el sistema est en estado de rampa o de frenado o de stop o de waiting for iterlock parpadea r pidamente periodo de 200 ms aproximadamente condici n de error C mo detener la Turbo...

Страница 26: ...obre el cual ha sido aplicado NO debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y que por el contrario deber ser sometido a un procedimiento de recogida diferenc...

Страница 27: ...energia cin tica devida alta velocidade de rota o unida massa espec fica de seus rotores Em caso de avaria do sistema causada por exemplo por um contacto entre o rotor e o estator ou uma ruptura do ro...

Страница 28: ...temperatura de 20 C a 70 C umidade relativa de 0 a 95 n o condensante ao acionar as bombas turbomoleculares pela primeira vez o cliente deve ativ las sempre em modalidade Soft Start o tempo m ximo de...

Страница 29: ...instala o dos acess rios opcionais consultar Technical Information UTILIZA O Neste par grafo s o descritos os principais procedimentos operacionais Antes de usar o sistema efectuar todas as liga es el...

Страница 30: ...operacionais do sistema acesa fixa a bomba funciona normalmente intermit ncia lenta per odo de aprox 400 ms o sistema est em estado de acelera o ou de paragem ou de Stop ou de waiting for interlock in...

Страница 31: ...de Europeia indica que o produto no qual est aplicado N O deve ser eliminado juntamente com os res duos dom sticos ou industriais comuns mas deve ser dirigido a um sistema de recolha diferenciada Port...

Страница 32: ...e energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren In geval van een defect van het systeem bijvoorbeeld door een contact tussen de rotor en de stator of doordat de ro...

Страница 33: ...van 20 C tot 70 C relatieve vochtigheid van 0 tot 95 niet condenserend de klant moet de turbomoleculaire pompen altijd met de Soft Start opstarten wanneer ze ontvangen worden en voor de eerste keer i...

Страница 34: ...g toegankelijk is Controleer of de inrichting verbonden met de Turbo V 3K G goed ge soleerd is ook in geval van een enkele storing zoals voorzien door de norm EN 61010 1 Zie Technical Information voor...

Страница 35: ...zijn knipperen de werkcondities van het systeem aan brandt onafgebroken de pomp draait normaal knippert langzaam periode van circa 400 ms het systeem is in de status oploop of remmen of stop of waitin...

Страница 36: ...aan dat het product waarop het is aangebracht NIET mag worden afgevoerd samen met mormaal huisvuil of industrieel afval maar gescheiden moet worden ingezameld De eindgebruiker wordt dus verzocht cont...

Страница 37: ...n h je omdrejningshastighed kombineret med deres rotorers specifikke v gt Hvis der er en fejl i systemet for eksempel p grund af en kontakt mellem rotor og stator eller fordi rotoren g r i stykker kan...

Страница 38: ...e opfylder f lgende betingelser i forbindelse med transport flytning og opbevaring af pumperne temperatur fra 20 C til 70 C relativ fugtighed fra 0 til 95 ikke kondenserende Kunden skal altid starte d...

Страница 39: ...enkeltfejl som angivet i normen EN 61010 1 Der henvises til bilaget Technical Information for oplysninger vedr rende installation af ekstraudstyret ANVENDELSE Dette afsnit beskriver de vigtigste drif...

Страница 40: ...ved hj lp af I O kontakten se afsnittet J1 REMOTE I O i bilaget Technical Information 3 Overf r et fjernstyret stopsignal ved hj lp af den serielle gr nseflade RS232 485 se afsnit RS232 485 Communica...

Страница 41: ...rotationshastigheten och rotorernas specifika massa I det fall fel skulle uppst i systemet t ex p grund av kontakt mellan rotor och stator eller om rotorn skulle skadas kan det h nda att rotationsener...

Страница 42: ...standa och drifts kerhet f r Varian turbomolekyl ra pumpar Vid transport flytt och lagring av pumparna ska f ljande omgivningsf rh llanden respekteras Temperaturomr de 20 C till 70 C Relativ fuktighet...

Страница 43: ...IP 54 isoleringen Turbo V 3K G r utrustad med kontaktdon f r ing ngarna utg ngarna och f r den seriella kommunikationen som ska anslutas till de externa kretsarna s att det inte g r att komma t n gon...

Страница 44: ...lla EG standardernas krav Systemet r utrustat med en gr n LED f r statussignal Den gr na lysdioden LD1 p underdelen av TURBO V 3K G anger genom frekvensen av dess blinkningar hur systemet fungerar fas...

Страница 45: ...odukten p vilken symbolen har applicerats INTE f r skaffas bort tillsammans med vanliga hush lls eller industriavfall men att d remot ett differentierat uppsamlingssystem m ste uppr ttas Vi rekommende...

Страница 46: ...energiniv som skyldes den h ye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor I tilfelle feil ved systemet for eksempel p grunn av en kontakt mellom rotor og stator eller...

Страница 47: ...bomolekyl re pumper m f lgende anvisninger f lges Under transport flytting og lagring av pumpene m ikke f lgende milj forhold overstiges Temperatur fra 20 C til 70 C Relativ fuktighet fra 0 til 95 ute...

Страница 48: ...r spenning er tilgjengelige Forsikre deg om at isoleringen av anordningen koplet til Turbo V 3K G har en egnet isolering ogs under forhold med en enkel feil i f lge EN 61010 1 standarden For installas...

Страница 49: ...lger med 2 Gi et fjernstyrt stoppsignal med I O kontakt se avsnittet J1 REMOTE I O i vedlegget Technical Information 3 Gi et fjernstyrt stoppsignal med seriegrensesnittet RS232 485 se avsnittet RS232...

Страница 50: ...eutuu korkeasta py rimisnopeudesta yhdistettyn pumppujen roottorien massaan J rjestelm n vikatilassa esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai roottorin rikkoutuessa py rimisenergi...

Страница 51: ...rian turbomolekyylinen pumppu toimisi eritt in tehokkaasti ja luotettavasti Kun pumppua kuljetetaan siirret n ja varastoidaan seuraavia ymp r ivi olosuhteita ei tule ylitt l mp tila 20 C 70 C suhteell...

Страница 52: ...IP54 eristyksen Turbo V 3K G laitteissa on liittimet sis ntuloille ulostuloille sek sarjakytkenn lle jotka on kytkett v ulkoisiin j rjestelmiin siten ettei mihink n j nnitteen alaisena olevaan osaan...

Страница 53: ...1 Poista ohessa toimitettu I O liitin 2 Anna STOP et signaali I O liittimell ks Technical Information liitteen kappale J1 REMOTE I O 3 Anna STOP et signaali RS232 485 sarjaliit nn n kautta ks Technic...

Страница 54: ...ODHGIES CRHSHS 48 107 87 901 011 01 KINDUNOS...

Страница 55: ...okal soun bl bej sth suskeu SHMEIWSH Oi shmei seij peri coun shmantik j plhrofor ej pou coun apospaste ap to ke meno APOQHKEUSH Gia na egguhqe to M gisto ep pedo leitourgik thtaj kai axiopist aj twn S...

Страница 56: ...v tavsh Bebaiwqeivte ovti h movnwsh th sundemevnh diavtaxh ston Turbo V 3K G evcei mia ka tavllhlh movnwsh akovma kai se katavstash monhv blavbh ovpw problevpetai apov ton kanonismov EN 61010 1 Gia th...

Страница 57: ...amathvsete se sunqhvke evktakth anavgkh to Turbo V 3K G prevpei na bgavlete to kalwvdio trofodovthsh apov ton controller Profibus SUNTHRHSH To Turbo V 3K G de crei zetai kamm a sunt rhsh Opoiad pote e...

Страница 58: ...ODHGIES CRHSHS 52 107 87 901 011 01 logo WEEE WEEE...

Страница 59: ...val rendelkeznek a nagy forg si sebess g k s a rotorok fajlagos t mege miatt A rendszer hib s m k d se p ld ul a rotor ll r sz rintkez si hib ja vagy ak r a forg r sz sz tt r se eset n a forg si ener...

Страница 60: ...at sakor s t rol sakor a k vetkez k rnyezeti param tereket nem szabad t ll pni h m rs klettartom ny 20 C 70 C relat v p ratartalom 0 95 nem kondenz l A turbomolekul ris szivatty kat mindig l gyan kell...

Страница 61: ...z RN 61010 1 direkt va szerint Opcion lis tartoz kok telep t s hez v lassza a Technical Informationt HASZN LAT Ez a bekezd s r szletezi az alapvet zemeltet si elj r sokat V gezze el az sszes elektromo...

Страница 62: ...formation f ggel k J1 REMOTE I O bekezd se 3 t voli stop jel ad sa az RS 232 485 soros interf szen kereszt l l sd Technical Information f ggel k RS 232 485 Communication Description V szle ll t s A Tu...

Страница 63: ...n bardzo wysok pr dko ci obrot w razem z mas w a ciw wirnik w W przypadku uszkodzenia systemu na przyk ad z powodu kontaktu mi dzy wirnikiem a stojanem lub z powodu p kni cia wirnika energia obrotowa...

Страница 64: ...antowania najwy szego poziomu funkcjonalnego i niezawodno ci pomp turbomolekularnych Varian musz by przestrzegane nast puj ce zalecenia podczas transportu przesuni cia i magazynowania pomp nie mog by...

Страница 65: ...lacji lub nadnapi cia przewidzianej przez norm EN 61010 1 Dlatego te pod czy urz dzenie do linii zasilania kt ra spe ni te wymogi Wykorzysta znajduj ce si w wyposa eniu kontrokonektory dla zapewnienia...

Страница 66: ...ezpieczenia IP 54 nale y u ywa wy cznie konektor w dostarczonych razem z pomp Dla kabla zasilania nale y stosowa tylko PN 969 9957 lub 969 9958 i zamocowa kabel do kontrolera odpowiednim wspornikiem p...

Страница 67: ...w meritum sprawy PRZETWORSTWO ODPADOW Objasnienie znajdujacego sie na etykiecie znaczenia logo WEEE Uzyty ponizej symbol jest zgodny z wymogiem zarzadzenia WEEE Unii Europejskiej Symbol ten prawomocn...

Страница 68: ...odu obsahuj velk mno stv kinetick energie d ky vysok ot iv rychlosti v kombinaci s konkr tn m objemem jejich rotor V p pad syst mov nefuk nosti nap kontaktu rotoru anebo statoru nebo p i zhroucen roto...

Страница 69: ...C a 70 C Rozp t vlhkosti 0 a 95 bez sr en turbomolekul rn v v vy mus u ivatel po dod vce a poprv v dycky spou t t pozvoln skladovatelnost turbomolekul rn v v vy je 10 m s c ode dne doru en VAROV N Pok...

Страница 70: ...chy podle sm rnice EN 61010 1 Chcete li informace o dopl kov m p slu enstv viz Technical Information POU IT Tento odstavec popisuje podrobnosti z kladn ch pracovn ch postup P ed pou it m syst mu prove...

Страница 71: ...tion 3 p ive te zastavovac sign l ze vzd len ho m sta prost ednictv m s riov ho rozhran RS 232 485 viz odstavec Popis komunikace RS232 RS 485 v p loze Technical Information Nouzov zastaven Chcete li v...

Страница 72: ...ve k mno stvo kinetickej energie v aka vysokej ot avej r chlosti v kombin cii s konkretn m objemom ich rotorov V pr pade syst movej poruchy napr pri kontaktu rotora statora alebo pri zr caniu rotora s...

Страница 73: ...maxim lny a spo ahliv v kon dodr iavajte nasleduj ce pokyny neprekra ujte nasleduj ce pecifik cie prostredia po as prevozu pren ania a uchov vania v vev rozsah tepl t 20 C a 70 C rozsah relat vnej vl...

Страница 74: ...rebn pripoji ku zdroju nap jania ktor vyhovuje uvedenej kateg rii Na zaistenie izol cie pod a IP 54 pou ite protikonektory Zariadenie Turbo V 3K G m konektory pre vstup v stup a konektory s riovej kom...

Страница 75: ...1 na z kladnom elnom paneli Turbo V 3K G base ukazuje frekvenciou blikania sp sob innosti syst mu iadne blikanie v veva norm lne rotuje pomal blikanie interval asi 400 ms syst m je v niektorom z t cht...

Страница 76: ...WEEE Tento symbol platn iba pre t ty Eur pskej nie znamen e v robok s t mto t tkom NESMIE by odstr nen spolu s be n m dom cim alebo priemyseln m odpadom ale sa mus odstr ni ako delen odpad Vyz vame p...

Страница 77: ...no kineti ne energije zaradi visoke hitrosti v povezavi s specifi nimi masami rotorjev V primeru nepravilnega delovanje sistema na primer pri dotiku rotorja statorja ali po kodbe rotorja se lahko spro...

Страница 78: ...vodil Pri po iljanju premikanju in shranjevanju rpalk ne smete prese i naslednjih specifikacij temperaturno obmo je 20 C do 70 C obmo je relativne vla nosti 0 do 95 brez kondenza Turbomolekularne rpa...

Страница 79: ...ilju ite na napetost ki je v vskladu z zgornjo kategorijo Uporabljajte proti spajala ki so v konfekciji za izolacijo IP 54 Naprava Turbo V 3K G ima vhodne izhodne in serijske priklju ke ki jih je treb...

Страница 80: ...anje perioda pribli no 200 ms Napaka Zaustavljanje sistema Za zaustavljanje sistema lahko uporabite eno od naslednjih metod 1 priklju ite prilo en I O priklju ek 2 oddajte oddaljeni signal za zagon pr...

Страница 81: ...rgy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational...

Страница 82: ...should not be exceeded temperature range 20 C to 70 C relative humidity range 0 to 95 non condensing the turbomolecular pumps must be always soft started when received and operated for the first time...

Страница 83: ...has Input Output and serial communication connectors that must be connected to external circuits in such a way that no electrical part is accessible Be sure that the insulation of the device connecte...

Страница 84: ...l The green LED located on the Turbo V 3K G base front panel indicates with its flashing frequency the system operating condi tions with no flashing the pump is normally rotating slowly flashing perio...

Страница 85: ...ountries of the European Com munity indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste coll...

Страница 86: ...in an anticlockwise direction when viewed from the high vacuum flange end The turbine rotor is supported by permanently lu bricated high precision ceramic ball bearings in stalled on the forevacuum s...

Страница 87: ...ler can be operated by a remote host computer via the serial connection a Windows based software is available as an option or by the remote I O connector At every power up the controller is in Remote...

Страница 88: ...fuse 2 x 12 5 A Compliance with EN 55011 Radio disturbance characteristics EN 61000 3 2 Limits for har monic current emissions EN 61000 3 3 Limitation of volt age changes voltage fluctua tions and fl...

Страница 89: ...03 1 0E 02 1 0E 01 Inlet Pressure mbar Pumping speed L sec N2 He Ar Typical Pumping Speed curves 1 E 00 1 E 01 1 E 02 1 E 03 1 E 04 1 E 05 1 E 06 1 E 07 1 E 08 1 E 09 1 00E 03 1 00E 02 1 00E 01 1 00E...

Страница 90: ...TECHNICAL INFORMATION 84 107 87 901 011 01 TURBO V 3K G OUTLINE The following figure shows the Turbo V 3K G outlines dimensions are in mm inches...

Страница 91: ...mp INTERLOCK input signal to confirm the pump ro tation With the supplied cover connector the INTERLOCK signal is connected to the 24 Vdc pin and the INTERLOCK signal to the GROUND pin in this conditi...

Страница 92: ...active open More over if the reference quantity is the frequency or the current drawn it is possible to set the hysteresis in of the threshold value to avoid bouncing For example reference quantity f...

Страница 93: ...w 167 If activated all the related functions set point out output voltage will follow the frequency read ing ACTIVE STOP This function allows the user to brake the pump without venting This function m...

Страница 94: ...the T Plus software 969 9883 is available op tional SERIAL CABLE INSTALLATION In order to maintain the IP 54 protection level please use a certified IP 54 connector or the one provided by Varian RS 2...

Страница 95: ...haracter The addressed SLAVE will respond with an ANSWER whose structure depends from the MESSAGE type When the MESSAGE is a reading command the SLAVE will respond transmitting a string with the same...

Страница 96: ...nation PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command SOFT START OFF Source PC Destination Controller 02 80 31 30 30 31 30 03 42 33 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 0...

Страница 97: ...ump life cycle time cycle num ber reset To reset write 1 N Read Write Data Type Description Admitted Values 111 R W L Analog out put type output volt age signal proportional to frequency or power 0 fr...

Страница 98: ...o 999999 303 R N High Power Start cycles number 310 to 399 Reserved to Varian service N Read Write Data Type Description Admitted Values 400 R A CRC EPROM QE QE5XXXX where XXXX are variable 402 R A CR...

Страница 99: ...ter P N 9699258 and 9699259 which operate as a gate way from 485 to 232 link The controller provides the serial address of the MoniTorr option Every controller must therefore have a different serial a...

Страница 100: ...to download the vibra tion files In order to permit a correct analysis a pe riodically an archive file every 1 or 2 weeks downloading is recommended Interconnections The following figure shows the Mon...

Страница 101: ...r monitor NOTE It is suggested that you maintain the proposed di rectory and path so as to facilitate the identification of the files generated by the system Click on the figure to continue with the i...

Страница 102: ...ers The operator can change the configuration of the Monitorr parameters To change the configurations select one of the Monitorrs connected to the network by positioning the cursor in the row of the M...

Страница 103: ...t is reported in the following figure Please in order to obtain best per formance use profibus certified cables CAUTION To maintain the IP 54 protection level use the appropriate connector provided wi...

Страница 104: ...Interface set up SRC_ADDR Search for the controller serial address IDENTIFY Identify controller model and protocol DATA_EX Regular data exchange The two machines continuously share I O data with the r...

Страница 105: ...not drive the set point out 103 11 2 0 2 s 0 65535 0 inf Vent Valve Opening Delay Set the delay time between the stop command and vent opening Valid only in purge vent auto mode Parameter Buffer byte...

Страница 106: ...ctivated by the user after first run up activate this function only if the pump has been stopped for at least 3 months 1 on 100 B4 Active Stop 0 off after a stop command the controller stop driving th...

Страница 107: ...Temperature Read the pump body temperature close to the water circuit If 42 C the controller goes in fail and the pump is stopped 216 23 1 C 0 100 Controller Power Section Temperature Read the control...

Страница 108: ...on the target speed In Buff byte 8 is low speed Out Buff byte 3 001 B2 Soft Start Status 0 on 1 off this function is active at first pump run up and can t be deactivated by the user after first run up...

Страница 109: ...ady for data exchange B2 cfg fault configuration data doesn t match B3 ext diag slave has external diagnostic data B4 not supported slave doesn t support re quested function B5 invalid slave response...

Страница 110: ...installed to pre vent thermal radiation heating the high vacuum flange on the pump The maximum temperature allowed for the inlet flange is 80 C WATER COOLING CONNECTION The pumping system is supplied...

Страница 111: ...described in the following points 1 Close the process gases flowing into the sys tem before sending the STOP signal to the Turbo V 3K G pump 2 Leaving the Turbo V 3K G pump and the backing pump runnin...

Страница 112: ...reaming PUMP USED IN PRESENCE OF MAGNETIC FIELDS Magnetic fields induce eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation The result is increased electrical power...

Страница 113: ...ns cable NEMA Plug 3m long 969 9958 Mains cable European Plug 3m long 969 9957 Serial cable and T Plus Software 969 9883 Inlet screen DIN ISO 250 969 9350 Protocol Converter RS 232 RS 485 wire 969 925...

Страница 114: ...TIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping E...

Страница 115: ...rate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Oth...

Страница 116: ...1263 Toll Free 0120 655 040 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico...

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Agilent Technologies 969-8888, Инструкция по эксплуатации

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