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Agilent Technologies 869-8928R003 Скачать руководство пользователя страница 140

 

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TV 401/301 MS User Manual / 87-901-013-01

 (A)

 

FIGYELEM! 

A TV 401/301 MS a második telepítési (vagy túlfeszültség) kategóriához tartozik 
az EN 61010-1 direktíva szerint. Csatlakoztassa az eszközt a fenti kategóriának 
megfelel

ő

 hálózathoz. A TV 401/301 MS-nek olyan bemeneti/kimeneti és soros 

kommunikációs csatlózásai vannak, amelyeket úgy kell küls

ő

 áramkörökhöz 

csatlakoztatni, hogy elektromos részek ne legyenek hozzáférhet

ő

k. Gy

ő

z

ő

djön 

meg róla, hogy a TV 401/301 MS-hez csatlakoztatott eszköz megfelel

ő

 egyes 

hiba esetén is az RN 61010-1 direktíva szerint. 

Opcionális tartozékok telepítéséhez válassza a „Technical 
Information”. 

Használat 

Ez a bekezdés részletezi az alapvet

ő

 üzemeltetési eljárásokat. 

Végezze el az összes elektromos és pneumatikus csatlakoztatást a 
rendszer használata el

ő

tt. 

A vákuumkamra melegítése közben a bemeneti szelep h

ő

mérséklete 

nem haladhatja meg a 120 °C-ot. 

 

VESZÉLY! 

 

 

Soha ne használja a turbószivattyút, amikor a bemeneti karima nincs 
csatlakoztatva a vákuumkamrához. Ne érintse meg a turbószivattyút vagy 
annak tartozékait a melegítési folyamat közben. Magas h

ő

mérséklet égést 

okozhat. 

FIGYELEM! 

Kerülje a szivattyú ütését, rázását vagy durva mozgatását üzem közben. A 
csapágyak megsérülhetnek. Használjon portól és szilárd részekt

ő

l mentes 

leveg

ő

t vagy közömbös gázt a szivattyú szell

ő

ztetéséhez. A szell

ő

z

ő

 porton lév

ő

 

nyomásnak 2 barnál kisebbnek kell lennie (a légköri nyomás fölött). Agresszív 
gázok szivattyúzásához ezek a szivattyúk fel vannak szerelve egy különleges 
porttal, hogy lehet

ő

vé tegyék közömbös gáz (pl. N2, Ar) stabil áramlását 

védelmet visel

ő

 szivattyú számára (lásd „Technical Information” függelék). 

Содержание 869-8928R003

Страница 1: ...sjon manual Bedienungshandbuch Ohjek sikirja Notice de mode d emploi Felhaszn l i k zik nyv Manual de istrucciones Podrecznik instrukcji Manual de istru es N vod k pou it Bedrijfshandleiding N vod na...

Страница 2: ...re furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime co...

Страница 3: ...TV 401 301 MS TV 401 301 MS User Manual 87 901 013 01 A 3 264 TV 401 301 MS...

Страница 4: ...TV 401 301 MS 4 264 TV 401 301 MS User Manual 87 901 013 01 A...

Страница 5: ...olecolari 14 Informazioni generali 15 Immagazzinamento 16 Preparazione per l installazione 17 Installazione 18 Uso20 Manutenzione 23 Smaltimento 24 2 Gebrauchsanleitung25 Sicherheitshinweise f r Turbo...

Страница 6: ...41 Installation 42 Utilization 44 Entretien 47 Mis au rebut 48 4 Manual de istrucciones 49 Indicaciones de Seguridad para Bombas Turbomoleculares 50 Informaci n general 51 Almacenamiento 52 Preparaci...

Страница 7: ...ing 73 Veiligheidsinstructies voor Turbomoleculaire pompen 74 Algemene informatie 75 Opslag 76 Uitpakken 77 Installatie 78 Gebruik 80 Onderhoud 83 Afvalverwerking 84 7 Istruktionsbog 85 Sikkerhedsanvi...

Страница 8: ...rberedelser f r installationen 101 Installation 102 Anv ndning 104 Underh ll 107 Bortskaffning 108 9 Instruksjon Manual 109 Sikkerhetsanvisninger for Turbomolekyl r Pumper 110 Generell informasjon111...

Страница 9: ...33 Biztons gi tmutat Turb molekul ris szivatty khoz 134 ltal nos inform ci k 135 T rol s 136 El k sz t s telep t sre 137 Telep t s 138 Haszn lat 140 Karbantart s 143 Megsemmis t s 144 12 Podrecznik In...

Страница 10: ...cn informace 159 Uskladn n 160 P prava k instalaci 161 Instalace 162 Pou it 164 dr ba 167 Likvidace 168 14 N vod na Obsluhu 169 Bezpe nostn n vod pre Turbomolekul rne v vevy 170 V eobecn inform cie 17...

Страница 11: ...e opadkov 192 16 Instructions for Use 193 Safety Guideline for Turbomolecular Pumps 194 General Information 195 Storage 196 Preparation for Installation 197 Installation 198 Use200 Maintenance 203 Dis...

Страница 12: ...ng Kit Installation 239 Purge Valve Installation 242 Serial Cable Installation 243 TV 401 301 MS Controller Installation 245 Connection of the Fore Vacuum Pump 245 TV 401 301 MS Insertion and Extracti...

Страница 13: ...Turbomolecolari 14 Informazioni generali 15 Immagazzinamento 16 Preparazione per l installazione 17 Installazione 18 Uso 20 Accensione ed Uso della TV 401 301 MS 21 Arresto della TV 401 301 MS 22 Arr...

Страница 14: ...vata quantit di energia cinetica dovuta alla alta velocit di rotazione in unione alla massa specifica dei loro rotori Nel caso di un guasto del sistema ad esempio per un contatto tra rotore e statore...

Страница 15: ...i di alto e ultra alto vuoto e dal relativo controller Il sistema capace di pompare qualsiasi tipo di gas o di composto gassoso ma non adatto per il pompaggio di liquidi o di particelle solide L effet...

Страница 16: ...atura NOTA Le note contengono informazioni importanti estrapolate dal testo Immagazzinamento Per garantire il massimo livello di funzionalit ed affidabilit delle pompe Turbomolecolari Agilent devono e...

Страница 17: ...si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballaggio prestare particolare attenzione a non la...

Страница 18: ...stallazione sul sistema onde evitare eventuale inquinamento da polvere Installazione ATTENZIONE Togliere il tappo di protezione solo al momento del collegamento della turbopompa al sistema Non aliment...

Страница 19: ...Technical Information Il TV 401 301 MS pu essere installato in qualsiasi posizione Fissare il TV 401 301 MS in posizione stabile collegando la flangia di fissaggio della turbopompa ad una controflangi...

Страница 20: ...S abbia un isolamento adeguato anche in condizione di guasto singolo come previsto dalla normativa EN 61010 1 Per l installazione degli accessori opzionali vedere Technical Information Uso In questo p...

Страница 21: ...ormation AVVERTENZA Quando la pompa viene utilizzata per il pompaggio di gas tossici infiammabili o radioattivi seguire le appropriate procedure tipiche di ciascun gas Non usare la pompa in presenza d...

Страница 22: ...controller incorporato arresta immediatamente la pompa AVVERTENZA Per la sicurezza dell operatore il controller Turbo V deve essere alimentato con un cavo di alimentazione a 3 fili vedere la tabella d...

Страница 23: ...a sia inferiore a 50 C In caso di guasto possibile usufruire del servizio di riparazione Agilent o del Agilent advanced exchange service che permette di ottenere un sistema rigenerato in sostituzione...

Страница 24: ...solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di rac...

Страница 25: ...f r Turbomolekularpumpen 26 Allgemeine Information 27 Lagerung 28 Vor der Installation 29 Installation 30 Gebrauch 32 Einschaltung und Gebrauch der TV 401 301 MS 33 Stoppen von Modell TV 401 301 MS 3...

Страница 26: ...ohen Rotationsgeschwindigkeit in Verbindung mit dem spezifischen Gewicht ihrer Rotoren ber eine gro e Menge kinetischer Energie Im Falle eines Systemdefekts z B durch einen Kontakt zwischen Rotor und...

Страница 27: ...ystem eignet sich f r die F rderung aller Arten von Gasen oder gashaltigen Gemischen nicht jedoch f r die F rderung von Fl ssigstoffen oder Festpartikeln Der Pumpeffekt wird ber eine Hochgeschwindigke...

Страница 28: ...en k nnten HINWEIS Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden Lagerung Um ein H chstma an Effizienz und Zuverl ssigkeit der Agilent Turbomolekularpumpen zu gew...

Страница 29: ...kung geliefert Eventuelle Transportsch den sind der zust ndigen rtlichen Verkaufsstelle zu melden Modell TV 401 301 MS ist vorsichtig auszupacken wobei es vor dem Herunterfallen und vor St en und Vibr...

Страница 30: ...n durch Staub zu vermeiden Installation VORSICHT Die Schutzkappe erst bei Anschluss der Turbopumpe an das System entfernen Die Turbopumpe nicht speisen wenn sie nicht ordnungsgem an das Vakuumsystem a...

Страница 31: ...TV 401 301 MS kann in jeder beliebigen Position installiert werden Die TV 401 301 MS in einer stabilen Position befestigen wobei der Flansch der Turbopumpe an einen festen Gegenflansch angeschlossen...

Страница 32: ...tung auch bei einer Einzelst rung ausreichend isoliert wie es von der Richtlinie EN 61010 1 vorgesehen wird F r die Installation der Optionsteile siehe im Anhang Technical Information Gebrauch In dies...

Страница 33: ...icht entflammbaren oder radioaktiven Gasen benutzt wird sind die f r das jeweilige Gas vorgeschriebenen Vorg nge und Ma nahmen zu befolgen Die Pumpe darf niemals bei Vorhandensein von explosionsf hige...

Страница 34: ...ten Der eingebaute Controller sorgt f r den sofortigen Pumpenstopp WARNUNG F r die Sicherheit des Bedieners muss der Controller Turbo V mit einem dreidr htigen Stromkabel siehe Tabelle der Bestellteil...

Страница 35: ...se unter 50 C abgesunken ist Bei Defekten kann der Agilent Service oder der Agilent advanced exchange service in Anspruch genommen werden der ein general berholtes System als Ersatz f r das defekte Sy...

Страница 36: ...ctronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsyste...

Страница 37: ...culaires 38 Indications Generales 39 Stockage 40 Preparation pour l installation 41 Installation 42 Utilization 44 Mise en marche et utilisation de la TV 401 301 MS 45 Arr t de la TV 401 301 MS 46 Ar...

Страница 38: ...t une nergie cin tique lev e due la grande vitesse de rotation associ e la masse sp cifique de leurs rotors En cas de panne du syst me par exemple cause d un contact entre rotor et stator ou d une rup...

Страница 39: ...vide pouss et ultrapouss et dot d un contr leur Le syst me est m me de pomper tous les types de gaz et de compos s gazeux mais il n est pas adapt au pompage de liquides ou de particules solides L effe...

Страница 40: ...ppareillage NOTE Les notes contiennent des renseignements importants extrapol s du texte Stockage Pour garantir les performances et la fiabilit maximales des pompes turbomol culaires Agilent il est in...

Страница 41: ...ant s tre produit pendant le transport contacter le bureau de vente local Pendant l op ration d ouverture de l emballage veiller tout particuli rement ne pas laisser tomber le TV 401 301 MS et ne lui...

Страница 42: ...ge clos jusqu au moment de l installation Installation ATTENTION Ne retirer le bouchon de protection qu au moment du branchement de la turbopompe au syst me Ne pas alimenter la turbopompe tant qu elle...

Страница 43: ...primaire Cf sch ma dans Technical Information Le TV 401 301 MS peut tre install e dans n importe quelle position Assurer le TV 401 301 MS de fa on stable en fixant la collerette de la turbopompe une...

Страница 44: ...ion appropri e m me en condition de panne individuelle selon les termes de la norme EN 61010 1 Pour l installation des accessoires en option se reporter Technical Information Utilization Ce paragraphe...

Страница 45: ...l Information AVERTISSEMENT Lorsque la pompe est utilis e pour le pompage de gaz toxiques inflammables ou radioactifs suivre les proc dures typiques de chaque gaz Ne pas utiliser la pompe en pr sence...

Страница 46: ...leur incorpor arr te imm diatement la pompe AVERTISSEMENT Pour la s curit de l op rateur le contr leur Turbo V doit tre aliment par un c ble d alimentation 3 fils voir le tableau des parties qui peuve...

Страница 47: ...50 C En cas de panne il est possible de b n ficier du service r parations Agilent ou du Agilent advanced exchange service qui permet d obtenir un syst me r g n r en remplacement du syst me endommag N...

Страница 48: ...les pays de la Communaut euro p enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m na g res ou les d chets industriels ordinaires mais passer par un...

Страница 49: ...mbas Turbomoleculares 50 Informaci n general 51 Almacenamiento 52 Preparaci n para la instalaci n 53 Instalaci n 54 Uso 56 Encendido y Uso de la TV 401 301 MS 57 Parada de la TV 401 301 MS 58 Parada d...

Страница 50: ...una elevada cantidad de energ a cin tica debido a la alta velocidad de rotaci n en combinaci n a la masa espec fica de sus rotores En el caso de un da o del sistema por ejemplo por un contacto entre e...

Страница 51: ...vac o integrada por el controler correspondiente El sistema puede bombear cualquier tipo de gas o de composici n gaseosa pero no es adecuado para bombear l quidos o part culas s lidas El efecto de bom...

Страница 52: ...tienen informaci n importante extra da del texto Almacenamiento Para garantizar el nivel m ximo de funcionalidad y fiabilidad de las bombas turbomoleculares Agilent deber n aplicarse las siguientes in...

Страница 53: ...pecial de protecci n si se observan da os que podr an haberse producido durante el transporte ponerse en contacto con la oficina local de ventas Durante la operaci n de desembalaje tener cuidado de qu...

Страница 54: ...el sistema para evitar su posible contaminaci n por polvo Instalaci n ATENCI N Retirar el tap n de protecci n s lo en el momento de conectar la bomba de turbina al sistema No alimentar la bomba de tur...

Страница 55: ...a v ase diagrama en Technical Information El TV 401 301 MS puede instalarse en cualquier posici n Fijar el TV 401 301 MS en una posici n estable conectando la brida de fijaci n de la bomba de turbina...

Страница 56: ...1 301 MS mantenga una acci n aisladora incluso en caso de verificarse una aver a de conformidad con lo establecido por la normativa EN 61010 1 Para instalar los accesorios opcionales v ase Technical I...

Страница 57: ...o la bomba se utiliza para bombear gases t xicos inflamables o radioactivos seguir los procedimientos apropiados t picos de cada gas No usar la bomba cuando haya gases explosivos Encendido y Uso de la...

Страница 58: ...detiene inmediatamente la bomba ADVERTENCIA Para seguridad del operador el controlador Turbo V debe ser alimentado con cable de alimentaci n de 3 hilos v ase tabla de partes disponibles para pedido p...

Страница 59: ...erficial de la bomba sea inferior a 50 C En caso de aver a se podr utilizar el servicio de reparaci n Agilent o el Agilent advanced exchange service que permite obtener un sistema regenerado para sust...

Страница 60: ...dica que el producto sobre el cual ha sido aplicado NO debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y que por el contrario deber ser sometido a un procedimient...

Страница 61: ...para Bombas Turbomoleculares 62 Informa es gerais 63 Armazenagem 64 Prepara o para a instala o 65 Instala o 66 Utiliza o 68 Acendimento e Utiliza o da TV 401 301 MS 69 Paragem da TV 401 301 MS70 Parag...

Страница 62: ...e Instru es t m uma alta quantidade de energia cin tica devida alta velocidade de rota o unida massa espec fica de seus rotores Em caso de avaria do sistema causada por exemplo por um contacto entre o...

Страница 63: ...troller O sistema capaz de bombear qualquer tipo de g s ou de composto gasoso mas n o adequado para bombear l quidos ou part culas s lidas O efeito da bomba obtido atrav s de uma turbina rotativa de a...

Страница 64: ...anos aparelhagem NOTA As notas cont m informa es importantes destacadas do texto Armazenagem Para garantir o n vel M ximo de funcionalidade e fiabilidade das bombas Turbomoleculares Agilent devem ser...

Страница 65: ...a apresentar sinais de danos que poderiam ter ocorrido durante o transporte entrar em contacto com o escrit rio de vendas local Durante a remo o da embalagem tomar muito cuidado para n o deixar cair o...

Страница 66: ...instala o no sistema para evitar eventuais acumula es de p Instala o CUIDADO Retirar a tampa de prote o somente no momento de ligar a turbobomba ao sistema N o ativar a Turbobomba se n o est fixada co...

Страница 67: ...301 MS deve ser ligado a uma bomba prim ria consultar esquema em Technical Information O TV 401 301 MS pode ser instalado em qualquer posi o Fixar o TV 401 301 MS em posi o est vel ligando o flange d...

Страница 68: ...401 301 MS esteja isolado correctamente mesmo em caso de avaria conforme previsto pela norma NE 61010 1 Para a instala o dos acess rios opcionais consultar Technical Information Utiliza o Neste par g...

Страница 69: ...hnical Information ATEN AO Quando a bomba utilizada para bombear gases t xicos inflam veis ou radioactivos seguir os procedimentos adequados t picos para cada g s N o usar a bomba na presen a de gases...

Страница 70: ...e alimenta o O controller incorporado para imediatamente a bomba ATEN AO Para a seguran a do operador o controller Turbo V deve ser alimentado com um cabo de alimenta o com 3 fios ver a tabela das par...

Страница 71: ...a seja inferior a 50 C Em caso de defeito poss vel usufruir do servi o de assist ncia Agilent ou do Agilent advanced exchange service que permite obter um sistema regenerado que substitua a bomba com...

Страница 72: ...pa ses da Comunidade Europeia indica que o produto no qual est aplicado N O deve ser eliminado juntamente com os res duos dom sticos ou industriais comuns mas deve ser dirigido a um sistema de recolh...

Страница 73: ...ties voor Turbomoleculaire pompen 74 Algemene informatie 75 Opslag 76 Uitpakken 77 Installatie 78 Gebruik 80 Inschakeling en gebruik van de TV 401 301 MS 81 Afzetten van de TV 401 301 MS 82 Noodstop 8...

Страница 74: ...hebben een grote hoeveelheid kinetische energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren In geval van een defect van het systeem bijvoorbeeld door een contact tussen...

Страница 75: ...gen plus bijbehorende controller bestaat Het systeem is in staat om elk type gas of gasverbinding te pompen maar is niet geschikt voor het pompen van vloeistoffen of vaste deeltjes Het pompeffect word...

Страница 76: ...kingen bevatten belangrijke informatie die uit de tekst is gelicht Opslag Om een zo goed mogelijke werking en betrouwbaarheid van de Turbomoleculaire pompen van Agilent te garanderen moeten de volgend...

Страница 77: ...geconstateerd die tijdens het transport veroorzaakt zou kunnen zijn meteen contact opnemen met het plaatselijke verkoopkantoor Zorg er bij het uitpakken voor dat de TV 401 301 MS niet kan vallen en g...

Страница 78: ...ingebouwd zodat eventuele vervuiling door stof wordt voorkomen Installatie VOORZICHTIG Verwijder de beschermdop pas op het moment dat de turbopomp op het systeem wordt aangesloten De Turbopomp niet vo...

Страница 79: ...hema in Technical information De TV 401 301 MS kan in alle standen worden ge nstalleerd Bevestig de TV 401 301 MS in een stabiele positie door de bevestigingsflens van de turbopomp aan een vaste steun...

Страница 80: ...401 301 MS goed ge soleerd is ook in geval van een enkele storing zoals voorzien door de norm EN 61010 1 Zie Technical Information voor installatie van accessoires die als optie verkrijgbaar zijn Geb...

Страница 81: ...Wanneer de pomp wordt gebruikt voor het pompen van brandbare giftige of radioactieve gassen moeten de procedures worden gevolgd die speciaal voor elk type gas zijn opgesteld Gebruik de pomp niet in aa...

Страница 82: ...ngebouwde controller stopt onmiddellijk de pomp WAARSCHUWING Voor de veiligheid van de bediener dient de controller Turbo V gevoed te worden met een driedradige voedingskabel zie de tabel met de besta...

Страница 83: ...nder een temperatuur van 50 C is gezakt In geval van storing is het mogelijk om de reparatiedienst van Agilent of de Agilent advanced exchange service in te schakelen zo krijgt men een ruilpomp ter ve...

Страница 84: ...pese Gemeenschap geeft aan dat het product waarop het is aangebracht NIET mag worden afgevoerd samen met mormaal huisvuil of industrieel afval maar gescheiden moet worden ingezameld De eindgebruiker w...

Страница 85: ...olekyl re turbopumper 86 Generel Information 87 Opbevaring 88 Forberedelse f r installation 89 Installation 90 Anvendelse 92 Start og anvendelse af TV 401 301 MS 93 Stop af TV 401 301 MS 94 N dstop 94...

Страница 86: ...en stor kinetisk energi der skyldes den h je omdrejningshastighed kombineret med deres rotorers specifikke v gt Hvis der er en fejl i systemet for eksempel p grund af en kontakt mellem rotor og stato...

Страница 87: ...hed Systemet er i stand til at pumpe en hvilken som helst form for gas eller gaslignende luftarter men systemet kan ikke anvendes til pumpning af v ske eller af faste partikler Pumpeeffekten opn s ved...

Страница 88: ...askinskader BEM RK Dette g r opm rksom p vigtig information i teksten Opbevaring Det er n dvendigt at overholde f lgende forskrifter for at sikre optimal funktion og driftssikkerhed i de turbomolekyl...

Страница 89: ...tion TV 401 301 MS leveres i en speciel beskyttende emballage Kontakt den lokale forhandler hvis emballagen viser tegn p skader der kan v re opst et under transporten S rg for at TV 401 301 MS ikke ta...

Страница 90: ...alleres Herved forhindres at der kommer st v i pumpen Installation FORSIGTIG Beskyttelsesproppen m f rst fjernes n r turbopumpen sluttes til systemet Turbopumpen m aldrig aktiveres hvis den ikke er fa...

Страница 91: ...s en hovedpumpe se skemaet Technical Information TV 401 301 MS kan installeres i en hvilken som helst position Fastg r TV 401 301 MS i en stabil position ved at slutte turbopumpens indl bsflange til e...

Страница 92: ...ar en passende isolering Dette g lder ogs i tilf lde af enkeltfejl som angivet i normen EN 61010 1 Der henvises til bilaget Technical Information for oplysninger vedr rende installation af ekstraudsty...

Страница 93: ...ilaget Technical Information ADVARSEL N r pumpen anvendes til toksiske brandfarlige eller radioaktive gasser f lges fremgangsm den for den enkelte gastype Anvend ikke pumpen til eksplosive gasser Star...

Страница 94: ...yreenhed afbryder straks pumpen ADVARSEL For operat rens sikkerhed skal Turbo V controller en str mforsynes med et 3 tr det f dekabel se tabellen over de bestilbare stykker f dekablet skal v re udstyr...

Страница 95: ...rotoren er standset og til temperaturen p pumpens overflade er under 50 C I tilf lde af skader p systemet kontaktes et Agilent reparationsv rksted eller Agilent advanced exchange service der udskifter...

Страница 96: ...ldende for EU landene viser at produktet som det sidder p IKKE m bortskaffes sammen med affald fra private husholdninger eller industriel affald men skal indleveres p en godkendt affaldsstation Vi opf...

Страница 97: ...l ra turbopumpar98 Allm n information 99 F rvaring 100 F rberedelser f r installationen 101 Installation 102 Anv ndning 104 Start och anv ndning av TV 401 301 MS 105 Att st nga av TV 401 301 MS 106 N...

Страница 98: ...g kinetisk energi beroende p den h ga rotationshastigheten och rotorernas specifika massa I det fall fel skulle uppst i systemet t ex p grund av kontakt mellan rotor och stator eller om rotorn skulle...

Страница 99: ...r och en styrenhet Systemet kan anv ndas f r pumpning av alla typer av gas eller gasf reningar Dock l mpar sig inte systemet f r pumpning av v tskor eller fasta partiklar Pumpningen stadkoms med hj lp...

Страница 100: ...ste f ljas exakt f r att inte risk f r maskinskada skall uppst OBSERVERA Detta visar p viktig information i texten F rvaring Respektera f ljande anvisningar f r att garantera optimal prestanda och dri...

Страница 101: ...S levereras i ett s rskilt skyddande emballage Kontakta det lokala f rs ljningskontoret om emballaget visar tecken p skador som kan ha uppst tt under transporten Se till att TV 401 301 MS inte tappas...

Страница 102: ...erats i systemet f r att f rhindra att det kommer in damm eller annat i den Installation OBSERVER Ta bort skyddsproppen f rst n r turbopumpen ska anslutas till systemet S tt aldrig ig ng turbopumpen o...

Страница 103: ...udpump se schemat i Technical information TV 401 301 MS kan installeras i valfri position F st TV 401 301 MS i ett stabilt l ge genom att ansluta turbopumpens intagsfl ns till en fast fl ns som m ste...

Страница 104: ...Kontrollera att anordningen som r ansluten till TV 401 301 MS har en l mplig isolering ven vid ett enskilt fel enligt standard EN 61010 1 Installation av tillbeh rsutrustning beskrivs i Technical Inf...

Страница 105: ...ilagan Technical information VARNING D pumpen anv nds f r pumpning av giftiga l ttant ndliga eller radioaktiva gaser b r man f lja de s rskilda anvisningarna f r varje enskild gas Anv nd ej pumpen i n...

Страница 106: ...lkabeln ur v gguttaget Den inbyggda styrenheten avbryter omedelbart pumpens funktion VARNING F r operat rens s kerhet b r Turbo V systemet vara anslutet med en str mkabel med 3 stycken ledare se tabel...

Страница 107: ...n tills rotorn stannat samt tills pumpens yttemperatur r l gre n 50 C Om pumpen havererar kontakta Agilent reparationsverkstad eller Agilent utbytesservice som kan ers tta systemet med ett renoverat s...

Страница 108: ...nionen indikerar att produkten p vilken symbolen har applicerats INTE f r skaffas bort tillsammans med vanliga hush lls eller industriavfall men att d remot ett differentierat uppsamlingssystem m ste...

Страница 109: ...or Turbomolekyl r Pumper 110 Generell informasjon 111 Lagring 112 Klargj re til installasjon 113 Installasjon 114 Bruk 116 Starte og bruke TV 401 301 MS 117 Stoppe TV 401 301 MS 118 N dstopp 118 Vedli...

Страница 110: ...e Bruksanvisningen har et h yt kinetisk energiniv som skyldes den h ye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor I tilfelle feil ved systemet for eksempel p grunn av...

Страница 111: ...av en turbo molekul r pumpe for bruk i h y eller ultrah ye vakuumanlegg og en styreenhet Systemet kan pumpe nesten alle typer gass eller gassforening Det er ikke beregnet for pumpe v sker eller faste...

Страница 112: ...ikke f lges kan f re til at utstyret skades MERK Merknadene inneholder viktig informasjon som er hentet fra teksten Lagring For garantere optimal drift og p litelighet for Agilent turbomolekyl re pump...

Страница 113: ...lsesemballasje Viser denne tegn p skader som kan ha oppst tt under transporten m du ta kontakt med det lokale salgskontoret N r TV 401 301 MS pakkes ut m du se til at det ikke slippes ned eller utsett...

Страница 114: ...systemet slik at den ikke forurenses eller utsettes for nedst ving Installasjon FORSIKTIG Fjern beskyttelsesproppen f rst n r turbopumpen skal sluttes til systemet Turbopumpen m aldri aktiveres hvis...

Страница 115: ...ical Information TV 401 301 MS kan monteres i en valgfri stilling TV 401 301 MS m installeres i en stabil posisjon og turbopumpens inngangsflens m koples til en fast motflens som er i stand til motst...

Страница 116: ...nstruksjoner for korrekt bruk finnes i dette avsnittet Les n ye gjennom denne manualen f r systemet tas i bruk Mens oppvarmingen av kammeret p g r m temperaturen ved inngangsflensen ikke overskride 12...

Страница 117: ...er og starter pumpen F rste igangsetting av pumpen skjer med MYK START som etter denne f rste igangsettingssyklusen desaktiveres slik at etterf lgende igangsettinger skjer uten MYK START For oppn en M...

Страница 118: ...an bestilles og utstyrt med et st psel som er internasjonalt godkjent for brukerens sikkerhet Bruk denne kabelen og st pselet sammen med en egnet jordet kontakt for unng elektrisk st t og for overhold...

Страница 119: ...verflatetemperatur er lavere enn 50 C Dersom systemet stanser m du ta kontakt med Agilents reparasjonservice eller med Agilents avanserte bytteservice som kan tilby overhalte system til erstatning for...

Страница 120: ...symbolet som bare gjelder for land i Det europeiske fellesselskap viser at produktet som det sitter p IKKE m behandles som vanlig hus industriavfall men m legges i kildesortering Derfor oppfordrer man...

Страница 121: ...ipumppujen Turvaohjeet 122 Yleisi tietoja 123 Varastointi 124 Valmistelut asennusta varten 125 Asennus 126 K ytt 128 TV 401 301 MSin k ynnistys ja k ytt 129 TV 401 301 MSin pys ytt minen 130 H t pys y...

Страница 122: ...m r kineettist energiaa joka aiheutuu korkeasta py rimisnopeudesta yhdistettyn pumppujen roottorien massaan J rjestelm n vikatilassa esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai root...

Страница 123: ...hji n k ytt varten J rjestelm kykenee pumppaamaan kaiken tyyppisi kaasuja tai kaasukoostumuksia Se ei sovellu nesteiden tai kiinteiden hiukkasten pumppaamiseen Pumppaus saadaan aikaan korkealla nopeud...

Страница 124: ...en vahingoittumiseen HUOM Huomautukset sis lt v t t rke tekstiss k sitelty tietoa Varastointi Noudata seuraavia ohjeita jotta Agilent turbomolekyylinen pumppu toimisi eritt in tehokkaasti ja luotettav...

Страница 125: ...mahdollisesti kuljetuksen aikana tapahtuneita vaurioita ottakaa yhteys paikalliseen myyntitoimistoon Pakkauksen purkamisen aikana tulee varoa erityisesti TV 401 301 MSin putoamista tai siihen kohdistu...

Страница 126: ...ten v ltet n laitteen mahdollinen p lysaastuminen Asennus HUOMIO Poistakaa suojakansi vasta kun turbopumppu kytket n j rjestelm n lk kytkek turbopumppuun s hk ellei sit ole kiinnitetty asianmukaisesti...

Страница 127: ...e kytke p pumppuun ks Technical Information liitteen kaaviota TV 401 301 MS voidaan asentaa mihin tahansa asentoon Kiinnitt k Kiinnitt k TV 401 301 MS vakaaseen asentoon liitt m ll turbopumpun sis ntu...

Страница 128: ...MS laitteeseen kytketyn laitteen eristys riitt my s yksitt isen toimintah iri n yhteydess EN 61010 1 s nn sten edellytt m ll tavalla Ks Technical Information liitett lis varusteiden asentamista varte...

Страница 129: ...rkyllisten paloherkkien tai radioaktiivisten kaasujen pumppaamiseen noudattakaa jokaiselle kaasulle sopivaa menettelytapaa lk k ytt k pumppua r j hdysherkkien kaasujen l hell TV 401 301 MSin k ynnisty...

Страница 130: ...nrakennettu valvoja pys ytt pumpun v litt m sti VAROITUS K ytt j n turvallisuuden takaamiseksi Turbo V valvojan virran sy t n on tapahduttava pistokkeella kansainv lisesti hyv ksytty tyyppi ja 3 lla...

Страница 131: ...l mm n laskea alle 50 C en Laitteen vahingoittuessa on mahdollista k ytt Agilentin korjauspalvelua tai Agilent advanced exchange service vaihtopalvelua jonka kautta saatte uudistetun pumpun vahingoitt...

Страница 132: ...kaisesti Merkki koskee ainoastaan Euroopan Unionin j senmaita tarkoittaa ett tuotetta EI saa h vitt tavallisen kotitalous tai teollisuusj tteen mukana vaan se on toimitettava erilliseen ker yspisteese...

Страница 133: ...mutat Turb molekul ris szivatty khoz 134 ltal nos inform ci k 135 T rol s 136 El k sz t s telep t sre 137 Telep t s 138 Haszn lat 140 A TV 401 301 MS bekapcsol sa s 141 A TV 401 301 MS 142 V szle ll t...

Страница 134: ...g pk nyvben le van rva nagy mozg si energi val rendelkeznek a nagy forg si sebess g k s a rotorok fajlagos t mege miatt A rendszer hib s m k d se p ld ul a rotor ll r sz rintkez si hib ja vagy ak r a...

Страница 135: ...kul ris szivatty val nagy s rendk v l nagy v kuumalkalmaz sokhoz a megfelel vez rl j vel A rendszer b rmely t pus g zt vagy g zkever ket k pes szivatty zni Nem alkalmas folyad kok vagy szil rd r szecs...

Страница 136: ...ez s k rosod s t okozhatj k MEGJEGYZ S A megjegyz sek a sz vegb l vett fontos inform ci t tartalmaznak T rol s A Agilent Turbomolecular szivatty k maxim lis teljes tm nyszintj nek garant l s ra a k ve...

Страница 137: ...csomagol sban sz ll tj k Ha ez s r l s jeleit mutatja ami sz ll t s k zben felmer lhet forduljon a helyi szolg ltat si irod hoz A rendszer kicsomagol sakor gyeljen arra hogy ne ejtse le s ker lje anna...

Страница 138: ...egakad lyozva a por ltali szennyez d s b rmely form j t Telep t s FIGYELEM Ne t vol tsa el a v d kupakot a turb szivatty nak a rendszerhez val csatlakoztat sa el tt Ne t pl lja a turb szivatty t am g...

Страница 139: ...tlakoztatni l sd Technical Information A TV 401 301 MS b rmely helyzetben telep thet R gz tse a TV 401 301 MS et stabil helyzetben a turb szivatty r gz t karim j t egy r gz tett ellenkarim ra csatlako...

Страница 140: ...sokat V gezze el az sszes elektromos s pneumatikus csatlakoztat st a rendszer haszn lata el tt A v kuumkamra meleg t se k zben a bemeneti szelep h m rs klete nem haladhatja meg a 120 C ot VESZ LY Soha...

Страница 141: ...t t s elind tja a szivatty t Az els szivatty ind t s l gy ind t s m dban t rt nik Amikor az ind t si ciklus befejez dik a l gy ind t s m d automatikusan tiltva van s a k vetkez ind t sok l gy ind t s...

Страница 142: ...gyik v g n nemzetk zi szabv ny szerinti csatlakoz dug val van ell tva Ezt a k belt s csatlakoz dug t megfelel en f ldelt csatlakoz aljazattal haszn lja hogy elker lje az ram t s vesz ly t s eleget teg...

Страница 143: ...org sa le ll s am g a szivatty fel let nek h m rs klete 50 C al esik Meghib sod s eset n l pjen kapcsolatba a helyi Agilent szervizk zponttal ahol tudnak adni egy helyre ll tott rendszert a hib s hely...

Страница 144: ...z ss g orsz gaiban rv nyes azt jelzi hogy a term k melyen megtal lhat NEM ker lhet k z ns ges h ztart si vagy ipari hullad kkal egy tt megsemmis t sre hanem azt egy szelekt v hullad kgy jt rendszerbe...

Страница 145: ...omolekularnych 146 Og lne informacje147 Magazynowanie 148 Przygotowanie do instalacji149 Instalacja 150 U ytkowanie 152 W czenie i U ytkowanie TV 401 301 21 NSF 153 Zatrzymanie systemu TV 401 301 21 N...

Страница 146: ...i Obs ugi posiadaj wysok energi kinetyczn spowodowan bardzo wysok pr dko ci obrot w razem z mas w a ciw wirnik w W przypadku uszkodzenia systemu na przyk ad z powodu kontaktu mi dzy wirnikiem a stojan...

Страница 147: ...rowania tzw kontroler System jest w stanie pompowa jakikolwiek typ gazu lub mieszanki gazowej ale nie jest przystosowany do pompowania p yn w lub sta ych cz stek Zjawisko pompowania jest uzyskane popr...

Страница 148: ...zegania mo e doj do uszkodzenia aparatury PRZYPIS S to wa ne informacje wyci gni te z tekstu Magazynowanie W celu zagwarantowania najwy szego poziomu funkcjonalnego i niezawodno ci pomp turbomolekular...

Страница 149: ...ypadku lad w uszkodze do kt rych mog oby doj podczas transportu nale y skontaktowa si z miejscowym biurem sprzeda y Podczas operacji rozpakowywania nale y zwr ci szczeg ln uwag aby nie spowodowa upadk...

Страница 150: ...i na systemie pozosta a zamkni ta w celu unikni cia zanieczyszczenia jej py em Instalacja UWAGA Zdj korek zabezpieczaj cy tylko w momencie po czenia pompy do systemu Nie zasila turbopompy je eli nie j...

Страница 151: ...czony do g wnej pompy patrz schemat w dodatku Technical Information TV 401 301 21 NSF mo e by zainstalowany w jakiejkolwiek pozycji Zamocowa TV 401 301 21 NSF w stabilnej pozycji cz c ko nierz mocuj...

Страница 152: ...posiada odpowiednie odizolowanie nawet w stanie pojedynczej usterki zgodnie z wymaganiami normy EN 61010 1 Aby zainstalowa opcjonalne akcesoria nale y zapozna si z Technical Information U ytkowanie W...

Страница 153: ...n ZAGRO ENIE Kiedy pompa jest zastosowana do pompowania gaz w toksycznych atwo palnych lub radioaktywnych nale y wykona odpowiednie procedury typowe dla ka dego z gaz w Nie stosowa pompy w obecno ci g...

Страница 154: ...nia Wbudowany sterownik zatrzyma natychmiast pomp ZAGRO ENIE Dla zagwarantowania bezpiecze stwa operatorowi kontroler Turbo V powinien by zasilany kablem zasilaj cym o 3 przewodach zobacz tabel cz ci...

Страница 155: ...a poni ej 50 C W przypadku usterki mo liwe jest skorzystanie z serwisu naprawczego Agilent lub Agilent advanced exchange service kt ry pozwoli na uzyskanie zregenerowanego systemu w zast pstwie uszko...

Страница 156: ...j Symbol ten prawomocny tylko w krajach Unii Europejskiej oznacza e wyr b nim oznaczony nie mo e by przetworzony jako odpad razem z innymi domowymi lub przemys owymi odpadami lecz musi by sk adowany w...

Страница 157: ...Turbomolekul rn v v vy 158 V eobecn informace 159 Uskladn n 160 P prava k instalaci 161 Instalace 162 Pou it 164 Zapnut a pou v n v v vy TV 401 301 MS 165 Vypnut v v vy TV 401 301 MSse roubovanou p ru...

Страница 158: ...jak jsou popisov ny v n sleduj c m n vodu obsahuj velk mno stv kinetick energie d ky vysok ot iv rychlosti v kombinaci s konkr tn m objemem jejich rotor V p pad syst mov nefuk nosti nap kontaktu rotor...

Страница 159: ...rn v v vou a p slu n m regul torem pro takov aplikace kde se po aduje vysok a velmi vysok vakuum Za zen m e od erp vat libovoln plyn nebo plynnou sm s Nen vhodn na erp n tekutin nebo pevn ch stic erp...

Страница 160: ...hly po kodit za zen POZN MKA Pozn mky obsahuj d le it informace p evzat z textu Uskladn n Aby byla zaji t na maxim ln provozuschopnost a spolehlivost turbomolekul rn ch v v v firmy Agilent mus te dodr...

Страница 161: ...balu Pokud toto balen vykazuje zn mky po kozen k n mu mohlo doj t b hem p epravy kontaktujte va i m stn prodejn pobo ku P i vybalov n d vejte pozor aby za zen nespadlo a chra te jej p ed v emi nenad l...

Страница 162: ...a do syst mu a t m se ochr nila p ed jak mkoli zne i t n m a prachem Instalace POZOR P ed p ipojen m turbomolekul rn v v vy do syst mu nesund vejte roubovac v ko Nezap nejte turbov v vu dokud nebude n...

Страница 163: ...n mu erpadlu viz Technical Information V v vu TV 401 301 MS lze instalovat v libovoln poloze V v vu TV 401 301 MS upevn te v n jak stabiln poloze a p vodn p rubu turbov v vy p ipojte k pevn protip rub...

Страница 164: ...tavec popisuje podrobnosti z kladn ch pracovn ch postup P ed pou it m syst mu prove te v echna elektrick a pneumatick p ipojen P i zah v n vakuov komory teplota p vodn p ruby nesm p ekro it 120 C NEBE...

Страница 165: ...do provozu Prvn spu t n v v vy je v re imu pozvoln ho rozb hu Jakmile bude rozb hov cyklus dokon en re im pozvoln ho rozb hu se automaticky vypne a dal starty ji budou prob hat bez pozvoln ho rozb hu...

Страница 166: ...jen troj ilov m p vodn m kabelem viz tabulka d l kter lze doobjednat se z str kou mezin rodn schv lenou Pou vejte tento kabel se z str kou a pat i n uzemn nou z suvku abyste p ede li razu elektrick m...

Страница 167: ...o kejte dokud povrchov teplota v v vy neklesne pod 50 C V p pad poruchy kontaktujte m stn servisn st edisko firmy Agilent kter m e dodat n hradn repasovan za zen v m nou za porouchan POZN MKA P ed ode...

Страница 168: ...ur uje e v robek kter je takto ozna en NESM b t likvidov n spole n s ostatn mi dom c mi nebo pr myslov mi odpady ale je nutno ho p edat do pat i n ch provozn ch sb ren kde mus b t t d n a likvidov n...

Страница 169: ...bomolekul rne v vevy 170 V eobecn inform cie 171 Uchov vanie 172 Pr prava na in tal ciu 173 In tal cia 174 Pou itie 176 Zapnutie a pou itie zariadenia TV 401 301 MS177 Vypnutie zariadenia TV 401 301 M...

Страница 170: ...vevy ak s n sledovne popisovan obsahuj ve k mno stvo kinetickej energie v aka vysokej ot avej r chlosti v kombin cii s konkretn m objemom ich rotorov V pr pade syst movej poruchy napr pri kontaktu rot...

Страница 171: ...omolekul rnou v vevou pre vysok a ultravysok v kuov aplik cie s relevantn m kontroln m modulom Syst m dok e vy erpa ubovo n typ plynu alebo zmesi plynov Nie je vhodn na vy erp vanie tekut n alebo pevn...

Страница 172: ...sobi po kodenie zariadenia POZN MKA Pozn mky upozor uj na d le it inform cie z textu Uchov vanie Ak chcete aby turbomolekul rne v vevy zna ky Agilent pod vali maxim lny a spo ahliv v kon dodr iavajte...

Страница 173: ...peci lnom ochrannom balen Ak je balenie po koden o sa m e sta napr klad po as prepravy obr te sa na miestne zast penie spolo nosti Agilent Po as vyba ovania syst mu dbajte na to aby zariadenie nespad...

Страница 174: ...ostalo zabalen a do in tal cie kv li prevencii kontamin cie prachom In tal cia POZOR Ochrann kryt odstr te tesne pred pripojen m turbov vevy k syst mu Turbov vevy nesp ajte k m nie je pripojen na v ku...

Страница 175: ...ariadenie TV 401 301 MS m e by nain talovan v ubovo nej polohe Upevnite TV 401 301 MS do stabilnej polohy pripojen m vstupnej pr ruby turbov vevy k pevnej pr rube upevnenej tak aby vydr ala nam hanie...

Страница 176: ...e z kladn sp soby pou itia zariadenia Sk r ne za nete syst m pou va zapojte v etky elektrick a pneumatick pripojenia Teplota vstupnej pr ruby po as zahrievania v kuovej komory nesmie prekro i 120 C NE...

Страница 177: ...Prv spustenie v vevy prebehne v re ime Soft Start Jemn tart Po dokon en sp acieho cyklu sa re im Soft Start automaticky zablokuje a v etky nasleduj ce spustenia zariadenia prebehn bez re imu Soft Star...

Страница 178: ...an pomocou 3 ilovej n ry vi tabu ku dielov ktor mo no objedna so z str kou medzin rodne schv lenou T to n ru so z str kou pou vajte spolu s vhodne uzemnenou z suvkou aby nedo lo k z sahu elektrick m p...

Страница 179: ...k m sa rotor neprestane ot a a k m teplota povrchu v vevy neklesne pod 50 C V pr pade poruchy zariadenia vyh adajte kontaktn stredisko spolo nosti Agilent kde v m pokazen syst m vymenia POZN MKA Sk r...

Страница 180: ...je smernicu E s n zvom WEEE Tento symbol platn iba pre t ty Eur pskej nie znamen e v robok s t mto t tkom NESMIE by odstr nen spolu s be n m dom cim alebo priemyseln m odpadom ale sa mus odstr ni ako...

Страница 181: ...Turbomolekularne rpalke 182 Splo ne informacije 183 Shranjevanje 184 Priprava za monta o 185 Monta a 186 Uporaba 188 Vklop in uporaba naprave TV 401 301 MS 189 Izklop naprave TV 401 301 MS 190 Zaustav...

Страница 182: ...lednjih navodilih vsebujejo veliko koli ino kineti ne energije zaradi visoke hitrosti v povezavi s specifi nimi masami rotorjev V primeru nepravilnega delovanje sistema na primer pri dotiku rotorja st...

Страница 183: ...urbomolekularno rpalko za visoko in ultra visoko vakuumsko uporabo s primernim krmilnikom Sistem lahko rpa vse tipe plinova ali plinskih zmesi Ni primeren za rpanje teko ine ali trdnih delcev rpanje s...

Страница 184: ...terih lahko pride do po kodbe opreme OPOMBA Opombe vsebujejo pomebne informacije iz besedila Shranjevanje Da bi zagotovili maksimalni u inek in zanesljivost rpalk Agilent Turbomolecular se morate dr a...

Страница 185: ...monta o Naprava TV 401 301 MS je dobavljena v posebni za itni embala i e je embala a po kodovana kontaktirajte lokalno prodajno pisarno Pri odpiranju sistema pazite da vam ne pade iz rok oz ga ne str...

Страница 186: ...e v sistem S tem boste prepre ili onesna enje s prahom Monta a POZOR Za itni pokrov ne odstranjujte dokler ne pove ete turbo rpalko na sistem Ne dovajajte ni esar turbo rpalki dokler ta ni primerno pr...

Страница 187: ...iklju iti na primarno rpalko glej Technical Information TV 401 301 MS lahko montirate v tevilne pozicije TV 401 301 MS namestite v stabilem polo aj tako da pove ete vhodno prirobnico turbo rpalke na p...

Страница 188: ...uje osnovne postopke za uporabo Pred uporabo sistema pove ite vse elektri ne in pnevmatske povezave Pri segrevanju vakuumskega le i a temperatura dovodne prirobnice ne sme prese i 120 C SVARILO Turbo...

Страница 189: ...Prvi zagon rpalke je v na inu mehkega zaganjanja Soft Start Ko se za etni cikel zaklju i se na in Soft Start samodejno onemogo i in na voljo so naslednji zagoni brez na ina Soft Start Za ponovno akti...

Страница 190: ...a napajalnega kabla glej tabelo delov ki se lahko naro ijo z vtika em potrjen na mednarodnem nivoju Uporabljajte ta kabel in vtika skupaj s primerno ozemljeno vti nico tako da vas tok ne strese in da...

Страница 191: ...rtino po akajte da se rotor ustavi an po akajte da povr inska temperatura rpalke pade pod 50 C V primeru okvare kontaktirajte lokalni Agilent servisni center ki vam lahko zamenja pokvarjen sistem z no...

Страница 192: ...EEE Ta simbol ki velja samo v dr avah Evropske Skupnosti pomeni da izdelek NE SMETE ODSTRANITI skupaj z ostalimi komunalnimi ali pa industrijskimi odpadki temve morate poskrbeti za njihovo primerno lo...

Страница 193: ...ine for Turbomolecular Pumps 194 General Information 195 Storage 196 Preparation for Installation 197 Installation 198 Use 200 Switching on and Use of TV 401 301 MS 201 TV 401 301 MS Switching off 202...

Страница 194: ...contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact...

Страница 195: ...ar pump for high and ultra high vacuum applications with its relevant controller The system can pumps any type of gas or gas compound It is not suitable for pumping liquids or solid particles The pump...

Страница 196: ...to the equipment NOTE Notes contain important information taken from the text Storage In order to guarantee the maximum level of performance and reliability of Agilent Turbomolecular pumps the follow...

Страница 197: ...special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the system be sure not to drop it and avoid any kind of...

Страница 198: ...in the system thus preventing any form of pollution by dust Installation CAUTION Do not remove the protective cap before connecting the turbopump to the system Do not supply the Turbopump until it is...

Страница 199: ...be connected to a primary pump see Technical Information The TV 401 301 MS can be installed in any position Fix the TV 401 301 MS in a stable position connecting the turbopump fixing flange to a fixed...

Страница 200: ...the fundamental operating procedures Make all electrical an pneumatic connections before the use of the system While heating the vacuum chamber the temperature of the inlet flange must not exceed 120...

Страница 201: ...start up is in Soft Start mode When the start up cycle is finished the Soft Start mode automatically is disabled and the following start ups are without the Soft Start mode To re enable the Soft Start...

Страница 202: ...rd see orderable parts table and plug internationally approved for user s safety Use this power cord and plug in conjunction with a properly grounded power socket to avoid electrical shock and to sati...

Страница 203: ...wait until the surface temperature of the pump falls below 50 C In the case of breakdown contact your local Agilent service center who can supply a reconditioned system to replace that broken down NOT...

Страница 204: ...ymbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a diffe...

Страница 205: ...Outline 212 Interconnections 216 Input Power Connector217 P3 Spare 217 P5 External Fan 218 J5 In Out 218 Signal Description 219 How to Connect the Output Open Collector of the Controller 223 How to C...

Страница 206: ...Serial Cable Installation 243 TV 401 301 MS Controller Installation 245 Connection of the Fore Vacuum Pump 245 TV 401 301 MS Insertion and Extraction 246 Insertion Procedure 247 Extraction Procedure...

Страница 207: ...l 87 901 013 01 A 207 264 Description of the TV 401 301 MS The TV 401 301 MS pumping system consists of a pump with a dedicated controller The TV 401 301 MS pump model is 869 8928R003 see the followin...

Страница 208: ...e pump The static blades of the stator are made of stainless steel These are supported and accurately positioned by spacer rings The Macrotorr stators are in the form of self positioning machined disc...

Страница 209: ...p microcomputer and is composed of two PCBs which include power supply and 3 phase output analog and input output section microprocessor and digital section The power supply together with the 3 phase...

Страница 210: ...10 8 Torr Inlet flange DN 100 Nominal rotational speed 60000 RPM Start up time 3 minutes Recommended forepump mechanical Agilent DS 302 dry pump Agilent SH 100 Operating position any Operating ambient...

Страница 211: ...t RS232 cable with a 9 pin D type male connector and a 9 pin D type female connector and Navigator software optional Pump power output 54 Vac 3 phases 150 W max 1010 Hz max nominal rotational speed 60...

Страница 212: ...301 MS Outline 212 264 TV 401 301 MS User Manual 87 901 013 01 A TV 401 301 MS Outline The following figure shows the TV 401 301 MS outlines dimensions are in mm inches Figure 5 TV 401 301 MS outline...

Страница 213: ...mation TV 401 301 MS Outline 17 TV 401 301 MS User Manual 87 901 013 01 A 213 264 The following figure shows the 869 8979M005 controller outline dimensions are in inches mm Figure 6 TV 401 301 NSF con...

Страница 214: ...rmation TV 401 301 MS Outline 214 264 TV 401 301 MS User Manual 87 901 013 01 A Figure 7 Graph of nitrogen pumping speed vs inlet pressure Main port Figure 8 Graph of nitrogen pumping speed vs inlet p...

Страница 215: ...ation TV 401 301 MS Outline 17 TV 401 301 MS User Manual 87 901 013 01 A 215 264 Figure 9 Graph of compression ratio vs foreline pressure Main Port Figure 10 Graph of compression ratio vs foreline pre...

Страница 216: ...17 Technical Information Interconnections 216 264 TV 401 301 MS User Manual 87 901 013 01 A Interconnections The following figure shows the TV 401 301 MS interconnections Figure 11...

Страница 217: ...er Manual 87 901 013 01 A 217 264 Input Power Connector The following figure shows the input power connector Figure 12 P3 Spare Figure 13 This is a dedicated 24 Vdc spare connector note that it can be...

Страница 218: ...dicated 24 Vdc connector to supply the optional external fan J5 In Out Figure 15 This connector carries all the input and output signals to remote control the TV 401 301 MS It is a 15 pins D type conn...

Страница 219: ...ANALOG SIGNAL OUT 15 GROUND PROGRAMMABLE ANALOG SIGNAL OUT Signal Description START STOP input signal to start or stop the pump With the supplied cover connector the START STOP signal is connected to...

Страница 220: ...speed is set to High Speed 1010 Hz max and settable by window 120 If a continuous signal is applied pin 5 fixed at 24 V and pin 6 fixed to ground the pump speed is set to Low Speed The Low Speed frequ...

Страница 221: ...is the output is normally at 24 Vdc and becomes 0 Vdc when activated Moreover if the reference quantity is the frequency or the current drawn it is possible to set the hysteresis in of the threshold v...

Страница 222: ...shold 980 Hz hysteresis 2 activation type low level delay time 0 second RELAY CONTACT this output signal is the repetition of the PROGRAMMABLE SET POINT output signal When the PROGRAMMABLE SET POINT s...

Страница 223: ...ect the Output Open Collector of the Controller Here below there are examples of typical connections of the input of TV 401 301 MS to an external system Two cases are considered 1 the customer supplie...

Страница 224: ...17 Technical Information J5 In Out 224 264 TV 401 301 MS User Manual 87 901 013 01 A Figure 19 Case 1...

Страница 225: ...Technical Information J5 In Out 17 TV 401 301 MS User Manual 87 901 013 01 A 225 264 Figure 20 Case 2 with relay utilisation...

Страница 226: ...utilisation How to Connect the Outputs of the Controller The following figure shows a typical logic output connection relay coil but any other device may be connected e g a LED a computer etc and the...

Страница 227: ...Technical Information J5 In Out 17 TV 401 301 MS User Manual 87 901 013 01 A 227 264 Using internal 24 Vdc supply Figure 22 Using external 24 Vdc supply Figure 23...

Страница 228: ...a 9 pin D type serial input output connector to control via an RS 232 or RS 485 connection the TV 401 301 MS Tab 4 PIN N SIGNAL NAME 1 5 V OUT 2 TX RS232 3 RX RS232 4 A RS422 Optional 5 GND 6 A RS485...

Страница 229: ...is necessary to select the type of communication as well as the device address by means of the Navigator software Communication Format 8 data bit no parity 1 stop bit baud rate 600 1200 2400 4800 960...

Страница 230: ...graph COM Command 0x30 to read the window 0x31 to write into the window DATA an alphanumeric ASCII string with the data to be written into the window In case of a reading command this field is not pre...

Страница 231: ...gic window Numeric 6 bytes After a read instruction of a numeric window Alphanumeric 10 bytes After a read instruction of an alphanumeric window ACK 1 byte 0x6 The command execution has been successfu...

Страница 232: ...rce PC Destination Controller 02 80 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command STOP Source PC Destination Con...

Страница 233: ...C Destination Controller 02 80 31 30 30 31 31 03 42 32 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command SOFT START OFF Source PC Destinatio...

Страница 234: ...38 37 STX ADDR WINDOW RD ETX CRC Source Controller with address 3 in stop status Destination PC 02 83 32 30 35 30 30 30 30 30 30 03 38 37 STX ADDR WINDOW DATA STATUS ETX CRC Command READ SERIAL TYPE...

Страница 235: ...Start write only in Stop condition YES 1 NO 0 101 R W N Set Point type 0 Frequency 1 Current 2 Time default 0 102 R W N Set Point threshold expressed in Hz mA or s default 980 103 R W N Set Point del...

Страница 236: ...output voltage signal proportional to frequency or power 0 frequency 1 power default 0 117 R W N Low Speed frequency Hz 750 to Maximum rotationl frequency win 121 default 750 120 R W N Rotational freq...

Страница 237: ...voltage duty cycle 203 R N Driving frequency in Hz 204 R N Pump temperature in C 0 to 70 205 R N Pump status Stop 0 Waiting intlk 1 Starting 2 Auto tuning 3 Braking 4 Normal 5 Fail 6 206 R N Error co...

Страница 238: ...ault 0 NOTE 1 Automatic means that when the controller stops the vent valve is opened with a delay defined by window n 126 when the controller starts the vent valve is immediately closed 2 On command...

Страница 239: ...ater Cooling Kit Installation Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient The two model part numbe...

Страница 240: ...013 01 A CAUTION The items of the plastic model kit must be assembled as shown in the following figure Figure 28 The assembled kit must be screwed into the suitable holes of the pump body with a reco...

Страница 241: ...avoid that the tube s gets loose or disconnected during operation Cooling may be carried out either through an open circuit with eventual discharge of the water or using a closed circuit cooling syste...

Страница 242: ...le to protect the pump bearings against particulate and corrosive gases that could move into the pump see Accessories and Spare Parts table To install the gas purge valve it is necessary to unscrew th...

Страница 243: ...Figure 31 Serial Cable Installation The supplied serial cable must be installed when the TV 401 301 MS or the optional vent valve has to be controlled by means of a remote computer The cable is insta...

Страница 244: ...17 Technical Information Serial Cable Installation 244 264 TV 401 301 MS User Manual 87 901 013 01 A Figure 32...

Страница 245: ...on the controller casing see controller outline drawing Connection of the Fore Vacuum Pump A KF 16 flange is available to connect the TV 401 301 MS pump to the fore vacuum pump A vacuum approved pipe...

Страница 246: ...Needed TV 401 301 MS pump PN 869 8928R003 in the following the pump supplied with O rings already mounted in the factory Quantity 6 screws M6 20 8 mm black with spherical tip resistance class 10 9 or...

Страница 247: ...extraction flange Insertion smooth holes 6 RED CIRCLES 60 extraction M6 threaded holes 3 BLUE RHOMBS 120 Insertion Procedure 1 Insert the pump into the chamber carefully and without tilting it Align...

Страница 248: ...xtraction 248 264 TV 401 301 MS User Manual 87 901 013 01 A Figure 35 2 When the axial distance between the pump flange and chamber flange is about 4 mm engage 6 sphere screws with washers RED CIRCLES...

Страница 249: ...e torque wrench set 10 Nm WARNING Do not screw in the M4 screws present on the pump flange at a smaller diameter and marked with yellow enamel 4 Screw in the 6 sphere screws clockwise into the notched...

Страница 250: ...ual 87 901 013 01 A Figure 37 5 Get the pump flange in contact with the chamber flange and close the sphere screws 10 Nm Extraction Procedure 1 Use a torque wrench locked at a torque value 10 Nm 2 Uns...

Страница 251: ...ARNING Do not unscrew in the M4 screws present on the pump flange at a smaller diameter and marked with yellow enamel 3 Engage 3 sphere screws into the M6 threaded holes present on the pump flange blu...

Страница 252: ...Technical Information TV 401 301 MS Insertion and Extraction 252 264 TV 401 301 MS User Manual 87 901 013 01 A Figure 39 5 When the pump is free pull it out of the chamber carefully Fig 40 turn turn t...

Страница 253: ...Technical Information TV 401 301 MS Insertion and Extraction 17 TV 401 301 MS User Manual 87 901 013 01 A 253 264 Figure 40 6 Remove the 3 M6 screws from the pump flange...

Страница 254: ...to the pump ground If the temperature sensor is disconnected the pump will not start To prevent damage to the pump when the temperature exceeds 60 C the sensor automatically cuts out the power supply...

Страница 255: ...to vent the system and the pump avoiding the contact between the pump bearings and the corrosive gas is described in the following points 1 Close the corrosive gas flow into the system 2 Leaving the T...

Страница 256: ...onsumption by the motor most of which is dissipated in the rotor Since the rotor is not in contact with the stator the above power can leave the rotor mainly by radiation and hence the rotor may be ov...

Страница 257: ...d by Agilent s specialist Accessories and Spare Parts Tab 8 Description Part number Mains cable NEMA Plug 3m long 969 9958 Mains cable European Plug 3m long 969 9957 Serial cable and Navigator Softwar...

Страница 258: ...17 Technical Information Accessories and Spare Parts 258 264 TV 401 301 MS User Manual 87 901 013 01 A...

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Страница 264: ...6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 1QU UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 China Agilent Technologies China Co Ltd Vacuum Products Division No 3...

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