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Vacuum System
6
5977B Series MSD Troubleshooting and Maintenance Manual
175
Turbo Pump and Fan
The turbo pump is clamped directly to the bottom of the analyzer chamber.
The turbo pump has a cylindrical body with its inlet open to the interior of the
analyzer chamber. Inside the pump body is a central shaft or cylinder. Sets of
small blades (airfoils) radiate from the central shaft. The shaft spins at up to
60,000 revolutions per minute (rpm) in the turbo pump.
Turbo pumps move gas by momentum transfer. The turbine blades are angled
so that when they strike a gas molecule it is deflected downward. Each set of
blades pushes the gas molecules further down toward the pump outlet.
The foreline pump is connected by a hose to the outlet of the turbo pump.
It removes the gas molecules that reach the outlet.
A controller regulates current to the pump and monitors pump motor speed
and temperature. A cooling fan is located between the turbo pump and the
front panel of the MSD. The fan draws air from outside the MSD and blows it
over the pump.
The turbo pump automatically turns on when the MSD power is switched on.
The system allows the analyzer to be turned on when the turbo pump is
greater than 80% speed, but the pump normally operates at 100% speed. Turbo
pump MSDs typically maintain an indicated pressure below 8 × 10
-5
Torr for
helium column flows up to 4 mL/minute for the performance turbo pump, and
up to 2 mL/minute for the standard turbo pump. Pressure (vacuum) can only
be measured if your MSD is equipped with the optional gauge controller.
The turbo pump spins up (starts) and spins down (stops) quickly. This
simplifies pumpdown and venting. From initial power-on, the system can
pump down to operating pressure in 5 to 10 minutes.
See Also
•
To pump down the MSD in the Operating Manual
•
To vent the MSD in the Operating Manual
•
Содержание 5977B Series
Страница 1: ...Agilent Technologies Agilent 5977B Series MSD Troubleshooting and Maintenance Manual ...
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Страница 33: ...Introduction 1 5977B Series MSD Troubleshooting and Maintenance Manual 33 ...
Страница 34: ...34 5977B Series MSD Troubleshooting and Maintenance Manual 1 Introduction ...
Страница 88: ...88 3 CI Troubleshooting ...
Страница 152: ...152 5977B Series MSD Troubleshooting and Maintenance Manual 5 CI Maintenance ...
Страница 180: ...180 5977B Series MSD Troubleshooting and Maintenance Manual 6 Vacuum System ...
Страница 196: ...196 5977B Series MSD Troubleshooting and Maintenance Manual 7 Analyzer Figure 46 Interface tip seal Interface tip seal ...
Страница 226: ...226 5977B Series MSD Troubleshooting and Maintenance Manual 8 Electronics ...
Страница 232: ...232 5977B Series MSD Troubleshooting and Maintenance Manual 9 Parts Figure 55 Pfeiffer DUO pump ...
Страница 241: ...Parts 9 5977B Series MSD Troubleshooting and Maintenance Manual 241 EI ion source ...
Страница 243: ...Parts 9 5977B Series MSD Troubleshooting and Maintenance Manual 243 Figure 63 Extractor EI ion source ...
Страница 245: ...Parts 9 5977B Series MSD Troubleshooting and Maintenance Manual 245 Figure 64 The CI ion source 15 16 ...
Страница 250: ...250 5977B Series MSD Troubleshooting and Maintenance Manual 9 Parts Figure 67 CI GC MSD interface ...
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Страница 258: ... G3870 90003 G7077 90028 Agilent Technologies Inc Printed in USA September 2016 Agilent Technologies ...