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5975 Series MSD Troubleshooting and Maintenance Manual
4
General Maintenance
To Remove the Diffusion Pump
Materials needed
•
Aluminum foil, clean
•
Gloves, oil-resistant
Procedure
1
Vent the MSD.
2
Separate the MSD from the GC. See
“To Separate the MSD from the GC”
3
Disconnect the foreline gauge assembly from the diffusion pump outlet.
The foreline gauge cable can be disconnected or can remain connected to
the foreline gauge.
4
Disconnect the diffusion pump temperature sensor wires from the wiring
harness.
5
Disconnect high vacuum power (HIVAC POWER) cable from the back panel
of the MSD. (This is the thick black cable that emerges near the bottom of
the pump.)
6
Support the diffusion pump with one hand.
WA R N I N G
The diffusion pump fluid may contain traces of toxic chemicals.
Содержание 5975C TAD VL MSD
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Страница 249: ...Parts 9 5975 Series MSD Troubleshooting and Maintenance Manual 249 Figure 59 Turbo pump and related parts 1 2 3 4 5...
Страница 253: ...Parts 9 5975 Series MSD Troubleshooting and Maintenance Manual 253 Figure 61 Analyzer parts 7 under clips 3 4 5 6...
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