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Overview

PRO225LM Hardware Manual

1.3. Basic Specifications

N O T E :

Aerotech continually improves its product offerings; listed options may be superseded at any

time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.

Table 1-3:

PRO225LM Series Specifications (-0100 to -0400)

PRO225LM

-0100

-0150

-0200

-0250

-0300

-0400

Travel

100 mm

150 mm

200 mm

250 mm

300 mm

400 mm

Accuracy

(1)

Standard

±4 μm

±6 μm

±8 μm

±9 μm

±10 μm

±12 μm

Calibrated

±1 μm

±1 μm

±1 μm

±1 μm

±1 μm

±1 μm

Resolution (Minimum
Incremental Motion)

5 nm (-E1 Encoder),

10 nm (-E3 Encoder)

Bidirectional Repeatability

(1)

±0.3 μm

±0.4 μm

±0.4 μm

±0.4 μm

±0.4 μm

±0.4 μm

Horizontal Straightness

(1)

±1.5 μm

±2 μm

±2.5 μm

±3 μm

±3.5 μm

±4.5 μm

Vertical Straightness

(1)

±1.5 μm

±2 μm

±2.5 μm

±3 μm

±3.5 μm

±4.5 μm

Pitch

25 μrad

(5.2 arc

sec)

29 μrad

(6 arc sec)

39 μrad

(8.0 arc

sec)

44 μrad

(9.1 arc

sec)

50 μrad

(10.3 arc

sec)

60 μrad

(12.4 arc

sec)

Roll

27 μrad

(5.6 arc

sec)

29 μrad

(6 arc sec)

39 μrad

(8.0 arc

sec)

44 μrad

(9.1 arc

sec)

50 μrad

(10.3 arc

sec)

60 μrad

(12.4 arc

sec)

Yaw

27 μrad

(5.6 arc

sec)

29 μrad

(6 arc sec)

39 μrad

(8.0 arc

sec)

44 μrad

(9.1 arc

sec)

50 μrad

(10.3 arc

sec)

60 μrad

(12.4 arc

sec)

Maximum Speed

(2)

2 m/s

Maximum Acceleration

(2)

3 g

Maximum Force, Continuous

153 N – Standard

251.6 N – With Air Cooling (20 psig)

Load Capacity

(3)

Horizontal

100 kg

Side

100 kg

Moving Mass

8.4 kg

Stage Mass

23.8 kg

25.4 kg

26.9 kg

28.5 kg

30.1 kg

33.3 kg

Material

Anodized Aluminum

Mean Time Between Failure

20,000 Hours

1. Certified with the PL1 option.
2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
3. Axis orientation for on-axis loading is listed.
4. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent (consult the Aerotech factory for multi-axis or non-standard applications).

14

Chapter 1

www.aerotech.com

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Содержание PRO225LM Series

Страница 1: ...Revision 1 03 00 PRO225LM Hardware Manual ...

Страница 2: ...rvice aerotech com 101 Zeta Drive Pittsburgh PA 15238 2811 www aerotech com United Kingdom Japan Phone 44 0 1256 855055 Fax 44 0 1256 855649 Email service aerotech co uk Phone 81 0 50 5830 6814 Fax 81 0 43 306 3773 Email service aerotechkk co jp Germany China Phone 49 0 911 967 9370 Fax 49 0 911 967 93720 Email service aerotechgmbh de Phone 86 21 3319 7715 Email service aerotech com France Taiwan ...

Страница 3: ...ng and Handling the Stage 17 2 2 Dimensions 20 2 3 Securing the Stage to the Mounting Surface 23 2 4 Attaching the Payload to the Stage 24 2 4 1 Speed Capability 26 Chapter 3 Electrical Specifications and Installation 27 3 1 Motor and Feedback Connectors 28 3 2 Motor and Feedback Wiring 34 3 3 Motor and Feedback Specifications 36 3 4 Limits Marker and Machine Direction 38 3 5 Motor and Feedback Ph...

Страница 4: ...Load Capability of PRO225LM Series Stages 25 Figure 2 7 Stage Orientations 25 Figure 3 1 Ground Connection Points for the CMS0 Option 28 Figure 3 2 Motor and Feedback Wiring 34 Figure 3 3 Motor and Feedback Wiring for a Typical Vertical or Rotary Axis Stage 35 Figure 3 4 Machine Direction 38 Figure 3 5 Hall Phasing 39 Figure 3 6 Analog Encoder Phasing Reference Diagram E1 Incremental Encoder 40 Fi...

Страница 5: ...to Mounting Surface Hardware 23 Table 3 1 Linear Motor Connector Wiring 29 Table 3 2 Linear Motor Limit and Encoder Connector Wiring E1 and E2 Incremental Encoder Options 30 Table 3 3 Linear Motor Limit and Encoder Connector Wiring E3 Absolute Encoder Option 31 Table 3 4 General Motor Connector Wiring for Z or T Axes 32 Table 3 5 General Feedback Connector Wiring for Z or T axes 33 Table 3 6 Feedb...

Страница 6: ...Table of Contents PRO225LM Hardware Manual 6 www aerotech com This page intentionally left blank ...

Страница 7: ...before servicing equipment 4 All components must be properly grounded in accordance with local electrical safety requirements 5 Operator safeguarding requirements must be addressed during final integration of the product W A R N I N G To minimize the possibility of electrical shock bodily injury or death the following precautions must be followed 1 Moving parts can cause crushing or shearing injur...

Страница 8: ...Safety PRO225LM Hardware Manual 8 www aerotech com This page intentionally left blank ...

Страница 9: ...ts and further more declares that it is not allowed to put the equipment into service until the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national implementing legislation i e as a whole including the equipment referred to in this Declaration This is to c...

Страница 10: ...Declaration of Conformity PRO225LM Hardware Manual 10 www aerotech com This page intentionally left blank ...

Страница 11: ...00 mm travel stage 1000 1000 mm travel stage 1200 1200 mm travel stage 1500 1500 mm travel stage Mounting Orientation Required Normal mounting orientation MT1 Side mounted or vertical orientation MT2 Inverted mounting orientation Tabletop Required TT1 Tabletop with metric dimension mounting TT2 Tabletop with English dimension mounting TT3 Accessory tabletop with mounting for select rotary stages T...

Страница 12: ...er by ordered on the upper axis of an XY set only order on lower axis ThermoComp Optional TCMP ThermoComp integrated thermal compensation unit single or lower axis NOTE An A3200 controller must be used with the TCMP option Metrology Required PL0 No metrology performance plots PL1 Metrology uncalibrated with performance plots PL2 Metrology calibrated HALAR with performance plots Accessories To be O...

Страница 13: ...ronment Excessive floor or acoustical vibration can affect system performance Contact Aerotech for information regarding your specific application Protection Rating The PRO225LM stages have limited protection against dust but not water This equates to an ingress protection rating of IP50 Use Indoor use only 1 2 Accuracy and Temperature Effects The accuracy specification of PRO225LM series stages i...

Страница 14: ...d 6 arc sec 39 μrad 8 0 arc sec 44 μrad 9 1 arc sec 50 μrad 10 3 arc sec 60 μrad 12 4 arc sec Roll 27 μrad 5 6 arc sec 29 μrad 6 arc sec 39 μrad 8 0 arc sec 44 μrad 9 1 arc sec 50 μrad 10 3 arc sec 60 μrad 12 4 arc sec Yaw 27 μrad 5 6 arc sec 29 μrad 6 arc sec 39 μrad 8 0 arc sec 44 μrad 9 1 arc sec 50 μrad 10 3 arc sec 60 μrad 12 4 arc sec Maximum Speed 2 2 m s Maximum Acceleration 2 3 g Maximum ...

Страница 15: ...d 18 6 arc sec 110 μrad 22 7 arc sec 130 μrad 26 8 arc sec 140 μrad 28 9 arc sec Yaw 70 μrad 14 4 arc sec 80 μrad 16 5 arc sec 90 μrad 18 6 arc sec 110 μrad 22 7 arc sec 130 μrad 26 8 arc sec 140 μrad 28 9 arc sec Maximum Speed 2 2 m s Maximum Acceleration 2 3 g Maximum Force Continuous 153 N Standard 251 6 N With Air Cooling 20 psig Load Capacity 3 Horizontal 100 kg Side 100 kg Moving Mass 8 4 kg...

Страница 16: ...ethylene gloves to prevent any contaminants from adhering to the surface of the PRO225LM 3 During installation use cleaned vented stainless steel fasteners when securing the PRO225LM 4 Reduced air pressure eliminates significant convective heat transfer This coupled with the viscous vacuum compatible lubricants could result in excessive motor operating temperatures Because of this consider all con...

Страница 17: ...a smooth flat and clean surface Before operating the PRO225LM it is important to let it stabilize at room temperature for at least 12 hours Allowing it to stabilize to room temperature will ensure that all of the alignments preloads and tolerances are the same as they were when tested at Aerotech Use compressed nitrogen or clean dry oil less air to remove any dust or debris that has collected duri...

Страница 18: ...is stack QTY 4 Red anodized brackets on the lower axis of a multi axis stack Figure 2 1 Shipping Brackets Used on Single Axis Stages or Upper Axes of XY Systems N OTE After removing the lifting features or shipping brackets retain them for future use Do not transport or ship the PRO225LM without the lifting features or shipping brackets attached 18 Chapter 2 www aerotech com ...

Страница 19: ...se must be removed for the stage to operate Retain the lifting hardware for future use If the stage must be lifted in the future reattach the shipping brackets and the lifting hardware If the stage is part of a multi axis system attach the lifting features to the lower axis Eyebolt QTY 4 Standoff QTY 4 Figure 2 2 PRO225LM Series Stage with Lifting Features N OTE After removing the lifting features...

Страница 20: ...Mechanical Specifications and Installation PRO225LM Hardware Manual 2 2 Dimensions NOTES Figure 2 3 PRO225LM Dimensions 20 Chapter 2 www aerotech com ...

Страница 21: ...LLOWING ADRS ADRT AGR ALAR CCS190DR 150 150 100 100 SP 240 200 200 150 100 LP 260 80 100 125 150 200 80 100 125 170 200 150 44X M6x1 0 10 170 175 12 5 25 40 75 100 125 25 40 75 100 125 250 225 8X 6 6 THRU ALL 11 6 5 16X 5 5 THRU ALL 9 5 6 Figure 2 4 PRO225LM Accessory Tabletop Dimensions TT3 TT6 Options www aerotech com Chapter 2 21 ...

Страница 22: ...5LM Hardware Manual 107 CONNECTOR INTERFACE 6 MM AIR LINE CONNECTION FORCER COOLING MOTOR POWER MOTOR ENCODER FEEDBACK DIMENSIONS MILLIMETERS Figure 2 5 Dimensions for Stages without a Cable Management System CMS0 Option 22 Chapter 2 www aerotech com ...

Страница 23: ...completely dry Gently place the stage on the mounting surface N OTE The PRO225LM is precision machined and verified for flatness prior to product assembly at the factory If machining is required to achieve the desired flatness it should be performed on the mounting surface rather than the PRO225LM Shimming should be avoided if possible If shimming is required it should be minimized to retain maxim...

Страница 24: ... provided by Aerotech with the shipment may not be appropriate and servo instability can occur Refer to the controller help file for tuning assistance The payload must be flat rigid and comparable to the stage in quality to maintain optimum performance N OTE For valid system performance the mounting interface should be flat within 12 µm W A R N I N G Refer to the dimensions in Section 2 2 for maxi...

Страница 25: ...llation Horizontal Side 0 0 20 40 60 80 100 120 50 100 150 Offset Distance mm Load kg 200 250 300 Figure 2 6 Cantilevered Load Capability of PRO225LM Series Stages C G DHorizontal DSide Horizontal Side Figure 2 7 Stage Orientations www aerotech com Chapter 2 25 ...

Страница 26: ...ion dependent and determined by factors such as travel length payload amplifier sizing and duty cycle The Motor Sizer application supplied by Aerotech at https www aerotech com resources motor sizer aspx can be used to estimate allowable speeds and accelerations based on these parameters Consult with an Aerotech Applications Engineer to specify the system configuration for optimum performance 26 C...

Страница 27: ...nents usually indicate the appropriate connections If system level integration was purchased an electrical drawing showing system interconnects has been supplied with the system separate from this documentation The electrical wiring from the motor and encoder are integrated at the factory Refer to the following sections for standard motor wiring and connector pin assignments W A R N I N G Applicat...

Страница 28: ... the final application D A N G E R Remove power before connecting or disconnecting electrical components or cables Failure to do so may cause electric shock W A R N I N G The protective ground connection must be properly installed to minimize the possibility of electric shock W A R N I N G For stages with the CMS0 option Ground wire connection points are provided at the tabletop and stage base A u...

Страница 29: ...2 A1 2 1 5 4 3 A2 Motor Phase B A3 Motor Phase C 1 Motor Shield EMI shield 2 Reserved 3 Reserved 4 Reserved 5 Reserved A4 Frame ground motor protective ground Mating Connector Aerotech P N Third Party P N Backshell ECK00656 Amphenol 17E 1726 2 Sockets QTY 4 ECK00659 ITT Cannon DM53744 6 Connector ECK00657 ITT Cannon DBMM9W4SA197 www aerotech com Chapter 3 29 ...

Страница 30: ...all Effect sensor phase B 6 Marker N 7 Marker 8 Reserved 9 Reserved 10 Hall Effect sensor phase A 11 Hall Effect sensor phase C 12 Positive CW hardware limit 13 Reserved 14 Cosine 15 Cosine N 16 5 V power supply 17 Sine 18 Sine N 19 Reserved 20 Common ground to limit switch 21 Common ground to encoder power 22 Reserved 23 Reserved 24 Negative CCW hardware limit 25 Reserved Mating Connector Aerotec...

Страница 31: ...feedback devices 4 Reserved 5 Hall Effect sensor phase B 6 Clock 7 Clock 8 Data 9 Reserved 10 Hall Effect sensor phase A 11 Hall Effect sensor phase C 12 Reserved 13 Reserved 14 Reserved 15 Reserved 16 5 V power supply 17 Reserved 18 Reserved 19 Data 20 Common ground 21 Common ground 22 Reserved 23 Reserved 24 Reserved 25 Reserved Mating Connector Aerotech P N Third Party P N Backshell ECK00656 Am...

Страница 32: ...4 A3 A2 A1 2 1 5 4 3 A2 Motor Phase B 16 1 31 A3 Motor Phase C 16 1 31 1 Motor Shield EMI shield 16 1 31 2 Reserved 3 Reserved 4 Reserved 5 Reserved A4 Frame ground motor protective ground 16 1 31 Mating Connector Aerotech P N Third Party P N Backshell ECK00656 Amphenol 17E 1726 2 Sockets QTY 4 ECK00659 ITT Cannon DM53744 6 Connector ECK00657 ITT Cannon DBMM9W4SA197 32 Chapter 3 www aerotech com ...

Страница 33: ...all Effect sensor phase A 26 0 129 11 Hall Effect sensor phase C 26 0 129 12 Positive CW hardware limit 26 0 129 13 Reserved Brake 1 26 0 129 14 Cosine 26 0 129 15 Cosine N 26 0 129 16 5 V power supply 26 0 129 17 Sine 26 0 129 18 Sine N 26 0 129 19 Reserved 20 Common ground to limit switch 26 0 129 21 Common ground to encoder power 26 0 129 22 Reserved 23 Reserved 24 Negative CCW hardware limit 2...

Страница 34: ... HALL C COM COM 5V 5V THERMISTOR COSINE COSINE N SINE SINE N MARKER MARKER N CASE CASE HALL A MOTOR CONNECTIONS THIRD PARTY CONTROLLER 12 24 LIMIT LIMIT 1 t 5V 10K typ 10K typ 10K typ 5V 10K Pull Up 10K Pull Up Pull Up 1K 5V 5V 120 Ω 120 Ω 120 Ω 7 6 19 8 CLOCK CLOCK DATA DATA 120 Ω 120 Ω 1 E1 and E2 Incremental Encoder Option 2 E3 Absolute Encoder Option 1 2 1 2 Figure 3 2 Motor and Feedback Wirin...

Страница 35: ... BRAKE CASE CASE SAFE SWITCH MOVE HALL A 26 AWG 16 AWG 16 AWG 16 AWG 16 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG 26 AWG MOTOR CONNECTIONS THIRD PARTY CONTROLLER 12 24 LIMIT LIMIT 1 t 5V 10K typ 10K typ 10K typ 5V 10K Pull Up 10K Pull Up Pull Up 1K 5V 5V 120 Ω 120 Ω 120 Ω Figure 3 3 Motor and Feedback Wiring for a Typical Ve...

Страница 36: ... Incremental Encoder 1 Vpk pk into 120 Ω Load differential signals SIN SIN COS COS are 5 V pk pk relative to ground Digital Output Incremental Encoder RS422 485 compatible Serial Output Absolute Encoder EnDat 2 2 with 36 bit word Limit Switch Specifications Supply Voltage 5 V Supply Current 25 mA Output Type Open Collector Output Voltage 5 V Output Current 10 mA sinking Output Polarity Normally Cl...

Страница 37: ...imum Bus Voltage VDC 340 Magnetic Pole Pitch mm in 30 48 1 20 1 Performance is dependent upon heat sink configuration system cooling conditions and ambient temperature 2 Values shown 100 C rise above a 25 C ambient temperature with motor mounted to the specified aluminum heat sink 3 Peak force assumes correct rms current consult Aerotech 4 Force constant and motor constant specified at stall 5 All...

Страница 38: ...and Feedback phasing information Programming direction of a stage is set by the controller that is used to move the stage Programming direction is typically selectable in the controller while machine direction is hardwired in the stage Figure 3 4 shows the machine direction of PRO225LM stages POSITIVE MACHINE DIRECTION Positive Limit CW Limit Applies to E1 and E2 Incremental Encoder Options 1 1 1 ...

Страница 39: ...relative to the virtual wye common point POSITIVE MACHINE DIRECTION Motor Phase B ØB Hall B 0 100 180 300 400 0 100 180 300 400 Motor Phase C ØC Hall C 0 100 200 240 300 420 0 100 200 240 300 420 Motor Phase A ØA Hall A 0 120 200 300 400 0 120 200 300 400 Positive MOVE Clockwise Figure 3 5 Hall Phasing www aerotech com Chapter 3 39 ...

Страница 40: ...720 810 0 90 180 270 360 450 540 630 315 675 720 810 Figure 3 6 Analog Encoder Phasing Reference Diagram E1 Incremental Encoder POSITIVE MACHINE DIRECTION MRK MRK N Positive MOVE Clockwise 0 90 180 270 360 450 540 630 720 810 SIN SIN N 0 90 180 270 360 450 540 630 720 810 COS COS N 0 90 180 270 360 450 540 630 720 810 Figure 3 7 Encoder Phasing Reference Diagram E2 Incremental Encoder 40 Chapter 3...

Страница 41: ...le speed and environment In general stages operating in a clean environment should be cleaned and lubricated annually or every 500 km whichever comes first For stages operating under conditions involving excessive debris the stage should be cleaned every six months For high speed applications those near max speed at a duty cycle of 50 frequent maintenance with standard lubricants is required Month...

Страница 42: ... or making adjustments to the equipment Cleaning If a solvent is necessary for cleaning the stage Aerotech recommends using isopropyl alcohol Harsher solvents such as acetone may damage the plastic and end caps on the bearing trucks W A R N I N G Make sure that all solvent has completely evaporated before attempting to move the stage Lubrication Aerotech recommends that you use only Kluberplex BEM...

Страница 43: ... to remove stubborn debris 6 Apply a thin continuous film of lubricant to the linear bearing guides A good quality natural bristle artist s brush makes an excellent applicator 7 Manually move the stage to the opposite end of travel This will work the grease into the linear bearing guides 8 Repeat steps 3 through 5 for any areas covered by the original table position 9 Refasten the hardcover N OTE ...

Страница 44: ...Maintenance PRO225LM Hardware Manual Figure 4 1 Endplate Cover Removal Step 2 44 Chapter 4 www aerotech com ...

Страница 45: ...PRO225LM Hardware Manual Maintenance PRO165LM model shown The number of screws securing the hardcover is model dependent Figure 4 2 Hardcover Screw Removal Step 3 www aerotech com Chapter 4 45 ...

Страница 46: ...Maintenance PRO225LM Hardware Manual Figure 4 3 Hardcover Removal Step 3 46 Chapter 4 www aerotech com ...

Страница 47: ...or polarity and compatibility requirements Example voltage requirements Controller trap or fault refer to controller documentation Stage moves uncontrollably Encoder sine and cosine signal connections refer to Chapter 3 and Controller documentation Motor Connections refer to Chapter 3 and Controller documentation Stage oscillates or squeals Gains misadjusted refer to the controller documentation E...

Страница 48: ...Maintenance PRO225LM Hardware Manual 48 Chapter 4 www aerotech com This page intentionally left blank ...

Страница 49: ... such approval A Return Materials Authorization RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate request available on our website www aerotech com Products must be returned prepaid to an Aerotech service center no C O D or Collect Freight accepted The status of any product returned later than thir...

Страница 50: ...ms and conditions stated in the following On Site Non Warranty Repair section apply On site Non Warranty Repair If any Aerotech product cannot be made functional by telephone assistance or purchased replacement parts and cannot be returned to the Aerotech service center for repair then the following field service policy applies Aerotech will provide an on site Field Service Representative in a rea...

Страница 51: ...pdate 1 02 00 l Product redesign l Safety information updated l Order and part number specifications updated Chapter 1 l Added ThermoComp information 1 01 00 Revision changes have been archived If you need a copy of this revision contact Aerotech Global Technical Support 1 00 00 www aerotech com Appendix B 51 ...

Страница 52: ...Revision History PRO225LM Hardware Manual 52 Appendix B www aerotech com This page intentionally left blank ...

Страница 53: ...spect 41 inspection schedule 41 isopropyl alcohol 42 L label 17 Lifting Instructions 19 Limit Switch Specifications 36 lubricants vacuum operation 16 Lubrication 42 lubrication schedule 41 M Maximum Achievable Velocity 26 Motor Specifications 37 mounting surface 23 multiaxis combinations 42 P part number 17 Possible Cause 47 Protection Rating 13 protective ground connection 28 R red anodized alumi...

Страница 54: ...ardware Manual Symptom 47 T Technical Support 2 Thermistor Specifications 36 U Unpacking and Handling the Stage 17 V vacuum 16 vacuum guidelines 16 Vibration 13 W Warranty and Field Service 49 54 Index www aerotech com ...

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