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Electrical Specifications and Installation
MPS75SV Hardware Manual
Table 3-6:
25-Pin D Motor and Feedback Connector Pinouts (-M2 with -HV Option)
Pin
Description
Connector
1
Reserved
2
Motor Phase B
3
Motor Phase A
4
Motor Return / Frame Ground
5
Reserved
6
Reserved
7
Signal indicating maximum travel limit produced by negative/CCW stage direction
8
5 V Common ground
9
5 V Common ground
10
Reserved
11
Reserved
12
Reserved
13
Reserved
14
Reserved
15
Motor Phase B
16
Motor Phase A
17
Motor Return / Frame Ground
18
Reserved
19
Reserved
20
Signal indicating maximum travel limit produced by positive/CW stage direction
21
Reserved
22
+5 V power supply
23
Reserved
24
Reserved
25
Reserved
Case Signal shield connection (to case)
1. Vacuum stages require a double-male bulkhead adapter (through the vacuum chamber wall) to mate to our standard cables.
26
Chapter 3
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Содержание MPS75SV
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Страница 42: ...Index MPS75SV Hardware Manual W Warranty and Field Service 37 42 Index www aerotech com...