Aerotech MPS75SL, Руководство по оборудованию

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MPS75SL/SLE Hardware Manual Overview
1.4. Vacuum Operation
MPS75SL/SLE stages ordered with the -HV option (high vacuum preparation) are designed for operation in
high vacuum environments. Special preparations include:
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Stage parts are lubricated with vacuum-compatible lubricants.
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Materials, fasteners, and coatings with vacuum outgas performance are ensured to be compatible with
the specified level of vacuum.
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For high vacuum stages, situations that may allow gases to become temporarily trapped during pump
down are removed.
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Prior to assembly, stage parts are thoroughly cleaned in a clean environment.
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Stages are packaged in a special polyethylene bag.
Vacuum Guidelines
To ensure that the MPS75SL/SLE will continue to perform well in the vacuum environment, follow the
guidelines listed below (in addition to standard handling, installation, and lubrication guidelines outlined in
this manual).
1. Do not remove the MPS75SL/SLE from its sealed bag until it is ready for use.
2. Always handle the MPS75SL/SLE in a clean environment and use powder-free polyethylene gloves to
prevent any contaminants from adhering to the surface of the MPS75SL/SLE.
3. During installation, use cleaned, vented, stainless steel fasteners when securing the MPS75SL/SLE.
4. Reduced air pressure eliminates significant convective heat transfer. This, coupled with the viscous
vacuum-compatible lubricants, could result in excessive motor operating temperatures. Because of
this, consider all continuous torque ratings to be 40 to 60% lower than the value specified for operation
in normal atmospheric environment. Reduce motor usage accordingly.
5. For vacuum applications, the recommended lubricant is a small quantity of Braycote® 602EF grease or
a compatible substitute of equal quality.
6. Baking vacuum components at 60 °C for 24 to 48 hours significantly reduces outgassing at initial pump-
down to vacuum pressure and evaporates water vapor that impregnates porous surfaces on the
aluminum and Teflon cables. Aerotech recommends that customers bake out vacuum systems when
first installing them in the vacuum chamber.
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