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MPS75SL/SLE Hardware Manual

Overview

Chapter 1: Overview

N O T E :

Aerotech continually improves its product offerings; listed options may be superseded at any

time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.

Table 1-1:

Model Numbers and Ordering Options

MPS75SL and MPS75SLE Miniature Mechanical-Bearing Screw-Driven Linear Stage

Direct Linear Feedback (-SLE Only; Required)

-E1

Incremental linear encoder; 1 Vpp

-E2

Incremental linear encoder; 0.05 µm digital TTL output

Travel (Required)

-025

25 mm travel stage

-050

50 mm travel stage

-075

75 mm travel stage

-100

100 mm travel stage

Vacuum Preparation (-SL Only; Optional)

-HV

High-vacuum preparation to 10

-6

torr

Motor (Required)

-M1

DC servomotor

-M2

Stepper motor

Bellows (Optional)

-BL

Bellows waycover (not available with -HV option)

Mounting Plate (Optional)

-MP

Optical mounting plate

Metrology (Required)

-PL0

No metrology performance plots

-PL1

Metrology, uncalibrated with performance plots

-PL2

Metrology, calibrated with performance plots

Accessories (To be Ordered as a Separate Line Item)

HDZ-MPS75SL

Right-angle bracket

HDZ-MPS75SL-HV

Right-angle bracket, high vacuum preparation to 10

-6

torr

www.aerotech.com

Chapter 1

Содержание MPS75SL

Страница 1: ...Revision 1 03 00 MPS75SL SLE Hardware Manual...

Страница 2: ...vice aerotech com 101 Zeta Drive Pittsburgh PA 15238 2811 www aerotech com United Kingdom Japan Phone 44 0 1256 855055 Fax 44 0 1256 855649 Email service aerotech co uk Phone 81 0 50 5830 6814 Fax 81...

Страница 3: ...g the Stage to the Mounting Surface 22 2 3 1 For XY Assemblies and Special Cases 24 2 4 Attaching the Payload to the Stage 25 Chapter 3 Electrical Specifications and Installation 29 3 1 Motor and Feed...

Страница 4: ...lity of MPS75SL SLE Series Stages 25 Figure 2 11 Stage Orientations 26 Figure 2 12 Torque Required to Turn Ball Screw in Vertical Orientation 27 Figure 3 1 Motor and Feedback Wiring M1 Option 36 Figur...

Страница 5: ...Pin D Motor and Feedback Connector Pinouts M1 with HV Option SL Only 32 Table 3 4 25 Pin D Motor and Feedback Connector Pinouts M2 Motor only for SLE 33 Table 3 5 25 Pin D Motor Mating Connector M2 3...

Страница 6: ...Table of Contents MPS75SL SLE Hardware Manual 6 www aerotech com This page intentionally left blank...

Страница 7: ...nt parts must be restricted while connected to a power source 2 Do not connect or disconnect any electrical components or connecting cables while connected to a power source 3 Disconnect electrical po...

Страница 8: ...Electrical Safety MPS75SL SLE Hardware Manual 8 www aerotech com This page intentionally left blank...

Страница 9: ...rther more declares that it is not allowed to put the equipment into service until the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to...

Страница 10: ...Declaration of Conformity MPS75SL SLE Hardware Manual 10 www aerotech com This page intentionally left blank...

Страница 11: ...cremental linear encoder 0 05 m digital TTL output Travel Required 025 25 mm travel stage 050 50 mm travel stage 075 75 mm travel stage 100 100 mm travel stage Vacuum Preparation SL Only Optional HV H...

Страница 12: ...sive floor or acoustical vibration can affect system performance Contact Aerotech for information regarding your spe cific application Protection Rating The MPS75SL SLE is not suited for dusty or wet...

Страница 13: ...3 0 m 3 0 m Flatness 2 0 m 2 0 m 3 0 m 3 0 m Maximum Speed 1 0 mm rev Ball Screw DC Motor M1 50 mm s 50 mm s 50 mm s 35 mm s Stepper Motor M2 30 mm s 30 mm s 30 mm s 30 mm s Load Capacity 4 Horizontal...

Страница 14: ...mm rev Ball Screw DC Motor M1 50 mm s 50 mm s 50 mm s 35 mm s Stepper Motor M2 30 mm s 30 mm s 30 mm s 30 mm s Load Capacity 4 Horizontal 15 kg 15 kg 15 kg 15 kg Side 15 kg 15 kg 15 kg 15 kg Vertical...

Страница 15: ...is ready for use 2 Always handle the MPS75SL SLE in a clean environment and use powder free polyethylene gloves to prevent any contaminants from adhering to the surface of the MPS75SL SLE 3 During ins...

Страница 16: ...Overview MPS75SL SLE Hardware Manual 16 Chapter 1 www aerotech com This page intentionally left blank...

Страница 17: ...tested at Aerotech Use compressed nitrogen or clean dry oil less air to remove any dust or debris that has collected during shipping Set the MPS75SL SLE on a smooth flat and clean surface Each MPS75SL...

Страница 18: ...tech continually improves its product offerings listed options may be superseded at any time Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current product...

Страница 19: ...MPS75SL SLE Hardware Manual Mechanical Specifications and Installation Figure 2 2 MPS75SL SLE with Bellows Dimensions www aerotech com Chapter 2 19...

Страница 20: ...ardware Manual Figure 2 3 MPS75SL SLE 025 Mounting Plate Dimensions Figure 2 4 MPS75SL SLE 050 Mounting Plate Dimensions Figure 2 5 MPS75SL SLE 075 Mounting Plate Dimensions Figure 2 6 MPS75SL SLE 100...

Страница 21: ...MPS75SL SLE Hardware Manual Mechanical Specifications and Installation Figure 2 7 MPS75SL SLE HDZ Angle Bracket Dimensions www aerotech com Chapter 2 21...

Страница 22: ...performed on the mounting surface rather than the MPS75SL SLE Shimming should be avoided if possible If shimming is required it should be minimized to retain maximum rigidity of the system Mount the s...

Страница 23: ...MPS75SL SLE Hardware Manual Mechanical Specifications and Installation Figure 2 8 MPS75SL SLE Mounting Hole Locations www aerotech com Chapter 2 23...

Страница 24: ...age if it is connected to a power source 1 Manually move the stage to one end of travel revealing two of the hidden mounting holes for the stage 2 Mount the stage to the base with M4 socket head cap s...

Страница 25: ...performance N OTE For valid system performance the mounting interface should be flat within 5 m W A R N I N G Refer to the dimensions in Section 2 2 for maximum allowable thread engagement A screw ext...

Страница 26: ...tations The approximate amount of torque required to turn the ball screw of an MPS75SL SLE series stage can be found from Figure 2 12 or the following equation Where Lead of Screw see Table 1 3 Effici...

Страница 27: ...MPS75SL SLE Hardware Manual Mechanical Specifications and Installation Figure 2 12 Torque Required to Turn Ball Screw in Vertical Orientation www aerotech com Chapter 2 27...

Страница 28: ...Mechanical Specifications and Installation MPS75SL SLE Hardware Manual 28 Chapter 2 www aerotech com This page intentionally left blank...

Страница 29: ...d with the system separate from this documentation The electrical wiring from the motor and encoder are integrated at the factory Refer to the sections that follow for standard motor wiring and connec...

Страница 30: ...there are any questions on system configuration The System Integrator or qualified installer is responsible for determining and meeting all safety and compliance requirements necessary for the integr...

Страница 31: ...osine N 3 Sine N 4 Marker N 5 Encoder Common 6 Limit Common 7 Negative CCW hardware limit 8 Reserved 9 Reserved 10 Motor 11 Motor 12 Reserved 13 Reserved 14 Cosine 15 Sine 16 Marker 17 Encoder 5 V 18...

Страница 32: ...egative CCW hardware limit 8 Limit Common 9 Encoder Common 10 Marker N 11 Sine N 12 Cosine N 13 Reserved 14 Reserved 15 Reserved 16 Motor 17 Motor 18 Reserved 19 Reserved 20 Positive CW hardware limit...

Страница 33: ...ware limit 8 Reserved 9 Reserved 10 Motor Return 11 Motor Phase A 12 Motor Phase B 13 Reserved 14 Reserved 15 Reserved 16 Reserved 17 Encoder 5 V 18 Stage ID 19 Positive CW hardware limit 20 Reserved...

Страница 34: ...ve CCW hardware limit 8 Limit Common 9 Encoder Common 10 Reserved 11 Reserved 12 Reserved 13 Reserved 14 Reserved 15 Motor Phase B 16 Motor Phase A 17 Motor Return 18 Reserved 19 Reserved 20 Positive...

Страница 35: ...Reserved 4 Marker N 5 Cosine N 6 Sine N 7 Encoder 5 V 8 Encoder 5 V 9 Signal Common 10 CW LMT 11 CCW LMT 12 Marker 13 Cosine 14 Sine 15 Reserved Case Signal shield connection to case Table 3 8 15 Pin...

Страница 36: ...ns and Installation MPS75SL SLE Hardware Manual 3 2 Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections Figure 3 1 Motor and Feedback Wiring M1 Option 36 Chap...

Страница 37: ...MPS75SL SLE Hardware Manual Electrical Specifications and Installation Figure 3 2 Motor and Feedback Wiring M2 Option www aerotech com Chapter 3 37...

Страница 38: ...utput Incremental Encoder RS422 485 compatible Limit Switch Specifications Supply Voltage 5 V Supply Current 25 mA Output Type Open Collector Output Voltage 5 V Output Current 10 mA sinking Output Pol...

Страница 39: ...24 V Maximum Terminal Voltage 48 V Motor Constant 0 021 Nm 1 This table specifies the motors themselves The stage has an additional gear ratio as listed in Table 1 3 Table 3 11 Stepper Motor Specifica...

Страница 40: ...oder Amplified sine and TTL 50 nm versions available Feedback Rotary Encoder 10 000 lines rev rotary encoder N A Rotary encoder electronic res olution 0 025 um 0 025 um 40 000 steps rev motor resoluti...

Страница 41: ...ack and motor signals and is dictated by the stage wiring refer to Section 3 5 for Motor and Feedback phasing information Programming direction of a stage is set by the controller that is used to move...

Страница 42: ...ations and Installation MPS75SL SLE Hardware Manual 3 5 Motor and Feedback Phasing Figure 3 4 Analog Encoder Phasing Reference Diagram Figure 3 5 Encoder Phasing Reference Diagram Standard 42 Chapter...

Страница 43: ...ch as duty cycle speed and the environment An inspection interval of once per month is recommended until a trend develops for the application Longer or shorter intervals may be required to maintain th...

Страница 44: ...actory In addition a laser interferometer is required for post assembly verification to maintain warranties Contact Aerotech for more information Cleaning Before using a cleaning solvent on any part o...

Страница 45: ...ation and cleaning if possible 1 Drive the carriage to one end of travel and remove power from the stage If the stage is equipped with the optional bellows the bellows will have to be compressed to ac...

Страница 46: ...r from the stage 2 Unbolt the bellows from the stage endplates Figure 4 1 Remove the Bellows Bolts 3 Move the stage carriage to one end of travel and compress the bellows to gain access to the ball sc...

Страница 47: ...ews from the bottom of the stage that attach the motor cover Remove the motor cover Figure 4 3 Motor Cover Screw Location 3 Slide the two bellow support rods though the holes in the motor adapter plat...

Страница 48: ...cure the Bellows Support Rods 5 Attach the bellows to the ends of the stage and to the carriage using 8 M2 socket head cap screws Ensure that the bellows are aligned to the stage travel Figure 4 6 Att...

Страница 49: ...d cap screws Figure 4 8 Attach the Bellows Tabletop 8 Re install the motor cover refer to Figure 4 3 ensuring that no wires are pinched or in the way Do not over tighten the screws that secure the mot...

Страница 50: ...tation for polarity and compatibility requirements Example voltage requirements Controller trap or fault refer to the Controller documentation Stage moves uncontrollably Encoder sine and cosine signal...

Страница 51: ...t such approval A Return Materials Authorization RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate...

Страница 52: ...rms and conditions stated in the following On Site Non Warranty Repair section apply On site Non Warranty Repair If any Aerotech product cannot be made functional by telephone assistance or purchased...

Страница 53: ...neral revision Product redesign l New configuration SL and SLE l Model numbers and ordering options updated Table 1 1 l Basic specifications updated Section 1 3 1 01 00 l Updated Standard Motor Wiring...

Страница 54: ...Revision History MPS75SL SLE Hardware Manual 54 Appendix B www aerotech com This page intentionally left blank...

Страница 55: ...DZ Angle Bracket Dimensions 21 Humidity 12 I Inspection Schedule 43 isopropyl alcohol 44 L Limit Switch Specifications 38 lubricants vacuum operation 15 Lubrication 45 M Mechanical Specifications 13 1...

Страница 56: ...Index MPS75SL SLE Hardware Manual V Vacuum 15 vacuum guidelines 15 Vibration 12 W Warranty and Field Service 51 56 Index www aerotech com...

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