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Electrical Specifications and Installation

MPS50SL Hardware Manual

Table 3-6:

25-Pin D Motor and Feedback Connector Pinouts (-M2 with -HV Option)

Pin

Description

Connector

1

Reserved

2

Motor Phase B

3

Motor Phase A

4

Motor Return

5

Reserved

6

Reserved

7

Negative (CCW) hardware limit

8

Common ground

9

Common ground

10

Reserved

11

Reserved

12

Reserved

13

Reserved

14

Reserved

15

Motor Phase B

16

Motor Phase A

17

Motor Return

18

Reserved

19

Reserved

20

Positive (CW) hardware limit

21

Reserved

22

+5 V power supply

23

Reserved

24

Reserved

25

Reserved

Case

Signal shield connection (to case)

1. Vacuum stages require a double-male bulkhead adapter (through the vacuum chamber wall) to mate to our standard cables.

30

Chapter 3

www.aerotech.com

Содержание MPS50SL

Страница 1: ...Revision 1 01 00 MPS50SL Hardware Manual...

Страница 2: ...ech com Phone 1 412 967 6440 Fax 1 412 967 6870 101 Zeta Drive Pittsburgh PA 15238 2811 www aerotech com United Kingdom China Email Support aerotech com Phone 44 0 1256 855055 Fax 44 0 1256 855649 Ema...

Страница 3: ...ns 16 2 3 Securing the Stage to the Mounting Surface 19 2 3 1 For XY Assemblies and Special Cases 21 2 4 Attaching the Payload to the Stage 22 Chapter 3 Electrical Specifications and Installation 25 3...

Страница 4: ...es 22 Figure 2 8 Stage Orientations 23 Figure 2 9 Torque Required to Turn Drive Screw in Vertical Orientation 24 Figure 3 1 Motor and Feedback Wiring M1 Option 31 Figure 3 2 Motor and Feedback Wiring...

Страница 5: ...edback Connector Pinouts M1 27 Table 3 2 25 Pin D Motor Mating Connector M1 27 Table 3 3 25 Pin D Motor and Feedback Connector Pinouts M1 with HV Option 28 Table 3 4 25 Pin D Motor and Feedback Connec...

Страница 6: ...Table of Contents MPS50SL Hardware Manual 6 www aerotech com This page intentionally left blank...

Страница 7: ...ent parts must be restricted while connected to a power source 2 Do not connect or disconnect any electrical components or connecting cables while connected to a power source 3 Disconnect electrical p...

Страница 8: ...Electrical Safety MPS50SL Hardware Manual 8 www aerotech com This page intentionally left blank...

Страница 9: ...re declares that it is not allowed to put the equipment into service until the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in co...

Страница 10: ...Declaration of Conformity MPS50SL Hardware Manual 10 www aerotech com This page intentionally left blank...

Страница 11: ...025 25 mm travel 050 50 mm travel Drive Screw Required BS Precision ground ball screw 1 mm rev LS Precision ground lead screw 0 5 mm rev Vacuum Preparation Optional HV High vacuum preparation to 10 6...

Страница 12: ...he system in a low vibration environment Excessive floor or acoustical vibration can affect system performance Contact Aerotech for information regarding your spe cific application Protection Rating T...

Страница 13: ...m 1 5 m Straightness 2 0 m 3 0 m Flatness 2 0 m 3 0 m Maximum Speed 1 0 mm rev Ball Screw DC Motor M1 5 mm s 5 mm s Stepper Motor M2 1 mm s 1 mm s 0 5 mm rev Lead Screw DC Motor M1 2 5 mm s 2 5 mm s...

Страница 14: ...in a clean environment and use powder free polyethylene gloves to prevent any contaminants from adhering to the surface of the MPS50SL 3 During installation use cleaned vented stainless steel fastene...

Страница 15: ...tested at Aerotech Use compressed nitrogen or clean dry oil less air to remove any dust or debris that has collected during shipping Set the MPS50SL on a smooth flat and clean surface Each MPS50SL has...

Страница 16: ...tech continually improves its product offerings listed options may be superseded at any time Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current product...

Страница 17: ...MPS50SL Hardware Manual Mechanical Specifications and Installation Figure 2 2 MPS50SL 025 Mounting Plate MP Dimensions Figure 2 3 MPS50SL 050 Mounting Plate MP Dimensions www aerotech com Chapter 2 17...

Страница 18: ...Mechanical Specifications and Installation MPS50SL Hardware Manual Figure 2 4 MPS50SL HDZ Angle Bracket Dimensions 18 Chapter 2 www aerotech com...

Страница 19: ...face rather than the MPS50SL Shimming should be avoided if possible If shimming is required it should be minimized to retain maximum rigidity of the system Mount the stage to the mounting surface usin...

Страница 20: ...Mechanical Specifications and Installation MPS50SL Hardware Manual Figure 2 5 Mounting Hole Locations 20 Chapter 2 www aerotech com...

Страница 21: ...onnect all electrical power 3 Mount the stage with M3 low head socket cap screws LHSCS See Table 2 2 for hardware details 4 Reconnect the stage to the power supply and drive the tabletop to the other...

Страница 22: ...intain optimum performance N OTE For valid system performance the mounting interface should be flat within 5 m W A R N I N G Refer to the dimensions in Section 2 2 for maximum allowable thread engagem...

Страница 23: ...rive screw of an MPS50SL series stage can be found from Figure 2 9 or the following equation Where Lead of Screw see Table 1 3 Efficiency 90 for ball screws 50 for MPS50 lead screws Reduction Ratio 49...

Страница 24: ...Mechanical Specifications and Installation MPS50SL Hardware Manual Figure 2 9 Torque Required to Turn Drive Screw in Vertical Orientation 24 Chapter 2 www aerotech com...

Страница 25: ...the system separate from this documentation The electrical wiring from the motor and encoder are integrated at the factory Refer to the sections that follow for standard motor wiring and connector pi...

Страница 26: ...are any questions on system configuration The System Integrator or qualified installer is responsible for determining and meeting all safety and compliance requirements necessary for the integration...

Страница 27: ...hardware limit 8 Reserved 9 Reserved 10 Motor 11 Motor 12 Reserved 13 Reserved 14 Cosine 15 Sine 16 Marker 17 5 V power supply 18 Stage ID 19 Positive CW hardware limit 20 Common ground 21 Common grou...

Страница 28: ...CCW hardware limit 8 Common ground 9 Common ground 10 Marker N 11 Sine N 12 Cosine N 13 Reserved 14 Reserved 15 Reserved 16 Motor 17 Motor 18 Reserved 19 Reserved 20 Positive CW hardware limit 21 Rese...

Страница 29: ...ed 9 Reserved 10 Motor Return 11 Motor Phase A 12 Motor Phase B 13 Reserved 14 Reserved 15 Reserved 16 Reserved 17 5 V power supply 18 Stage ID 19 Positive CW hardware limit 20 Common ground 21 Common...

Страница 30: ...ardware limit 8 Common ground 9 Common ground 10 Reserved 11 Reserved 12 Reserved 13 Reserved 14 Reserved 15 Motor Phase B 16 Motor Phase A 17 Motor Return 18 Reserved 19 Reserved 20 Positive CW hardw...

Страница 31: ...al Electrical Specifications and Installation 3 2 Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections Figure 3 1 Motor and Feedback Wiring M1 Option www aerot...

Страница 32: ...Electrical Specifications and Installation MPS50SL Hardware Manual Figure 3 2 Motor and Feedback Wiring M2 Option 32 Chapter 3 www aerotech com...

Страница 33: ...rent 25 mA Output Type Open Collector Output Voltage 5 V Output Current 10 mA sinking Output Polarity Normally Closed NC l Sinks current to ground Logic 0 when not in limit l High impedance Logic 1 wh...

Страница 34: ...tant 0 0036 N m Gear Ratio 676 49 Table 3 9 Stepper Motor Specifications Stepper Motor M2 Stall Torque 0 0036 N m Rated Phase Current 0 15 A Recommended Bus Voltage 24 V Rotor Inertia 4 50E 08 kg m2 F...

Страница 35: ...and motor signals and is dictated by the stage wiring refer to Section 3 5 for Motor and Feedback phasing information Programming direction of a stage is set by the controller that is used to move th...

Страница 36: ...Electrical Specifications and Installation MPS50SL Hardware Manual 3 5 Motor and Feedback Phasing Figure 3 4 Encoder Phasing Reference Diagram M1 Motor Option 36 Chapter 3 www aerotech com...

Страница 37: ...ction interval of once per month is recommended until a trend develops for the application Longer or shorter intervals may be required to maintain the film of lubricant on the bearing surfaces If the...

Страница 38: ...he factory In addition a laser interferometer is required for post assembly verification to maintain warranties Contact Aerotech for more information Cleaning Before using a cleaning solvent on any pa...

Страница 39: ...upper axis for lubrication and cleaning if possible W A R N I N G Do not attempt to manually back drive a MPS50SL Doing so will damage the MPS50SL 1 Drive the carriage to one end of travel and remove...

Страница 40: ...50SL 050 Bearing Cage Creep To correct this problem the cage can be pushed back into position using a bearing centering fixture which is available for purchase from Aerotech Two fixtures are available...

Страница 41: ...tage carriage until the fixture bottoms out against the carriage side bearing rail to ensure proper cage centering A tapped hole in the fixture M3 thread is provided to aid in removal of the fixture T...

Страница 42: ...ment Manually push the bearing cage toward the stage carriage until the fixture bottoms out against the carriage side bearing rail to ensure proper cage centering Verify cage position against scribe m...

Страница 43: ...tion for polarity and compatibility requirements Example voltage requirements Controller trap or fault refer to the Controller documentation Stage moves uncontrollably Encoder sine and cosine signal c...

Страница 44: ...Maintenance MPS50SL Hardware Manual 44 Chapter 4 www aerotech com This page intentionally left blank...

Страница 45: ...such approval A Return Materials Authorization RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate re...

Страница 46: ...problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair section apply On site Non Warranty Repair If any Aerotech product cannot be made funct...

Страница 47: ...MPS50SL Hardware Manual Revision History Appendix B Revision History Revision General Information 1 01 00 Full revision 1 00 00 New Manual www aerotech com Appendix B 47...

Страница 48: ...Revision History MPS50SL Hardware Manual 48 Appendix B www aerotech com This page intentionally left blank...

Страница 49: ...pecifications 33 G Global Technical Support 2 grease 14 39 H HDZ Angle Bracket Dimensions 18 Humidity 12 I Inspection Schedule 37 isopropyl alcohol 38 L Limit Switch Specifications 33 lubricants vacuu...

Страница 50: ...MPS50SL Hardware Manual T Technical Support 2 Temperature Effects 12 thermal expansion coefficient 12 V Vacuum 14 vacuum guidelines 14 Vibration 12 W Warranty and Field Service 45 50 Index www aerotec...

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