Aerotech HexGen HEX300-230HL, Руководство по оборудованию

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1.2. Basic Specifications
Table 1-3: HEX300-230HL Series Specifications
X Y Z A (θx) B (θy) C (θz)
Travel
(1)
55 mm 60 mm 25 mm 15° 15° 30°
Axis
Positioning
Accuracy
(2,3)
Full
Travel
Standard (-
PL3)
±4 μm ±4 μm ±3 μm
±50 μrad
(±10.3
arc-sec)
±50 μrad
(±10.3
arc-sec)
±25 μrad
(±5.2 arc-
sec)
ULTRA
(-PL4)
±1 μm ±1 μm ±0.75 μm
±10 μrad
(±2.1 arc-
sec)
±10 μrad
(±2.1 arc-
sec)
±5 μrad
(±1.0 arc-
sec)
Limited
Travel
(7)
Standard (-
PL3)
±1.25 μm
±12.5
μrad
(±2.6 arc-
sec)
±12.5
μrad
(±2.6 arc-
sec)
±7.5 μrad
(±1.5 arc-
sec)
ULTRA
(-PL4)
±0.75 μm ±0.75 μm ±0.5 μm
±5 μrad
(±1.0 arc-
sec)
±5 μrad
(±1.0 arc-
sec)
±2.5 μrad
(±0.5 arc-
sec)
Resolution
(Minimum Incremental Motion)
20 nm
0.2 μrad
(0.04 arc sec)
Bidirectional
Repeatability, pk-pk
(3)
±0.75 μm ±0.75 μm ±0.35 μm ±2 μrad (±0.2 arc sec)
Unidirectional
Repeatability, pk-pk
±0.35 μm ±0.35 μm ±0.15 μm ±1 μrad (±0.1 arc sec)
Maximum Speed
(4)
50 mm/s 50 mm/s 25 mm/s 15 °/s 15 °/s 30 °/s
Load Capacity,
All Positions
(5)
Vertical 45 kg (Push); 40 kg (Pull)
Horizontal 21 kg
Holding Capacity,
De-Energized
(6)
14 kg
Stage Mass 12 kg
Material Anodized Aluminum Platform and Base;
1. Travels are mutually-exclusive. Consult the HexGen
®
Hexapod Sizer on the Aerotech website for detailed workspace
sizing.
2. Measured with single-axis moves at a height of 50 mm above the moving platform. Results can be payload and workpoint
dependent.
3. X, Y, Z performance certified as standard. X, Y, Z, A, B, C performance certified with -PL4.
4. Requires the selection of an appropriate amplifier with sufficient voltage and current.
5. Centered loading (refer to
Section 2.4. ).
6. Horizontal base plate, centered loading (refer to Section 2.4. ).
7. Over any 10 mm (X, Y, Z) or 3° (A, B, C)
HEX300-230HL Hardware Manual 1.2. Basic Specifications
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