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Aerotech ECO225SL Series, Руководство по оборудованию

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Chapter 2: Installation

WARNING

: ECO225SL installation must be in accordance to instructions provided by this

manual and any accompanying documentation. Failure to follow these instructions could
result in injury or damage to the equipment.

2.1. Unpacking and Handling the Stage

WARNING

:

HEAVY!

It is the responsibility of the customer to safely and carefully lift and

move the ECO225SL.

l

Refer to

Section 1.3.

for stage mass specifications. Do not attempt to lift heavy loads

single handed.

l

Use care when you move the ECO225SL or you could negatively affect the performance
of it.

l

Lift this product only by the base.

l

Use lifting hardware if it has been provided (refer to

Figure 2-1

).

l

Use a cart, dolly, or similar device to move the stage to a new location.

l

For multi-axis assemblies, always lift the system by the lower axis.

l

Do not use the cables or the connectors to lift or move this product.

l

Make sure that all moving parts are secure before you move the ECO225SL. Unsecured
moving parts could shift and cause injury or damage to the equipment.

Carefully remove the stage from its protective shipping container. Gently set the stage on a smooth, flat,
and clean surface. Use compressed nitrogen or clean, dry, oil-free air to remove any dust or debris that
has collected during shipping.

Before you operate the stage, let it stabilize at room temperature for at least 12 hours. This will ensure
that all of the alignments, preloads, and tolerances are the same as they were when they were tested at
Aerotech.

Each stage  has a label listing the system part number and serial number. These numbers contain
information necessary for maintenance or system hardware and software updates. Locate this label and
record the information for later reference.

ECO225SL Hardware Manual

Chapter 2: Installation

www.aerotech.com

19

Содержание ECO225SL Series

Страница 1: ...Revision 2 00 ECO225SL Series Mechanical Bearing Ball Screw Stage HARDWARE MANUAL ...

Страница 2: ...d spare or replacement parts To get help immediately contact a service office or your sales representative Include your customer order number in your email or have it available before you call This manual contains proprietary information and may not be reproduced disclosed or used in whole or in part without the express written permission of Aerotech Inc Product names mentioned herein are used for...

Страница 3: ... 21 2 3 Securing the Stage to the Mounting Surface 24 2 4 Attaching the Payload to the Stage 25 Chapter 3 Electrical Installation 29 3 1 Motor and Feedback Connectors 30 3 2 Motor and Feedback Wiring 35 3 3 Motor and Feedback Specifications 37 3 4 Limits Marker and Machine Direction 41 3 5 Motor and Feedback Phasing 42 Chapter 4 Maintenance 45 4 1 Service and Inspection Schedule 45 4 2 Cleaning an...

Страница 4: ...9 and M10 Options 36 Figure 3 3 Machine Direction 41 Figure 3 4 Hall Phasing Diagram 42 Figure 3 5 Encoder Phasing Reference Diagram Standard Square Wave 43 Figure 3 6 Encoder Phasing Reference Diagram Analog Sine Wave 43 Figure 4 1 Hardcover Screw Removal 48 Figure 4 2 Hardcover Removal 49 Figure 4 3 Motor Mounting Overview 50 Figure 4 4 Attach the Coupling Adapter to the Motor Shaft 51 Figure 4 ...

Страница 5: ...ector Part Numbers for the Brushless Motor Feedback Connector 32 Table 3 7 Stepper Motor Feedback Connector Pinout M9 and M10 33 Table 3 8 Mating Connector Part Numbers for the Stepper Motor Feedback Connector 33 Table 3 9 Limit Connector Wiring 34 Table 3 10 Mating Connector Part Numbers for the Limit Connector 34 Table 3 11 Hall Effect Sensor Specifications BM or BMS Motor Options 37 Table 3 12 ...

Страница 6: ...This page intentionally left blank List of Tables ECO225SL Hardware Manual 6 www aerotech com ...

Страница 7: ... equipment could be impaired l The life expectancy of the product could be decreased DANGER To decrease the risk of electrical shock injury death and damage to the equipment obey the precautions that follow l Restrict access to the stage when it is connected to a power source l Do not connect or disconnect electrical components wires and cables while this product is connected to a power source l B...

Страница 8: ...nts are sources of elec tromagnetic fields Persons with implanted medical devices need to evaluate the risks associated with these devices before they can enter an area where the devices are in use l Strong rare earth magnets are present in the motor Interaction with metallic objects tools watches or keys for example could produce pinch injuries or damage to the equipment l Use non magnetic tools ...

Страница 9: ...s manual l Never install or operate equipment that appears to be damaged l On stages with BMS motors the motor over temperature sensor must be monitored by the drive Use it to shut down the drive if the motor overheats l Make sure that the product is securely mounted before you operate it l Use care when you move the ECO225SL or you could negatively affect the performance of it WARNING Securely mo...

Страница 10: ...This page intentionally left blank Safety Procedures and Warnings ECO225SL Hardware Manual 10 www aerotech com ...

Страница 11: ...the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national implementing legislation for example as a whole including the equipment referred to in this Declaration This is to certify that the aforementioned product is in accordance with the applicable requirem...

Страница 12: ...This page intentionally left blank EU Declaration of Incorporation ECO225SL Hardware Manual 12 www aerotech com ...

Страница 13: ...80 Brushless Servomotor and 1000 Line 1 Vpp Encoder M4 BMS280 Brushless Servomotor 1000 Line 1 Vpp Encoder and Brake M5 BM250 Brushless Servomotor and 2500 Line TTL Encoder M6 BM250 Brushless Servomotor 2500 Line TTL Encoder and Brake M7 BM250 Brushless Servomotor and 1000 Line 1 Vpp Encoder M8 BM250 Brushless Servomotor 1000 Line 1 Vpp Encoder and Brake M9 SM280 High Voltage Stepper Motor M10 SM2...

Страница 14: ...ories ordered as a separate line item ALIGN NPA Non precision XY assembly ALIGN NPAZ Non precision XZ or YZ assembly ALIGN PA10 XY assembly 10 arc sec orthogonality alignment to within 7 µm orthogonality for short travel stages ALIGN PA10Z XZ or YZ assembly with L bracket 10 arc second orthogonality alignment to within 10 µm orthogonality for short travel stages ALIGN PA5 XY assembly 5 arc sec ort...

Страница 15: ... vibration environment Excessive floor or acoustical vibration can affect system performance Contact Aerotech for information regarding your specific application Protection Rating The ECO225SL stages have an ingress protection rating of IP10 Use Indoor use only 1 2 Accuracy and Temperature Effects The accuracy specification of ECO225SL series stages is measured 25 mm above the table with the stage...

Страница 16: ...Speed 4 220 m s Maximum Acceleration 4 Function of motor amplifier payload and maximum axial load Load Capacity 5 Horizontal 100 kg Vertical Axial 60 kg Side 100 kg Moving Mass with tabletop 7 4 kg Stage Mass with no motor 18 5 kg 19 7 kg 20 9 kg 22 0 kg 23 2 kg Material Anodized Aluminum Mean Time Before Failure MTBF 20 000 Hours 1 Certified with PL1 and PL2 option 2 Achieved with Aerotech rotary...

Страница 17: ...apacity 5 Horizontal 100 kg Vertical Axial 60 kg Side 100 kg Moving Mass with tabletop 7 4 kg Stage Mass with no motor 25 5 kg 27 8 kg 30 1 kg 34 8 kg Material Anodized Aluminum Mean Time Before Failure MTBF 20 000 Hours 1 Certified with PL1 and PL2 option 2 Achieved with Aerotech rotary motor with amplified sine encoder 3 Achieved with Aerotech rotary motor with 2500 counts rev digital encoder 4 ...

Страница 18: ...vironment and use powder free polyethylene gloves to prevent any contaminants from adhering to the surface of the stage 3 During installation use cleaned vented stainless steel fasteners to secure the stage 4 Reduced air pressure eliminates significant convective heat transfer This coupled with the viscous vacuum compatible lubricants could result in excessive motor operating temperatures Because ...

Страница 19: ...m by the lower axis l Do not use the cables or the connectors to lift or move this product l Make sure that all moving parts are secure before you move the ECO225SL Unsecured moving parts could shift and cause injury or damage to the equipment Carefully remove the stage from its protective shipping container Gently set the stage on a smooth flat and clean surface Use compressed nitrogen or clean d...

Страница 20: ...the lifting hardware by turning a wrench on the flats of the standoffs see Figure 2 1 If the stage is part of a multi axis system the lifting hardware should be attached to the lower axis The lifting hardware must be removed before the stage can be operated Figure 2 1 Lifting Features 2 1 Unpacking and Handling the Stage ECO225SL Hardware Manual 20 www aerotech com ...

Страница 21: ...2 2 Dimensions Figure 2 2 ECO225SL Dimensions ECO225SL Hardware Manual 2 2 Dimensions www aerotech com 21 ...

Страница 22: ...Figure 2 3 Tabletop Accessory Dimensions TT3 Option 2 2 Dimensions ECO225SL Hardware Manual 22 www aerotech com ...

Страница 23: ...Figure 2 4 Z Axis Bracket Dimensions ECO225SL Hardware Manual 2 2 Dimensions www aerotech com 23 ...

Страница 24: ...hining is required to achieve the desired flatness it should be performed on the mounting surface rather than the stage Shimming should be avoided if possible If shimming is required it should be minimized to retain maximum rigidity of the system Table 2 1 Stage Mounting Surface Flatness Requirement Stage Travel Flatness Requirement All Travels 7 5 µm If necessary manually move the stage table to ...

Страница 25: ...ain optimum performance IMPORTANT For valid system performance the mounting interface should be flat within 12 µm WARNING If the screw extends through the stage table it could affect travel and damage the stage Refer to the dimensions in Section 2 2 for maximum allowable thread engagement Applied loads should be symmetrically distributed whenever possible The payload should be centered on the stag...

Страница 26: ...Figure 2 5 Stage Orientations Figure 2 6 Cantilevered Load Capability 2 4 Attaching the Payload to the Stage ECO225SL Hardware Manual 26 www aerotech com ...

Страница 27: ... AxialLoad x LeadofScrew 2 x π x Efficiency Figure 2 7 Load Torque Equation For ECO225SL series stages the ball screw efficiency is rated at 90 0 90 Refer to Section 1 3 for Load Capacity specifications Figure 2 8 Torque Required to Turn Ball Screw in Vertical Orientation ECO225SL Hardware Manual 2 4 Attaching the Payload to the Stage www aerotech com 27 ...

Страница 28: ...This page intentionally left blank 2 4 Attaching the Payload to the Stage ECO225SL Hardware Manual 28 www aerotech com ...

Страница 29: ...egrator or qualified installer is responsible for determining and meeting all safety and compliance requirements when they integrate the ECO225SL into a completed system Electrical installation requirements will depend on the ordered product options Installation instructions in this section are for Aerotech stages equipped with standard Aerotech motors intended for use with an Aerotech motion cont...

Страница 30: ...round protection only Additional grounding and safety precautions are required for applications requiring access to the stage while it is energized The System Integrator or qualified installer is responsible for determining and meeting all safety and compliance requirements necessary for the integration of this stage into the final application DANGER The protective ground connection must be proper...

Страница 31: ...57A 10 Note All parts are nickel plated Table 3 3 Stepper Motor Connector Pinout M9 and M10 Pin Description Connector A1 Motor Phase A A2 Motor Phase B A3 Motor Phase A Return 1 Brake with Brake Option 2 Brake with Brake Option 3 Reserved 4 Frame Ground motor protective ground 5 Frame Ground motor protective ground A4 Motor Phase B Return Table 3 4 Mating Connector Part Numbers for the Stepper Mot...

Страница 32: ...ensor 1 BM Motors Reserved M Hall Effect Sensor Phase B N Reserved P Hall Effect Sensor Phase C R Reserved S Reserved Brake with Brake Option 1 T Reserved Brake with Brake Option 1 1 24 VDC 1 A max Table 3 6 Mating Connector Part Numbers for the Brushless Motor Feedback Connector Mating Connector Aerotech P N Third Party P N Plug MCM00454 Amphenol MS3106A 20 Insert MCM00464 Amphenol MS20 29S Clamp...

Страница 33: ...erved 14 COS Encoder Cosine 15 COS Encoder Cosine 16 5V Power Supply Input 17 SIN Encoder Sine 18 SIN Encoder Sine 19 Reserved 20 Common 21 Common 22 Reserved 23 Reserved 24 Reserved 25 Reserved Table 3 8 Mating Connector Part Numbers for the Stepper Motor Feedback Connector Mating Connector Aerotech P N Third Party P N 25 Socket D Connector ECK00300 FCI DB25S064TLF Backshell ECK00656 Amphenol 17E...

Страница 34: ... 4 Home Limit 5 Limit CCW Negative Counterclockwise Limit 6 Reserved 7 Common ground 8 Reserved 9 Reserved Table 3 10 Mating Connector Part Numbers for the Limit Connector Mating Connector Aerotech P N Third Party P N 9 Pin D Connector ECK00340 FCI DE09S064TLF Backshell ECK01021 Amphenol 17E 1724 2 3 1 Motor and Feedback Connectors ECO225SL Hardware Manual 34 www aerotech com ...

Страница 35: ...ck Wiring Shielded cables are required for the motor and feedback connections Figure 3 1 Brushless Motor and Feedback Wiring M1 through M8 Options ECO225SL Hardware Manual 3 2 Motor and Feedback Wiring www aerotech com 35 ...

Страница 36: ...Figure 3 2 Stepper Motor and Feedback Wiring M9 and M10 Options 3 2 Motor and Feedback Wiring ECO225SL Hardware Manual 36 www aerotech com ...

Страница 37: ... 14 Limit Switch Specifications LI1 Option LI2 Option Supply Voltage 5 V 5 V Supply Current 25 mA Output Type Open Collector Output Voltage 5 V 5 V Output Current 10 mA sinking 10 mA sinking Output Polarity Factory Configured Normally Closed NC l Sinks current to ground Logic 0 when not in limit l High impedance Logic 1 when in limit l Requires external pull up to 5 V 10 kΩ recommended Normally Op...

Страница 38: ...40 Thermal Resistance C W 0 93 Number of Poles 14 1 Performance is dependent upon heat sink configuration system cooling conditions and ambient temperature 2 Values shown 75 C rise above a 25 C ambient temperature with housed motor mounted to a 250 mm x 250 mm x 6 mm aluminum heat sink 3 Peak torque assumes correct rms current consult Aerotech 4 Force constant and motor constant specified at stall...

Страница 39: ...40 Thermal Resistance C W 0 82 Number of Poles 8 1 Performance is dependent upon heat sink configuration system cooling conditions and ambient temperature 2 All performance and electrical specifications 10 3 Values shown 105 C rise above a 25 C ambient temperature with housed motor mounted to a 250 mm x 250 mm x 6 mm aluminum heat sink 4 Peak torque assumes correct rms current consult Aerotech 5 T...

Страница 40: ...4 lb Table 3 19 Rotary Encoder Specifications for ECO225SL Stages Encoder Option Fundamental Signal Period Digital Resolution M1 M2 M5 M6 2500 line TTL signal 2 µm 0 5 µm M3 M4 M7 M8 1000 line 1Vpp Amplified Sine signal 5 µm M3 M4 M7 M8 with 1000x Interpolation 1 1000 line 1Vpp Amplified Sine signal 5 µm 5 nm M3 M4 M7 M8 with 4000x Interpolation 1 1000 line 1Vpp Amplified Sine signal 5 µm 1 25 nm ...

Страница 41: ...y the stage wiring refer to Section 3 2 Programming direction of a stage is set by the controller that is used to move the stage Programming direction is typically selectable in the controller while machine direction is hardwired in the stage Figure 3 3 shows the machine direction of ECO225SL stages Figure 3 3 Machine Direction ECO225SL Hardware Manual 3 4 Limits Marker and Machine Direction www a...

Страница 42: ...otor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point Figure 3 4 Hall Phasing Diagram 3 5 Motor and Feedback Phasing ECO225SL Hardware Manual 42 www aerotech com ...

Страница 43: ...igure 3 5 Encoder Phasing Reference Diagram Standard Square Wave Figure 3 6 Encoder Phasing Reference Diagram Analog Sine Wave ECO225SL Hardware Manual 3 5 Motor and Feedback Phasing www aerotech com 43 ...

Страница 44: ...This page intentionally left blank 3 5 Motor and Feedback Phasing ECO225SL Hardware Manual 44 www aerotech com ...

Страница 45: ...r the performance and life expectancy of the stage will be reduced 4 1 Service and Inspection Schedule Inspect the ECO225SL at least once per month The need for a longer or shorter inspection interval will depend on the application and conditions such as the duty cycle speed and environment Monthly inspections should include but not be limited to l Visually inspect the stage and cables l Re tighte...

Страница 46: ...ther to form multi axis systems the orthogonality may be lost if the stage tables of the support stages are loosened Precision aligned stages should not be loosened or disassembled 5 We recommend that you do not disassemble the stage beyond the instructions given in this manual Proper assembly and calibration can only be done at the factory Contact Aerotech for more information For stages equipped...

Страница 47: ...s a brake restore power to the stage drive it to the desired position then remove power l Redo Steps 3 and 4 for any areas covered by the previous table position 6 Clean the end of the ball screw nut and wiper with a clean lint free cloth or swab 7 Clean the linear bearing guides with a clean lint free cloth or swab 8 Apply a thin continuous film of lubricant to the ball screw threads and linear b...

Страница 48: ...Figure 4 1 Hardcover Screw Removal 4 2 Cleaning and Lubrication ECO225SL Hardware Manual 48 www aerotech com ...

Страница 49: ...Figure 4 2 Hardcover Removal ECO225SL Hardware Manual 4 2 Cleaning and Lubrication www aerotech com 49 ...

Страница 50: ...the motor and coupling adapter hardware Figure 4 3 Loctite products are printed with an expiration date Before use be sure that the expiration date is legible and the product has not expired If your stage is used in a vacuum or cleanroom environment contact Aerotech Figure 4 3 Motor Mounting Overview How to Mount a Motor 1 Remove the hard cover from the stage 2 Locate the Shaft Coupling access hol...

Страница 51: ...age in the correct orientation Figure 4 5 Use a hex wrench to ensure that the motor flange is fully seated and the hardware is tight The motor housing prevents the use of a torque wrench Figure 4 5 Attach the Motor the Stage ECO225SL Hardware Manual 4 3 Motor Mounting www aerotech com 51 ...

Страница 52: ...e 4 6 Tighten the Shaft Coupling to the Drive Screw 8 Rotate the drive screw by hand to ensure that the drive screw rotates freely IMPORTANT You must reapply Loctite to the mounting hardware if the Motor or Shaft Coupling screws are removed adjusted loosened or replaced 4 3 Motor Mounting ECO225SL Hardware Manual 52 www aerotech com ...

Страница 53: ...espective shafts Figure 4 8 a Each pulley is held in position with two set screws b Ensure that the set screws are tight and centered over the shaft flats 4 Check the tension in the belt to determine if adjustment is necessary 5 If adjustment is required loosen but do not remove the mounting screws for the idler pulley mount ing bracket 6 Remove the M4 set screw to gain access to the tapped hole a...

Страница 54: ...er Removal IMPORTANT If the stage has been calibrated PL2 option note the orientation of the two pulleys with regard to each other or recalibration might be required 4 4 Belt Adjustment ECO225SL Hardware Manual 54 www aerotech com ...

Страница 55: ...Figure 4 8 Foldback Motor Part Callouts Figure 4 9 Lubricate the Pulley Flanges ECO225SL Hardware Manual 4 4 Belt Adjustment www aerotech com 55 ...

Страница 56: ...ltage requirements Controller trap or fault refer to the Controller documentation Stage moves uncontrollably Encoder sine and cosine signal connections refer to Chapter 3 Electrical Installation and Controller documentation Motor Connections refer to Chapter 3 Electrical Installation and the Controller documentation Stage oscillates or squeals Gains misadjusted refer to the Controller documentatio...

Страница 57: ...zation RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate request available on our website www aerotech com Products must be returned prepaid to an Aerotech service center no C O D or Collect Freight accepted The status of any product returned later than thirty 30 days after the issuance of a return...

Страница 58: ...l rates apply If during the on site repair it is determined the problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair section apply On site Non Warranty Repair If any Aerotech product cannot be made functional by telephone assistance or purchased replacement parts and cannot be returned to the Aerotech service center for repair then the f...

Страница 59: ...n History Revision Description 2 00 New Section Section 4 3 Motor Mounting 1 02 Dimensions updated Section 2 2 1 01 Product updates 1 00 New Manual ECO225SL Hardware Manual Appendix B Revision History www aerotech com 59 ...

Страница 60: ...This page intentionally left blank Appendix B Revision History ECO225SL Hardware Manual 60 www aerotech com ...

Страница 61: ...tive 2006 42 EC 11 E Electrical Installation 29 EN 60204 1 2010 11 EN ISO 12100 2010 11 Encoder Specifications 37 EU 2015 863 11 eyebolts 20 F foldback 53 G grease 18 H Hall Effect Sensors Specifications 37 Humidity 15 I Inspection Schedule 45 isopropyl alcohol 46 L label 19 Lifting Features 20 Limit Switch Specifications 37 lubricant vacuum 18 Lubrication 46 M mounting surface cleaning 24 25 secu...

Страница 62: ...ons 37 stabilizing stage 19 stage distortion 24 stabilizing 19 standoffs 20 Symptom 56 T Table of Contents 3 Temperature Effects 15 thermal expansion coefficient 15 Thermistor Specifications 37 torque 27 Troubleshooting 56 U Unpacking and Handling the Stage 19 V vacuum guidelines 18 vacuum lubricant Braycote 602EF 18 Vacuum Operation 18 Vibration 15 W Warnings 7 Warranty and Field Service 57 Index...

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