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Aerotech Automation1 iXR3, Руководство по оборудованию

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Figure 2-2:

XR3 Connection Overview

All low voltage connections must be made using cables and wires sized for the maximum currents
that will be carried. Insulation on these cables and wires must be rated at 300 V if this wiring can
come into contact with wiring operating above 100 V (AC and motor wiring). Low voltage wiring
should not be bundled with AC and motor wiring to minimize signal disturbances due to EMI
interference and coupling.

IMPORTANT

: The machine integrator, OEM or end user is responsible for meeting the

final protective grounding requirements of the system.

DANGER

: Disconnect power before you do maintenance to the equipment. Wait at

least ten (10) minutes after removing the power supply before doing maintenance or an
inspection. Otherwise, there is the danger of electric shock.

WARNING

: Before powering on the iXR3/XR3, verify that all drive modules and cables

to the iXR3/XR3 have been properly installed. Refer to the remaining chapters of this
manual for installation and configuration procedures.

Confirm that the AC power is the correct voltage before turning on power to the
iXR3/XR3.

2.1. Electrical Installation

iXR3/XR3 Hardware Manual

32

www.aerotech.com

Содержание Automation1 iXR3

Страница 1: ...Revision 2 08 Automation1 iXR3 and XR3 Drive Racks HARDWARE MANUAL...

Страница 2: ...spare or replacement parts To get help immediately contact a service office or your sales representative Include your customer order number in your email or have it available before you call This man...

Страница 3: ...DC Brush Motor Connections 40 2 2 2 1 DC Brush Motor Phasing 40 2 2 3 Stepper Motor Connections 41 2 2 3 1 Stepper Motor Phasing 41 2 2 4 Three Phase Stepper Motor Connections 42 2 2 4 1 Stepper Motor...

Страница 4: ...6 2 11 HyperWire Interface 87 2 12 Sync Port 88 2 13 Industrial Ethernet iXR3 Only 88 2 14 Cooling Options C0 C1 C2 Option 89 2 15 PC Configuration and Operation Information 92 Chapter 3 Maintenance 9...

Страница 5: ...9 Figure 2 20 Hall Effect Inputs Schematic Feedback Connector 50 Figure 2 21 Thermistor Input Schematic Feedback Connector 51 Figure 2 22 Encoder Fault Input Schematic Feedback Connector 52 Figure 2 2...

Страница 6: ...iming 86 Figure 2 49 Location of the Rear Fan and Air Flow 89 Figure 2 50 C0 Fan Location and Direction of Air Flow 89 Figure 2 51 C1 Model Showing Perforated Covers for External Fans 90 Figure 2 52 C...

Страница 7: ...ck Connector 52 Table 2 16 End of Travel and Home Limit Pins on the Feedback Connector 53 Table 2 17 Brake Output Pins on the Feedback Connector 56 Table 2 18 Brake Output Specifications 56 Table 2 19...

Страница 8: ...e 2 50 STO Electrical Specifications 82 Table 2 51 STO Standards 83 Table 2 52 STO Standards Data 83 Table 2 53 STO Signal Delay 85 Table 2 54 Motor Function Relative to STO Input State 85 Table 2 55...

Страница 9: ...nstalled and used in accordance with the manufacturer s supplied installation instructions EN 61010 1 2010 A1 2016 Safety Requirements for Electrical Equipment EN 61800 3 2004 A1 2011 EMC Requirements...

Страница 10: ...ing Agency TUV SUD Certificate Z10 068995 0030 Rev 00 Standards EN ISO 13849 1 2015 up to PL e IEC 61508 1 2010 up to SIL3 IEC 61508 2 2010 up to SIL3 IEC 61800 5 2 2016 IEC 62061 2005 up to SILCL3 IE...

Страница 11: ...ovided by the equipment could be impaired l The life expectancy of the product could be decreased Safety notes and symbols are placed throughout this manual to warn you of the potential risks at the m...

Страница 12: ...hat all components are grounded correctly and that they obey the local electrical safety requirements 7 Install the necessary precautions to supply safety and protection to the operator DANGER System...

Страница 13: ...tion such as the l Customer order number please provide this number when requesting product support l Drawing number l System part number Handling IMPORTANT It is the responsibility of the customer to...

Страница 14: ...1 2 Connect the PC to the USB or Ethernet port N A 3 Connect the next drive in the system to the HyperWire Out port Section 2 11 4 Connect the motors to the Motor Power inputs Section 2 2 5 Connect t...

Страница 15: ...k mountable l The iXR3 runs the Automation1 iSMC controller to generate commands for itself as well as for additional drives on the chain l The XR3 is based on the HyperWire communication protocol and...

Страница 16: ...Figure 1 2 XR3 Connection Overview Chapter 1 iXR3 XR3 Overview iXR3 XR3 Hardware Manual 16 www aerotech com...

Страница 17: ...Output Section 2 3 l Three PSO External Sync inputs Section 2 4 l Three TTL or isolated PSO outputs Section 2 4 2 l One Data Acquisition Input Section 2 4 4 l Up to 12 High Speed Differential outputs...

Страница 18: ...ge 2 SB4 Axis 1 4 Bus Voltage 1 Axis 5 6 Bus Voltage 2 SB5 Axis 1 5 Bus Voltage 1 Axis 6 Bus Voltage 2 Axis Control Board Section 2 3 1 3 Axis 1 Required Axis 2 6 Optional CT0 No control board 0 No co...

Страница 19: ...xis PSO firing includes One axis Part Speed PSO PSO2 Two axis PSO firing includes Two axis Part Speed PSO PSO3 Three axis PSO firing includes Three axis Part Speed PSO PSO5 Two axis Part Speed PSO fir...

Страница 20: ...The block diagram that follows shows a summary of the connector signals Figure 1 3 Functional Diagram Chapter 1 iXR3 XR3 Overview iXR3 XR3 Hardware Manual 20 www aerotech com...

Страница 21: ...can result in lower performance For example the motor output specifications are affected by the Bus supply the number of axes that are operating at the same time the type of motion the AC Line voltag...

Страница 22: ...z Note If the iXR3 XR3 contains an offline Bus power supply the AC Input will be limited to one AC input range Inrush Current 32 A Peak Auxiliary Power Outputs 5 V provided on all axis feedback connec...

Страница 23: ...pecification depends on the motor supply voltage the motor speed and motor resistance Contact an Aerotech sales engineer for more information 2 This specification assumes a motor winding resistance of...

Страница 24: ...Power Rotary Motors Power Output W Torque N m Angular velocity rad sec Linear Motors Power Output W Force N Linear velocity m sec Rotary or Linear Motors Power Output W Bemf V I rms 3 Power Loss 3 I...

Страница 25: ...ecifications iXR3 XR3 Customer Supplied Enclosure IP54 Compliant Weight 25 kg Dimensions Refer to Section 1 2 2 Dimensions Minimum Clearance Airflow 25 mm Connectors 100 mm Operating Temperature Refer...

Страница 26: ...1 2 2 Dimensions IMPORTANT iXR3 and XR3 dimensions are the same iXR3 is shown Figure 1 5 Dimensions with Chassis Slides 1 2 2 Dimensions iXR3 XR3 Hardware Manual 26 www aerotech com...

Страница 27: ...IMPORTANT iXR3 and XR3 dimensions are the same iXR3 is shown Figure 1 6 Dimensions without Chassis Slides iXR3 XR3 Hardware Manual 1 2 2 Dimensions www aerotech com 27...

Страница 28: ...ve humidity is 80 for temperatures that are less than 31 C and decreases linearly to 50 relative humidity at 40 C Operating Altitude 0 m to 2 000 m 0 ft to 6 562 ft above sea level If you must operate...

Страница 29: ...ion column drives that show a specific version number are not supported after that version Table 1 8 Drive and Software Compatibility Drive Type Software First Software Version Last Software Version i...

Страница 30: ...This page intentionally left blank 1 4 Drive and Software Compatibility iXR3 XR3 Hardware Manual 30 www aerotech com...

Страница 31: ...le connections are made to the rear of the iXR3 XR3 A combination power switch circuit breaker is located on the front of the iXR3 XR3 This breaker is connected to the incoming AC power and provides p...

Страница 32: ...is responsible for meeting the final protective grounding requirements of the system DANGER Disconnect power before you do maintenance to the equipment Wait at least ten 10 minutes after removing the...

Страница 33: ...rements are listed in Table 2 1 WARNING The AC power cord is the Mains disconnect Table 2 1 Main AC Power Input Voltages and Current Requirements AC Input Voltage Input Amps maximum continuous 100 VAC...

Страница 34: ...cations especially when there are significant wire distances a larger wire size may be required to reduce the voltage drop that occurs along the wire This increase may be necessary in order to keep th...

Страница 35: ...apacitance Energy J VB7 with split bus 125 VAC 8000 uF 200 VDC 35 VB7 without split bus 125 VAC 16000 uF 200 VDC 70 VB8 with split bus 240 VAC 2300 uF 400 VDC 52 VB8 without split bus 240 VAC 4600 uf...

Страница 36: ...high power D style motor power connectors Axis 1 6 are located on the rear panel The pinouts for these connectors are shown in Table 2 4 Table 2 4 Motor Power Output Connector Pinout Pin Description R...

Страница 37: ...ng one of the following methods powered through the use of a test program or unpowered using an oscilloscope Both methods will identify the A B and C Hall motor lead sets and indicate the correct conn...

Страница 38: ...nals in the Diagnostics section of the Status Utility Table 2 6 Hall Signal Diagnostics Hall Signal Status Definition 0 V or logic low ON 5 V or logic high Figure 2 4 Positive Motor Direction Figure 2...

Страница 39: ...r Phasing Oscilloscope Example With the designations of the motor and Hall leads of a third party motor determined the motor can now be connected to an Aerotech system Connect motor lead A to motor co...

Страница 40: ...onnect the negative lead of the voltmeter to the other motor terminal 3 Move or rotate the motor in the positive or clockwise CW direction by hand Figure 2 9 Positive Motor Direction 4 If the voltmete...

Страница 41: ...to motor rotation it is important to phase the motor Run a positive motion command The motor is phased correctly if there is a positive scaling factor determined by the ServoLoopSetup parameter and t...

Страница 42: ...ecause the end of travel EOT limit inputs are relative to motor rotation it is important to phase the motor Run a positive motion command The motor is phased correctly if there is a positive scaling f...

Страница 43: ...all Effect Sensor A brushless motors only Input 11 Hall Effect Sensor C brushless motors only Input 12 Clockwise End of Travel Limit Input 13 Brake Output Output 14 Encoder Cosine Input 15 Encoder Cos...

Страница 44: ...e encoders Square Wave or Absolute encoders CT2 Sine Wave high performance Square Wave or Absolute encoders Square Wave or Absolute encoders CT4 Sine Wave high performance Square Wave or Absolute enco...

Страница 45: ...signal connection Use twisted pair wiring for the highest performance and noise immunity Table 2 11 Square Wave Encoder Specifications Specification Value Encoder Frequency 10 MHz maximum 25 ns minim...

Страница 46: ...ring for the highest performance and noise immunity You cannot echo an absolute encoder signal Refer to Figure 2 15 for the serial data stream interface Refer to the Help file for information on how t...

Страница 47: ...UT High Speed Output connector or used internally by the PSO Refer to the EncoderDivider and PrimaryEmulatedQuadratureDivider A3200 EmulatedQuadratureDivider parameters and the encoder output function...

Страница 48: ...Figure 2 17 Sine Wave Encoder Schematic Feedback Connector 2 3 1 3 Sine Wave Encoder Primary CT1 CT2 CT4 Option iXR3 XR3 Hardware Manual 48 www aerotech com...

Страница 49: ...hile observing the position of the encoder in the diagnostics display see Figure 2 19 For dual loop systems the velocity feedback encoder is displayed in the diagnostic display Figure 2 19 Figure 2 18...

Страница 50: ...sing Table 2 13 Hall Effect Feedback Pins on the Feedback Connector Pin Description In Out Bi 3 5V Power 1 Output 5 Hall Effect Sensor B brushless motors only Input 10 Hall Effect Sensor A brushless m...

Страница 51: ...uses the resistance of the thermistor to increase the sensor will trigger an over temperature fault The thermistor is connected between Pin 2 and Signal Common The nominal trip value of the sensor is...

Страница 52: ...meter configurable and the controller should be configured to disable the axis when the fault level is active The nominal trip voltage of the encoder fault input is 2 5 V Table 2 15 Encoder Fault Inpu...

Страница 53: ...nostics display refer to Figure 2 25 Table 2 16 End of Travel and Home Limit Pins on the Feedback Connector Pin Description In Out Bi 12 Clockwise End of Travel Limit Input 16 5V Power Output 20 Signa...

Страница 54: ...End of Travel and Home Limit Input Connections Figure 2 24 End of Travel and Home Limit Input Schematic Feedback Connector 2 3 5 End of Travel and Home Limit Inputs iXR3 XR3 Hardware Manual 54 www ae...

Страница 55: ...W and CCW inputs at the Feedback connector or swap the CW and CCW limit functionality in the software using the EndOfTravelLimitSetup parameter View the logic level of the EOT limit inputs in the Diag...

Страница 56: ...e brake output Refer to the Help file for more information Table 2 17 Brake Output Pins on the Feedback Connector Pin Description In Out Bi 13 Brake Output Output 25 Brake Output Output Table 2 18 Bra...

Страница 57: ...L A3200 PSO Output 1 Output 11 Ground N A 12 Ground N A 13 PSO Output 1 5 V TTL A3200 PSO Output 0 Output 14 Data Acquisition Input 15 PSO Output 3 Isolated A3200 PSO Output 2 Output 16 PSO Output 3 I...

Страница 58: ...Specification Specification Value Outputs 5 24 V 250 mA Table 2 22 Isolated Output Pins on the PSO Connector Pin Description In Out Bi 15 PSO Output 3 Isolated A3200 PSO Output 2 Output 16 PSO Output...

Страница 59: ...ts Specification Specification Value Outputs TTL 5 V 50 mA Table 2 24 TTL Output Pins on the PSO Connector Pin Description In Out Bi 8 PSO Output 3 5 V TTL A3200 PSO Output 2 Output 9 Ground N A 10 PS...

Страница 60: ...synchronization signal occurs Table 2 25 External PSO Sync Input Pins on the PSO Connector Pin Description In Out Bi 2 External PSO Sync 1 A3200 External PSO Sync 0 Input 3 External PSO Sync 1 A3200...

Страница 61: ...n be used with sourcing or sinking drivers Table 2 26 Data Acquisition Input Pins on the PSO Connector Pin Description In Out Bi 1 Data Acquisition Input 14 Data Acquisition Input Table 2 27 Data Acqu...

Страница 62: ...put 0 Output 4 Axis 2 High Speed Output 1 Output 5 Axis 2 High Speed Output 1 Output 7 Axis 3 High Speed Output 0 Output 6 Axis 3 High Speed Output 0 Output 18 Axis 3 High Speed Output 1 Output 17 Axi...

Страница 63: ...be used to transmit clock and direction signals for driving an external device In this configuration High Speed Output 0 transmits the direction signal and High Speed Output 1 transmits the clock sign...

Страница 64: ...ent sinking output that has diode suppression refer to Figure 2 35 The digital outputs are not designed for high voltage isolation applications and they should only be used with ground referenced circ...

Страница 65: ...nd N A 14 Port 2 Digital Output Common Output 15 Port 2 Digital Output 8 Output 16 Port 2 Digital Output 9 Output 17 Port 2 Digital Output 10 Output 18 Port 2 Digital Output 11 Output 19 Port 3 Digita...

Страница 66: ...Figure 2 33 Digital Output Schematic 2 6 DOUT Connector Digital Outputs iXR3 XR3 Hardware Manual 66 www aerotech com...

Страница 67: ...Figure 2 34 Digital Outputs Connected in Current Sourcing Mode Figure 2 35 Outputs Connected in Current Sinking Mode iXR3 XR3 Hardware Manual 2 6 DOUT Connector Digital Outputs www aerotech com 67...

Страница 68: ...Input 14 Input 6 Port 3 Digital Input 13 Input 7 Port 3 Digital Input 12 Input 8 Port 3 Digital Input Common Output 9 Port 2 Digital Input 11 Input 10 Port 2 Digital Input 10 Input 11 Port 2 Digital I...

Страница 69: ...Figure 2 36 Digital Input Schematic iXR3 XR3 Hardware Manual 2 7 DIN Connector Digital Inputs www aerotech com 69...

Страница 70: ...2 37 Digital Inputs Connected to Current Sourcing PNP Devices Figure 2 38 Digital Inputs Connected to Current Sinking NPN Devices 2 7 DIN Connector Digital Inputs iXR3 XR3 Hardware Manual 70 www aerot...

Страница 71: ...veEncoderOutputConfigureInput function A3200 EncoderDivider parameter to configure the Sine and Cosine connector pins as RS 422 outputs You can only echo incremental square wave primary encoder inputs...

Страница 72: ...signal connection Use twisted pair wiring for the highest performance and noise immunity Table 2 39 Square Wave Encoder Specifications Specification Value Encoder Frequency 10 MHz maximum 25 ns minimu...

Страница 73: ...formance and noise immunity You cannot use an absolute encoder with incremental signals on the Aux Encoder Connector Refer to Figure 2 40 for the serial data stream interface Refer to the Help file fo...

Страница 74: ...ystem noise use it only if necessary You can use a sine wave encoder with the CT4 multiplier option as an input to the PSO The CT4 option generates emulated quadrature signals For the highest performa...

Страница 75: ...Figure 2 42 Sine Wave Encoder Schematic Aux Encoder Connector iXR3 XR3 Hardware Manual 2 8 3 Sine Wave Encoder Auxiliary CT4 Option www aerotech com 75...

Страница 76: ...Connector Pinout Pin Description In Out Bi Connector 1 Analog Input 0 Input 2 Analog Input 0 Input 3 Ground N A 4 Analog Output 0 Output 5 Ground N A 6 Analog Input 1 Input 7 Analog Input 1 Input 8 G...

Страница 77: ...e 2 43 Analog Output Specifications Specification Value Output Voltage 10 V to 10 V Output Current 5 mA Resolution bits 16 bits Table 2 44 Analog Output Pins on the Analog I O Connector Pin Descriptio...

Страница 78: ...og Input Specifications Specification Value AI AI 10 V to 10 V 1 Resolution bits 16 bits Input Impedance 1 M 1 Signals outside of this range may damage the input Table 2 46 Analog Input Pins on the An...

Страница 79: ...46 shows you how to connect a joystick to the Analog I O connector Table 2 47 Joystick Interface Pins on the Analog I O Connectors Pin Description In Out Bi 1 Analog Input 0 Input 2 Analog Input 0 Inp...

Страница 80: ...the controller that the joystick is present Joystick control will not activate unless the joystick is in the center location Third party devices can be used provided they produce a symmetric output vo...

Страница 81: ...f the user of the controller WARNING STO wires must be insulated to prevent short circuits between connector pins The primary concern is a short circuit between STO 1 and STO 2 wire strands or solder...

Страница 82: ...s one safety device connected to multiple controllers in parallel WARNING The controller does not check for short circuits on the external STO wiring If this is not done by the external safety device...

Страница 83: ...61508 1 2010 SIL 3 EN IEC 61508 2 2010 SIL 3 EN ISO 13849 1 2015 Category 4 PL e EN IEC 62061 2005 with Amendments SIL 3 Table 2 52 STO Standards Data Standard Value EN ISO 13849 1 2015 MTTFD 1000 yea...

Страница 84: ...as soon as the deceleration ramp is complete This is typically configured to occur before the STO channel turns off the power amplifier transistors The software controlled stop functionality must be...

Страница 85: ...fer to Section 2 10 4 2 10 3 STO Startup Validation Testing Verify the state of the STO 1 and STO 2 channels by manually activating the external STO hardware Each STO channel must be tested separately...

Страница 86: ...to meet the listed SIL level the STO circuit must be activated power removed from both inputs according to the interval specified in Table 2 52 Table 2 55 STO Timing Time Description Value T1 STO Del...

Страница 87: ...o re establish communication WARNING Do not connect or disconnect HyperWire cables while you are loading firmware or damage to the drives may occur Table 2 56 HyperWire Card Part Number Part Number De...

Страница 88: ...erOutputConfigureDivider DriveEncoderOutputConfigureInput DriveEncoderOutputOn DriveEncoderOutputOff Configure each Sync port as an input or an output PsoDistanceConfigureInputs Let the PSO to track t...

Страница 89: ...n on all models The fan pulls air into the chassis Refer to Figure 2 49 Figure 2 49 Location of the Rear Fan and Air Flow Built In Cooling C0 Built in fans pull cooling air from the left side through...

Страница 90: ...to direct airflow through the perforated covers Refer to Figure 2 51 Table 2 60 C1 Option Airflow Specifications Amplifier Type Airflow Specification XSP Amplifiers PWM 50 CFM XSL Amplifiers linear 30...

Страница 91: ...chassis at the factory The tray houses two fans that will direct airflow through the drive rack from the bottom to the top Refer to Figure 2 52 For the dimensions refer to Section 1 2 Figure 2 52 C2 1...

Страница 92: ...Information For more information about hardware requirements PC configuration programming system operation and utilities refer to the Help file 2 15 PC Configuration and Operation Information iXR3 XR3...

Страница 93: ...is the danger of electric shock 3 All tests must be done by an approved service technician Voltages inside the controller and at the input and output power connections can kill you Table 3 1 LED Descr...

Страница 94: ...electrically conductive material go into the chassis Examine all cables and connections to make sure they are correct Make sure that all connections are correctly attached and not loose Replace cables...

Страница 95: ...ement Part Numbers Bus Fuse Description Aerotech P N Manufacturer P N Bus 1 F1 VB1 to VB2 2 A SLO BLO 3AG EIF00102 Littelfuse 313002 F1 VB3 to VB5 3 A SLO BLO 3AG EIF00103 Littelfuse 313003 F1 VB7 to...

Страница 96: ...n To replace an amplifier 1 Disconnect power 2 Loosen the two screws that secure the amplifier They cannot be removed from the amplifier panel 3 Carefully slide the amplifier out of the slot Figure 3...

Страница 97: ...Figure 3 3 Slot Details iXR3 XR3 Hardware Manual 3 3 Amplifier Replacement www aerotech com 97...

Страница 98: ...This page intentionally left blank 3 3 Amplifier Replacement iXR3 XR3 Hardware Manual 98 www aerotech com...

Страница 99: ...ation RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate request available on our website www aerote...

Страница 100: ...rates apply If during the on site repair it is determined the problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair section apply On site N...

Страница 101: ...ved bus voltages This voltage selector function should not be changed when using off line supplies Damage to the unit may result if this function is used improperly If the user changes the voltage sel...

Страница 102: ...a manual revision should contact Aerotech for more information if you need to change voltage settings Table B 1 AC Voltage Selector Switch Settings S1 S2 S3 S4 100 VAC A B A B 115 VAC A A A A 200 VAC...

Страница 103: ...ections have been updated l EU Declaration of Conformity l Agency Approvals l Added C1 airflow specifications Table 2 60 2 02 Updated l EU Declaration of Conformity l Agency Approvals 2 01 Updated Tab...

Страница 104: ...This page intentionally left blank Appendix C Revision History iXR3 XR3 Hardware Manual 104 www aerotech com...

Страница 105: ...log Input Pins on the Analog I O Connector 78 Analog Input Specifications Analog I O Connectors 78 Analog Inputs Analog I O Connectors 78 Analog Inputs Schematic 78 Analog Output Pins on the Analog I...

Страница 106: ...ted to Current Sinking Devices DIN Connector 70 Digital Inputs Connected to Current Sourcing Devices DIN Connector 70 Digital Inputs Connector DIN Connector 68 Digital Output Pinout DOUT Connector 65...

Страница 107: ...c PSO 61 DC Brush Motor Configuration Motor Power Output Connector 40 Diagram Showing Axis 1 and Axis 2 High Speed Outputs HSOUT Connector 63 Digital Input Schematic DIN Connector 69 Digital Inputs Co...

Страница 108: ...ematic PSO 58 Isolated Output Current Sources Schematic PSO 58 Isolated Output Pins on the PSO Connector 58 Isolated Outputs PSO 58 J Joystick Interface Analog I O Connectors 79 Joystick Interface C29...

Страница 109: ...ck Interface Pins Analog I O Connectors 79 Motor Power Output Connector 36 Primary Encoder Inputs Feedback Connector 44 PSO Connector 57 STO Connector 81 Thermistor Input Pin Feedback Connector 51 TTL...

Страница 110: ...quare Wave Encoder Specifications Feedback Connector 45 72 Standard Features 17 Stepper Motor Configuration 41 Stepper Motor Connections Motor Power Output Connector 41 Stepper Motor Phasing 41 42 STO...

Страница 111: ...W Warranty and Field Service 99 iXR3 XR3 Hardware Manual Index www aerotech com 111...

Страница 112: ...Index iXR3 XR3 Hardware Manual This page intentionally left blank 112 www aerotech com...

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